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KR-102959848-B1 - Deposition film materials with high elasticity and high conductivity and their manufacturing methods

KR102959848B1KR 102959848 B1KR102959848 B1KR 102959848B1KR-102959848-B1

Abstract

The objective of the present invention is to provide a deposited film electrode material having high elasticity and high conductivity suitable for application in foldable displays and sliding expandable displays. In accordance with the above purpose, the present invention provides an amorphous or nanocrystalline alloy deposition film based on an Al material having high elasticity and high conductivity, and a deposition film electrode material characterized by having an Al content of 84 atomic% or more and one or more rare earth elements mixed, wherein the mixed rare earth elements contain at least 1 atomic% or more.

Inventors

  • 민병욱
  • 박은수
  • 전창우

Assignees

  • 주식회사 이엠엘

Dates

Publication Date
20260508
Application Date
20240409

Claims (20)

  1. Based on AI, One or more rare earth elements are mixed, and if two or more rare earth elements are mixed, each rare earth element is included in at least 1 atomic percent and the total content of rare earth elements included in the deposited film is at least 6 atomic percent, and A deposited film electrode material for a stretchable flexible display, characterized by having high elasticity and high conductivity, wherein the remainder is Al, but the Al content is 84 atomic% or more.
  2. A deposited film electrode material for a stretchable flexible display according to claim 1, characterized in that the rare earth element comprises one or more of Y, Ce, Dy, Gd, Ho, Er, La, Pr, Nd, Yb, Tm, Pm, Sc, Eu, Sm, and Lu, which have an atomic radius larger than that of Al.
  3. A deposition film electrode material for a stretchable flexible display, characterized in that, in claim 1, the total content of alloying elements added in addition to Al is 10% or less to obtain a deposition film with a nanocrystalline structure.
  4. Based on Al, containing rare earth elements and transition metals, The transition metal includes one or more of Ti, Ni, Cu, and Co, and The Al content is controlled from over 90% to under 95%, and The remainder comprises one or more rare earth elements and transition metal elements, and is characterized by being amorphous or nanocrystalline, and is a deposited film electrode material for a stretchable flexible display.
  5. Based on Al, containing rare earth elements and transition metals, Rare earths consist of a mixture of one or more rare earth elements, and if there are two or more mixed rare earth elements, each rare earth element is included in at least 1 atomic percent, and The transition metal includes one or more of Ti, Ni, Cu, and Co, and The total content of rare earth elements included in the deposited film is at least 6 atomic percent, and The content of elements other than Al shall be 10 atomic% or less, and A deposited film electrode material for a stretchable flexible display, characterized by having the remainder be Al, with the Al content ranging from 90 atomic% or more to 95% or less, thereby increasing the elastic limit and forming an amorphous deposited film.
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  7. A flexible flexible display deposition film electrode material characterized by the elastic modulus of the deposition film electrode material for a flexible display according to any one of claims 1 to 5 being increased by 6 to 20 times compared to an electrode material made of Al alone.
  8. A deposited film electrode material for a flexible display according to any one of claims 1 to 5, characterized by having an amorphous or nanocrystalline layer and forming a multilayer structure by alternately stacking it with a pure Al layer.
  9. A deposited film electrode material for a stretchable flexible display according to claim 8, characterized in that the multilayer structure stacked on the substrate starts by stacking an amorphous or nanocrystalline layer directly on the substrate, is repeatedly stacked alternately with a pure Al layer, and is finished by stacking an amorphous or nanocrystalline layer as the final layer.
  10. A deposited film electrode material for a stretchable flexible display according to claim 8, characterized in that the ratio of the thickness of the amorphous or nanocrystalline layer to the thickness of the Al layer is controlled to be between 1:0.5 and 2, the thickness of the Al layer is increased when conductivity is increased, and the thickness of the amorphous or nanocrystalline layer is increased when stretchability is increased.
  11. A deposited film electrode material for a stretchable flexible display, characterized in that, in claim 10, the thickness of each layer is controlled to be between 20 and 100 nm, and the resistivity value is lowered by setting the ratio of the thickness of the amorphous or nanocrystalline layer to the thickness of the Al layer to 1:2.
  12. A deposited film electrode material for a stretchable flexible display, characterized in that, in claim 11, the thickness ratio of the Al-10Y alloy layer to the Al layer is 1:2 and the resistivity value is 10 μΩcm or less.
  13. Alloy elements having a ratio of rare earth elements equal to that of a misch metal containing 55% Ce, 25% La, 15~18% Nd, and 2~5% Fe are included in an amount of 1 to 16 atomic percent, and An Al-based amorphous or nanocrystalline alloy deposition film electrode material having high elasticity and high conductivity, characterized in that the remainder is Al, and Al is included in an amount of 84 atomic percent or more.
  14. In claim 13, an Al-based amorphous or nanocrystalline alloy deposition film electrode material having high elasticity and high conductivity, characterized by the additional addition of Ce, La, and Nd to increase amorphous forming ability by changing the ratio of rare earth elements.
  15. An Al-based amorphous or nanocrystalline alloy deposition film electrode material having high elasticity and high conductivity, characterized in that, in claim 14, other rare earth elements other than Ce, La, and Nd are added in an amount of 0.1 atomic % to 5 atomic %.
  16. A deposited film electrode material for a flexible display according to any one of claims 13 to 15, characterized by having an amorphous or nanocrystalline layer and forming a multilayer structure by alternately and repeatedly stacking it with a pure Al layer.
  17. A deposited film electrode material for a stretchable flexible display according to claim 16, characterized in that the multilayer structure stacked on a substrate starts by stacking an amorphous or nanocrystalline layer directly on the substrate, is repeatedly stacked alternately with a pure Al layer, and is finished by stacking an amorphous or nanocrystalline layer as the final layer.
  18. A deposited film electrode material for a stretchable flexible display according to claim 16, characterized in that the ratio of the thickness of the amorphous or nanocrystalline layer to the thickness of the Al layer is controlled to be between 1:0.5 and 2, the thickness of the Al layer is increased when conductivity is increased, and the thickness of the amorphous or nanocrystalline layer is increased when stretchability is increased.
  19. A deposited film electrode material for a stretchable flexible display, characterized in that, in claim 18, the thickness of each layer is controlled to be between 20 and 100 nm.
  20. As a manufacturing system for a deposition film electrode material for a flexible display according to claim 8, A vacuum chamber connected to a vacuum pump and a gas supply unit; An alloy target for forming an amorphous or nanocrystalline layer and an Al target for forming a pure Al layer, each disposed in the vacuum chamber; Shutter for alloy target and shutter for Al target; A substrate positioned opposite to the above targets; and A movable substrate holder capable of mounting the above substrate and rotating or reciprocating the substrate in a straight line; comprising A deposited film is formed by physical vapor deposition (PVD) by flowing gas into a vacuum chamber, To form an amorphous or nanocrystalline layer, close the shutter for the Al target and open the shutter for the alloy target, position the substrate near the alloy target using a movable substrate holder, and perform a deposition process. A manufacturing system for a deposition film electrode material for a stretchable flexible display, characterized by opening a shutter for an Al target and closing a shutter for an alloy target to form a pure Al layer, positioning a substrate near the Al target using a movable substrate holder, and performing a deposition process.

