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KR-102961179-B1 - The aligning apparatus and method thereof of the device having fine pitch

KR102961179B1KR 102961179 B1KR102961179 B1KR 102961179B1KR-102961179-B1

Abstract

The present invention relates to an alignment device and method for a device having a fine pitch, and enables the device to be accurately aligned and loaded onto the upper surface of a vacuum chuck so that electrical performance tests can be performed in a handler after producing a device such as a BGA (Ball Grid Array), TSOP (Thin Small Outline Package), or HBM (High Bandwidth Memory) which has a small bump size and a narrow pitch. To this end, the present invention comprises an X-axis rail (101) installed on a base (100), a slider (110) installed on the X-axis rail and moving along the X-axis direction, a vision camera (130) installed on the slider to identify a reference mark (121) of a device (120) to be tested and to notify the control unit of the coordinate value, a lighting unit (131) installed below the vision camera, a device alignment means (140) installed on one side of the lighting unit by a bracket (142) and having an opening (141) formed in the center, a Z-axis motor (143) for raising and lowering the device alignment means, and a vacuum suction pad (150) installed below the device alignment means, having a vacuum line (152) formed inside through which vacuum pressure is applied via a vacuum hose (151), and a through hole (153) formed in the center to allow the vision camera (130) to identify the reference mark (121) of the device (120). The device alignment means (140) is configured and is characterized by being composed of an X-axis transfer unit (144) that is supported by the bracket (142) and moves the vacuum suction pad (150) in the X-axis direction, a Y-axis transfer unit (145) that is installed below the X-axis transfer unit (144) and moves the vacuum suction pad (150) in the Y-axis direction, and a θ-axis transfer unit (146) that is installed below the Y-axis transfer unit (145) and moves the vacuum suction pad (150) in the θ-axis direction.

Inventors

  • 김두철
  • 김원

Assignees

  • 에이엠티 주식회사

Dates

Publication Date
20260507
Application Date
20250520

Claims (10)

