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JP-7856812-B1 - Method for determining the connection status of a power supply and a heating resistor.

JP7856812B1JP 7856812 B1JP7856812 B1JP 7856812B1JP-7856812-B1

Abstract

[Problem] To provide a power supply device that can easily determine the connection status of a heating resistor before reducing the pressure inside an airtight container. [Solution] The power supply device 1A includes a power conversion circuit 3A having a modulation circuit 4 that modulates a first power, which is DC power, into a second power, and a rectifier and smoothing circuit 5 that converts the second power into a third power, which is DC power; a heating resistor 61 to which the third power is supplied; a modulation control circuit 7A that outputs modulation circuit drive signals Sg1 to Sg4 that control the modulation circuit 4; and a load current detection unit 8 that detects the magnitude of the load current If supplied by the power conversion circuit 3A to the heating resistor 61 and generates a current detection signal S If . Based on the current detection signal S If , the modulation control circuit 7A controls the drive frequencies of the modulation circuit drive signals Sg1 to Sg4 so that the magnitude of the load current If approaches the target value of the load current If. Based on the drive frequencies, the modulation control circuit 7A determines the electrical connection state between the power conversion circuit 3A and the heating resistor 61. [Selection Diagram] Figure 1

Inventors

  • 柿原 利之
  • 原口 大

Assignees

  • 浜松ホトニクス株式会社

Dates

Publication Date
20260511
Application Date
20250422

Claims (7)

