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KR-102961484-B1 - Air floating device for substrate protection

KR102961484B1KR 102961484 B1KR102961484 B1KR 102961484B1KR-102961484-B1

Abstract

The present invention relates to an air floating device for protecting a substrate. By configuring the substrate air floating device so that air injected to float a substrate fed through an input section in a substrate manufacturing process can be sprayed onto the bottom surface of the substrate while forming a vortex, thereby enabling floating regardless of the weight of the substrate to be floated, a single substrate air floating device can be used universally, thereby reducing the cost associated with purchasing the device and preventing scratches and contamination that occur during the loading and unloading of the substrate.

Inventors

  • 최병수

Assignees

  • 주식회사 디에스이엔티

Dates

Publication Date
20260507
Application Date
20251215

Claims (6)

  1. In an air floating device for protecting a substrate, A floating table (110) installed on one side of an input section (10) configured to allow a product (A) to be inserted; A floating transfer unit (120) installed on one side of the upper surface of the above floating table (110) and configured to be able to move forward and backward toward the input unit (10); A floating clamp part (130) installed at the other end of a bracket (B) fixed to one end of the floating transfer unit (120) above, which operates in response to the supply of pneumatic or hydraulic pressure to clamp a product (A) fed into the input part (10); A floating fixing member (140) having one end each fixedly provided at the front and rear ends of the upper surface of the floating table (110); It includes a floating air injection means (150) formed in a plate shape and fixedly seated on the upper surface of the floating fixing member (140), wherein the air supplied is connected to the plate through an air supply unit and a supply hose and is injected toward the bottom side of the product (A) transported through the floating clamp unit (130) to enable the product (A) to float. The above-described floating air injection means (150) is formed in the shape of a plate, wherein a plurality of guide plate fixing holes (151a) are formed on the plate to be seated and fixed to the floating fixing member (140), a plurality of coupling fixing holes (151b) are formed at regular intervals on one side of the guide plate fixing holes (151a), and a plurality of air guide holes (151c) for guiding air are formed on the plate between the coupling fixing holes (151b), thereby providing a floating air guide plate (151); a plurality of air supply ports (152) are provided such that each end is connected to the air guide holes (151c) respectively and the other end is connected to a supply hose connected to an air supply unit, so as to be positioned on the bottom surface of the floating air guide plate (151); and a plate is formed so as to be overlapped with a silicone tube interposed to prevent air leakage on the upper surface of the floating air guide plate (151), wherein the coupling A floating air injection plate (153) is provided with a plurality of fixing holes (153a) for an air injection plate formed so as to be fixed to a fixing hole (151b), and a plurality of floating air injection holes (153b) are formed at regular intervals in the transverse and longitudinal directions on a plate between the fixing holes (153a) for the air injection plate so as to be able to float the product (A) by injecting air, and a plurality of floating air connection grooves (153c) are formed on the bottom surface so as to connect the floating air injection holes (153b) to each other so that air supplied through the fixing hole (151a) for a guide plate can be evenly injected toward the bottom side of the product (A); and a floating vortex forming member (154) is provided inside the floating air injection holes (153b) of the floating air injection plate (153) so that the injected air can be injected toward the bottom surface of the product (A) while forming a vortex. Air floating device for protecting substrates.
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  3. In paragraph 1, An air floating device for protecting a substrate, characterized in that the rear surface of the above-mentioned air guide plate (151) for floating has a stopper (155) for preventing detachment, wherein one end is fixed by a fixing member and the other end protrudes upward, so as to prevent the floating product (A) from detaching from the above-mentioned air injection plate (153).
  4. In paragraph 1 or 3, An air floating device for protecting a substrate, characterized in that the upper surface of the above-mentioned air injection plate (153) for floating further has longitudinal and transverse air discharge grooves (153d) formed therein so that air injected to float the product (A) can be discharged.
  5. In paragraph 1, The above-mentioned floating air injection hole (153b) is characterized by being composed of a floating air injection port (153b-1) formed inwardly from the upper surface of the floating air injection plate (153), a floating air expansion port (153b-2) that gradually expands from the floating air injection port (153b-1), and a floating air connection port (153b-3) that extends from the end of the floating air expansion port (153b-2) and is formed to be in communication with the floating air connection groove (153c), and is provided so that the floating vortex forming member (154) can be installed inside.
  6. In paragraph 5, The above floating vortex-forming member (154) is characterized by being composed of a vortex-forming spiral groove (154a) formed on a part of the inner surface of the above floating air connector (153b-3), and a vortex-forming part (154c) having a screw groove 1.2 to 3 times deeper than the depth of the vortex-forming spiral groove formed on the outer surface so as to form an air guide (154b) formed by screw coupling with the above vortex-forming spiral groove (154a).

