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JP-7857028-B2 - Laminate, method for manufacturing a laminate, and method for increasing the superconducting transition temperature.

JP7857028B2JP 7857028 B2JP7857028 B2JP 7857028B2JP-7857028-B2

Inventors

  • 大竹 尚登
  • 関根 香乃
  • 柳田 敏輝

Assignees

  • 国立大学法人東京科学大学

Dates

Publication Date
20260512
Application Date
20240328

Claims (17)

  1. A laminate comprising a diamond-like carbon (DLC) film on an object containing a material selected from oxide superconducting materials and conductive materials, The object is a thin film with a pattern having grooves or spaces, formed on a substrate. A laminate in which DLC is embedded in the aforementioned grooves or spaces.
  2. The laminate according to claim 1 , wherein the depth of the grooves formed in the thin film is 30% or more of the thickness of the thin film.
  3. The laminate according to claim 1 , wherein the patterned thin film has a stripe-like or tile-like repeating pattern.
  4. The laminate according to claim 1 , wherein the material is a conductive material and the patterned thin film constitutes a circuit pattern.
  5. The laminate according to claim 1 , wherein the line width of the thin film is 0.5 to 500 μm.
  6. The laminate according to claim 1 , wherein the thickness of the thin film is 0.05 to 5 μm.
  7. The laminate according to claim 1 , wherein the space or groove width of the thin film is 0.01 to 500 μm.
  8. The laminate according to claim 1 , wherein the thickness of the DLC film is 0.05 to 5 μm.
  9. The laminate according to claim 1 , wherein the DLC film has a compressive internal stress of 20 MPa or more.
  10. The laminate according to claim 1 , wherein the material is an oxide superconducting material.
  11. The laminate according to claim 10 , wherein the oxide superconducting material is a copper oxide superconductor.
  12. The laminate according to claim 10 , wherein the superconducting transition temperature is 0.5 K or higher than that of an object without a DLC film.
  13. A method for manufacturing a laminate according to claim 1 , As an object containing a material selected from oxide superconducting materials and conductive materials , a patterned thin film having grooves or spaces formed on a substrate is prepared, A method for manufacturing a laminate, comprising forming a DLC film on the aforementioned object.
  14. The method for manufacturing a laminate according to claim 13 , wherein the DLC film is formed by vapor phase growth.
  15. The method for manufacturing a laminate according to claim 13 , wherein the DLC film is formed by a Filtered Cathodic Vacuum Arc method.
  16. This includes coating an object containing an oxide superconducting material with DLC, A method for increasing the superconducting transition temperature of an object, wherein the object is a thin film in the shape of a pattern having grooves or spaces formed on a wire or a substrate.
  17. A method for increasing the superconducting transition temperature of an object according to claim 16 , wherein the DLC coating is performed by a filtered cathode vacuum arc method.

Description

This disclosure relates to a laminate, a method for manufacturing a laminate, and a method for increasing the superconducting transition temperature. Superconductivity is a phenomenon in which a material loses its electrical resistance below a certain transition temperature Tc. Currently, efforts are being made to conserve energy and reduce CO2 emissions in order to achieve carbon neutrality and the SDGs, and superconductivity is attracting attention as a phenomenon that can solve these problems. For example, in terms of energy conservation, resistance-free power transmission lines that utilize the superconducting state are expected. In addition, other applications of superconductivity include linear motor cars that enable high-speed travel, magnetic resonance imaging (MRI) that can precisely image the inside of the human body, and quantum computers that enable parallel computing. It is known that some superconductors exhibit an increase in Tc when pressure is applied; this phenomenon is called the pressure effect. For example, Patent Document 1 discloses a high-pressure generator used to investigate the pressure effect of superconductors. Furthermore, Patent Document 2 discloses an oxide superconducting composite long body formed by depositing an oxide superconductor on a long metal substrate via a buffer layer made of a diamond-like carbon thin film. According to Patent Document 2, providing a buffer layer prevents the interdiffusion between atoms in the substrate and the oxide superconducting material that occurs during heat treatment. Japanese Patent Publication No. 2012-187612Japanese Patent Application Publication No. 02-243781 This is a schematic cross-sectional view showing an example of a laminate according to the first embodiment.This is a schematic cross-sectional view used to illustrate the pressurization of an object within a laminate.This is a perspective view showing an example of an object according to the first embodiment.This is a schematic cross-sectional view showing an example of a laminate according to the first embodiment.This is a schematic cross-sectional view showing an example of a laminate according to the second embodiment.This is a schematic cross-sectional view showing an example of a laminate according to the second embodiment.These are schematic cross-sectional and front views showing an example of a laminate according to the third embodiment.This is a schematic cross-sectional view used to illustrate the pressurization of an object within a laminate.This is a schematic front view showing an example of a laminate according to the third embodiment.This is a schematic cross-sectional view showing an example of a laminate according to the third embodiment.This is a schematic diagram of the FCVA method.This is the result of structural evaluation using a laser microscope.This is a laser microscope image showing the pattern shape of a YBCO thin film.This is the Raman spectrum of a DLC film.This is a schematic cross-sectional view illustrating the parameters of Stoney's equation.This graph shows the evaluation of the superconductivity of thin films.This is a graph showing the film thickness of DLC films. The embodiments for carrying out the invention will be described below with reference to the drawings. In each embodiment, identical components are denoted by the same reference numerals, and their descriptions are omitted or simplified. For clarity, the following descriptions and drawings are simplified as appropriate, and the scale of each component may differ significantly. In this specification, terms such as "parallel,""perpendicular,""orthogonal," and "identical," which specify shapes, geometric conditions, and their degrees, shall not be interpreted strictly, but shall be interpreted to include a range that can be expected to function similarly. Unless otherwise specified, the "~" indicating a numerical range includes the values written before and after it as the lower and upper limits. [Laminate] First, the laminate of this disclosure will be outlined with reference to Figures 1 and 2. Figure 1 is a schematic cross-sectional view showing an example of the laminate of the first embodiment described later. Figure 2 is a schematic cross-sectional view used to explain the pressurization of the object in the laminate of Figure 1. For illustrative purposes, the warp in Figure 2 is exaggerated to an extreme degree. The laminate 100 shown in Figure 1 has an object 10 in the shape of a sheet, and a DLC film 20 is provided on the sheet-shaped object 10. DLC is an amorphous carbon film composed of sp2 and sp3 bonds between carbon atoms and hydrogen atoms. Depending on the ratio of these bonds and hydrogen atoms, DLC has an internal stress (residual stress) of approximately 10 MPa to 20 GPa. Therefore, in the laminate 100, a sustained compressive force is generated in the DLC film 20, and pressure is applied to the object 10 in the direction of arrow 30 in Figure 2. This causes a press