KR-102961245-B1 - DC VARIABLE CAPACITOR ELEMENT

Abstract

A DC variable capacitor element is disclosed. A DC variable capacitor element according to one embodiment may include a DC variable capacitor section; a fine control section for controlling a Q-factor of the DC variable capacitor section; and an RF characteristic detection sensor section for monitoring a change in RF characteristics caused by a DC bias in the DC variable capacitor section.

Inventors

• 신성규
• 이동헌

Assignees

• 주식회사 알에프피티

Dates

Publication Date

20260511

Application Date

20240325

Claims (1)

1. In a DC variable capacitor element, DC variable capacitor section; A fine control unit comprising at least one inductor, at least one capacitor, and at least one BJT (Bipolar Junction Transistor), which controls the Q-Factor of the DC variable capacitor unit by adjusting the fine variable resistance of the at least one BJT; and RF characteristic detection sensor unit that monitors changes in RF characteristics due to DC bias in the above-mentioned DC variable capacitor unit Includes, The method in which the above at least one BJT is connected to the above at least one inductor and the above at least one capacitor in series or in parallel is, The above fine control unit is characterized by being determined according to the unit to control the fine variable resistor of the at least one BJT, and The above fine control unit is, It is characterized by finely controlling the real component of the impedance related to the Q factor of the above-mentioned DC variable capacitor section, and The above fine control unit is, The method is characterized by finely controlling the Q factor of the DC variable capacitor section by adjusting the fine variable resistance between the collector and emitter of at least one BJT. A DC variable capacitor element characterized in that the adjustment unit of the fine variable resistor varies depending on whether the at least one BJT is connected in series or in parallel with the at least one inductor and the at least one capacitor.

Description

DC Variable Capacitor Element The following embodiments relate to DC variable capacitor elements. Vacuum Variable Capacitors (VVCs), which vary the capacitor value based on mechanical control by a motor, are mostly used as high-output variable capacitor devices. However, vacuum variable capacitors have a limit to the control speed due to mechanical control. Accordingly, the development of electronic variable capacitors is underway; however, electronic variable capacitors not only have limitations in electrical withstand voltage but also suffer from distortion problems caused by electronic switching or the nonlinear characteristics of semiconductor devices. Meanwhile, variable capacitors using dielectrics whose permittivity changes according to DC bias have been researched and developed for decades, but to date, actual high-speed, high-output variable characteristics have not been realized due to changes in dielectric properties caused by temperature and non-linear characteristics caused by DC bias. Therefore, the following embodiments propose a technology that overcomes the limitations and problems of existing technologies. FIG. 1 is a diagram showing a high-speed, high-output DC variable capacitor element according to one embodiment. FIG. 2 is a diagram showing a high-speed, high-output DC variable capacitor element according to another embodiment. FIG. 3 is a drawing showing a DC variable capacitor section included in the high-speed high-output DC variable capacitor element shown in FIG. 1 to 2. FIGS. 4 to 11 are drawings showing a fine control unit included in a high-speed, high-output DC variable capacitor element illustrated in FIGS. 1 to 2. FIG. 12 is a drawing showing a plasma processing apparatus in which a high-speed, high-output DC variable capacitor element shown in FIG. 1 to 2 is used. Hereinafter, embodiments of the present invention are described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present invention. Since the description of the present invention is merely an example for structural or functional explanation, the scope of the rights of the present invention should not be interpreted as being limited by the embodiments described in the text. That is, since the present invention is capable of various modifications and can be implemented in various different forms, it is not limited to the embodiments described herein; therefore, the scope of rights according to the present invention should be understood to include equivalents capable of realizing the technical concept. Meanwhile, the meaning of the terms described in this invention should be understood as follows. Terms such as "first," "second," etc., are intended to distinguish one component from another, and the scope of rights shall not be limited by these terms. For example, the first component may be named the second component, and similarly, the second component may be named the first component. When it is stated that one component is "connected" to another component, it should be understood that it may be directly connected to that other component, or that there may be other components in between. Conversely, when it is stated that one component is "directly connected" to another component, it should be understood that there are no other components in between. Meanwhile, other expressions describing the relationships between components, such as "between" and "exactly between," or "adjacent to" and "directly adjacent to," should be interpreted in the same way. A singular expression should be understood to include a plural expression unless the context clearly indicates otherwise, and terms such as "include" or "have" are intended to specify the existence of the implemented features, numbers, steps, actions, components, parts, or combinations thereof, and should be understood not to preclude the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. In each step, identifiers (e.g., a, b, c, etc.) are used for convenience of explanation and do not describe the order of the steps; the steps may occur differently from the specified order unless a specific order is clearly indicated in the context. That is, the steps may occur in the same order as specified, may be performed substantially simultaneously, or may be performed in the reverse order. Unless otherwise defined, all terms used herein have the same meaning as generally understood by those skilled in the art to which this invention pertains. Terms defined in commonly used dictionaries should be interpreted as having meanings consistent with the context of the relevant technology and should not be interpreted as having an ideal or overly formal meaning unless explicitly defined in this invention. It should be noted that the drawings are schematic and not drawn to scale. The relative dimensions and proportions of parts in the drawings are exaggerated or