Description

Air floating device for substrate protection The present invention relates to an air floating device for protecting a substrate, and more specifically, to an air floating device for protecting a substrate configured to allow the substrate, fed through an input section in a substrate manufacturing process, to be fed in and out while floating it with air, thereby preventing scratches and contamination that may occur during the feeding and feeding of the substrate. The Automated Optical Inspection (AOI) system, which is commonly used in systems for inspecting glass, is an inspection device capable of handling various types of glass (Multi Model Glass) by detecting minute pattern defects in color filter glass at high speed using a precision camera and reproducing and storing the detected defects in real time. In addition, it is an inspection device featuring user-friendly software and capable of inline and stand-alone operation. In such general AOI systems, the color filter glass is transported using an air slide method. Upon examination, when a color filter glass is loaded onto a transfer table at the loading/unloading position of the transfer device by a loader arm, the color filter glass is scanned by multiple vision cameras installed on a camera mounting frame to inspect for pattern defects. Several vision cameras for inspecting the pattern of the color filter glass are installed in a camera installation frame, and the camera installation frame is installed on a frame support formed on a conveying device that conveys the color filter glass. A loader arm responsible for transporting and returning the color filter glass to the transfer device using an air slide method is positioned at the loading/unloading position of the transfer device, and the glass loading/unloading device supports the glass at the loading/unloading position of the transfer device. The loader arm moves horizontally left and right to transport color filter glass to the loading/unloading position of the glass transport device and to return it to the outside, and the glass loading/unloading device installed at the loading/unloading position of the color filter glass transport device moves vertically up and down by means of a lift pin. In the process of loading the color filter glass, when the color filter glass transported by the loader arm moves to the loading/unloading position, the color filter glass is placed on the color filter glass loading/unloading device. At this time, the lift pin of the glass loading/unloading device has a predetermined material applied to it to prevent scratches on the lower surface of the glass caused by contact with the lower surface of the color filter glass, or has a plurality of rubber contact protrusions attached to it. However, the above loading/unloading device has a problem in that scratches and contamination continue to occur on the part where the lower surface of the glass comes into contact during the loading/unloading of the color filter glass, and this causes a decrease in the production quality of the color filter pattern glass. Taking these points into consideration, a loading/unloading device and method using air floating has been proposed in Patent Publication No. 10-2006-0061873. Upon examination, a conventional loading/unloading device utilizing general air floating is a device for loading/unloading glass transported by a loader arm, characterized in that it includes an air floating through hole for air floating and an air supply passage for supplying air to the air floating through hole, a plurality of lift pins that contact the lower surface of the glass and support the glass, and a lift pin support means that supports the lower portion of the plurality of lift pins. However, the aforementioned conventional loading/unloading device using general air floating is configured so that air is injected only in a certain direction, that is, in a straight line, through the air floating through hole, so there is an inconvenience in that the air injection pressure must be adjusted to correspond to the weight of the glass when the weight of the glass to be floated is different. FIG. 1 is a schematic diagram illustrating an air floating device for protecting a substrate according to the present invention. FIG. 2 is a plan view illustrating an air floating device for protecting a substrate according to the present invention. FIG. 3 is a front view illustrating an air floating device for protecting a substrate according to the present invention. FIG. 4 is a plan view illustrating a floating air guide plate included in the floating air injection means of an air floating device for protecting a substrate according to the present invention. FIG. 5 is a side view illustrating a floating air injection means of an air floating device for protecting a substrate according to the present invention. FIG. 6 is a perspective view illustrating a floating air injection plate included in the floating air injection means