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KR-102962313-B1 - CHEMICAL LIQUID MEASURING QUANTITATION JIG AND SUBSTRATE TREATING UNIT

KR102962313B1KR 102962313 B1KR102962313 B1KR 102962313B1KR-102962313-B1

Abstract

The liquid quantity measuring jig of the present invention may include a base mounted on a spin head; a quantity measuring beaker provided on the base and containing a liquid discharged from a nozzle; and a drain portion for draining the liquid contained in the beaker after measuring the quantity of the liquid in the quantity measuring beaker.

Inventors

  • 김하늘
  • 유창수

Assignees

  • 세메스 주식회사

Dates

Publication Date
20260511
Application Date
20200813

Claims (14)

  1. Regarding the drug solution quantitative measurement jig: Base that rests on the spin head; A quantitative measuring beaker provided on the above base and containing the liquid medicine discharged from the nozzle; and It includes a drain portion for draining the liquid medicine contained in the beaker after measuring the quantity of the liquid medicine in the quantitative measuring beaker; The above drain part A drain port connected to the above quantitative measurement beaker; An opening/closing member installed on the above drain port; and A liquid quantitative measuring jig comprising an operating part that opens the opening/closing member by the chucking operation of the spin head.
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  4. In Article 1, The above quantitative measurement beaker is A drug solution quantitative measurement jig further including an overflow line for draining the overflowing drug solution.
  5. In Article 1, The above quantitative measurement beaker is Multiple beakers; A measuring jig for quantitative measurement of a drug solution including a connecting portion for transferring the drug solution between the plurality of beakers.
  6. In Article 5, The above plurality of beakers A first beaker that holds the liquid medicine discharged from the above nozzle and stores a first amount of the liquid medicine; A second beaker in which a medicinal solution is supplied from the first beaker through the above connection and a second amount of medicinal solution is stored; and A measuring jig for a drug solution quantity, comprising a third beaker in which a drug solution is supplied from the second beaker through the above connection and a third amount of drug solution is stored.
  7. In Article 6, The above plurality of beakers A measuring jig for drug solution with different quantitative values.
  8. In Article 5 or 6, The above drain part A drain port connected to each of the plurality of beakers above; An opening/closing member installed on the above drain port; and A liquid quantitative measuring jig comprising an operating part that opens the opening/closing member by the chucking operation of the spin head.
  9. In Article 6, The above third beaker is A drug solution quantitative measurement jig further including an overflow line for draining the overflowing drug solution.
  10. In a substrate processing device: Rotatable spin head; A cup provided to surround the spin head; and It includes a drug solution quantity measuring jig that is seated on the spin head and capable of measuring whether the drug solution discharged from the nozzle is quantitatively measured; The above drug solution quantitative measurement jig A base that is seated on the spin head above; A quantitative measuring beaker provided on the above base and containing the liquid medicine discharged from the nozzle; and It includes a drain portion for draining the liquid medicine contained in the beaker after measuring the quantity of the liquid medicine in the quantitative measuring beaker; The above drain part A drain port connected to the above quantitative measurement beaker; An opening/closing member installed on the above drain port; and A substrate processing device comprising an operating part that opens the opening/closing member by the chucking operation of the spin head.
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  12. In Article 10, The above quantitative measurement beaker is A substrate processing device further comprising an overflow line for draining an overflowing chemical solution.
  13. In Article 10, The above quantitative measurement beaker is A first beaker for holding the liquid medicine discharged from the above nozzle; A second beaker for holding the liquid medicine that overflows from the first beaker; It includes a third beaker for holding the liquid medicine that overflows from the second beaker, and The first to third beakers above are A substrate processing device in which different quantities are stored.
  14. In Article 13, The above third beaker is A substrate processing device further comprising an overflow line for draining the overflowing liquid from the base.

Description

Chemical Liquid Quantification Jig and Substrate Treatment Unit The present invention relates to a jig for measuring the quantitative amount of a chemical solution used in substrate processing. Generally, the manufacturing process of integrated circuit devices, such as semiconductor devices, includes a cleaning process to remove impurities generated by various sources of contamination, including particles generated during the process, contamination from equipment, and contamination by reactants or products during the process. In particular, as integrated circuits become miniaturized and devices become ultra-highly integrated, very small contaminants of about 0.1㎛, which were not considered important in the past, are now having a significant impact on product performance. Consequently, the importance of cleaning processes for removing contaminants continues to increase. Therefore, in order to maintain the surface of the substrate, where multiple processes are performed, in a clean state, a cleaning process is performed before and/or after each process. Accordingly, the cleaning process is repeated to complete the integrated circuit device, and thus the cleaning process accounts for about 30 to 40 percent of the total manufacturing process. In addition, as design rules become more miniaturized, the proportion of the cleaning process in the total process is gradually increasing. Meanwhile, the cleaning device used in the cleaning process performs a cleaning process in which impurities remaining on the substrate are removed by spraying chemicals, and a rinsing process in which chemicals are removed by spraying a rinsing liquid (ultrapure water) using a fixed nozzle to remove the chemicals used in the cleaning process. In such a substrate cleaning device, the processing liquid needs to be supplied at a specific flow rate required for substrate processing. For this reason, the substrate cleaning device is equipped with a flow meter in the supply path of the processing liquid, and based on the measurement results of this flow meter, the supply of the processing liquid is controlled so that the processing liquid is stably supplied at the aforementioned specific flow rate. However, a method is required to accurately measure whether the processing solution is supplied to the substrate at the precise flow rate. FIG. 1 is a perspective view showing a liquid quantity measurement jig according to one embodiment of the present invention. Figure 2 is a cross-sectional view of the drug solution quantitative measurement jig shown in Figure 1. Figure 3 is a plan view of the drug solution quantitative measurement jig shown in Figure 1. FIG. 4 is a schematic plan view of the substrate processing facility of the present invention. Figure 5 is a plan view of the substrate processing apparatus of Figure 4. Figure 6 is a cross-sectional view of the substrate processing apparatus of Figure 4. Figure 7 is a diagram illustrating the process of measuring the quantity of a drug solution using a drug solution measuring jig mounted on a spin head. Figure 8a is a diagram showing the un-chucking state of the chucking pin. Figure 8b is a diagram showing the chucking state of the chucking pin. FIG. 9 is a drawing showing a drug solution quantitative measurement jig according to another embodiment of the present invention. Other advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Unless otherwise defined, all terms used herein (including technical or scientific terms) have the same meaning as generally accepted by the general art to which this invention pertains. Terms defined by general dictionaries may be interpreted as having the same meaning as they do in the relevant art and/or in the text of this application, and will not be conceptualized or interpreted overly formally, even if they are not explicitly defined herein. The terms used herein are for describing embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. As used in this specification, 'comprising' and/or various conjugations of this verb, e.g., 'comprising', 'comprising', 'comprising', 'comprising', etc., do not exclude the presence or addition of one or more other compositions, components, elements, steps, actions, and/or elements to the mentioned compositions, components, elements, steps, actions, and/or elements. In this specification, the ter