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KR-102962247-B1 - Apparatus for Automatically Supplying Liquid Chemical from a Container

KR102962247B1KR 102962247 B1KR102962247 B1KR 102962247B1KR-102962247-B1

Abstract

The present invention relates to an automatic supply device for liquid chemicals contained in a container, wherein the chemical is supplied to a mass production facility in the form of a plastic jerrycan, known as a jerrycan, used in semiconductor and display manufacturers that use chemicals, and the opening of the opening/closing cap and the transfer of the chemical are performed automatically after the container is placed.

Inventors

  • 김영태

Assignees

  • 주식회사 라온큐텍

Dates

Publication Date
20260511
Application Date
20250919

Claims (5)

  1. In an automatic liquid chemical supply device contained in a container (200) that contains a chemical and is equipped with an outlet at the top and an opening/closing cap (201) that covers and seals the outlet, A mounting part (110) in which the above container (200) is mounted on the upper side and a fixing bracket (111) for fixing the mounted container is provided; A transfer table (120) that slides the mounting portion (110) horizontally between a first position for mounting or discharging a container and a second position for transferring a chemical; A cap opening unit (150) having a gripper (151) installed at the second position and supporting the opening/closing cap (201) by gripping it downward, a rotating part (152) that rotates the gripper (151) to open the opening/closing cap (201), and a first driving part (153) that adjusts the up, down, left, and right positions of the gripper (151); A discharge unit (160) having a tubular transfer nozzle (161) inserted into the discharge port, a second drive unit (162) for adjusting the upper, lower, left, and right positions of the transfer nozzle (161), and a transfer pump (163) communicating with the transfer nozzle (161) to suck in and transfer chemicals contained in a container; and A liquid chemical automatic supply device characterized by comprising: a tilting member (130) that supports the lower part of the mounting member (110) at the second position, and is provided with a rotating shaft (131) that supports one lower part of the mounting member (110) by traversing it laterally, and a tilting cylinder (132) that supports the other central lower part of the mounting member (110) so that its vertical length can be adjusted, thereby causing the mounting member (110) to tilt to one side or the other through a change in the length of the tilting cylinder (132).
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  3. In paragraph 1, The above mounting portion (110) further includes a support member (113) that crosses the lower side laterally, and A liquid chemical automatic supply device further comprising: a position fixing part (140) which prevents movement of the mounting part (110) through contact between the support pin (141) and the support body (113), by having a support pin (141) located on the lower side of the mounting part at the second position and rotating in a horizontal and vertical state, and an actuator (142) that rotates the support pin (141).
  4. In paragraph 1, It is installed adjacent to the above discharge section (160), A liquid chemical automatic supply device further comprising: a washing tank (171) that is open to the upper side and into which the transfer nozzle (161) is inserted, and to which a drain valve (173) and a drain pipe (172) for discharging internal cleaning liquid are connected to the lower side; and a washing unit (170) installed at the top of the washing tank (171) and having an air injection unit (180) and a cleaning liquid injection unit (190) that respectively spray air and cleaning liquid toward the inserted transfer nozzle (161).
  5. In paragraph 4, The above air injection unit (180) and cleaning liquid injection unit (190) are, A liquid chemical automatic supply device characterized by comprising: a first through hole (182) formed in the center through which the transfer nozzle passes in the vertical direction, with an inclined portion (183) in which the inner diameter narrows from the upper side to the lower side; an upper body (181) having supply holes (184) formed on both sides through which air or cleaning liquid is supplied; a lower body (186) coupled to the lower side of the upper body (181) having a second through hole (187) formed in the center corresponding to the first through hole (182); and a passage (188) communicating with the supply holes and formed along the contact portion between the upper body (181) and the lower body (186), which supplies and sprays the air or cleaning liquid supplied from the supply holes toward the transfer nozzle (161).

Description

Apparatus for Automatically Supplying Liquid Chemical from a Container The present invention relates to a liquid chemical supply device, and more specifically, to an automatic liquid chemical supply device contained in a container that supplies chemicals used in semiconductor and display manufacturers, etc., which are received in a plastic jerrycan-shaped container known as a jerrycan, to mass production facilities, wherein the opening of the opening/closing cap and the transfer process of the chemical are performed automatically after the container is placed. In various chemical industries, including semiconductor substrate manufacturing processes, the safe and efficient handling of chemicals is very important. These medicines are stored and supplied in various containers, including drums, while relatively small volumes are supplied in plastic jerrycans, also known as large containers. In order to use chemicals supplied in this form in the process, it is generally required to open the container cap, insert the suction tube, and transfer the chemicals to the equipment using a pump. However, there was a constant risk of exposure to hazardous substances during the process of workers manually opening the cap and transferring the chemicals, and there was a problem of reduced work efficiency in processes requiring large quantities of chemicals due to the repetitive arrangement and opening of containers and the insertion and removal of suction tubes. In addition, the process of tilting the container or lifting it to pour out the chemical contained in the container during pumping was performed manually, which caused inconvenience and posed a risk of chemical leakage or accidents due to worker error. In order to solve these conventional problems, the applicant filed a patent application No. 10-2023-0013591 (hereinafter referred to as 'prior art') on February 1, 2023, for a chemical supply device capable of automatically discharging a chemical filled in a chemical container and supplying it to a required location. A chemical supply device according to the prior art comprises: a mounting portion on which a chemical container filled with chemical is mounted; a cap opening portion installed on the upper side of the mounting portion and opening a cap that opens and closes a chemical discharge port provided on the upper side of the chemical container mounted on the mounting portion; and a chemical discharge portion installed adjacent to the cap opening portion and discharging the chemical through the chemical discharge port. However, the aforementioned prior art is based on drum containers, which imposes limitations on chemicals supplied in relatively small container forms such as jerrycans; furthermore, given that containers are generally made of plastic, there was a concern that deformation of the container could disrupt automated operations. FIG. 1 is a perspective view of a chemical automatic supply device and a transfer pump according to an embodiment, FIG. 2 is a drawing showing the structure of a mounting part according to an embodiment of the present invention. FIG. 3 is a drawing showing the structure of a fixing bracket according to an embodiment of the present invention. FIG. 4 is a drawing showing the structure of a transfer table according to an embodiment of the present invention. FIG. 5 is a drawing showing the structure of a tilted portion according to an embodiment of the present invention, FIG. 6 is an operating state diagram of a tilting part according to an embodiment of the present invention, FIG. 7 is a drawing showing the structure of a position fixing part according to an embodiment of the present invention. FIG. 8 is an operating state diagram of a position fixing part according to an embodiment of the present invention, FIG. 9 is a perspective view of a cap opening and a discharge portion according to an embodiment of the present invention. FIG. 10 is a side view of a cap opening and a discharge portion according to an embodiment of the present invention, FIG. 11 is an operating state diagram of a cap opening part according to an embodiment of the present invention, FIG. 12 is a drawing showing the structure of a cleaning unit according to an embodiment of the present invention. FIG. 13 is an exploded view of a cleaning unit according to an embodiment of the present invention, FIG. 14 is a cross-sectional view of an air injection unit according to an embodiment of the present invention, FIG. 15 is an operating state diagram of an air injection unit and a cleaning liquid injection unit according to an embodiment of the present invention. The structure of an automatic liquid chemical supply device contained in a container is described in detail below with reference to the attached drawings. FIG. 1 is a perspective view of a chemical automatic supply device and a transfer pump according to an embodiment. The chemical automatic supply device according to the present invention is a device that automa