KR-102962384-B1 - Compression of sensor data within the plasma tool

KR102962384B1KR 102962384 B1KR102962384 B1KR 102962384B1KR-102962384-B1

Abstract

Systems and methods for compressing data are described. One of the methods includes the step of receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool. The RF transmission path extends from the output of an RF generator to an electrode of a plasma chamber. The method includes the step of converting the plurality of measurement signals from an analog form to a digital form to sample the data, and the step of processing the data to reduce the amount of data. The amount of data is compressed to output compressed data. The method includes the step of transmitting the compressed data to a controller to control the plasma tool.

Inventors

발코어, 존, 주니어.
웡, 트래비스, 조셉
우, 잉
무두누리, 샌딥
푸스트, 보스티안

Assignees

램 리써치 코포레이션

Dates

Publication Date: 20260507
Application Date: 20210510
Priority Date: 20200527

Claims (20)

A step of receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool, wherein the RF transmission path extends from the output of an RF generator to the electrode of the plasma tool, and the step of receiving the plurality of measurement signals is A step of receiving a first electrical signal representing a first parameter associated with a first RF signal; and A step of receiving the plurality of measurement signals, comprising the step of receiving a second electrical signal representing a second parameter associated with a second RF signal; A step of converting the plurality of measurement signals from an analog form to a digital form to sample data, wherein the step of converting the plurality of measurement signals is A step of sampling the first electrical signal to output a first plurality of sample sets; and A step of converting the plurality of measurement signals, comprising the step of sampling the second electrical signal to output a second plurality of sample sets; A step of processing the sample data to output compressed data, wherein the step of processing the sample data is: A step of determining a first maximum peak-to-peak value from the first plurality of sample sets; or A step of determining a second maximum peak-to-peak value from the second plurality of sample sets; or A step of determining a statistical frequency value from the first plurality of sample sets; or A step of determining a statistical phase value from the first plurality of sample sets and the second plurality of sample sets; or A step of processing the sample data, comprising a combination of two or more of the above-determining steps; and A method for compressing data, comprising the step of transmitting the compressed data to a controller to control the plasma tool.
In Article 1, The above-mentioned first plurality of sample sets include a first master sample set and a second master sample set, and The above second plurality of sample sets include a first slave sample set and a second slave sample set, and The step of processing the above sample data is, A step of determining the first master sample set to have the largest swing among the first master sample set and the second master sample set; A step of identifying the first slave sample set as corresponding to the first master sample set; and A method for compressing data, comprising the step of determining at least one of a maximum size, a minimum size, a positive crossing time, and a negative crossing time from the first slave sample set.
In Article 1, The above-mentioned first plurality of sample sets include a first master sample set and a second master sample set, and The above-mentioned second plurality of sample sets include a first slave sample set and a second slave sample set, and The step of processing the above sample data is, A step of determining the first master sample set to have the largest swing among the first master sample set and the second master sample set; or A step of determining the maximum size of the first master sample set; or A step of determining the second master sample set to have the largest maximum size from the maximum size of the first master sample set and the maximum size of the second master sample set; or A step of determining the minimum size of the first master sample set; or A step of determining that the minimum size becomes the minimum value among the minimum size of the first master sample set and the minimum size of the second master sample set; or A step of determining the location of a positive crossing within the first master sample set; or A step of determining the location of a negative crossing within the first master sample set; or A method for compressing data, comprising the step of determining the sum of the differences between the positive crossing and the negative crossing of the first master sample set and the second master sample set.
In Article 1, The above-mentioned first plurality of sample sets include a first master sample set and a second master sample set, and The above-mentioned second plurality of sample sets include a first slave sample set and a second slave sample set, and The step of processing the above sample data is, A step of determining the first slave sample set to have the largest swing among the first slave sample set and the second slave sample set; or A step of determining the maximum size of the first slave sample set; or A step of determining the second slave sample set to have the largest maximum size from the maximum size of the first slave sample set and the maximum size of the second slave sample set; or A step of determining the minimum size of the first slave sample set; or A step of determining that the minimum size becomes the minimum value among the minimum size of the first slave sample set and the minimum size of the second slave sample set; or A step of determining the location of a positive crossing within the first slave sample set; or A step of determining the location of a negative crossing within the first slave sample set; or A method for compressing data, comprising the step of determining the sum of the differences between the positive crossing and the negative crossing of the first slave sample set and the second slave sample set.
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In Article 1, A method for compressing data, wherein the step of sampling the first electrical signal and the step of sampling the second electrical signal are performed in synchronization with a clock signal, and the step of determining the first maximum peak-to-peak value, the step of determining the second maximum peak-to-peak value, the step of determining the statistical frequency value, and the step of determining the statistical phase value are performed in synchronization with the clock signal.
In Article 1, A method for compressing data, wherein the step of processing the sample data comprises the step of rendering the first plurality of sample sets and the second plurality of sample sets unusable for subsequent use after the step of determining the first maximum peak-to-peak value, the second maximum peak-to-peak value, the statistical frequency value, and the statistical phase value.
In Article 1, A method for compressing data, wherein the step of transmitting the compressed data comprises the step of transmitting the first maximum peak-to-peak value, the second maximum peak-to-peak value, the statistical frequency value, and the statistical phase value to the controller for controlling the plasma tool based on one or more of the first maximum peak-to-peak value, the second maximum peak-to-peak value, the statistical frequency value, and the statistical phase value.
