JP-7856404-B2 - Manufacturing methods for sensors, devices, systems, and articles

JP7856404B2JP 7856404 B2JP7856404 B2JP 7856404B2JP-7856404-B2

Inventors

紅谷喜之
矢島明
佐々木正二
伊礼嘉治
石川陽康
高橋悠
小河原隆行
増子聡
堀口春彦

Assignees

キヤノン株式会社

Dates

Publication Date: 20260511
Application Date: 20211115

Claims (20)

A structure having at least four elastic parts discretely arranged in a virtual plane, A sensor comprising detection means for detecting deformation of the aforementioned structure, The aforementioned structure is Metal parts formed by bending sheet metal, A first reinforcing part connected to the aforementioned metal part, It includes a second reinforcing part connected to the aforementioned metal part, Within the aforementioned plane, the four elastic parts are arranged such that a virtual circle passes through the four elastic parts. The metal part has an upper surface portion provided in a plane parallel to the virtual plane on one side, a lower surface portion provided in a plane parallel to the virtual plane on the other side, and at least one of the four elastic portions . The first reinforcing component is positioned on one side of the virtual plane and connected to the upper surface , and the second reinforcing component is positioned on the other side of the virtual plane and connected to the lower surface . The elastic portion of the metal member includes both sides in the thickness direction of the sheet metal, and the sensor is arranged such that the circle passes through both sides .
The metal part has at least a first elastic part and a second elastic part among the four elastic parts, The first reinforcing component has a first overlapping portion that overlaps the first elastic portion, a second overlapping portion that overlaps the second elastic portion, and a first relay portion that connects the first overlapping portion and the second overlapping portion. The sensor according to claim 1, wherein the second reinforcing part has a third overlapping portion that overlaps the first elastic portion, a fourth overlapping portion that overlaps the second elastic portion, and a second relay portion that connects the third overlapping portion and the fourth overlapping portion.
The sensor according to claim 2, wherein the distance between the first overlapping portion and the metal component is less than the thickness of the first elastic portion, and the distance between the fourth overlapping portion and the metal component is less than the thickness of the second elastic portion.
The metal part comprises a first metal part that satisfies at least one of the following conditions: overlapping the first relay portion and connecting the first elastic portion and the second elastic portion, The metal part has a second metal part that satisfies at least one of the following conditions: overlapping the second relay part and connecting the first elastic part and the second elastic part. The sensor according to claim 2 or 3, wherein a gap is provided between the first metal part and the second metal part.
The thickness of the first relay portion is greater than the thickness of the first metal portion. The sensor according to claim 4, wherein the thickness of the second relay portion is greater than the thickness of the second metal portion.
The thickness of the first relay portion is less than the distance between the first metal portion and the second metal portion. The thickness of the second relay portion is less than the distance between the first metal portion and the second metal portion. The sensor according to claim 4 or 5.
The difference between the thickness of the first elastic part and the thickness of the first metal part is smaller than the difference between the thickness of the first relay part and the thickness of the first metal part. The difference between the thickness of the second elastic portion and the thickness of the second metal portion is smaller than the difference between the thickness of the second relay portion and the thickness of the second metal portion. The sensor according to any one of claims 4 to 6.
The distance between the first metal part and the second metal part is 2/3 or more of the distance between the first relay part and the second relay part. The sensor according to any one of claims 4 to 7.
The sensor according to any one of claims 4 to 8, wherein the thickness of the first relay portion is between the distance between the first metal portion and the second metal portion and the thickness of the first metal portion, and the thickness of the second relay portion is between the distance between the first metal portion and the second metal portion and the thickness of the second metal portion.
The thickness of the first overlapping portion is less than the distance between the first overlapping portion and the third overlapping portion, The thickness of the third overlapping portion is less than the distance between the first overlapping portion and the third overlapping portion, The thickness of the first relay portion is less than the distance between the first relay portion and the second relay portion, The thickness of the second relay portion is less than the distance between the first relay portion and the second relay portion, The thickness of the first relay portion is greater than the thickness of the first elastic portion, The thickness of the second relay portion is greater than the thickness of the second elastic portion, The distance between the first overlapping portion and the metal part is smaller than the thickness of the first overlapping portion. The distance between the third overlapping portion and the metal part is less than the thickness of the third overlapping portion, The distance between the first relay portion and the metal part is less than the thickness of the first relay portion, The distance between the second relay portion and the metal part is less than the thickness of the second relay portion, A sensor according to any one of claims 2 to 9, which satisfies at least one of the following conditions.
A gap is provided between the first reinforcing component and the metal component, as described in any one of claims 1 to 10.
The sensor according to claim 11, wherein the area in which the first reinforcing component and the metal component face each other through the gap, relative to the overlapping area of the first reinforcing component and the metal component, is 25% or more.
The sensor according to claim 11 or 12, wherein either the first reinforcing component or the metal component has a plurality of protrusions, and the gap is provided between the plurality of protrusions.
The sensor according to claim 11 or 12, wherein a shim is provided between the first reinforcing component and the metal component.
The sensor according to any one of claims 1 to 14, wherein, in a direction perpendicular to the plane, the upper surface portion, the lower surface portion, and the elastic portion of the metal part are located between the first reinforcing part and the second reinforcing part .
The sensor according to any one of claims 1 to 15 , wherein, in a direction perpendicular to the plane, the upper surface is located between the lower surface and the second reinforcing component .
The sensor according to any one of claims 1 to 16, wherein the first reinforcing component and the second reinforcing component are welded to the metal component.
The sensor according to any one of claims 1 to 17, wherein the metal component having the first elastic portion and the second elastic portion is defined as the first metal component, and the structure includes a second metal component having at least the third and fourth elastic portions among the four elastic portions.
The first reinforcing component is connected to the second metal component. The second reinforcing component is connected to the second metal component, The sensor according to claim 18, wherein the second metal component is provided between the first reinforcing component and the second reinforcing component.
The sensor according to any one of claims 1 to 19, wherein the thickness of the first reinforcing component in a direction perpendicular to the plane and the thickness of the second reinforcing component in a direction perpendicular to the plane are greater than the thickness of the elastic portion in the circumferential direction of the circle .