  1. An X-axis rail (101) installed on a base (100), and A slider (110) installed on the above X-axis rail and moving along the X-axis direction, and A vision camera (130) installed on the above slider to identify a reference mark (121) of a device (120) to be tested and to notify the control unit of the coordinate value, and A lighting unit (131) installed at the bottom of the vision camera, and A device alignment means (140) installed on one side of the above-mentioned lighting unit with a bracket (142) and having an opening (141) formed in the center, and A Z-axis motor (143) for raising and lowering the above device alignment means, and It is composed of a vacuum suction pad (150) which is installed at the bottom of the above device alignment means, has a vacuum line (152) formed inside through which vacuum pressure is applied via a vacuum hose (151), and has a through hole (153) formed in the center so that a vision camera (130) can identify a reference mark (121) of the device (120). The above device alignment means (140) is, An X-axis transfer unit (144) that is supported by the above bracket (142) and moves the vacuum suction pad (150) in the X-axis direction, and A Y-axis transfer unit (145) installed at the lower part of the above X-axis transfer unit (144) to move the vacuum suction pad (150) in the Y-axis direction, and An alignment device for a device having a fine pitch, characterized by being composed of a θ-axis transfer unit (146) installed at the lower part of the above Y-axis transfer unit (145) to move the vacuum suction pad (150) in the θ-axis direction.
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  3. In claim 1, Alignment device for a device having a fine pitch, characterized by further having a picker (170) installed on one side of the slider (110) to vacuum adsorb the device (120) and load it onto a vacuum chuck (160).
  4. In claim 1, Alignment device for a device having a fine pitch, characterized by installing a plurality of sliders (110) on the X-axis rail (101) at pitch intervals of vacuum holes formed in a vacuum chuck (160), and each slider (110) being equipped with a vision camera (130), a lighting unit (131), a device alignment means (140), a Z-axis motor (143), and a vacuum suction pad (150).
  5. Step (S1) in which the device alignment means (140) lowers and then applies vacuum pressure to the vacuum line (152) of the vacuum suction pad (150) through the vacuum hose (151) to adsorb the device (120) to be tested onto the vacuum suction pad (150) and rise, and A step (S2) of applying a primary vacuum pressure to adsorb a device (120) loaded into each vacuum hole formed in the vacuum chuck (160), and A step (S3) in which the vision camera (130) confirms the reference mark (121) coordinate value of the device (120) adsorbed on the vacuum suction pad (150) through the opening (141) formed at the center of the device alignment means (140) and the through hole (153) formed at the center of the vacuum suction pad (150) and notifies the control unit, and A step (S4) of aligning the position of the device (120) adsorbed on the vacuum suction pad (150) by moving the X-Y-θ axis transfer unit (144)(145)(146), which is the device alignment means (140), along the X-Y-θ axis direction according to the reference mark (121) coordinate value of the device (120), and Step (S5) in which the above device alignment means (140) descends to load the adsorbed device (120) into the vacuum hole of the vacuum chuck (160), and simultaneously releases the vacuum pressure of the vacuum adsorption pad (150) while suctioning the loaded device (120) with a secondary vacuum pressure greater than the primary vacuum pressure. A step (S6) in which the vision camera (130) reconfirms the alignment status of the device (120) before the above device alignment means (140) rises, and Step (S7) in which the device alignment means (140) returns to an initial position while maintaining the alignment state of the above device (120), and A step (S8) of moving the above vacuum chuck (160) one step along the X-axis or Y-axis direction, and A step (S9) of determining whether there is an empty vacuum hole in the above vacuum chuck (160), and A method for aligning a device having a fine pitch, characterized by the step (S10) of: if there is an empty vacuum hole in the vacuum chuck (160), vacuum adsorbing the device (120) with a vacuum adsorption pad (150) to align it and then loading it; and if there is no empty vacuum hole, transferring the vacuum chuck (160) loaded with the device (120) to a test section to perform an electrical test for a set period of time.
  6. In claim 5, Alignment method for a device having a fine pitch, characterized by performing alignment work on the device (120) while the above vacuum suction pad (150) vacuum-suctions the device (120) to be tested and moves it toward the vacuum chuck (160).
  7. In claim 5, Alignment method of a device having a fine pitch, characterized by forming a plurality of reference marks (121) on the above device (120) and having a vision camera (130) inform a control unit of the reference mark coordinate values.
  8. A step (S11) in which a picker (170) sequentially loads devices (120) to be tested onto the upper surface of a vacuum chuck (160) having multiple vacuum holes formed therein, and then applies a primary vacuum pressure to the vacuum holes to adsorb the devices (120) to the vacuum chuck (160); Step (S13) in which the device alignment means (140) lowers, then applies a vacuum pressure greater than the primary vacuum pressure applied to the vacuum hole in the vacuum line (152) of the vacuum suction pad (150) through the vacuum hose (151) to adsorb the device (120) to be tested onto the vacuum suction pad (150), and the device alignment means (140) rises; A step (S14) in which the vision camera (130) confirms the reference mark (121) coordinate value of the device (120) adsorbed to the vacuum suction pad (150) through the opening (141) formed at the center of the device alignment means (140) and the through hole (153) formed at the center of the vacuum suction pad (150) and notifies the control unit, and A step (S15) of aligning the position of the device (120) adsorbed to the vacuum suction pad (150) by moving the X-Y-θ axis transfer unit (144)(145)(146), which is the device alignment means (140), along the X-Y-θ axis direction according to the reference mark (121) coordinate value of the device (120), and The above device alignment means (140) lowers to load the adsorbed device (120) into the vacuum hole of the vacuum chuck (160), and the loaded device (120) is suctioned with a secondary vacuum pressure greater than the primary vacuum pressure (S16). A step (S17) in which the vision camera (130) reconfirms the alignment status of the device (120) before the above device alignment means (140) rises, and A step (S18) in which the device alignment means (140) returns to an initial position while maintaining the alignment state of the above device (120), and A step (S19) of moving the above vacuum chuck (160) one step along the X-axis or Y-axis direction, and A step (S20) for determining whether the alignment of the device (120) loaded on the vacuum chuck (160) is completely finished, and A method for aligning a device having a fine pitch, characterized by comprising the step (S21) in which, if there is a device (120) to be aligned to the vacuum chuck (160), the vacuum suction pad (150) vacuum suctions the device (120) and aligns it through the steps described above, and then loads it onto the vacuum chuck (160); and if there is no device (120) to be aligned, the vacuum chuck (160) on which the device (120) has been aligned is transferred to a test section and an electrical test is performed for a set period of time.
  9. In claim 8, Alignment method of a device having a fine pitch, characterized by forming a plurality of reference marks (121) on the above device (120) and having a vision camera (130) inform a control unit of the reference mark coordinate values.
  10. In claim 8, A method for aligning a device having a fine pitch, characterized by further performing a step (S12) of determining whether the device (120) is fully loaded on the vacuum chuck (160) before the vacuum suction pad (150) adsorbs the device (120) to be tested on the vacuum chuck (160).