In Article 1, The first RF signal is transmitted from the RF generator to an impedance matching circuit via an RF cable, and A method for compressing data, wherein the second RF signal is reflected from the plasma chamber toward the RF generator through the impedance matching circuit.
In Article 1, The first RF signal is transmitted from the RF generator to an impedance matching circuit via an RF cable, and A method for compressing data, wherein the second RF signal is transmitted from the impedance matching circuit to the plasma chamber through an RF transmission line.
In Article 1, The step of processing the sample data includes the step of determining a maximum value and a minimum value for each of the first plurality of sample sets; The first maximum peak-to-peak value is determined from the maximum value and the minimum value determined from the first plurality of sample sets; and The step of processing the sample data includes the step of determining the maximum value and the minimum value for each of the second plurality of sample sets, and A method for compressing data, wherein the second maximum peak-to-peak value is determined from the maximum value and the minimum value determined from the second plurality of sample sets.
In Article 1, The step of processing the above sample data is, For each of the first plurality of sample sets, a step of determining a maximum value and a minimum value; and A method for compressing data, comprising the step of determining, for each of the first plurality of sample sets, a time associated with the maximum value and a time associated with the minimum value, wherein the statistical frequency value is determined based on the times associated with the maximum values of the first plurality of sample sets and based on the times associated with the minimum values of the first plurality of sample sets.
In Article 1, The step of processing the above sample data is, For each of the first plurality of sample sets, a step of determining a maximum value and a minimum value; For each of the second plurality of sample sets, a step of determining a maximum value and a minimum value; For each of the first plurality of sample sets, a step of determining the time associated with the maximum value and the time associated with the minimum value; and For each of the second plurality of sample sets, the method includes the step of determining the time associated with the maximum value and the time associated with the minimum value, and A method for compressing data, wherein the statistical phase value is determined from the times associated with the maximum values of the first plurality of sample sets, the times associated with the maximum values of the second plurality of sample sets, the times associated with the minimum values of the first plurality of sample sets, and the times associated with the minimum values of the second plurality of sample sets.
In Article 1, The step of processing the above sample data is, For each of the first plurality of sample sets, the method includes the step of determining the time associated with a positive zero crossing and the time associated with a negative zero crossing. A method for compressing data, wherein the statistical frequency value is determined based on the times associated with the positive zero crossings of the first plurality of sample sets and based on the times associated with the negative zero crossings of the first plurality of sample sets.
In Article 1, The step of processing the above sample data is, For each of the first plurality of sample sets, a step of determining the time associated with a positive zero crossing and the time associated with a negative zero crossing; and For each of the second plurality of sample sets, the method includes the step of determining the time associated with a positive zero crossing and the time associated with a negative zero crossing. A method for compressing data, wherein the statistical phase value is determined from the times associated with the positive zero crossings of the first plurality of sample sets, the times associated with the positive zero crossings of the second plurality of sample sets, the times associated with the negative zero crossings of the first plurality of sample sets, and the times associated with the negative zero crossings of the second plurality of sample sets.
In Article 1, The above plasma tool is, Plasma control state determined based on the above compressed data; or RF transition sequence determined based on the above compressed data; or RF trigger event determined based on the above compressed data; or RF precursor events determined based on the above compressed data; or Controlled based on RF fault events determined based on the above compressed data, The above plasma tool includes a plasma chamber, and A method for compressing data that facilitates achieving wafer processing advantages, wherein the above plasma control state, or the above RF trigger event, or the control of pressure within the plasma chamber, or the control of gas flow within the plasma chamber, or the control of an impedance matching circuit, or the control of temperature within the plasma chamber, or the control of a gap within the plasma chamber.
In Article 1, A method for compressing data, wherein one of the above one or more sensors is coupled between the output of an impedance matching circuit and the electrode, and the impedance matching circuit is coupled to the output of the RF generator.
In Article 1, A method for compressing data, wherein one or more of the above sensors is located within the RF generator.
In Article 1, A method for compressing data, wherein one or more of the above sensors is located within a matching unit coupled to the RF generator.
In a compression integration system for compressing data, An analog-to-digital converter configured to receive a plurality of measurement signals from one or more sensors coupled to an RF transmission path of a plasma tool, wherein the RF transmission path extends from the output of an RF generator to the electrode of the plasma tool. To receive the above plurality of measurement signals, the analog-to-digital converter, Receiving a first electrical signal representing a first parameter associated with a first RF signal; and Configured to receive a second electrical signal representing a second parameter associated with a second RF signal; The above analog-to-digital converter is configured to convert the plurality of measurement signals from an analog form to a digital form to sample data, and To convert the above plurality of measurement signals, the analog-to-digital converter, Sample the first electrical signal to output the first plurality of sample sets; and The analog-to-digital converter configured to sample the second electrical signal to output a second plurality of sample sets; As a data compression unit coupled to the analog-to-digital converter, the data compression unit is configured to process the sample data to output the compressed data, and To process the above sample data, the data compression unit, Determining a first maximum peak-to-peak value from the first plurality of sample sets; or Determining a second maximum peak-to-peak value from the second plurality of sample sets; or Determining statistical frequency values from the above first plurality of sample sets; or Determining statistical phase values from the first plurality of sample sets and the second plurality of sample sets; or The data compression unit comprising a combination of two or more of the above decisions; and A compression integrated system comprising a transmitter coupled to the above data compression unit, wherein the transmitter is configured to transmit the compressed data to a controller for controlling the plasma tool.

