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KR-102962357-B1 - Modular filter manifold

KR102962357B1KR 102962357 B1KR102962357 B1KR 102962357B1KR-102962357-B1

Abstract

A modular filter manifold comprises one or more plates, each plate comprising a connection for one or more filters on a first side and a connection for a fluid line on a second side facing the first side. At least two fluid line connections are provided for each filter connection, and there is a fluid passage passing through each plate for the fluid line connection. Each fluid passage is independent of one another. The manifold plates can be coupled to a support structure to form a manifold to which a filter can be attached. Piping is connected to the fluid line connections to enable flow through the filters in series or in parallel.

Inventors

  • 그레거슨 베리 엘

Assignees

  • 엔테그리스, 아이엔씨.

Dates

Publication Date
20260511
Application Date
20210416
Priority Date
20200428

Claims (20)

  1. It is a filter manifold, and It includes at least one manifold plate, and the manifold plate is: Plate body having a first side and a second side - the second side faces the first side -; At least two filter connections on the first side of the plate body - each filter connection includes an outer wall and a divider -; and For each of at least two filter connections, at least two fluid line connectors extending from a second side are included, and each fluid line connector includes a fluid passage passing through a manifold plate in the thickness direction of the plate body, and each fluid passage includes a first side fluid passage opening on the first side, and the first side fluid passage opening is located within the outer wall or divider of one of the filter connections and extends from the second side to the second side fluid passage opening. For each filter connection, at least one of the openings on the first side is located within the divider, and at least one of the openings on the first side is located between the divider and the outer wall, A filter manifold in which each fluid passage of the fluid line connector is an independent path for fluid flow.
  2. A filter manifold according to claim 1, wherein a fluid line connector having an opening located between the divider and the outer wall of at least two filter connection parts is separated by a distance smaller than the distance between fluid line connectors having an opening located within the divider of each of the at least two filter connection parts.
  3. A filter manifold according to claim 1 or 2, wherein the filter manifold further comprises a branch portion surrounding a filter connection portion on a first side of a plate body, and a drainage fluid passage extending from the branch portion on the first side to a connector provided on a second side of the plate body.
  4. It is a filter manifold, and It includes at least one manifold plate, and the manifold plate is: Plate body having a first side and a second side - the second side faces the first side -; At least two filter connections on the first side of the plate body - each filter connection includes an outer wall and a divider -; and Each of at least two filter connections includes at least two fluid line connectors extending from a second side, each fluid line connector includes a fluid passage passing through a manifold plate in the thickness direction of the plate body, and each fluid passage includes an opening located in the first side of the outer wall or divider of one of the filter connections. For each filter connection, at least one of the openings on the first side is located within the divider, and at least one of the openings on the first side is located between the divider and the outer wall, Each fluid passage of the fluid line connector is an independent path for fluid flow, and A filter manifold further comprising a plurality of void features extending into the plate body formed on one or more side walls of the plate body, wherein each side wall extends between a first side and a second side of the plate body.
  5. In paragraph 4, a filter manifold in which a plurality of void features are each separated from one another by one or more ribs.
  6. This is a method for assembling a filter manifold, and A step of providing one or more manifold plates, wherein each manifold plate is: Plate body having a first side and a second side - the second side faces the first side -; At least two filter connections on the first side of the plate body - each filter connection includes an outer wall and a divider -; For each of at least two filter connections, at least two fluid line connectors extending from a second side are included, and each fluid line connector includes a fluid passage passing through a manifold plate in the thickness direction of the plate body, and each fluid passage includes a first side fluid passage opening on the first side, and the first side fluid passage opening is located within the outer wall or divider of one of the filter connections and extends from the second side to the second side fluid passage opening. For each filter connection, at least one of the openings on the first side is located within the divider, and at least one of the openings on the first side is located between the divider and the outer wall, Each fluid passage of the fluid line connector is a step, which is an independent path for fluid flow; A step of connecting one or more manifold plates to a support structure; A step of connecting piping to at least some of the fluid line connectors of one or more manifold plates; and A method comprising the step of connecting a filter to one of the filter connections of one or more manifold plates.
  7. In paragraph 6, the piping is connected such that each of the plurality of filters is connected to one another so that fluid flows in series through the plurality of filters.
  8. A method according to claim 6 or 7, wherein the piping is connected such that at least some of the plurality of filters are connected so that the fluid flows parallel to each other through at least some of the plurality of filters.
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Description

