JP-7856022-B2 - Inspection device and inspection method

Inventors

• 萩原 晃平
• 鳥居 美之

Assignees

• 株式会社デンソー

Dates

Publication Date

20260511

Application Date

20230213

Claims (8)

1. An inspection device that performs electrical inspection of a workpiece (W) at a predetermined inspection temperature, A temperature-controlled tank (20) capable of controlling the temperature of the workpiece using a liquid medium and evacuating the inside of the tank, An electrical inspection unit (30, 85) that performs electrical inspection of the aforementioned workpiece, A recovery unit (50) for recovering the liquid medium discharged from the temperature control tank and the volatile gas discharged by vacuuming, Equipped with, In the temperature-controlled bath, the workpiece is subjected to electrical testing and vacuum drying. The temperature control tank has a partition wall (215) that divides the internal space of the tank body (21) into a liquid medium storage chamber (212) and a work chamber (213) where the workpiece is placed. The work chamber is an inspection device that can switch between a state in which the workpiece is placed and a state in which it is filled with a liquid medium .
2. The inspection apparatus according to claim 1 , wherein the electrical inspection unit performs electrical inspection in parallel with vacuuming the work chamber.
3. The temperature control bath is a high-temperature bath for heating the workpiece, In addition to the high-temperature bath, a low-temperature bath (10) for cooling the workpiece is provided. The inspection apparatus according to claim 1 or 2, wherein, after performing an electrical inspection of the workpiece cooled in the low - temperature bath at a low temperature in the vacuumed workpiece chamber, the workpiece chamber is filled with a liquid medium to heat it and perform an electrical inspection at a high temperature.
4. The temperature control bath is a high-temperature bath for heating the workpiece, In addition to the high-temperature bath, a low-temperature bath (80) for cooling the workpiece is provided. The inspection apparatus according to claim 1 or 2, wherein, after performing an electrical inspection at a low temperature on the workpiece cooled in the low-temperature bath, the workpiece is transported to the high-temperature bath, heated with a liquid medium, and an electrical inspection at a high temperature is performed in the high-temperature bath.
5. The inspection apparatus according to claim 1 or 2 , wherein the recovery unit includes a condenser (51) for condensing volatile gas and a gas holder (60) for storing volatile gas, and returns the volatile gas when the temperature control tank is restored to its original pressure.
6. An inspection method for performing an electrical inspection of a workpiece (W) at a predetermined inspection temperature, A temperature control step (S13, S17, S33, S37) in which the workpiece is heated using a liquid medium, An electrical inspection process (S16, S18, S34, S38) for performing electrical inspection of the aforementioned workpiece, A vacuum drying step (S18, S39) is performed to vacuum dry the workpiece, Includes, The temperature control process includes a cooling process (S13, S33) for cooling the workpiece, and a heating process (S17, S37) for heating the workpiece. The cooling process is performed in the low-temperature bath (10). An inspection method comprising: transporting the cooled workpiece to a high-temperature bath (20); performing the low-temperature electrical inspection process in the vacuum-sealed high-temperature bath; heating the workpiece in the heating process; and performing the high-temperature electrical inspection process and the vacuum drying process in the high-temperature bath .
7. An inspection method for performing an electrical inspection of a workpiece (W) at a predetermined inspection temperature, A temperature control step (S13, S17, S33, S37) in which the workpiece is heated using a liquid medium, An electrical inspection process (S16, S18, S34, S38) for performing electrical inspection of the aforementioned workpiece, A vacuum drying step (S18, S39) is performed to vacuum dry the workpiece, Includes, The temperature control process includes a cooling process (S13, S33) for cooling the workpiece, and a heating process (S17, S37) for heating the workpiece. The cooling process and the electrical inspection process at low temperature are performed in the low-temperature chamber (80). An inspection method comprising the following steps: after the electrical inspection step at a low temperature, the workpiece is transported to a high-temperature bath (20), and the heating step, the electrical inspection step at a high temperature, and the vacuum drying step are performed in the high-temperature bath .
8. The inspection method according to claim 6 or 7 , wherein the electrical inspection step and the vacuum drying step are performed simultaneously.

