KR-102960175-B1 - SYSTEM FOR TREATING LEAKED GAS

KR102960175B1KR 102960175 B1KR102960175 B1KR 102960175B1KR-102960175-B1

Abstract

A leak gas treatment system is provided. The leak gas treatment system includes a leak gas detection unit connected to a gas supply unit for detecting gas leaking from the gas supply unit, and a leak gas treatment unit connected to the gas supply unit for treating the leak gas. The gas supply unit includes a gas storage container for storing gas supplied to a production facility, a container storage box for receiving and storing the gas storage container, and a gas supply pipe connecting the gas storage container and the production facility. The leak gas detection unit is connected to the container storage box and can detect gas leaking from the gas storage container.

Inventors

신창현
이선민
허화진
박봉균

Dates

Publication Date: 20260508
Application Date: 20231220

Claims (9)

A leak gas detection unit connected to a gas supply unit and detecting gas leaking from the gas supply unit; and It includes a leak gas treatment unit connected to the above gas supply unit to treat the leak gas, and The above gas supply unit is, Gas storage container for storing gas supplied to production facilities, A container storage box for receiving and storing the above gas storage container, and It includes a gas supply pipe connecting the above gas storage container and the above production facility, The above leak gas detection unit is, Connected to the above container storage box to detect gas leaking from the gas storage container, and The above leak gas treatment unit is, A first gas discharge pipe connected to the container storage box and discharging gas inside the container storage box, A gas flow switch connected to the first gas discharge pipe above to switch the direction of gas flow, A second gas discharge pipe connected to the above gas flow switch and discharging gas transferred through the first gas discharge pipe, A third gas discharge pipe separated from the second gas discharge pipe and connected to the gas flow switch, and discharging gas transferred through the first gas discharge pipe, and A leak gas treatment system characterized by including a leak gas treatment unit connected to the third gas discharge pipe and neutralizing the gas transported through the first gas discharge pipe and the third gas discharge pipe.
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In Article 1, The above leak gas detection unit is, A leak gas detector that detects the above leak gas, A leak gas detection transfer pipe connecting the above container storage box and the above leak gas detector, and A leak gas treatment system characterized by including a leak gas detection conveyor disposed in the above leak gas detection conveyor and conveying the leak gas.
In Article 1, The above leak gas treatment unit is, A neutralizing agent storage tank disposed adjacent to the above-mentioned leak gas treatment device for storing a neutralizing agent, A neutralizing agent supply pipe connecting the above leak gas treatment device and the above neutralizing agent storage tank, and A leak gas treatment system characterized by further including a neutralizing agent supply pump disposed in the above neutralizing agent supply pipe and supplying the neutralizing agent to the above leak gas treatment device.
In Article 1, The above leak gas treatment unit is, A leak gas treatment system characterized by further including a gas conveyor disposed in the first gas discharge pipe and sucking in and transporting gas within the container storage box.
In Article 4, The above leak gas treatment unit is, A first gas conveyor disposed in the second gas discharge pipe and controlling the transfer of gas through the first gas discharge pipe and the second gas discharge pipe, and A leak gas treatment system characterized by further including a second gas conveyor disposed in the third gas discharge pipe and controlling the transfer of gas through the first gas discharge pipe and the third gas discharge pipe.
In Article 6, The above leak gas detection unit is connected to and communicates with the gas flow switch, the first gas conveyor, the second gas conveyor, and the neutralizing agent supply pump via wired or wireless connection, and A leak gas treatment system characterized in that the leak gas detection unit provides a leak gas detection signal to the gas flow switch, the first gas conveyor, the second gas conveyor, and the neutralizing agent supply pump when it detects leak gas.
In Article 6, The system further includes a system control unit connected to the leak gas detection unit and the leak gas processing unit to control the operation of the leak gas detection unit and the leak gas processing unit. The above system control unit communicates with the above leak gas detection unit, the gas flow switch, the first gas conveyor, the second gas conveyor, and the neutralizing agent supply pump via wired or wireless connection, and The above leak gas detection unit provides a leak gas detection signal to the system control unit when it detects leak gas, and A leak gas treatment system characterized by the above-mentioned system control unit controlling the operation of the gas flow switch, the first gas conveyor, the second gas conveyor, and the neutralizing agent supply pump according to the leak gas detection signal.
In Article 7 or Article 8, A leak gas treatment system characterized in that the operating speed of the first gas conveyor and the operating speed of the second gas conveyor are set to satisfy the following operating condition 1 and operating condition 2. Operating Condition 1: First transfer time ≥ Leak gas detection time Operating Condition 2: 1st Transfer Time + 2nd Transfer Time ≥ Leak Gas Detection Time + Neutralizer Supply Pump Operating Time (Leak Gas Handler Operating Time) (The first transfer time indicates the time during which the leaked gas is transferred from the first gas discharge pipe by the operating speed of the first gas transfer device, the second transfer time indicates the time during which the leaked gas is transferred from the first gas discharge pipe and the third gas discharge pipe by the operating speed of the second gas transfer device, the leaked gas detection time indicates the time required to detect the leaked gas by the leaked gas detection unit, and the neutralizing agent supply pump operation time indicates the time from when the leaked gas is detected and the operation of the neutralizing agent supply pump begins until the neutralizing agent begins to be supplied to the leaked gas treatment device.)

