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KR-102961581-B1 - Blank jig apparatus for manufacturing crystal sensor and Deposition apparatus

KR102961581B1KR 102961581 B1KR102961581 B1KR 102961581B1KR-102961581-B1

Abstract

The present invention relates to a blank jig device for manufacturing a crystal sensor and a deposition device applying the same, wherein the blank, which is a substrate raw material for the crystal sensor, is rotated and rotated to perform an electrode deposition process, and the blank is inverted to perform an electrode deposition process on both sides of the blank, and the deposition device applying the same.

Inventors

  • 오승환
  • 박무근
  • 김번중

Assignees

  • 오투컴(주)

Dates

Publication Date
20260507
Application Date
20201029

Claims (13)

  1. A blank support means for supporting a blank, which is the substrate raw material of a crystal sensor; A rotational means for rotating a plurality of the above-mentioned blank support means; A rotation means for rotating the above-mentioned blank support means; and It includes a reversing means for reversing the above-mentioned blank support means, and While rotating and revolving the blank support means, the blank is inverted to enable electrode deposition on the upper and lower surfaces of the blank, and The above-mentioned inversion means is, A blank jig device for manufacturing a crystal sensor, characterized by comprising: a reversing shaft rotatably supported by the above-mentioned rotational means and connected to the blank support means on one side; a reversing handle connected to the other side of the reversing shaft; and a reversing handler that engages with the reversing handle to rotate the reversing handle.
  2. In Article 1, The above-mentioned orbital means is, Orbiting disc rotated by an orbiting motor; and It includes a plurality of orbiting brackets, each having one end connected to the orbiting disc and spaced at regular intervals along the inner circumference of the disc. A blank jig device for manufacturing a crystal sensor, characterized in that the rotational means is coupled to the other side of each of the plurality of orbital brackets.
  3. In Article 2, The above-mentioned rotational means is, A rotating motor supported by the other side of the above-mentioned orbital bracket; and It includes a rotating bracket, one side of which is connected to the rotating motor through the other side of the aforementioned rotating bracket, and A blank jig device for manufacturing a crystal sensor, characterized in that the inversion handle is coupled to the other side of the above-mentioned rotating bracket.
  4. A blank support means for supporting a blank, which is the substrate raw material of a crystal sensor; A rotational means for rotating a plurality of the above-mentioned blank support means; A rotation means for rotating the above-mentioned blank support means; and It includes a reversing means for reversing the above-mentioned blank support means, and While rotating and revolving the blank support means, the blank is inverted to enable electrode deposition on the upper and lower surfaces of the blank, and The above-mentioned orbital means is, Orbiting disc rotated by an orbiting motor; and It includes a plurality of orbiting brackets, each having one end connected to the orbiting disc and spaced at regular intervals along the inner circumference of the disc. The rotation means is coupled to the other side of each of the plurality of the above-mentioned orbital brackets, and The above-mentioned rotational means is, A fixed disc fixed to correspond to the center of the above-mentioned orbital disc, with teeth formed along the circumference; A rotating gear shaft supported by the other side of the above-mentioned orbital bracket; A rotating gear mounted on one side of the above rotating gear shaft and meshing with the teeth of the above fixed disc; and It includes a rotating bracket, one end of which is connected to the other end of the above-mentioned rotating gear shaft, and A blank jig device for manufacturing a crystal sensor, characterized in that the inversion means is coupled to the other side of the above-mentioned rotating bracket.
  5. In Article 4, It further includes a universal joint, one end of which is connected to the other side of the above gear shaft, and A blank jig device for manufacturing a crystal sensor, characterized in that one side of a rotating bracket is connected to the other side of the above-mentioned universal joint.
  6. In Article 5, The above-mentioned inversion means is, A reversing motor supported by the other side of the above-mentioned rotation bracket; and A blank jig device for manufacturing a crystal sensor, characterized by including a reversing shaft connected to the reversing motor through the other side of the aforementioned rotating bracket and having the blank support means connected to its end.
  7. In Article 5, The above-mentioned inversion means is, An inversion shaft that is rotatably supported by the other side of the above-mentioned rotation bracket and has the blank support means connected to one side; A reversing handle connected to the other side of the above reversing axis; and A blank jig device for manufacturing a crystal sensor, characterized by including a reversal handler that engages with the reversal handle and rotates the reversal handle.
  8. In Article 1 or Article 7, The above-mentioned inversion handle is, It includes a reversing wing protruding radially corresponding to the center of the above reversing axis, and The above inversion handler is, A blank jig device for manufacturing a crystal sensor, characterized by including a reversal projection and a reversal groove that are fixed at a set position on the orbital circumference of the above-mentioned orbital means and engage with the reversal wing to rotate the reversal handle.
  9. In Article 4, The fixed disc of the above-mentioned rotational means is, It includes a toothed rotational region along a portion of the circumference and a toothless rotational stationary region along the remainder, The above-mentioned inversion means is, An inversion shaft that is rotatably supported by the other side of the above-mentioned rotation bracket and has the blank support means connected to one side; An inversion handle connected to the other side of the above inversion axis; A reversal handler fixedly positioned in correspondence with the rotational stop region within the orbital circumference of the above-mentioned orbital means, and engaging with the reversal handle to rotate the reversal handle; A guide rail mounted corresponding to the above-mentioned rotational stop area; and A blank jig device for manufacturing a crystal sensor, characterized by including a state maintaining bar that maintains the stationary state of the rotation bracket through the guide rail.
  10. In Article 1 or Article 4, The above blank support means is, A blank support plate that holds the outer perimeter of a plurality of blanks arranged and seated, such that the upper and lower surfaces of the blanks are open; and A blank jig device for manufacturing a crystal sensor, characterized by including a plate support member that supports the blank support plate.
  11. A jig device for depositing a crystal sensor according to claim 1 or 4; and The above jig device includes a deposition chamber disposed therein, A deposition apparatus characterized by performing electrode deposition on both sides of a blank.
  12. In Article 11, The above jig device is, It is positioned in the upper space of the above deposition chamber, and A deposition apparatus characterized by a deposition source being supplied from the lower part of the internal space of the deposition chamber.
  13. In Article 11, The above jig device is, It is positioned in the lower space of the above deposition chamber, and A deposition apparatus characterized by a deposition source being supplied from the upper part of the internal space of the deposition chamber.