  1. A power supply unit that outputs a first power which is DC power, A power conversion circuit having a modulation circuit that modulates the first power and converts it into a second power, and a rectifier and smoothing circuit that converts the second power into a third power which is DC power, A heating resistor module having a heating resistor to which the aforementioned third power is supplied, and an airtight container for holding the heating resistor in a reduced-pressure atmosphere, A modulation control circuit connected to the modulation circuit and outputting a modulation circuit drive signal to control the modulation circuit, The power conversion circuit includes a first current detection unit that detects the magnitude of the load current supplied to the heating resistor by the third power or the magnitude of a current that fluctuates together with the load current, and generates a first current detection signal. The modulation control circuit is A parameter control unit controls the modulation parameters of the modulation circuit drive signal so that the magnitude of the load current approaches the target value of the load current, based on the first current detection signal. The system includes a connection state determination unit that determines the electrical connection state between the power conversion circuit and the heating resistor based on the modulation parameters, The modulation circuit described above is A switching circuit connected to the power supply unit, which converts the first power supplied from the power supply unit into AC power as the second power, The system further comprises a resonant circuit connected between the switching circuit and the rectifier/smoothing circuit, which steps up or down the AC voltage generated by the AC power, The parameter control unit controls the drive frequency of the switching circuit as the modulation parameter. The connection status determination unit determines the connection status based on whether or not the drive frequency has reached a threshold, and is a power supply device.
  2. A power supply unit that outputs a first power which is DC power, A power conversion circuit having a modulation circuit that modulates the first power and converts it into a second power, and a rectifier and smoothing circuit that converts the second power into a third power which is DC power, A heating resistor module having a heating resistor to which the aforementioned third power is supplied, and an airtight container for holding the heating resistor in a reduced-pressure atmosphere, A modulation control circuit connected to the modulation circuit and outputting a modulation circuit drive signal to control the modulation circuit, The power conversion circuit supplies a load current to the heating resistor, and a first current detection unit detects the magnitude of the load current due to the third power or the magnitude of a current that fluctuates with the load current to generate a first current detection signal. An anode is positioned opposite the heating resistor, which acts as the cathode, and the thermionic electrons emitted from the heating resistor converge thereto, The system includes a second current detection unit that detects the magnitude of the current flowing between the cathode and the anode and generates a second current detection signal, The modulation control circuit is A parameter control unit controls the modulation parameters of the modulation circuit drive signal so that the magnitude of the load current approaches the target value of the load current, based on the first current detection signal. The system includes a connection state determination unit that determines the electrical connection state between the power conversion circuit and the heating resistor based on the modulation parameters, The parameter control unit has a first operating mode and a second operating mode, In the first operating mode, the parameter control unit controls the modulation parameters based on the second current detection signal so that the magnitude of the current flowing between the cathode and the anode approaches the target value of the current. In the second operating mode, the parameter control unit controls the modulation parameter regardless of the second current detection signal.
  3. A power supply unit that outputs a first power which is DC power, A power conversion circuit having a modulation circuit that modulates the first power and converts it into a second power, a transformer whose primary winding is connected to the modulation circuit, and a rectifier and smoothing circuit connected to the first secondary winding of the transformer that converts the second power into a third power which is DC power, A heating resistor module having a heating resistor to which the aforementioned third power is supplied, and an airtight container for holding the heating resistor in a reduced-pressure atmosphere, A modulation control circuit connected to the modulation circuit and outputting a modulation circuit drive signal to control the modulation circuit, A receiving circuit connected to the second secondary winding of the transformer, The system includes a connection state determination unit that determines the electrical connection state between the power conversion circuit and the heating resistor, The modulation control circuit performs a signal transmission, which involves transmitting a connection confirmation signal generated by driving the modulation circuit to the receiving circuit via the transformer, before the power transmission, which involves transmitting the second power generated by driving the modulation circuit to the rectifier and smoothing circuit via the transformer. The connection status determination unit determines the connection status based on whether or not the connection confirmation signal from the modulation control circuit has successfully reached the receiving circuit .
  4. The airtight container has a first connection terminal that is connected to the rectifier and smoothing circuit and outputs the third power, The power supply device according to any one of claims 1 to 3 , wherein the heating resistor has a second connection terminal that can contact the first connection terminal and is configured to be detachably attached to the airtight container.
  5. A method for determining the connection status of a heating resistor using a power supply device, The aforementioned power supply device is A power supply unit that outputs a first power which is DC power, A power conversion circuit having a modulation circuit that modulates the first power and converts it into a second power, and a rectifier and smoothing circuit that converts the second power into a third power which is DC power, A heating resistor module having a heating resistor to which the aforementioned third power is supplied, and an airtight container for holding the heating resistor in a reduced-pressure atmosphere, A modulation control circuit connected to the modulation circuit and outputting a modulation circuit drive signal to control the modulation circuit, The power conversion circuit includes a first current detection unit that detects the magnitude of the load current supplied to the heating resistor by the third power or the magnitude of a current that fluctuates together with the load current, and generates a first current detection signal. The aforementioned method, The steps include controlling the modulation parameters of the modulation circuit drive signal based on the first current detection signal so that the magnitude of the load current approaches the target value of the load current, The system includes the step of determining the electrical connection state between the power conversion circuit and the heating resistor based on the modulation parameters, The modulation circuit described above is A switching circuit connected to the power supply unit, which converts the first power supplied from the power supply unit into AC power as the second power, The system further comprises a resonant circuit connected between the switching circuit and the rectifier/smoothing circuit, which steps up or down the AC voltage generated by the AC power, In the step of controlling the modulation parameter, the drive frequency of the switching circuit is controlled as the modulation parameter. A method for determining the connection state of a heating resistor, wherein the step of determining the connection state is to determine the connection state based on whether or not the drive frequency has reached a threshold .
  6. A method for determining the connection status of a heating resistor using a power supply device, The aforementioned power supply device is A power supply unit that outputs a first power which is DC power, A power conversion circuit having a modulation circuit that modulates the first power and converts it into a second power, and a rectifier and smoothing circuit that converts the second power into a third power which is DC power, A heating resistor module having a heating resistor to which the aforementioned third power is supplied, and an airtight container for holding the heating resistor in a reduced-pressure atmosphere, A modulation control circuit connected to the modulation circuit and outputting a modulation circuit drive signal to control the modulation circuit, The power conversion circuit supplies a load current to the heating resistor, and a first current detection unit detects the magnitude of the load current due to the third power or the magnitude of a current that fluctuates with the load current to generate a first current detection signal. An anode is positioned opposite the heating resistor, which acts as the cathode, and the thermionic electrons emitted from the heating resistor converge thereto, The system includes a second current detection unit that detects the magnitude of the current flowing between the cathode and the anode and generates a second current detection signal , The aforementioned method, The steps include controlling the modulation parameters of the modulation circuit drive signal based on the first current detection signal so that the magnitude of the load current approaches the target value of the load current, The system includes the step of determining the electrical connection state between the power conversion circuit and the heating resistor based on the modulation parameters, The step of controlling the modulation parameters includes a first operating mode and a second operating mode. In the first operating mode, the modulation parameters are controlled based on the second current detection signal so that the magnitude of the current flowing between the cathode and the anode approaches a target value of the current. A method for determining the connection state of a heating resistor , which controls the modulation parameter regardless of the second current detection signal in the second operating mode .
  7. A method for determining the connection status of a heating resistor using a power supply device, The aforementioned power supply device is A power supply unit that outputs a first power which is DC power, A power conversion circuit having a modulation circuit that modulates the first power and converts it into a second power, a transformer whose primary winding is connected to the modulation circuit, and a rectifier and smoothing circuit connected to the first secondary winding of the transformer that converts the second power into a third power which is DC power, A heating resistor module having a heating resistor to which the aforementioned third power is supplied, and an airtight container for holding the heating resistor in a reduced-pressure atmosphere, A modulation control circuit connected to the modulation circuit and outputting a modulation circuit drive signal to control the modulation circuit, The receiving circuit is connected to the second secondary winding of the transformer, The aforementioned method, The steps include: performing signal transmission by driving the modulation circuit and transmitting the connection confirmation signal generated to the receiving circuit via the transformer; The steps include determining the electrical connection state between the power conversion circuit and the heating resistor based on whether the connection confirmation signal from the modulation control circuit has successfully reached the receiving circuit , If the connection state is normal, the power transmission step involves driving the modulation circuit to generate the second power and transmitting it to the rectifier and smoothing circuit via the transformer. A method for determining the connection state of a heating resistor, comprising:

