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KR-102962296-B1 - apparatus for sensing humidity

KR102962296B1KR 102962296 B1KR102962296 B1KR 102962296B1KR-102962296-B1

Abstract

The present invention discloses a humidity sensor device. The device comprises a substrate, an antenna on the substrate, an RFID chip connected to the antenna, a capacitor chip connected to the RFID chip, and a humidity sensor connected to the RFID chip. The humidity sensor may include a device substrate, a moisture-sensitive film on the lower surface of the device substrate, and electrodes on the upper surface of the device substrate. The device substrate may include a flexible polymer film.

Inventors

  • 양우석
  • 홍성훈

Assignees

  • 한국전자통신연구원

Dates

Publication Date
20260508
Application Date
20220621
Priority Date
20220329

Claims (10)

  1. Substrate; Antenna on the above substrate; RFID chip connected to the above antenna; A capacitor chip connected to the RFID chip above; and Includes a humidity sensor connected to the RFID chip, The above humidity sensor is: Device substrate; A moisture-sensitive film on the lower surface of the above-mentioned device substrate; and The device substrate includes electrodes on the upper surface, The above-described element substrate is a humidity sensor device comprising a flexible polymer film.
  2. In Article 1, The humidity sensor above is a humidity sensor device further comprising a lower superhydrophobic SAM provided on the lower surface of the humidity-sensitive film.
  3. In Article 2, The above lower superhydrophobic SAM is a humidity sensor device comprising HDFS (heptadecauoro-1,1,2,2-tetrahydrodecyl trichlorosilane), DMOCS (dimethyl-n-octadecilcholorsilane), OTS (octadecyltrichlorosilane), or FDTS (perfluorodecyltrichlorosilane).
  4. In Article 1, The humidity sensor device further comprises an upper superhydrophobic SAM provided on the upper surface of the element substrate exposed between the electrodes and the above humidity sensor.
  5. In Article 1, The above electrodes are a humidity sensor device having a spacing of 75 μm to 125 μm.
  6. In Article 1, A humidity sensor device in which each of the above electrodes has a thickness of 10 μm to 40 μm.
  7. In Article 1, The above flexible polymer film is a humidity sensor device comprising a polyimide film.
  8. In Article 1, The above-described element substrate is a humidity sensor device having a thickness of 10 μm to 40 μm.
  9. In Article 1, The above capacitor chip is a humidity sensor device having a capacitance of 3 pF to 15 pF.
  10. In Article 1, A humidity sensor device further comprising a passivation layer provided on the substrate, the antenna, the RFID chip, and the capacitor chip.

Description

humidity sensor device {apparatus for sensing humidity} The present invention relates to a sensor device, and more specifically, to a humidity sensor device. Humidity sensors are classified into resistive and capacitive types, in which resistance changes as the moisture-sensitive material absorbs water vapor from the surrounding environment. Capacitive types offer the advantages of superior linearity over a wider measurement range and lower power consumption compared to resistive types. Meanwhile, RFID humidity sensors are a type of wireless sensor that simultaneously transmits the ID of the attached object and the relative humidity of the surrounding environment. Because capacitive humidity sensors consume less power than resistive types, they are more suitable for RFID sensors where power supply is extremely limited. FIG. 1 is a plan view showing an example of a humidity sensor device according to the concept of the present invention. Figure 2 is a cross-sectional view showing an example of the substrate, capacitor chip, and humidity sensor of Figure 1. Figure 3 is a cross-sectional view showing an example of the substrate and humidity sensor of Figure 1. Figure 4 is a plan view showing an example of the humidity sensor of Figure 1. Figure 5 is a cross-sectional view taken along line II' of Figure 4. Figure 6 is a circuit diagram showing the humidity sensors of Figures 4 and 5. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The advantages and features of the present invention, and the methods for achieving them, will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in different forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed content is thorough and complete and to ensure that the spirit of the present invention is sufficiently conveyed to those skilled in the art, and the present invention is defined only by the scope of the claims. Throughout the entire specification, the same reference numerals refer to the same components. The terms used herein are for the purpose of describing embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. As used herein, "comprises" and/or "comprising" do not exclude the presence or addition of one or more other components, steps, actions, and/or elements to the mentioned components, steps, actions, and/or elements. As they are based on preferred embodiments, the reference numerals presented in the order of description are not necessarily limited to that order. FIG. 1 shows an example of a humidity sensor device (100) according to the concept of the present invention. Referring to FIG. 1, the humidity sensor device (100) of the present invention may include an RFID humidity sensor device. According to one example, the humidity sensor device (100) of the present invention may include a substrate (10), an antenna (20), an RFID chip (30), a capacitor chip (40), and a humidity sensor (50). The substrate (10) can mount an antenna (20), an RFID chip (30), a capacitor chip (40), and a humidity sensor (50). For example, the substrate (10) may have a thickness of about 25 μm to about 75 μm. The substrate (10) may include a printed circuit board. Additionally, the substrate (10) may include polyimide, but the present invention is not limited thereto. The antenna (20), the RFID chip (30), the capacitor chip (40), and the humidity sensor (50) may be electrically connected by bonding pads and bonding wires on the substrate (10). The antenna (20) may be placed on the upper surface or inside the substrate (10). The antenna (20) may be arranged symmetrically along both edges of the substrate (10). For example, the antenna (20) may comprise a metal of aluminum or copper. An RFID chip (30) may be provided on the center of the substrate (10). The RFID chip (30) may be connected to an antenna (20). The RFID chip (30) may transmit a humidity detection signal via a short-range wireless communication method. A capacitor chip (40) can be connected to one side of an RFID chip (30). The capacitor chip (40) can store power. The capacitor chip (40) can provide a constant capacitance to the RFID chip (30) that does not change according to atmospheric humidity. For example, the capacitor chip (40) can have a capacitance of about 3 pF to about 15 pF. A humidity sensor (50) may be connected to an RFID chip (30) adjacent to a capacitor chip (40). The humidity sensor (50) may detect humidity in the atmosphere and generate a humidity signal. According to one example, the humidity sensor (50) may include a capacitive humidity sensor. The humidity sensor (50) may detect humidity from 0 to about 100%. More sp