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KR-102962556-B1 - MICRO POSITIONER

KR102962556B1KR 102962556 B1KR102962556 B1KR 102962556B1KR-102962556-B1

Abstract

The micro positioner of the present disclosure may include a rail portion having a metal member, a moving portion having a magnetic member and movably coupled to the metal member of the rail portion by magnetic force, a rotating portion rotatably coupled to one side of the moving portion, and a probe fixed to the rotating portion and having one end extended to the outside of the rotating portion.

Inventors

  • 이형만
  • 김원효

Assignees

  • 한국전자기술연구원

Dates

Publication Date
20260508
Application Date
20250410

Claims (11)

  1. Rail section equipped with a metal member; A moving part equipped with a magnetic member and coupled to the metal member of the rail part so as to be movable by magnetic force; A pivot part rotatably coupled to one side of the above-mentioned moving part; and A probe fixed to the above-mentioned pivot part, with one end extending to the outside of the above-mentioned pivot part; comprising The above magnetic member is, A first magnet provided on the side facing the rail portion of the moving portion and having a circular periphery, and It includes a second magnet provided on the side facing the rotating part in the moving part above, The above moving part moves along the length of the metal member while attached to the metal member by magnetic force by the first magnet, and rotates while attached to the metal member. The above-mentioned pivoting part rotatably connects one side of the above-mentioned pivoting part, to which the above-mentioned probe is extended, to the above-mentioned moving part, and The above-mentioned rotating part is a micro positioner having a repulsive magnet having the same polarity as the second magnet, which faces the second magnet on the other side opposite to the one-side part.
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  5. In claim 1, The above moving part is a micro positioner that includes a convex moving guide in the part equipped with the first magnet.
  6. In claim 5, The above rail portion is a micro positioner comprising a concave guide rail corresponding to the moving guide in the portion equipped with the metal member.
  7. In claim 6, The above-mentioned moving guide and the above-mentioned guide rail are micro-positioners that interlock with each other.
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Description

Micro Positioner The present disclosure relates to a micropositioner. In the semiconductor manufacturing process, it is necessary to examine the material properties of solid and liquid samples formed on a wafer or substrate, such as electromagnetic, dielectric, optical, and chemical properties. Since the characteristics of the device are affected by external factors, it is necessary to provide a vacuum or an environment with controlled light irradiation, gas, and temperature and humidity during the process of detecting the device characteristics. A vacuum probe system is provided that includes a chamber for placing a sample inside in order to detect the characteristics of the sample. A vacuum probe system detects the characteristics of a device through a probe that contacts the device, and in the vacuum probe system, a micro-positioner that precisely moves the probe can be located inside or outside the chamber. FIG. 1 is a plan view of a micro chamber according to a first embodiment. FIG. 2 is a perspective view of a micro positioner according to a first embodiment. FIGS. 3 to 5 are usage state diagrams illustrating the operating state of the micro positioner in FIG. 2. FIG. 6 is an exploded perspective view showing only the rotating part with the moving part and probe installed in FIG. 2 disassembled. FIG. 7 is a schematic drawing showing only the rail portion and the movable body to show the combined state of the rail portion and the movable body according to one embodiment of the present disclosure. FIG. 8 is a schematic drawing showing only the rail portion and the movable body to show the combined state of the rail portion and the movable body according to another embodiment of the present disclosure. FIG. 9 is a cross-sectional view illustrating a micropositioner according to a second embodiment of the present disclosure. In assigning reference numerals to the components of the drawings, identical components are assigned the same reference numeral whenever possible, even if they are shown in different drawings, and similar components are assigned similar reference numerals. The terms used to describe an embodiment of the present disclosure are not intended to limit the present disclosure. It should be understood that singular expressions include plural expressions unless otherwise specified in the context. Drawings may be schematic or exaggerated for the purpose of illustrating embodiments. In this document, expressions such as “have,” “may have,” “include,” or “may include” indicate the presence of such features (e.g., numerical values, functions, operations, or components such as parts) and do not exclude the presence of additional features. Terms such as "one," "other," "another," "first," and "second" are used to distinguish one component from another, and the components are not limited by these terms. Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the attached drawings. FIG. 1 is a plan view of a micro chamber according to a first embodiment, FIG. 2 is a perspective view of a micro positioner according to a first embodiment, FIG. 3 to 5 are usage state diagrams showing the operating state of the micro positioner in FIG. 1, FIG. 6 is an exploded perspective view showing only the rotating part with the moving part and probe installed in FIG. 2, FIG. 7 is a diagram schematically showing only the rail part and the moving body to show the combined state of the rail part and the moving body according to one embodiment of the present disclosure, FIG. 8 is a diagram schematically showing only the rail part and the moving body to show the combined state of the rail part and the moving body according to another embodiment of the present disclosure. A microchamber (1) according to one embodiment can detect material properties of a specimen (W). The specimen (W) may be, for example, a semiconductor device formed on a wafer. In FIG. 1, the specimen (W) is shown as a rectangle for convenience, but this is merely an example for convenience of explanation and may be various types of semiconductor devices formed on a wafer. The micro chamber (1) can detect various characteristics of the specimen (W), such as electrical characteristics, optical characteristics, and chemical characteristics, by being linked with other devices. The micro chamber (1) can quickly create a vacuum atmosphere inside for the inspection of the specimen (W) or purge gas inside. Therefore, the micro chamber (1) can accurately measure the characteristics of the specimen (W) even when the characteristics of the specimen (W) are sensitive to the surrounding environment. A micro positioner (10) according to one embodiment of the present disclosure may be placed inside a micro chamber (1). Referring to FIGS. 2 to 8, a micro positioner (10) according to one embodiment of the present disclosure may include a rail portion (100) having a metal member (110), a moving portion (200) having a magnetic m