KR-102962320-B1 - HOLDING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

KR102962320B1KR 102962320 B1KR102962320 B1KR 102962320B1KR-102962320-B1

Abstract

A holding support device having a flat surface on its outer circumference, comprising a tube including a contact surface that contacts the flat surface, a first elastic member that presses the optical element in the direction of the optical axis of the optical element, and a second elastic member that presses the flat surface on the contact surface.

Inventors

아오키 가츠히사

Assignees

캐논 가부시끼가이샤

Dates

Publication Date: 20260508
Application Date: 20230703
Priority Date: 20220712

Claims (13)

It is a holding support device that holds and supports an optical element having a flat surface on its outer periphery, and A barrel including a contact surface that contacts the above plane, and A first elastic member that compresses the optical element in the direction of the optical axis of the optical element, and A retaining support device characterized by having a second elastic member that presses the plane in a direction perpendicular to the optical axis direction at the abutting surface.
In paragraph 1, A holding support device characterized in that the compressive force of the second elastic member against the optical element is stronger than the frictional force of the first elastic member against the optical element, and the compressive force of the first elastic member against the optical element is stronger than the frictional force of the second elastic member against the optical element.
In paragraph 1, A holding support device characterized by having an annular spacer member disposed between the optical element and the first elastic member.
In paragraph 1, A retaining support device characterized by pressing the plane with a plurality of the second elastic members.
In paragraph 1, The above optical element further has a second plane different from the above plane, and The above-mentioned barrel is, It further includes a second contact surface that is in contact with the second plane and is different from the contact surface, and A retaining support device characterized by further having a third elastic member disposed in a through hole provided in the second contact surface and compressing the second plane.
In paragraph 5, A holding support device characterized in that the compressive force on the optical element by the third elastic member is stronger than the frictional force on the optical element by the first elastic member and the second elastic member, and the compressive force on the optical element by the first elastic member is stronger than the frictional force on the optical element by the second elastic member and the third elastic member, and the compressive force on the optical element by the second elastic member is stronger than the frictional force on the optical element by the first elastic member and the third elastic member.
In paragraph 1, A retaining support device characterized in that the first elastic member is a plate spring.
In paragraph 1, A retaining support device characterized in that the second elastic member is a plunger.
In paragraph 1, The above-described holding support device is a holding support device characterized by holding and supporting an optical filter having a light-blocking portion.
In paragraph 1, A holding support device characterized in that the above-mentioned contact surface is a surface that determines the position in an angular direction centered on the optical axis of the optical element.
In paragraph 1, The above optical element further includes a curved surface on its outer circumference, and A retaining support device characterized in that the above-described barrel further includes a surface that abuts the above-described curved surface.
It is a lithography device that forms a pattern on a substrate, An illumination optical system that illuminates a mask having a pattern corresponding to a pattern to be formed on the substrate, and It includes a retaining support device, The above-mentioned lighting optical system includes an optical element, and A lithography apparatus characterized in that the above-mentioned holding support device comprises a holding support device described in any one of claims 1 to 11 for holding and supporting the optical element.
A forming process for forming a pattern on a substrate using a lithography apparatus described in paragraph 12, and The above forming process includes a processing process for processing the substrate on which the pattern is formed. A method for manufacturing an article, characterized by manufacturing an article from the substrate processed in the above processing process.

Description

Holding apparatus, exposure apparatus, and method of manufacturing article The present invention relates to a holding support device, an exposure device, and a method for manufacturing an article. In the lithography process for manufacturing liquid crystal panels, organic EL displays, or semiconductor devices, an exposure device is used to transfer the pattern of a plate onto a substrate coated with a photosensitive material. High positional precision is required for the optical elements mounted in the exposure device. However, due to temperature changes caused by the energy of the exposure light, the optical elements or the holding and supporting devices holding and supporting the optical elements may undergo thermal expansion, which can cause a change in the position of the optical elements. Patent Document 1 discloses a method for maintaining the position of an optical element with high precision even when the optical element changes in the diameter direction due to changes in the external environment. FIG. 1 is a perspective view of a holding support device in a first embodiment. FIG. 2 is an exploded view of a holding support device in the first embodiment. FIG. 3 is a side view and a front view of a holding support device in a first embodiment. FIG. 4 is a cross-sectional view of a holding support device in the first embodiment. FIG. 5 is a perspective view of a holding support device in a second embodiment. FIG. 6 is an exploded view of a holding support device in a second embodiment. FIG. 7 is a side view and a front view of a holding support device in a second embodiment. FIG. 8 is a cross-sectional view of a holding support device in a second embodiment. FIG. 9 is a schematic diagram showing the configuration of an exposure device as one aspect of the present invention. Figure 10 is a schematic diagram showing the configuration of an illumination optical system. Hereinafter, preferred embodiments of the present invention will be described in detail based on the accompanying drawings. In addition, in each drawing, the same reference numerals are used for identical components, and redundant descriptions are omitted. <First Embodiment> First, with reference to FIGS. 1 to 4, a holding support device of the present embodiment will be described. FIG. 1 is a perspective view of a holding support device (101). FIG. 2 is an exploded view of FIG. 1. FIG. 3(a) is a side view of the holding support device (101), FIG. 3(b) is a front view of the holding support device (101). FIG. 4 is a cross-sectional view along line A-A shown in FIG. 3(a). In the present embodiment, the optical axis direction of the optical element (2) is defined as the Z direction, and directions perpendicular to the Z direction are defined as the X direction and the Y direction. In the present embodiment, the holding support device (101) holds and supports the optical element (2) (e.g., a glass member such as a lens or an optical filter). The holding support device (101) comprises a barrel (1), a spacer member (3), a plate spring (4) (first elastic member), a screw (5), and a plunger (6) (second elastic member). An optical element (2) is elastically held in a positioned state in the Z direction (optical axis direction) by being compressed by the plate spring (4) (first elastic member) through the annular spacer member (3). The plate spring (4) is fixed to the barrel (1) by the screw (5). Multiple plate springs (4) may be arranged along the circumferential direction of the optical element to stably hold and support the optical element (2). The optical element (2) is elastically maintained in a positioned state in the X direction and also in the θ direction (angular direction centered on the optical axis) so that the contact surface (1a) of the lens tube (1) and the plane (2a) of the optical element (2) come into contact by being compressed by the plunger (6) (second elastic member). A through hole is provided in the lens tube (1), and a plunger (6) is disposed in each through hole. The through hole and the plunger (6) may be a single or multiple number. The plunger (6) may be a ball plunger in which the ball at the tip operates or a pin plunger in which the pin at the tip operates. In addition, the optical element (2) in this embodiment is a non-rotationally symmetrical element having a flat surface (2a) on its outer circumference. By contacting the contact surface (1a) and the flat surface (2a), it is possible to ensure that the optical element (2) does not rotate in the Z direction. Furthermore, by arranging the spacer member (3), the compressive force from the plate spring (4) can be uniformly transmitted to the optical element (2). Also, by arranging the spacer member (3), light is blocked by the spacer member (3), so the area receiving light by the optical element (2) can be set to any area. The spacer member may have a circular opening. Additionally, when maintaining elasticity on the flat surface (2a), there is an effect of being eas