JP-7855872-B2 - Method for manufacturing solid electrolytic capacitors, method for manufacturing capacitor arrays, solid electrolytic capacitors and capacitor arrays

Inventors

• 土生 大樹

Assignees

• 株式会社村田製作所

Dates

Publication Date

20260511

Application Date

20220222

Claims (20)

1. A step of preparing an anode plate having a core, a porous layer provided on at least one main surface of the core, and a dielectric layer provided on the surface of the porous layer, The process includes forming a cathode layer on the surface of the dielectric layer, The step of forming the cathode layer includes the step of forming a solid electrolyte layer containing a conductive polymer on the surface of the dielectric layer, The step of forming the solid electrolyte layer includes the steps of forming a first conductive polymer layer inside the pores of the dielectric layer, forming a second conductive polymer layer inside the pores of the dielectric layer that covers the first conductive polymer layer, and forming a third conductive polymer layer on the surface of the anode plate that covers at least the second conductive polymer layer. In the step of forming the first conductive polymer layer, a liquid containing the first conductive polymer is used to form the layer containing the first conductive polymer. A method for manufacturing a solid electrolytic capacitor, wherein in the step of forming the second conductive polymer layer, a liquid in which a second conductive polymer having a larger particle size than the first conductive polymer is dispersed, and a liquid containing an insulating material that suppresses thermal and oxidative degradation of the conductive polymer contained in the solid electrolyte layer are used to form a layer in which the second conductive polymer and the insulating material are mixed.
2. The method for manufacturing a solid electrolytic capacitor according to claim 1, wherein the second conductive polymer layer is formed by simultaneously applying a liquid in which the second conductive polymer is dispersed and a liquid containing the insulating material.
3. The method for manufacturing a solid electrolytic capacitor according to claim 2, wherein the first conductive polymer layer is formed by applying a liquid containing the first conductive polymer.
4. The method for manufacturing a solid electrolytic capacitor according to any one of claims 1 to 3, wherein the first conductive polymer layer is formed using a liquid in which the first conductive polymer is dissolved.
5. A method for manufacturing a solid electrolytic capacitor according to any one of claims 1 to 4, wherein the first conductive polymer is self-doped and the second conductive polymer is unself-doped.
6. A method for manufacturing a solid electrolytic capacitor according to any one of claims 1 to 5, wherein the weight ratio of the solid content of the insulating material to the second conductive polymer is 1/10 or more and 10/1 or less.
7. The method for manufacturing a solid electrolytic capacitor according to any one of claims 1 to 6, wherein the step of forming the cathode layer further includes the step of forming a conductive layer on the surface of the solid electrolyte layer.
8. The method for manufacturing a solid electrolytic capacitor according to claim 7, wherein the step of forming the conductive layer includes the step of forming a conductive resin layer containing a metal filler.
9. A method for manufacturing a solid electrolytic capacitor according to any one of claims 1 to 8, further comprising the step of forming a mask layer on the surface of the porous layer so as to surround the region on the anode plate where the cathode layer is to be formed.
10. A step of preparing an anode plate having a core, a porous layer provided on at least one main surface of the core, and a dielectric layer provided on the surface of the porous layer, The anode plate is divided into multiple element regions by forming a mask layer on the surface of the porous layer, A step of forming a cathode layer on the surface of the dielectric layer within the element region separated by the mask layer, The process of separating the anode plate on which the cathode layer is formed into a plurality of capacitor elements by dividing the element region, The process includes a step of forming a sealing layer so as to cover the plurality of capacitor elements, The step of forming the cathode layer includes the step of forming a solid electrolyte layer containing a conductive polymer on the surface of the dielectric layer, The step of forming the solid electrolyte layer includes the steps of forming a first conductive polymer layer inside the pores of the dielectric layer, forming a second conductive polymer layer inside the pores of the