Modular filter manifold This application claims the benefit of U.S. Application No. 63/016,341 filed April 28, 2020, the entirety of which is incorporated herein by reference. Technology field The present disclosure relates to a modular filter manifold comprising one or more plates and a method for manufacturing the same. In applications such as chemical processes and semiconductor manufacturing, filters may be provided in manifolds that enable the connection of multiple filters. These manifolds typically include all piping in a set configuration and a specific number of separate filter connections, such as six or eight filter connections. Consequently, these manifolds are bulky and may require a large space in environments where floor space is critical, and are not suitable for small-scale applications where typically only a few filters are required. FIG. 1 shows a perspective view of a manifold plate according to one embodiment. FIG. 2 shows a side view of a manifold plate according to an embodiment of FIG. 1. FIG. 3 shows a partial cross-sectional view of a manifold plate according to an embodiment of FIG. 1. FIG. 4 shows a perspective view of a filter manifold according to one embodiment. FIG. 5 shows a bottom view of a filter manifold according to the embodiment of FIG. 4. FIG. 6 illustrates a filter manifold according to the embodiment of FIG. 4 installed on a support structure. FIG. 7 shows a perspective view of a manifold plate according to one embodiment. FIG. 8 shows a side view of a manifold plate according to the embodiment of FIG. 7. FIG. 9a shows a cross-sectional view of a manifold plate along a vertical plane according to the embodiment of FIG. 7. FIG. 9b illustrates a cross-sectional view of a manifold plate along a horizontal plane according to an embodiment of FIG. 7. FIG. 10 illustrates a cap and a locking ring for a manifold plate according to an embodiment. FIG. 11 illustrates a manifold plate according to one embodiment. FIG. 12 illustrates a cross-sectional view of a filter manifold according to FIG. 4. The present disclosure relates to a modular filter manifold comprising one or more plates and a method for manufacturing the same. FIG. 1 illustrates a perspective view of a manifold plate according to one embodiment. The manifold plate (100) comprises a plate body (102) having a first side (104) and a second side (106), and a side wall (108) extends from the first side (104) to the second side (106). On the first side, two filter connection portions (110) are provided. As used herein, the term “filter connection portion” refers to a connection feature for attaching a filter housing or a filter cartridge. Each filter connection portion includes an outer wall (112) and a divider (114). The first side fluid passage opening (116) may be located within the outer wall (112) and/or the divider (114). The first side (104) may include a branch portion (118) and a drain opening (120). The manifold plate (100) further includes a mounting opening (122). A manifold plate (100) is configured to form part of a modular filter manifold. The manifold plate (100) provides a structure that allows for the connection of piping and filters configured to supply fluid (i.e., liquid or gas) to the filters or to receive fluid from these filters. In one embodiment, the manifold plate (100) is formed from a thermoplastic polymer material. In one embodiment, the manifold plate (100) is formed by machining a compression-molded polymer material. In one embodiment, the manifold plate (100) is formed by injection molding. In one embodiment, the manifold plate (100) comprises one or more fluoropolymers. Non-limiting examples of fluoropolymers that may be used in the manifold plate (100) include polytetrafluoroethylene (PTFE) or perfluoroalkoxyalkanes (PFA). In one embodiment, the manifold plate (100) comprises one or more melt-processable polymers. Non-limiting examples of melt-processable polymers that can be used in the manifold plate (100) include PFA and polypropylene (PP). The manifold plate (100) includes a plate body (102). The plate body (102) includes a first side (104) and a second side (106) facing the first side (104). The plate body may have any suitable shape to provide a filter connection (110) and to provide a mounting opening (122) at a suitable location for attachment to a support structure. In the embodiment illustrated in FIG. 1, the plate body (102) is generally rectangular in shape. The plate body (102) has a thickness, and a side wall (108) extends from the first side (104) to the second side (106). In one embodiment, the side wall (108) may be vertical, and the first and second sides (104, 106) have the same size and shape. In one embodiment, the side wall (108) may be angular, and the first and second sides (104, 106) have different shapes and/or sizes. A filter connection (110) is provided on a first side (104) of a plate body (102). The filter connection (110) is configured to allow the conn