Description

This invention relates to a power supply device and a method for determining the connection status of a heating resistor. The apparatus described in Patent Document 1 includes a buck-boost circuit that increases or decreases the voltage supplied to the filament, and predicts the remaining lifespan of the filament using a measured value of the current flowing on the low-voltage side of the buck-boost circuit. For example, in the apparatus described in Patent Document 1, the time derivative of the current flowing on the low-voltage side is calculated, and the remaining time until the end of the filament's lifespan is calculated by dividing the difference between the current value on the low-voltage side and the current value at the end of the filament's lifespan by the calculated time derivative. International Publication No. 2020/161795 Figure 1 is a schematic diagram of the circuit diagram of a power supply device according to the first embodiment of this disclosure.Figure 2 is a schematic diagram showing the structure of the heating resistance module provided in the pressure reducing tube.Figure 3 is a block diagram showing an example of the internal configuration of an inverter control circuit.Figure 4 is a graph showing an example of the frequency characteristics of the gain of a power conversion circuit including a heating resistor.Figure 5 is a flowchart showing an example of a method for determining the electrical connection state between a heating resistor and a power conversion circuit.Figure 6 is a graph showing the time evolution of various values in the second operating mode.Figure 7 is a graph showing the time evolution of various values when the heating resistor and the power conversion circuit are properly connected.Figure 8 is a graph showing the time evolution of various values when the connection between the heating resistor and the power conversion circuit is abnormal.Figure 9 is a circuit diagram showing the configuration of the power supply device according to the second embodiment.Figure 10 shows an example of the time waveform of the voltage output from the inverter.Figure 11 is a graph showing the time waveform of the connection confirmation signal.Figure 12 is a flowchart showing an example of a method for determining the electrical connection state between a heating resistor and a power conversion circuit.Figure 13 is a circuit diagram showing the configuration of a power supply device according to the first modified example.Figure 14 is a circuit diagram showing the configuration of a power supply device according to a second modified example.Figure 15 is a circuit diagram showing the configuration of a power supply device according to the third modified example.Figure 16 is a circuit diagram showing the configuration of a power supply device according to the fourth modified example.Figure 17 is a circuit diagram showing the configuration of a power supply device according to the fifth modified example. Hereinafter, preferred embodiments of a power supply device and a method for determining the connection status of a heating resistor according to one embodiment of this disclosure will be described in detail with reference to the drawings. [First Embodiment] Figure 1 is a schematic diagram of the circuit of a power supply device 1A according to the first embodiment of the present disclosure. The power supply device 1A is a power supply device for supplying power to a heating resistor 61 which is a load, and raising the temperature of the heating resistor 61. The heating resistor 61 constitutes the cathode (filament) of the pressure reducing tube 6. The pressure reducing tube 6 is, for example, a vacuum tube. The pressure reducing tube 6 is, for example, an X-ray tube or an electron beam tube. The power supply unit 1A comprises a power supply unit 2, a power conversion circuit 3A, a pressure reducing tube 6, an inverter control circuit 7A, a load current detection unit 8, and a tube current detection unit 9. The power supply unit 2 outputs a first power, which is DC power. The power supply unit 2 functions as an AC/DC converter, for example, converting AC power generated in the AC power source AP into the first power, which is DC power. The power supply unit 2 is a power supply circuit that supplies the first power to the inverter 4 included in the power conversion circuit 3A. The power supply unit 2 is, for example, a switching-type AC/DC converter. In that case, the power supply unit 2 may have a switching element (not shown). The power supply unit 2 receives a tube current instruction signal S ISET (second current instruction signal) which indicates a target value for the magnitude of the tube current Iout flowing through the pressure reducing tube 6. The tube current instruction signal S ISET can be set arbitrarily, for example, by the user. The power supply unit 2 operates in feedforward control. The power supply unit 2 may vary the magnitude of the first power, for example, acc