dielectric layer that covers the first conductive polymer layer, and forming a third conductive polymer layer on the surface of the anode plate that covers at least the second conductive polymer layer. In the step of forming the first conductive polymer layer, a liquid containing the first conductive polymer is used to form the layer containing the first conductive polymer. A method for manufacturing a capacitor array, wherein in the step of forming the second conductive polymer layer, a liquid in which a second conductive polymer having a larger particle size than the first conductive polymer is dispersed, and a liquid containing an insulating material that suppresses thermal and oxidative degradation of the conductive polymer contained in the solid electrolyte layer are used to form a layer in which the second conductive polymer and the insulating material are mixed.
11. A step of forming an insulating layer on the surface of the porous layer within the element region, A method for manufacturing a capacitor array according to claim 10, further comprising the step of forming a through-hole conductor that penetrates the insulating layer in the thickness direction.
12. The step of forming the through-hole conductor includes the steps of forming a first through-hole that penetrates the insulating layer in the thickness direction, and forming a first through-hole conductor inside the first through-hole. The method for manufacturing a capacitor array according to claim 11, wherein the first through-hole conductor is electrically connected to the anode plate at the inner wall of the first through-hole.
13. The step of forming the through-hole conductor includes the steps of forming a second through-hole that penetrates the insulating layer in the thickness direction, and forming a second through-hole conductor inside the second through-hole. The method for manufacturing a capacitor array according to claim 11 or 12, wherein the second through-hole conductor is electrically insulated from the anode plate by the inner wall of the second through-hole.
14. an anode plate having a core, a porous layer provided on at least one main surface of the core, and a dielectric layer provided on the surface of the porous layer, The dielectric layer comprises a cathode layer provided on the surface of the dielectric layer, The cathode layer is provided on the surface of the dielectric layer and includes a solid electrolyte layer containing a conductive polymer. The solid electrolyte layer includes a first conductive polymer layer provided inside the pores of the dielectric layer, a second conductive polymer layer provided inside the pores of the dielectric layer and covering the first conductive polymer layer, and a third conductive polymer layer provided on the surface of the anode plate and covering at least the second conductive polymer layer. The first conductive polymer layer is a layer containing a self-doped first conductive polymer, The solid electrolytic capacitor is a layer in which a non-self-doped second conductive polymer and an insulating material that suppresses thermal and oxidative degradation of the conductive polymer contained in the solid electrolyte layer are mixed.
15. The solid electrolytic capacitor according to claim 14, wherein at least one of the conductive polymers contained in the solid electrolyte layer is present in a region within 5 μm of the insulating material.
16. A portion of the first conductive polymer layer and/or a portion of the second conductive polymer layer are exposed on the surface of the anode plate. The solid electrolytic capacitor according to claim 14 or 15, wherein the area of the region on the surface of the anode plate in which the first conductive polymer layer and the second conductive polymer layer are not present is larger than the area of the region on the surface of the anode plate in which the first conductive polymer layer and the second conductive polymer layer are present.
17. A solid electrolytic capacitor according to any one of claims 14 to 16, wherein a portion of the third conductive polymer layer is embedded inside the pores of the dielectric layer.
18. The solid electrolytic capacitor according to any one of claims 14 to 17, wherein the cathode layer further comprises a conductive layer provided on the surface of the solid electrolyte layer.
19. The solid electrolytic capacitor according to claim 18, wherein the conductive layer comprises a conductive resin layer containing a metal filler.
20. Multiple capacitor elements, The system comprises a sealing layer provided to cover the plurality of capacitor elements, A capacitor array in which each of the plurality of capacitor elements is a solid electrolytic capacitor according to any one of claims 14 to 19.

