KR-102961765-B1 - MAGNET ASSEMBLY AND DEPOSITION APPARATUS INCLUDING THE SAME

Abstract

A magnet assembly according to one embodiment includes a yoke plate and a plurality of magnets fixed to the yoke plate. Each magnet includes a first surface facing the yoke plate, a second surface facing in a direction opposite to the first surface, and a concave groove extending from the second surface.

Inventors

• 홍재민
• 류종혁
• 진승민

Assignees

• 삼성디스플레이 주식회사

Dates

Publication Date

20260507

Application Date

20210309

Claims (20)

1. yoke plate, and A plurality of magnets fixed to the above yoke plate Includes, Each magnet includes a first surface facing the yoke plate, a second surface facing in the opposite direction to the first surface, and a concave groove extending from the second surface. A magnet assembly in which the magnet is a unitary body and the groove does not penetrate the magnet in the thickness direction.
2. In Paragraph 1, The above groove is a magnet assembly that extends along the length of the magnet to a predetermined depth from the above second surface.
3. In paragraph 1, The above groove is a magnet assembly formed along the length of the magnet in the central part of the above second surface.
4. delete
5. In Paragraph 1, The above groove is a magnet assembly having a cross-sectional shape of a square, triangular, semicircular, or semi-elliptical.
6. In paragraph 1, The above magnet is a magnet assembly having a U-shaped cross-sectional shape.
7. In Paragraph 1, A magnet assembly in which the plurality of magnets are spaced apart in a first direction and arranged to be in contact in a second direction intersecting the first direction.
8. In Paragraph 7, A magnet assembly in which the second-sided polarity of the plurality of magnets alternates in the first direction and is the same in the second direction.
9. In Paragraph 7, The yoke plate comprises a plurality of grooves extending along the second direction, and a magnet assembly having two or more magnets disposed in each groove of the yoke plate.
10. In Paragraph 1, A magnet assembly in which the first surface of the magnet is a flat or curved surface.
11. A deposition source that sprays deposition material, A mask assembly positioned on the above deposition source, and A magnet assembly positioned above the mask assembly and comprising a yoke plate and a plurality of magnets fixed to the yoke plate Includes, Each magnet includes a first surface facing the yoke plate, a second surface facing the mask assembly, and a concave groove extending from the second surface. A deposition apparatus in which the magnet is a unitary body and the groove does not penetrate the magnet in the thickness direction.
12. In Paragraph 11, The above-mentioned groove is a deposition apparatus that extends along the length of the magnet from the second surface to a predetermined depth in the central part of the second surface.
13. delete
14. In Paragraph 11, The above-mentioned groove is a deposition device having a cross-sectional shape of a square, triangular, semicircular, or semi-elliptical.
15. In Paragraph 11, The above plurality of magnets are a deposition apparatus protruding from the yoke plate toward the mask assembly.
16. In Paragraph 11, A deposition apparatus in which the plurality of magnets are spaced apart in a first direction and arranged to be in contact in a second direction intersecting the first direction.
17. In Paragraph 16, A deposition apparatus in which the polarity of the second surface side of the plurality of magnets alternates in the first direction and is the same in the second direction.
18. In Paragraph 16, A deposition apparatus in which the yoke plate includes a plurality of grooves extending along the second direction, and two or more magnets are disposed in each groove of the yoke plate.
19. In Paragraph 16, The above mask assembly comprises a plurality of mask sticks arranged in the second direction, and each mask stick is a deposition device extending along the first direction.
20. In Paragraph 11, A deposition apparatus further comprising a cool plate located between the mask assembly and the magnet assembly.

Description

Magnet assembly and deposition apparatus including the same The present invention relates to a magnet assembly and a deposition apparatus including the same. A light-emitting display device is used as a device for displaying images. A light-emitting display device can express an image through a combination of pixels, and pixels can be implemented by light-emitting diodes. A light-emitting diode may include an anode, a cathode, and a light-emitting layer between them. The light-emitting layer of the light-emitting diode may be formed by a deposition method. For example, a substrate on which light-emitting layers are to be formed may be aligned with a mask having a predetermined pattern, and the material of the light-emitting layers may be passed through the pattern of the mask to deposit light-emitting layers corresponding to the mask pattern onto the substrate. A magnet assembly in which magnets are arranged on a yoke plate may be used to adhere the mask and the substrate, and the substrate may be placed between the mask and the magnet assembly. The mask and the substrate can be adhered to with a predetermined adhesion force by the magnetic force of the magnets. FIG. 1 is a schematic diagram showing a deposition apparatus according to one embodiment. FIG. 2 is a perspective view of a mask assembly according to one embodiment. FIG. 3 is a perspective view of a magnet assembly according to one embodiment. FIG. 4 is a cross-sectional view of a magnet assembly according to one embodiment. FIG. 5 is a perspective view of a magnet according to one embodiment. Figure 6 is a graph showing the adhesion force of a mask stick in a deposition apparatus according to a comparative example and one embodiment. FIG. 7 is a cross-sectional view of a magnet of a magnet assembly according to some embodiments. FIG. 8 is a cross-sectional view schematically showing the laminated structure of a display panel according to one embodiment. With reference to the attached drawings, embodiments are described in detail so that those skilled in the art can easily implement the present invention. The size and thickness of each component shown in the drawing are arbitrarily indicated for the convenience of explanation. When a part such as a layer, membrane, region, or plate is said to be "on" or "on" another part, this includes not only cases where it is "directly on" another composition, but also cases where there is another composition in between. Conversely, when a composition is said to be "directly on" another composition, it means that there is no other composition in between. In the specification, this means that a part may include additional components unless otherwise stated that it "includes" a certain component. In the specification, "connected" does not mean only cases where two or more components are directly connected, but may include cases where two or more components are indirectly connected through other components, cases where they are physically or electrically connected, as well as cases where each part, which is substantially one and referred to by different names according to location or function, is connected to one another. In the drawing, the symbols "x," "y," and "z" are used to indicate directions, where "x" is the first direction, "y" is the second direction perpendicular to the first direction, and "z" is the third direction perpendicular to both the first and second directions. The first direction (x), the second direction (y), and the third direction (z) may correspond to the horizontal direction, the vertical direction, and the thickness direction of the display device, respectively. Unless otherwise specified in the specification, "overlap" means overlap in the plan view and overlap in the third direction (z). FIG. 1 is a schematic diagram showing a deposition apparatus according to one embodiment. Referring to FIG. 1, a deposition apparatus according to one embodiment may include a chamber (10), a deposition source (20), a holder (30), a mask assembly (40), a cool plate (50), and a magnet assembly (60). The chamber (10) may be a vacuum chamber, and the deposition source (20), the holder (30), the mask assembly (40), the cool plate (50), and the magnet assembly (60) may be located within the chamber (10). Depositing a deposition material onto a mother substrate (MS) (or target substrate) for manufacturing a display panel, etc., may be performed within the chamber (10) of such deposition apparatus, and the mother substrate (MS) may be placed between the mask assembly (40) and the cool plate (50). The deposition source (20) can store a deposition material (e.g., a material for forming a light-emitting layer of a light-emitting display device) and spray the deposition material toward a substrate (MS) that is the target of deposition. The mask assembly (40) can be detachably fixed to a holder (30) over a deposition source (20). A source substrate (MS) can be positioned on the mask assembly (40) so as to be alig