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KR-102961492-B1 - Substrate loading device with air floating method

KR102961492B1KR 102961492 B1KR102961492 B1KR 102961492B1KR-102961492-B1

Abstract

The present invention relates to a substrate loading device having an air floating method. It is configured such that a substrate fed through an input section in a substrate manufacturing process is air-floated, the floating substrate is aligned, and the aligned substrate is vacuum-adsorbed onto the upper surface of an air injection plate, after which the next process of the substrate can be performed. This configuration prevents scratches that may occur on the bottom surface of the substrate during all processes of substrate loading and enables more stable movement of the substrate to the next process by vacuum-adsorbing it using a vacuum suction member.

Inventors

  • 최병수

Assignees

  • 주식회사 디에스이엔티

Dates

Publication Date
20260507
Application Date
20251215

Claims (5)

  1. In a substrate loading device having an air floating method, A table (110) installed on one side of an input section (10) configured to allow a product (A) to be inserted; A transfer unit (120) installed on one side of the upper surface of the table (110) and configured to be able to move forward and backward toward the input unit (10); A clamp part (130) installed at the other end of a bracket (B) fixed to one end of the transfer unit (120) and configured to operate in response to the supply of pneumatic or hydraulic pressure to clamp a product (A) fed into the input part (10); A fixing member (140) having one end each fixedly provided at the front and rear ends of the upper surface of the table (110), and an air injection means (150) formed in a plate shape and fixedly seated on the upper surface of the fixing member (140), wherein air supplied via an air supply unit and a supply hose is injected toward the bottom side of the product (A) transported through the clamp unit (130) to enable the product (A) to float; Alignment means (160) installed on the other side of the upper surface of the table (110) and configured to align a floating product (A) through the air injection means (150); It includes a vacuum suction means (170) which is fixedly installed on the bottom surface of the air injection means (150) and connected to a vacuum generator via a hose, so as to vacuum suction a product (A) aligned by the alignment means (160) in response to the operation of the vacuum generator toward the upper surface of the air injection means (150). The air injection means (150) is formed in the shape of a plate, wherein a plurality of fixing holes (151a) for a guide plate are formed on the plate to be seated and fixed to the fixing member (140), and a plurality of fixing holes (151d) for vacuum suction are formed to be fixed to the vacuum suction means (170), wherein a plurality of fixing holes (151b) for coupling are formed at regular intervals on one side of the fixing holes (151a) for the guide plate, and a plurality of air guide holes (151c) for guiding air are formed on the plate between the fixing holes (151b), thereby providing an air guide plate (151); a plurality of air supply ports (152) are provided such that each end is connected to the air guide hole (151c) and the other end is connected to a supply hose connected to an air supply unit, so as to be positioned on the bottom surface of the air guide plate (151); and a silicone tube is interposed on the upper surface of the air guide plate (151) to prevent air leakage so as to be stacked. The air is characterized by being formed in a plate shape, wherein a plurality of fixing holes (153a) for an air injection plate are formed on the plate so as to be fixed via a plurality of bolts or screws to the fixing holes (151b) for coupling, and a plurality of air injection holes (153b) are formed at regular intervals in the transverse and longitudinal directions on the plate between the fixing holes (153a) for the air injection plate so as to be injected to float the product (A), and a plurality of air connection grooves (153c) are formed on the bottom surface so as to connect the air injection holes (153b) to each other so that air supplied through the fixing holes (151a) for the guide plate can be evenly injected toward the bottom side of the product (A); and a vortex forming member (154) is provided inside the air injection holes (153b) of the air injection plate (153) so that the injected air can be injected toward the bottom surface of the product (A) while forming a vortex. A substrate loading device having a floating method.
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  3. In paragraph 1, The above vacuum suction means (170) comprises a plurality of vacuum suction holes (171) formed on one side of an air injection hole (153b) formed in an air injection plate (153) of the air injection means (150), a plurality of vacuum suction guide holes (172) formed at regular intervals in the transverse and longitudinal directions on one side of the upper surface of the air guide plate (151), a plurality of vacuum suction connecting grooves (173) formed to include some of the plurality of vacuum suction holes (171) and to be bundled into a unit by including one of the vacuum suction guide holes (172) on the upper surface of the air guide plate (151), and an air injection plate (153) being overlapped and coupled to the upper surface of the air guide plate (151). A silicone tube is interposed on both sides of the lower surface of the air guide plate (151) to include the vacuum suction guide holes (172). A substrate loading device having an air floating method, characterized by comprising: a vacuum suction line connecting member (174) having a vacuum suction groove (174a) formed on the upper surface to be fixed in the lateral direction, a vacuum suction connecting hole (174b) formed on one or both sides of the bottom surface of the vacuum suction groove (174a), and a plurality of connecting member fixing holes (174c) formed at regular intervals on the front end to be fixed to the vacuum suction fixing hole (151d) through a plurality of fixing bolts or screws; and a vacuum suction connector (175) having one end fixed to the front or front and rear surfaces of the vacuum suction line connecting member (174) to be connected to the vacuum suction connecting hole (174b) respectively, and the other end configured to be connectable to a hose connected to a vacuum generator.
  4. In paragraph 1, A substrate loading device having an air floating method, characterized in that the air injection hole (153b) is composed of an air injection port (153b-1) formed inwardly from the upper surface of the air injection plate (153), an air expansion port (153b-2) that gradually expands from the air injection port (153b-1), and an air connection port (153b-3) that extends from the end of the air expansion port (153b-2) and is formed to be in communication with the air connection groove (153c), and is provided so that the vortex forming member (154) can be installed inside.
  5. In paragraph 4, A substrate loading device having an air floating method, wherein the above-mentioned vortex-forming member (154) is composed of a vortex-forming spiral groove (154a) formed on a part of the inner circumference of the air connector (153b-3), and a vortex-forming part (154c) having a screw groove (154c-1) formed on the outer circumference that is 1.2 to 3 times deeper than the depth of the vortex-forming spiral groove so as to form an air guide (154b) formed by screw coupling with the vortex-forming spiral groove (154a).

