JP-7855686-B2 - Compressible tray for solid chemical vaporization chamber

Inventors

• バトル， スコット エル．
• ナイトー， ドン ケー．
• グレッグ， ジョン エヌ．
• トーマス， ジェイコブ
• パーカー， チェース
• シンドラー， ジェームズ
• ヘンドリックス， ブライアン シー．
• オルソン， ベンジャミン エイチ．

Assignees

• インテグリス・インコーポレーテッド

Dates

Publication Date

20260508

Application Date

20221006

Priority Date

20211008

Claims (4)

1. It is a tray for ampoules, The tray comprises a compressible portion that exhibits a compressed state and a relaxed state, The spring potential energy of the compressible portion is higher in the compressed state than in the relaxed state. The compressible portion has a bellows-like surface having a bulging direction and a folding direction. Tray.
2. The tray according to claim 1, further comprising a first heat transfer component in thermal contact with the compressible portion.
3. The tray according to claim 2, further comprising a second heat transfer component in thermal contact with the compressible portion.
4. The tray according to claim 1, wherein the compressible portion is compressed in the folding direction but not in the bulging direction.

Description

Priority This disclosure claims priority under U.S. Provisional Patent Application No. 63/253,800, filed October 8, 2021. This priority document is incorporated herein by reference for all purposes. This disclosure generally relates to a delivery system for solid precursor materials used in atomic layer deposition (ALD) processes, chemical vapor deposition (CVD) processes, or both. Delivery systems designed for transporting solid precursor materials used in ALD and CVD processes are used in wafer manufacturing processes. Such systems may comprise ampoules configured to contain the solid precursor material. Some embodiments of the delivery system include an ampoule having a body that defines an internal chamber having an inner surface. At least some of these embodiments of the delivery system are used in ALD, CVD, or both processes. Solid precursor materials can be used in the fabrication of microelectronic devices. In some embodiments, the solid precursor material is a variety of organic precursors, inorganic precursors, metal-organic precursors, or combinations thereof. In some embodiments, heat is required to use the solid precursor material. In some embodiments, the ampoule comprises at least one tray within its internal chamber for holding a solid precursor material. In some embodiments, the tray is configured with passages for allowing a fluid, such as a gas, to flow from the bottom to the top of the internal chamber, from the top to the bottom of the internal chamber, or both. In some embodiments, the tray is configured to conduct heat from the inner surface of the internal chamber to the solid precursor material. In some embodiments, the tray is configured with at least one portion for pressing a portion of the tray to increase or maximize contact with the inner surface of the internal chamber. In some embodiments, the tray is configured with a portion for increasing or maximizing heat transfer from the inner surface of the internal chamber to another portion of the tray, the solid precursor material, or both. In some embodiments, the tray is configured to have a structure that allows it to change its structure so that it can be easily or relatively easily placed in an internal chamber, and once placed in an internal chamber, the tray is configured to change its structure so that it adheres to the internal chamber. According to some embodiments, the tray may have a portion that engages, contacts, connects, or any combination thereof with the inner surface or other part of the internal chamber mechanically, frictionally, or both. In some embodiments, the ampoule tray includes a compressible portion that exhibits both a compressed and a relaxed state, with the spring potential energy of the compressible portion being higher than that of the relaxed state. In some embodiments of the tray, the tray includes a heat transfer component, which is in thermal contact with a compressible portion. In some embodiments of the tray, the tray includes a second heat transfer component, which is in thermal contact with a compressible portion. In some embodiments of the tray, the distance from the first heat transfer component to the second heat transfer component decreases when the compressible portion is compressed. In some embodiments of the tray, the heat transfer component and the second heat transfer component are configured to be in thermal contact with the inner wall surface of the ampoule, and the heat transfer component and the second heat transfer component are configured to transfer thermal energy from the inner wall surface of the ampoule to the compressible portion. In some embodiments of the tray, the tray has a surface configured to hold a solid precursor material and is in thermal contact with a compressible portion. In some embodiments of the tray, the compressible portion is compressible along the radial direction of the surface, the circumferential direction of the surface, or both. In some embodiments of the tray, the surface comprises a non-planar portion, a planar portion, or both. In some embodiments of the tray, the compressible portion includes a spring. In some embodiments of the tray, the compressible portion has a bellows-like surface with a bulging direction and a folding direction. In some embodiments of the tray, the bellows-like surface is configured to hold a solid precursor material. In some embodiments of the tray, the compressible portion includes an opening ring. In some embodiments of the tray, the tray comprises a surface configured to hold a solid precursor material and is in thermal contact with an open ring. In some embodiments of the tray, the opening ring is provided on the outer periphery of the surface. In some embodiments of the tray, the opening ring is located above the surface. In some embodiments of the tray, the opening ring is located below the surface. In some embodiments of the tray, the tri comprises a second surface configured to hold a solid precursor material