Description

This invention relates to a method for manufacturing a solid electrolytic capacitor, a method for manufacturing a capacitor array, a solid electrolytic capacitor, and a capacitor array. A solid electrolytic capacitor, for example, comprises a dielectric layer provided on the surface of a porous layer located on at least one main surface of the core, an anode plate made of a valve-acting metal such as aluminum, and a cathode layer including a solid electrolyte layer provided on the surface of the dielectric layer. Patent Document 1 discloses an electrolytic capacitor comprising an anode, a dielectric layer formed on the anode, and a solid electrolyte layer formed on the dielectric layer, wherein the solid electrolyte layer contains a conductive polymer, and the conductive polymer contains self-doped poly(3,4-ethylenedioxythiophene) derivatives. International Publication No. 2018/221096 Figure 1 is a schematic cross-sectional view showing an example of the solid electrolytic capacitor of the present invention.Figure 2 is a perspective view of the solid electrolytic capacitor shown in Figure 1.Figure 3 is an enlarged cross-sectional view of the portion enclosed by the dashed line in the solid electrolytic capacitor shown in Figure 2.Figure 4 is a schematic cross-sectional view showing another example of the solid electrolytic capacitor of the present invention.Figure 5 is a perspective view of the solid electrolytic capacitor shown in Figure 4, with the third conductive polymer layer, the first conductive layer, and the second conductive layer removed.Figure 6 is a schematic cross-sectional view showing yet another example of the solid electrolytic capacitor of the present invention.Figure 7 is a schematic perspective view showing an example of the process for preparing an anode plate.Figure 8 is an enlarged cross-sectional view of the portion of the anode plate shown in Figure 7 that is enclosed by the dashed line.Figure 9 is a schematic cross-sectional view showing an example of the process for forming the first conductive polymer layer.Figure 10 is a schematic cross-sectional view showing an example of the process for forming the second conductive polymer layer.Figure 11 is a schematic perspective view showing an example of the process for forming the third conductive polymer layer.Figure 12 is an enlarged cross-sectional view of the portion of the anode plate shown in Figure 11 that is enclosed by a dashed line.Figure 13 is a schematic perspective view showing an example of the process for forming the first conductive layer.Figure 14 is an enlarged cross-sectional view of the portion of the anode plate shown in Figure 13 that is enclosed by a dashed line.Figure 15 is a schematic perspective view showing an example of the process for forming the second conductive layer.Figure 16 is an enlarged cross-sectional view of the portion of the anode plate shown in Figure 15 that is enclosed by a dashed line.Figure 17 is a schematic cross-sectional view showing an example of the capacitor array of the present invention.Figure 18 is a perspective view of the capacitor array shown in Figure 17.Figure 19 is an enlarged cross-sectional view of the portion enclosed by the dashed line in the capacitor array shown in Figure 18.Figure 20 is a schematic perspective view showing an example of the process for preparing an anode plate.Figure 21 is a schematic perspective view showing an example of the process for forming a solid electrolyte layer.Figure 22 is an enlarged cross-sectional view of the portion of the anode plate shown in Figure 21 that is enclosed by a dashed line.Figure 23 is a schematic perspective view showing an example of the process for forming the first conductive layer.Figure 24 is a schematic perspective view showing an example of the process for forming the second conductive layer.Figure 25 is a schematic perspective view showing an example of the process of dividing an anode plate on which a cathode layer has been formed.Figure 26 is a schematic perspective view showing an example of the process of forming the second through-hole.Figure 27 is a schematic perspective view showing an example of the process for forming a sealing layer.Figure 28 is a schematic perspective view showing an example of the process of forming the first through-hole.Figure 29 is a schematic perspective view showing an example of the process for forming a through-hole conductor.Figure 30 is a schematic perspective view showing an example of the process of forming a via conductor.Figure 31 is a schematic cross-sectional view showing a portion of the solid electrolyte layer constituting the solid electrolytic capacitor of Example 1.Figure 32 is a schematic cross-sectional view showing a portion of the solid electrolyte layer constituting the solid electrolytic capacitor of Comparative Example 1.Figure 33 is a schematic cross-sectional view showing a portion of the solid electrolyte layer constituting the solid electrolytic capacitor