JP-7855927-B2 - Microscope image acquisition control device, microscope image acquisition control program

JP7855927B2JP 7855927 B2JP7855927 B2JP 7855927B2JP-7855927-B2

Inventors

後藤邦博
奥村文洋
清水司

Assignees

株式会社豊田中央研究所

Dates

Publication Date: 20260511
Application Date: 20220601

Claims (6)

A setting unit that sets a high-magnification image range within a microscope image taken at a specific magnification suitable for one image analysis, and which is taken at a higher magnification than the specific magnification suitable for other image analyses, A division unit that divides the aforementioned high-magnification image range into multiple shooting ranges, A shooting unit that captures high-magnification microscope images of each of the aforementioned multiple shooting ranges, It has a coupling unit that combines multiple high-magnification microscope images captured by the imaging unit, The aforementioned joint portion, A guide image is generated by capturing the aforementioned high-magnification image range at a magnification that allows for such capture, and each of the multiple high-magnification microscope images captured by the capturing unit is positioned such that the image patterns on the guide image match within a predetermined tolerance range. Based on multiple data sets that associate the positional accuracy error corresponding to the difference between the target position and the actual position of the stage used to position the sample, machine learning is used to predict the error between the imaging range of the high-magnification microscope image and the imaging range of the guide image, and to correct the imaging range of the high-magnification microscope image. Microscope image acquisition and control device.
A setting unit that sets a high-magnification image range within a microscope image taken at a specific magnification suitable for one image analysis, and which is taken at a higher magnification than the specific magnification suitable for other image analyses, A division unit that divides the aforementioned high-magnification image range into multiple shooting ranges, A shooting unit that captures high-magnification microscope images of each of the aforementioned multiple shooting ranges, It has a coupling unit that combines multiple high-magnification microscope images captured by the imaging unit, The aforementioned joint portion, A guide image is generated by capturing the aforementioned high-magnification image range at a magnification that allows for such capture, and each of the multiple high-magnification microscope images captured by the capturing unit is positioned such that the image patterns on the guide image match within a predetermined tolerance range. If there is a predetermined or greater magnification difference between the magnification of the guide image and the required high-magnification microscope image, an auxiliary guide image with an intermediate magnification between the magnification of the guide image and the required high-magnification microscope image is first generated, and an intermediate high-magnification microscope image is obtained based on the generated auxiliary guide image, after which the required high-magnification microscope image is obtained . Microscope image acquisition and control device.
A microscope image acquisition control device according to claim 1 or 2, wherein elements that may cause image blurring when capturing the multiple shooting ranges, and feature points that serve as indicators for the joining of the multiple shooting ranges are extracted in advance from the guide image, and the shooting range is corrected so that at least one of the following is satisfied: the area used to focus in the multiple shooting ranges is shifted away from the elements, and a predetermined number of the feature points are present in the multiple shooting ranges .
The microscope image acquisition control device according to claim 1 or claim 2, wherein a microscope image taken at the specified magnification is applied as the guide image .
A microscope image acquisition control device according to claim 1 or 2, comprising: comparing the shooting range of the combined high-magnification microscope image with the shooting range of the guide image; identifying a range within the shooting range of the guide image where the high-magnification microscope image does not exist; and supplementing the shooting range of the high-magnification microscope image according to the identified range.
Computers, To be operated as a microscope image acquisition control device according to claim 1 or claim 2, Microscope image acquisition control program.

Description

This invention relates to a microscope image acquisition control device and a microscope image acquisition control program for performing analysis using a microscope image measured at a relatively low magnification and a continuous microscope image at a relatively high magnification. Scanning Electron Microscopy (SEM) acquires relatively high-magnification images to observe the shape of a sample. By the way, when acquiring a high-magnification image of the same sample with a field of view equivalent to that of a low-magnification microscope image, it is necessary to divide the field of view, measure it, and then combine the images. In this process, misalignment may occur at the boundary of the bond. Furthermore, the field of view of the high-magnification image and the low-magnification image generated by the bond may not match. This may depend on the accuracy of the stage used to position the sample in the SEM, or due to image distortion, etc. Patent Document 1 describes an image display device comprising: a low-magnification image input means for acquiring an image of an object being observed at a predetermined magnification; a high-magnification image input means for acquiring an image of the object being observed at a higher magnification than that of the low-magnification image input means; a high-magnification image position and orientation processing means for determining the relative magnification, position, and orientation of both images; an image superposition means for superimposing an index indicating the image range acquired by the high-magnification image input means onto the image acquired by the low-magnification image input means using the processing results of the high-magnification image position and orientation processing means; and an image output means for displaying the output image of the image superposition means. Furthermore, Patent Document 2 describes a system comprising: a low-magnification imaging means for imaging the entire specimen at a low magnification, which is a first magnification; a region division information storage means for storing the positional information of each sub-region when the entire specimen is divided into multiple sub-regions with some overlapping areas as region division information; a high-magnification imaging means for sequentially imaging areas substantially identical to each divided region at a second magnification, which is a higher magnification than the first magnification, according to the region division information; a positional displacement detection means for detecting positional displacement of the captured high-magnification image based on the low-magnification specimen image captured by the low-magnification imaging means; a positional displacement correction means for correcting the position of each high-magnification image based on the detected positional displacement; and an image stitching means for sequentially stitching (combining) each high-magnification image to create a high-magnification image of the entire specimen. Japanese Patent Publication No. 2014-224929Japanese Patent Publication No. 2004-343222 (A) is a schematic diagram of the operating electron microscope (SEM "Scanning Electron Microscope") 10 according to the first embodiment, and (B) is an enlarged perspective view of the stage.This is a control block diagram of the control device according to the first embodiment.This is a functional block diagram for executing image acquisition control in the SEM control unit according to the first embodiment.This is a flowchart showing the main routine for high-magnification acquisition control executed in the SEM control unit according to the first embodiment.Figure 4 is a control flowchart showing the subroutine for setting the shooting location in step 104.This is a front view illustrating the transition between SEM images (low magnification), guide images, and high magnification images.This is a front view of the image illustrating the transition from high-magnification image capture to image compositing.This is a front view of an image showing the field of view for obtaining high-magnification images at different magnifications.This is a front view of an image showing the process of correcting candidate points and setting the segmented acquisition area.(A) is a characteristic diagram showing the amount of error deviation in the stage, and (B) is a front view showing the setting state of the segmented acquisition area for the guide image, which is set based on the magnitude of the error.This is a functional block diagram for executing image acquisition control in the SEM control unit according to the second embodiment.This is a functional block diagram for executing image acquisition control in the SEM control unit according to the third embodiment.This is a flowchart showing the main routine for high-magnification acquisition control executed in the SEM control unit according to the third embodiment.This is a front view of