Description

Alignment apparatus and method thereof of the device having fine pitch The present invention relates to an alignment device and method for a device having a fine pitch, and more specifically, to an alignment device and method for a device having a fine pitch that is accurately aligned and loaded onto the upper surface of a vacuum chuck so that electrical performance tests can be performed in a handler after producing a device such as a BGA (Ball Grid Array), TSOP (Thin Small Outline Package), or HBM (High Bandwidth Memory) which has a small bump size and a narrow pitch. Generally, semiconductor devices such as ICs undergo electrical characteristic testing during the final stage of their manufacturing process to determine whether they are defective. This electrical characteristic test is performed by electrically connecting the ball terminals of the semiconductor device to the contacts of a test board including a printed circuit board (PCB) and conducting the test for a set period of time; good products are shipped, while defective products are retested or disposed of. In other words, electrical testing of the device is performed based on the electrical contact between the ball terminals of the device mounted on the carrier and the probe pins supported by the socket assembly. Since the very small ball terminals and probe pins are arranged at a narrow pitch, very high-precision alignment is required during testing; however, the current practice is to achieve alignment of the ball terminals and probe pins through mutual alignment between the alignment holes of the carrier and the alignment pins of the socket guide. Therefore, the loading picker picks up the device located in the loading section, places it in a carrier, and sequentially transfers the carrier containing the device to the tester side to perform a test for a set period of time. After the test of the device is completed, the carrier is transferred to the unloading section, and the unloading picker selects the device as good or defective based on the test results and unloads it. Consequently, not only is it impossible to manufacture the handler compactly, but the process of connecting and disconnecting the carrier with the socket guide must also be repeated during the test. As a result, the alignment pin and alignment hole have increased clearance due to repeated connection and disconnection, leading to mismatch or offset defects between the ball terminal and the probe pin. Furthermore, when conducting conductivity tests on thousands of devices, if expensive devices are damaged due to collisions between the devices and probe pins, or if the ball terminals of damaged devices remain in the handler, the conductivity test must be suspended to replace or repair the parts, which leads to a decrease in the operating rate of expensive equipment. Accordingly, the applicant has newly developed equipment and a method for accurately aligning a device having a fine pitch and registered it as Patent No. 2291194 (August 12, 2021). FIG. 1 is a perspective view showing a conventional configuration, FIG. 2 is a front view of FIG. 1, and FIG. 3 is a plan view showing a base plate position adjustment means. A Y-axis plate (20) is installed on the upper surface of a base (10) having a vertical column (11) so as to be movable by one pitch (distance of devices loaded on the base plate) along the Y-axis direction, and a base plate (40) is installed on the upper surface of the Y-axis plate (20) such that a vacuum hole is formed at each seating point of the device (30), and the loaded device (30) is suctioned with a vacuum pressure (about 5 to 50 mmHg) so as to be finely moved when a vacuum pressure is applied while the device (30) is loaded. Additionally, on the upper surface of the Y-axis plate (20), there is a base plate comprising: a mounting plate (51) fixed to the Y-axis plate (20) to finely move the base plate (40) along the X-Y-θ direction according to the position of the device (30) loaded on the base plate (40); a pair of X-axis motors (52a) (52b) installed opposite to the mounting plate (51); a Y-axis motor (53) installed on the mounting plate (51) perpendicular to the X-axis motors; a movable plate (54) installed to be finely movable in the X-Y-θ direction by the X-axis motors (52a) (52b) and the Y-axis motor (53); four cross rollers (55) installed between the mounting plate (51) and the movable plate (54) to allow the movable plate (54) to move in the X-Y axis direction; and a shaft (56) rotatably connecting the movable plate (54) to each cross roller (55). A position adjustment means (50) is provided. An X-axis plate (60) that moves horizontally in one pitch along the X-axis direction is installed on the vertical column (11) of the base (10), and the X-axis plate (60) is equipped with an alignment vision assembly (70) that reads the coordinate values of the device (30) loaded on the base plate (40), notifies the control unit (not shown), and simultaneously alig