Description

Compression of plasma tool sensor data The embodiments described in this disclosure relate to the compression of sensor data of a plasma tool. The description of the background art provided in this specification is intended for the purpose of generally presenting the context of the present disclosure. The work of the inventors named in this specification to the extent described in this background art section, as well as aspects of the present art that may not otherwise be recognized as prior art at the time of filing, are not explicitly or implicitly recognized as prior art to the present disclosure. In a plasma tool, one or more radio frequency (RF) generators are coupled to an impedance matching network. The impedance matching network is coupled to a plasma chamber. RF signals are supplied from the RF generators to the impedance matching network. When the impedance matching network receives RF signals, it outputs RF signals to the plasma chamber. Additionally, multiple process gases are supplied to a gap within the plasma chamber. When RF signals are supplied from the impedance matching network to the plasma chamber and process gases are supplied, the wafer is processed in the plasma chamber. During wafer processing, a large amount of data is collected. In this context, the embodiments described in the present disclosure occur. Embodiments of the present disclosure provide sensor data compression for a plasma tool. It should be recognized that the embodiments may be implemented in a number of ways, e.g., as a process, device, system, a piece of hardware, or as a method on a computer-readable medium. Some embodiments are described below. In one embodiment, a method for compressing data is described. The method includes the step of receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool. The RF transmission path extends from the output of an RF generator to an electrode of a plasma chamber. The method includes the step of converting the plurality of measurement signals from an analog form to a digital form to sample the data, and the step of processing the data to reduce the amount of data. The amount of data is compressed while retaining critical information for optimized wafer processing. The method includes the step of transmitting the compressed data to a controller to control the plasma tool. An example of the critical information includes the master maximum peak-to-peak value, the slave maximum peak-to-peak value, the master average frequency value, and the average phase value described below. In one embodiment, a compression integrated system for compressing data is described. The compression integrated system includes an analog-to-digital converter that receives a plurality of measurement signals from one or more sensors coupled to the RF transmission path of a plasma tool. The analog-to-digital converter converts the plurality of measurement signals from an analog form to a digital form to sample the data. The compression integrated system includes a data compression unit coupled to the analog-to-digital converter. The data compression unit processes the data to reduce the amount of data. The amount of data is compressed to output compressed data. The compression integrated system includes a transmitter coupled to the data compression unit. The transmitter transmits the compressed data to a controller to control the plasma tool. In one embodiment, a system for compressing data is described. The system includes an RF generator coupled to an RF path. The RF generator supplies a first RF signal to the RF path. The system includes an RF sensor coupled to the RF path. The RF sensor senses the first RF signal and the second RF signal to output a plurality of measurement signals. The system includes a data integration system coupled to the RF sensor. The data integration system receives the plurality of measurement signals. The data integration system converts the plurality of measurement signals from analog form to digital form to sample the data and processes the data to reduce the amount of data in a synchronized manner. For example, the amount of data is compressed to output compressed data synchronized with a clock signal. The data integration system transmits the compressed data to a controller to control the system. Some advantages of the systems and methods described herein for compressing sensor data in a plasma tool include the step of reducing the amount of data used to control the plasma tool. An RF generator supplies an RF signal having many voltage cycles. In addition, the RF signal is reflected toward the RF generator, and the reflected RF signal has many voltage cycles. A large amount of data, represented by the supplied RF signal and the reflected RF signal, is measured. The large amount of data is overwhelming in determining the portion of the large amount of data to be used to control the plasma tool. The