JP-7855676-B2 - Differential pressure liquid flow controller

Inventors

• リン・リ

Assignees

• ティーエスアイ インコーポレイテッド

Dates

Publication Date

20260508

Application Date

20220812

Priority Date

20210813

Claims (18)

1. A capillary tube having a first end and a second end, A first temperature sensor coupled to the capillary tube, A first pressure sensor positioned at the first end, A second pressure sensor is positioned at the second end, A processor coupled to the first temperature sensor, the first pressure sensor, and the second pressure sensor, wherein the processor The first temperature based on the first temperature sensor, The first pressure based on the first pressure sensor, The second pressure based on the second pressure sensor, A processor comprising a fluid parameter, the fluid parameter being received using an interface coupled to the processor, and a control unit having fluid communication with the capillary, the fluid parameter including at least one parameter selected from fluid viscosity, fluid density, and fluid composition, and the control unit including a bypass or shunt fluid passage capable of regulating the flow through the capillary, The first temperature sensor has a sensing surface configured to measure the temperature of the capillary wall or the fluid inside the capillary, A fluid system in which the signal lines between the processor and the control unit include a setting line from which the control unit can be controlled, and a reading line from which the processor can receive signals corresponding to the settings of the control unit .
2. The fluid system according to claim 1, wherein the control unit includes at least one of a valve, a pump, and an orifice.
3. The fluid system according to claim 1, wherein the interface includes a user-operable data input device.
4. The fluid system according to claim 1, wherein the interface includes connection to a network.
5. The fluid system according to claim 1, further comprising a flow sensor coupled to the processor and fluid-coupled to the capillary tube.
6. The fluid system according to claim 5, wherein the flow sensor includes a mass flow sensor.
7. A capillary tube having a first end and a second end, A first temperature sensor coupled to the capillary tube, A first pressure sensor positioned at the first end, A second pressure sensor is positioned at the second end, A processor coupled to the first temperature sensor, the first pressure sensor, and the second pressure sensor, wherein the processor The first temperature based on the first temperature sensor, The first pressure based on the first pressure sensor, The second pressure based on the second pressure sensor, A processor comprising a fluid parameter, the fluid parameter being received using an interface coupled to the processor, and a processor configured to execute an instruction that determines an output using the fluid parameter, the output of which corresponds to a measurement of the mass flow rate in the capillary, The processor is coupled to a control unit that is in fluid communication with the capillary, the fluid parameters include at least one parameter selected from fluid viscosity, fluid density, and fluid composition, and the control unit includes a bypass or shunt fluid passage capable of regulating the flow through the capillary. The first temperature sensor has a sensing surface configured to measure the temperature of the capillary wall or the fluid inside the capillary, A fluid system in which the signal lines between the processor and the control unit include a setting line from which the control unit can be controlled, and a reading line from which the processor can receive signals corresponding to the settings of the control unit .
8. The fluid system according to claim 7, wherein the processor is coupled to a display configured to provide a visible display of the output.
9. The fluid system according to claim 7, wherein the interface includes a user-operable data input device.
10. The fluid system according to claim 7, wherein the interface includes connection to a network.
11. A capillary tube having a first end and a second end, A first temperature sensor coupled to the capillary tube, A first pressure sensor positioned at the first end, A second pressure sensor is positioned at the second end, A processor coupled to the first temperature sensor, the first pressure sensor, and the second pressure sensor, wherein the processor The first temperature based on the first temperature sensor, The first pressure based on the first pressure sensor, The second pressure based on the second pressure sensor, A processor is configured to execute commands that determine an output using a flow rate based on a flow sensor coupled to the capillary tube, wherein the output corresponds to parameters of the fluid in the capillary tube. The processor is coupled to a control unit that is in fluid communication with the capillary, the fluid parameters include at least one parameter selected from fluid viscosity, fluid density, and fluid composition, and the control unit includes a bypass or shunt fluid passage capable of regulating the flow through the capillary. The first temperature sensor has a sensing surface configured to measure the temperature of the capillary wall or the fluid inside the capillary, A fluid system in which the signal lines between the processor and the control unit include a setting line from which the control unit can be controlled, and a reading line from which the processor can receive signals corresponding to the settings of the control unit .
12. The fluid system according to claim 11, wherein the flow sensor includes a mass flow sensor.
13. The fluid system according to claim 11, wherein the processor is coupled to a display configured to provide a visible display of the output.
14. A capillary tube having a first end and a second end, A first temperature sensor is coupled to the capillary tube at the first end, A second temperature sensor is coupled to the capillary tube at the second end, A first pressure sensor positioned at the first end, A processor coupled to the first temperature sensor, the first pressure sensor, and the second temperature sensor, wherein the processor The first temperature based on the first temperature sensor, The first pressure based on the first pressure sensor, A fluid parameter, wherein the fluid parameter is received using an interface coupled to the processor, A processor comprising a flow rate, the flow rate being received from a flow sensor in fluid communication with the capillary tube, and configured to execute a command that determines an output using the flow rate, wherein the output corresponds to a differential pressure related to the first pressure, The processor is coupled to a control unit that is in fluid communication with the capillary, the fluid parameters include at least one parameter selected from fluid viscosity, fluid density, and fluid composition, and the control unit includes a bypass or shunt fluid passage capable of regulating the flow through the capillary. The first temperature sensor and the second temperature sensor each have a sensing surface configured to measure the temperature of the capillary wall or the fluid inside the capillary, A fluid system in which the signal lines between the processor and the control unit include a setting line from which the control unit can be controlled, and a reading line from which the processor can receive signals corresponding to the settings of the control unit .
15. The fluid system according to claim 14, wherein the interface includes a user-operable data input device.
16. The fluid system according to claim 14, wherein the interface includes connection to a network.
17. The fluid system according to claim 14, wherein the flow sensor includes a mass flow sensor.
18. The fluid system according to claim 14, wherein the flow sensor includes a volumetric flow sensor.