Description

Leaked Gas Treatment System The present invention relates to a leak gas treatment system. Various high-pressure process gases are used in the manufacturing processes of semiconductor or display devices. Since these process gases are toxic and hazardous chemicals that can cause casualties and environmental pollution in the event of a leak, facilities are installed and used at industrial sites to neutralize the leaked gases. However, because these facilities operate even when there is no gas leak, they incur high process costs. FIG. 1 schematically shows the configuration of a leak gas treatment system according to one embodiment of the present invention. FIG. 2 schematically shows the configuration of a leak gas treatment system according to another embodiment of the present invention. The present invention will be described in detail below through examples. The purpose, features, and advantages of the present invention will be easily understood through the following examples. The present invention is not limited to the examples described herein and may be embodied in other forms. The examples introduced herein are provided to ensure that the disclosed content is thorough and complete, and to ensure that the concept of the present invention is sufficiently conveyed to those skilled in the art to which the present invention pertains. Accordingly, the present invention should not be limited by the following examples. Although terms such as "first," "second," etc., have been used in this specification to describe various elements, said elements should not be limited by such terms. These terms are used merely to distinguish said elements from one another. FIG. 1 schematically shows the configuration of a leak gas treatment system according to one embodiment of the present invention. Referring to FIG. 1, the leak gas treatment system (10) includes a leak gas detection unit (100) and a leak gas treatment unit (200). The leak gas treatment system (10) is connected to a gas supply unit (20) to prevent harmful gases leaking from the gas supply unit (20) from being discharged into the atmosphere. The gas supply unit (20) may include a container storage box (21), a gas storage container (22), and a gas supply pipe (23). The gas supply unit (20) supplies high-pressure process gas to production facilities at an industrial site that manufactures semiconductor devices or display devices. The process gas may include, for example, phosphine, silane, etc. The container storage box (21) may have a cabinet shape and may accommodate and store gas storage containers (22). The container storage box (21) may accommodate two or more gas storage containers (22), and two or more gas storage containers may be used alternately. The gas storage container (22) may be a gas bomb and stores process gas supplied to the production facility. The gas supply pipe (23) connects the gas storage container (22) and the production facility (not shown) and supplies the process gas stored in the gas storage container (22) to the production facility. The leak gas detection unit (100) is connected to the gas supply unit (20) and can detect gas leaking from the gas supply unit (20). The leak gas detection unit (100) may include a leak gas detection transfer pipe (110), a leak gas detection transfer device (120), a leak gas detector (130), and a detector storage box (140). The leak gas detection transfer pipe (110) connects the container storage box (21) and the leak gas detector (130). Gas leaking from the gas storage container (22) inside the container storage box (21) can travel to the leak gas detector (130) through the leak gas detection transfer pipe (110). The leak gas detection transfer pipe (110) may have the form of a tube or a pipe. To effectively detect the leak gas, it is preferable that one end of the leak gas detection transfer pipe (110) be positioned adjacent to one end (inlet) of the first gas discharge pipe (211). A leak gas detection conveyor (120) is positioned in a leak gas detection conveyor pipe (110) to suck gas from inside a container storage box (21) and transfer it to a leak gas detector (130). The leak gas detection conveyor (120) may include a gas transfer pump, a fan, a blower, etc., and it is preferable to use a gas transfer pump to transfer gas from inside the container storage box (21) at a constant rate through the leak gas detection conveyor pipe (110) for precise detection of leak gas. The leak gas detector (130) is placed inside the detector storage box (140) and connected to the leak gas detection transfer pipe (110) to detect gas transferred from the container storage box (21). The leak gas detector (130) may include a gas detection sensor, etc., and can detect leak gas and the amount of leakage (leakage concentration). The leak gas detector (130) can communicate with the gas flow switch (220) via wired and/or wireless connection. When the leak gas detector (130) detects leaked gas within the container storage box (2