Description

This invention relates to a sensor. Sensors that measure mechanical quantities applied to a structure are known, comprising a structure and a detection means for detecting the deformation of the structure. Patent Document 1 discloses a torque sensor comprising a fixed member, a connecting member, an intermediate member, and a detection unit. This intermediate member has a radial stiffness less than its rotational stiffness. This is said to reduce the influence of deformation of the torque sensor by the wave generator on the detected torque. Japanese Patent Publication No. 2019-174472 A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the manufacturing method of the sensor.A schematic diagram illustrating the manufacturing method of the sensor.A schematic diagram illustrating the manufacturing method of the sensor.A schematic diagram illustrating the manufacturing method of the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the manufacturing method of the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the sensor.A schematic diagram illustrating the equipment. The embodiments for carrying out the present invention will be described below with reference to the drawings. In the following description and drawings, common components across multiple drawings are denoted by the same reference numerals. Therefore, common components will be described by referring to multiple drawings, and descriptions of components with common reference numerals will be omitted as appropriate. For items with the same name but different aspects, they can be distinguished by adding "item number ○" (where ○ is a number), such as "item number 1," "item number 2," etc. In the following explanation, when the symbols N, N+1, N+2, ..., n-1, n (n-N≧2) are consecutive natural numbers from N to n, they may be abbreviated as N to n. Furthermore, when the total number of elements is K, the number of elements can be expressed as "at least k" using a number k less than or equal to K (k≦K). These k elements are those selected from the K elements in any combination. Also, in mathematical formulas, [A&B] means at least one of A and B, and [C～D] means at least one of C～D. Figure 1(a) schematically shows the sensor 10 according to this embodiment. The sensor 10 comprises a structure 5 and a detection means 8 for detecting deformation of the structure 5. Figure 1(a) shows a virtual plane P that is parallel to the xy plane in the xyz Cartesian coordinate system and parallel to the rθ plane in the rθz cylindrical coordinate system. The cylindrical coordinate system is represented by the r direction, θ direction, and z direction. The r direction can be called the radial direction, the θ direction the circumferential direction, and the z direction the axial direction. In the cylindrical coordinate system, the rθ plane coincides with the xy plane, and the z direction coincides with the z direction of the Cartesian coordinate system. The structure 5 has an elastic part group 3, which is a group of multiple elastic parts discretely arranged in the virtual plane P. The elastic part group 3 has at least four elastic parts 31, 32, 33, and 34 discretely arranged in the virtual plane P. In other words, the number of elastic parts included in the elastic part group 3 that are discretely arranged in the virtual plane P is four or more. Furthermore, the sensor 10 may have one or more elastic parts that are not located within the virtual plane P on which the elastic part group 3 is arranged. However, one or more elastic parts that are not located within the virtual plane P are not counted as elastic parts of the elastic part group 3 located within the virtual plane P. The structure 5 includes at least one metal part 51. Each metal part 51 has at least two elastic parts 31, 32, and 32 from among the four elastic parts 31, 32, 33, and 34. In other words, the elastic parts 31 and 32 are part of the single metal part 51. The area within which the metallic bonds of metal atoms in a metal part are continuous is contained within a single metal part. Between two metal parts that are only fastened together by screws or glued together, the metallic bonds are discontinuous, and therefore the two metal parts are separate. The metal mate