Description

This invention relates to an inspection apparatus and an inspection method. Conventionally, temperature characteristic testing apparatuses are known for testing the temperature characteristics of objects under test, such as semiconductor devices, at predetermined temperatures. For example, in Patent Document 1, a fluorine-based inert liquid, which is a heat transfer medium, is injected into a measurement chamber at a predetermined temperature. The semiconductor device is then transported by a handler, immersed in the heat transfer medium, heated, cooled, and an electrical temperature characteristic test is performed. Japanese Patent Application Publication No. 5-11017 This is a system diagram showing an inspection device according to the first embodiment.This is a schematic diagram showing a low-temperature processing tank and a high-temperature inspection tank according to the first embodiment.This is a plan view showing a high-temperature inspection chamber according to the first embodiment.This is a cross-sectional view taken along line IV-IV in Figure 3.This figure shows the state of the high-temperature inspection chamber according to the first embodiment before the installation of the lower jig.This figure shows the state of the high-temperature inspection tank according to the first embodiment before the installation of the top lid unit.This figure shows the state when the upper chamber of the high-temperature inspection chamber according to the first embodiment is being evacuated.This is a flowchart showing the inspection method according to the first embodiment.This is a time chart showing the temperature changes of a workpiece in a low-temperature processing tank according to the first embodiment.This is a time chart showing the temperature changes of a workpiece inside a high-temperature inspection chamber according to the first embodiment.This is a schematic diagram showing a low-temperature inspection chamber and a high-temperature inspection chamber according to the second embodiment.This is a flowchart showing the inspection method according to the second embodiment.This is a time chart showing the temperature changes of a workpiece inside a low-temperature inspection chamber according to the second embodiment.This is a time chart showing the temperature changes of a workpiece inside a high-temperature inspection chamber according to the second embodiment. The inspection apparatus according to the present invention will be described below with reference to the drawings. In the following multiple embodiments, substantially identical components will be denoted by the same reference numerals, and their descriptions will be omitted. (First Embodiment) Figures 1 to 10 show an inspection apparatus according to the first embodiment. As shown in Figure 1, the inspection apparatus 1 comprises a low-temperature processing tank 10, a high-temperature inspection tank 20, an electrical inspection unit 30, and a recovery unit 50, and performs temperature characteristic inspection of workpieces W, such as ECU board products and Sensemi products. The cryogenic treatment tank 10 is configured to cool the workpiece W transported into the tank in a liquid medium LM. The liquid medium LM is supplied to the cryogenic treatment tank 10 from the liquid supply unit 11. The liquid level is detected by a liquid level gauge 71. The liquid medium LM in the cryogenic treatment tank 10 is circulated by a circulation pump 13 located in the piping 131 and returned to the cryogenic treatment tank 10 via a mixing nozzle 15. A strainer 132 and a filter 133 are provided in the piping 131. Furthermore, the liquid medium LM in the cryogenic treatment tank 10 is cooled by a cryogenic chiller 17 and a cooling coil 18. The workpiece W, cooled in the low-temperature processing tank 10, is transported to the high-temperature inspection tank 20. By transporting the workpiece W through dry air generated by the dry air generator 90, condensation on the workpiece W during transport can be prevented. Sensors such as flow sensors (indicated as "FS" in the diagram) and pressure sensors (indicated as "PS" in the diagram) are appropriately installed in the piping. The high-temperature inspection chamber 20 is configured to perform electrical testing of the temperature characteristics of the workpiece W transported into the chamber, as well as heating using the liquid medium LM and vacuuming. The high-temperature inspection chamber 20 is equipped with a liquid level gauge 72 and a vacuum gauge 73. The liquid medium LM in the high-temperature inspection chamber 20 is agitated using a circulation pump 42. The high-temperature inspection tank 20 is configured to be evacuated by a suction pump 45. The gas, mainly composed of volatile liquid medium LM (hereinafter referred to as "volatile gas"), is recovered in the condenser 51. Furthermore, liquid medium LM brought into the high-temperature inspection tank 20 due to adhesion to the workpiece W, etc