Description

Substrate loading device with air floating method The present invention relates to a substrate loading device having an air floating method, and more specifically, to a substrate loading device having an air floating method configured to float a substrate fed through an input section in a substrate manufacturing process with air, align the floating substrate, vacuum-adsorb the aligned substrate onto the upper surface of an air injection plate, and then allow the next process of the substrate to be performed, thereby enabling the prevention of scratches that may occur on the bottom surface of the substrate during all processes for substrate loading. The Automated Optical Inspection (AOI) system, which is commonly used in systems for inspecting glass, is an inspection device capable of handling various types of glass (Multi Model Glass) by detecting minute pattern defects in color filter glass at high speed using a precision camera and reproducing and storing the detected defects in real time. In addition, it is an inspection device featuring user-friendly software and capable of inline and stand-alone operation. In such general AOI systems, the color filter glass is transported using an air slide method. Upon examination, when a color filter glass is loaded onto a transfer table at the loading/unloading position of the transfer device by a loader arm, the color filter glass is scanned by multiple vision cameras installed on a camera mounting frame to inspect for pattern defects. Several vision cameras for inspecting the pattern of the color filter glass are installed in a camera installation frame, and the camera installation frame is installed on a frame support formed on a conveying device that conveys the color filter glass. A loader arm responsible for transporting and returning the color filter glass to the transfer device using an air slide method is positioned at the loading/unloading position of the transfer device, and the glass loading/unloading device supports the glass at the loading/unloading position of the transfer device. The loader arm moves horizontally left and right to transport color filter glass to the loading/unloading position of the glass transport device and to return it to the outside, and the glass loading/unloading device installed at the loading/unloading position of the color filter glass transport device moves vertically up and down by means of a lift pin. In the process of loading the color filter glass, when the color filter glass transported by the loader arm moves to the loading/unloading position, the color filter glass is placed on the color filter glass loading/unloading device. At this time, the lift pin of the glass loading/unloading device has a predetermined material applied to it to prevent scratches on the lower surface of the glass caused by contact with the lower surface of the color filter glass, or has a plurality of rubber contact protrusions attached to it. However, the above loading/unloading device has a problem in that scratches and contamination continue to occur on the part where the lower surface of the glass comes into contact during the loading/unloading of the color filter glass, and this causes a decrease in the production quality of the color filter pattern glass. Taking these points into consideration, a loading/unloading device and method using air floating has been proposed in Patent Publication No. 10-2006-0061873. Upon examination, a conventional loading/unloading device utilizing general air floating is a device for loading/unloading glass transported by a loader arm, characterized in that it includes an air floating through hole for air floating and an air supply passage for supplying air to the air floating through hole, a plurality of lift pins that contact the lower surface of the glass and support the glass, and a lift pin support means that supports the lower portion of the plurality of lift pins. However, the aforementioned conventional loading/unloading device using general air floating is configured so that air is injected only in a certain direction, that is, in a straight line, through the air floating through hole, so there is an inconvenience in that the air injection pressure must be adjusted to correspond to the weight of the glass when the weight of the glass to be floated is different. In addition, the aforementioned conventional loading/unloading device using general air floating has the disadvantage that accurate unloading is inevitably difficult because the glass is unloaded while in a floating state. FIG. 1 is a schematic diagram illustrating a substrate loading device having an air floating method according to the present invention. FIG. 2 is a plan view illustrating a substrate loading device having an air floating method according to the present invention. FIG. 3 is a front view illustrating a substrate loading device having an air floating method according to the present invention. FIG. 4 is a plan view illustrating