Description

Blank jig apparatus for manufacturing crystal sensor and deposition apparatus applying the same The present invention relates to a blank jig device for manufacturing a crystal sensor and a deposition device applying the same. More specifically, the invention relates to a jig device capable of performing an electrode deposition process by rotating and turning a blank, which is a substrate raw material for a crystal sensor, and performing an electrode deposition process on both sides of the blank by inverting the blank, and a deposition device applying the same. A quartz crystal oscillator is a piezoelectric device with a structure in which metal thin film electrodes are formed at both ends of a piece cut from a crystal into a very thin plate shape, and when an alternating electric field is applied to the metal thin film electrodes, it exhibits the property of resonating vibration at a constant frequency. A Quartz Crystal Microbalance (QCM) has been proposed that utilizes these characteristics to detect increases or decreases in mass and measure minute mass changes when trace amounts of material at the nanogram level are adsorbed on the surface of a metal thin film, thereby allowing it to be used as a microbalance. Such QCMs are used in various technological fields; in particular, by placing a quartz crystal oscillator in the internal space of a thin film deposition equipment chamber and detecting minute mass changes according to the degree of deposition of the deposition material on the surface of the quartz crystal oscillator during the thin film deposition process, it becomes possible to detect the thickness and deposition rate of the deposited thin film. The quartz crystal sensor used as the crystal oscillator in the QCM is manufactured by processing a thin quartz blank and forming a metal thin-film electrode on its surface. The manufacturing process of QCM involves performing electrode deposition by rotating multiple support jigs on which the blank is mounted to form electrodes on both sides of a circular blank; to achieve double-sided deposition, the support jigs are inverted at a set interval. This method presents a problem of non-uniform deposition compared to the conventional method using a planetarium. In particular, the step coverage is poor because the surface roughness of the blank itself is more severe than that of general semiconductor substrates or lens glass, and this needs to be improved. FIG. 1 illustrates a first embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 2 illustrates the schematic configuration of an orbiting means in a first embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 3 illustrates the schematic configuration of a rotation means and an inversion means in a first embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, FIG. 4 illustrates the schematic configuration of a blank support means in a first embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 5 illustrates a second embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 6 illustrates the schematic configuration of an inversion means in a second embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 7 illustrates the operation of an inversion means in a second embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 8 illustrates a third embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, FIGS. 9 and 10 illustrate the schematic configuration of the orbiting means and the rotating means in the third embodiment of the blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 11 illustrates the schematic configuration of an inversion means in a third embodiment of a blank jig device for manufacturing a crystal sensor according to the present invention, and FIG. 12 illustrates the schematic configuration of a first embodiment of a deposition apparatus according to the present invention, and FIG. 13 illustrates the schematic configuration of a second embodiment of a deposition apparatus according to the present invention. In order to explain the present invention, the operational advantages of the present invention, and the objectives achieved by the implementation of the present invention, preferred embodiments of the present invention are illustrated below and examined with reference thereto. First, the terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention; singular expressions may include plural expressions unless the context clearly indicates otherwise. Furthermo