Description

Deposition film materials with high elasticity and high conductivity and their manufacturing methods The present invention relates to a deposition film material having high elasticity and high conductivity and a method for manufacturing the same, and more specifically, to a TFT electrode material. Flexible device technology is one of the key technologies driving innovative changes in the fields of displays, electronics, and sensors. This technology breaks away from conventional flat device designs, enabling the fabrication of flexible devices that can be bent or folded. These flexible (flexible, expandable) devices can 혁신적으로 improve user portability and convenience. Realizing flexible devices requires technologies capable of efficiently making electrode materials, display panels, and sensors flexible. In particular, Al and Ti materials, used as display electrodes, cannot be restored once deformed; furthermore, severe deformation can cause the electrodes to break, preventing current transmission and rendering the devices inoperable. Consequently, there is a need for material and process technologies to make these electrode materials flexible. Registered Patent No. 10-1428349 describes an Al alloy film electrode, but only considers improvements in high temperature resistance, conductivity, and corrosion resistance. Figure 1 shows the XRD analysis results of the Al-RE material. Figure 2 shows the Al-RE DSC analysis results. Figure 3 is an example of the present invention, showing the XRD analysis results for AlNiCoY, Al-10Y, and Al-6Y. Figure 4 shows the substrate temperature according to the deposition power in the deposition process. Figure 5 is a TEM image showing the state of the deposited film according to the deposition temperature according to an embodiment of the present invention. FIG. 6 is a table showing the process conditions and physical properties of some embodiments according to the present invention. Figure 7 shows the configuration of a multilayer deposited film as another embodiment of the present invention. Figure 8 shows the equipment configuration for fabricating the multilayer deposition film of Figure 7. Figure 9 is a cross-sectional view of a multilayer film fabricated by controlling the ratio of the thickness of the amorphous or nanocrystalline film and the thickness of the pure Al layer in the deposited film of the multilayer structure of Figure 7. Figure 10 shows the EDS analysis results of the deposited film of the multilayer structure of Figure 7. Figure 11 is a table summarizing the electrode film characteristics according to the composition of the multilayer deposited film. Figure 12 shows the DSC analysis results for the electrode material according to the present invention. Figure 13 shows the surface analysis results of an Al-6MM electrode material according to the present invention. Figure 14 shows the surface analysis results of the Al-8MM electrode material according to the present invention. Figure 15 shows the thickness and XRD results of the Al-6MM electrode material and the Al-8MM electrode material according to the present invention. Figure 16 shows the electrode material deposition process conditions and the resistivity of the deposited film of the present invention. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. Research is being conducted to utilize organic materials that can be bent or curved as electrode materials for flexible displays by imparting electrical conductivity to them, instead of conventional metal electrode materials. In addition, research is underway to solve the problem of electrode deformation and improve stability by providing flexibility through the optimization of micro-patterns and metal grid designs of the electrode materials. Research is also being conducted to develop electrode materials that can be stretched or restored even after deformation in order to realize displays that can be stretched to expand wider (referred to as expandable, stretchable, or sliding expandable). In accordance with these circumstances, the present invention provides an Al-based high-stretch electrode material and a deposition film manufacturing technology that simultaneously satisfies the mechanical and electrical properties required for flexible device electrode materials, namely strength, elastic limit, elongation, and electrical conductivity. More specifically, the invention provides an Al-based high-stretch electrode material and a deposition film manufacturing technology having mechanical and electrical properties such as an elastic limit of 3% or more, a strength of 1.5 GPa or more, and a resistivity of 10 μΩ·cm or less. The present invention aims to overcome the low elastic limit of 0.2 to 0.6% of existing Al-based electrodes. To secure an excellent elastic limit, a thin film having an amorphous structure is formed, and to supplement the electrical conductivity as an electrode,