Description

Priority Claim This patent application claims priority to U.S. Provisional Patent Application No. 63/233,029 (Reference No. 4270.024PRV), filed on 13 August 2021, which is incorporated herein by reference in its entirety. This document generally relates to, but not limited to, liquid flow controllers with improved performance. Precisely measuring and controlling the flow rate of liquids or gases is crucial in many industrial, commercial, and medical applications. For example, semiconductor manufacturing requires fluid handling equipment where precision is critical to device manufacturing and performance. Flow controllers can provide pathways in which liquid flow rates can be measured or controlled. Measurement accuracy and control precision can be affected by many factors, including contaminants in the liquid and irregularities in the flow path. This is a schematic diagram illustrating an example of this topic.This is a flowchart illustrating an example of the method described in this subject. Figure 1 is a schematic diagram of System 100, an example of this subject. System 100 can be configured in a single package, sometimes referred to as a device. System 100 includes a capillary tube 116 having a lumen through which a fluid can flow. Pressure sensors 110A and 110B, sometimes referred to as the first and second pressure sensors in the illustrated example, are attached to the capillary tube 116. The direction of fluid flow can be from left to right or right to left through the capillary tube 116 in various examples. In the illustrated example, temperature sensors 120A and 120B, sometimes referred to as the first and second temperature sensors, are mounted on the capillary tube 116. In the figure, the temperature sensors are coupled to fittings attached to the ends (first and second ends) of the capillary tube 116. In other examples, a single temperature sensor (rather than a dual sensor) is provided and positioned at either end or between the ends. The temperature sensor may have a sensing surface configured to measure the temperature of the capillary wall or the fluid within the capillary tube. The output signals from pressure sensors 110A and 110B and temperature sensors 120A and 120B are coupled to processor 114. Processor 114 may include an analog or digital computer having instructions or configurations tailored to implement the method described herein. Processor 114 is coupled to interface 112. Interface 112 may include a user interface and may have a keyboard, a cursor control device (such as a mouse, trackball, or touchpad), a display, a printer, a microphone or speaker, or other components that enable human interaction with processor 114 or system 100. In one example, interface 112 may include a network interface configured to couple to a remote device via a wired or wireless connection. In the illustrated example, the processor 114 is coupled to the flow sensor 122. The flow sensor 122 may be located upstream or downstream of the capillary tube 116. In various examples, the flow sensor 122 includes a mass flow sensor or a volume flow sensor. The sensor may provide an output signal accessible to the processor 114, the signal being a function of the fluid flow rate through the system 100. In the illustrated example, the processor 114 is coupled to the control unit 124. The control unit 124 can be located upstream or downstream of the capillary tube 116, and can be proximal or distal to the capillary tube 116. In various examples, the control unit 124 includes a valve or pump or other hydraulic component with adjustable settings. In the case of a pump with a motor drive, the control unit 124 may include signal lines that allow the processor 114 to set the motor speed and, therefore, the flow rate through the capillary tube 116. In the figure, the control unit 124 is depicted connected in series with the capillary tube 116, but other configurations are possible. For example, the control unit 124 may include a bypass or shunt fluid passage that allows the flow through the capillary tube 116 to be adjusted. The signal lines between the processor 114 and the control unit 124 may include setting lines that allow the control unit 124 to be controlled, and reading lines that allow the processor 114 to receive signals corresponding to the settings of the control unit 124. Figure 2 shows a flowchart of Method 200, an example of this subject. In Method 210, Method 200 includes a step of receiving data. The data may include information about temperature from a temperature sensor or pressure from a pressure sensor. In addition, the received data may include fluid flow information from a flow sensor or device configuration information from a control device interacting with the system's capillaries. In some examples, the data receiving step may include a step of receiving manually entered information about the physical parameters of the fluid used in the system. The data can be received from a user interface or f