KR-102962707-B1 - Display apparatus and method of manufacturing the same

KR102962707B1KR 102962707 B1KR102962707 B1KR 102962707B1KR-102962707-B1

Abstract

According to one aspect of the present invention, a display device is provided comprising a substrate including a display area and a peripheral area and a pad portion located in the peripheral area, wherein the pad portion comprises a first conductive layer, a second conductive layer located on the first conductive layer and having a first opening, a third conductive layer located on the second conductive layer and having a second opening that overlaps with the first opening but has an area smaller than the area of the first opening on the upper surface of the second conductive layer, an organic protective layer that fills the first opening and has a third opening that overlaps with the second opening, and an additional metal layer that covers a portion of the upper surface of the first conductive layer exposed by the first opening, an inner surface of the second opening, an inner surface of the third opening, and the upper surface of the third conductive layer.

Inventors

양신혁
강동한
홍순욱
김유진
김지훈
윤한희

Assignees

삼성디스플레이 주식회사

Dates

Publication Date: 20260508
Application Date: 20201209

Claims (20)

A substrate including a display area and a peripheral area; and A pad portion located in the above surrounding area; provided, The above pad portion is, First challenge layer; A second conductive layer located on the first conductive layer and having a first opening; A third conductive layer located on the second conductive layer and having a second opening that overlaps with the first opening but has an area smaller than the area of the first opening on the upper surface of the second conductive layer; An organic protective layer having a third opening that fills the first opening and overlaps with the second opening; and A display device comprising: an additional metal layer covering a portion of the upper surface of the first conductive layer exposed by the first opening, the inner surface of the second opening, the inner surface of the third opening, and the upper surface of the third conductive layer.
In paragraph 1, A display device in which the inner surface of the second opening protrudes toward the center of the second opening more than the inner surface of the first opening.
In paragraph 1, The above pad portion is, A display device further comprising a delay film located between the organic protective layer and the second conductive layer.
In paragraph 3, A display device comprising a delay film that includes a material in which sulfur and a metal included in the second conductive layer are combined.
In paragraph 4, The above second conductive layer includes copper, and A display device in which the above delay film comprises copper sulfide.
In paragraph 1, A display device having the first conductive layer, the second conductive layer, and the third conductive layer having a shape that extends in one direction.
In paragraph 6, A display device in which the outer edge of the first conductive layer, the outer edge of the second conductive layer, and the outer edge of the third conductive layer coincide with each other.
In paragraph 1, Further comprising thin-film transistors located in the above-mentioned display area and having a source electrode and a drain electrode; A display device wherein each of the source electrode and the drain electrode comprises a first layer having a material identical to the material included in the first conductive layer, a second layer having a material identical to the material included in the second conductive layer, and a third layer having a material identical to the material included in the third conductive layer.
In paragraph 8, The above first conductive layer comprises titanium, and The above second conductive layer includes copper, and A display device comprising indium tin oxide (ITO) in the third conductive layer.
In paragraph 1, A display device in which the inner surface of the second opening and the inner surface of the third opening are not stepped.
In paragraph 1, A pixel electrode located in the above display area; and A display device further comprising: an upper insulating layer having a pixel opening that exposes the central portion of the pixel electrode and a fourth opening that overlaps with the first opening.
In Paragraph 11, A display device in which the above organic protective layer comprises the same material as the material comprising the above upper insulating layer.
In paragraph 1, A display device in which the additional metal layer electrically connects a portion located on one side of the first opening of the second conductive layer and a portion located on the other side of the first opening of the second conductive layer.
In paragraph 1, A display device in which the additional metal layer comprises silver or tungsten.
A step of forming thin-film transistors located in a display area of a substrate, and forming a pad portion having a first conductive layer, a second conductive layer, and a third conductive layer sequentially stacked and located in a peripheral area of the substrate; A step of forming a pixel electrode material layer on top of the above thin-film transistors; A step of forming a pixel electrode through a process of patterning the pixel electrode material layer, forming a first opening in a part of the second conductive layer, and forming a second opening that overlaps with the first opening in a part of the third conductive layer; A step of forming an organic layer on the upper part of the pad portion to fill the first opening; A step of patterning the organic layer to form an upper insulating layer having a pixel opening that exposes the central portion of the pixel electrode and a fourth opening that overlaps with the first opening, and forming an organic protective layer having a third opening that fills the first opening and overlaps with the first opening; and A step of forming an additional metal layer covering the upper surface of the first conductive layer exposed by the first opening, the inner surface of the second opening, the inner surface of the third opening, and a portion of the upper surface of the third conductive layer; A method for manufacturing a display device comprising
In paragraph 15, A method for manufacturing a display device, wherein at the portion where the organic protective layer and the second conductive layer are in contact, the organic protective layer and the second conductive layer react to form a delay film located between the organic protective layer and the second conductive layer.
In Paragraph 16, A method for manufacturing a display device, wherein the above delay film comprises a material in which sulfur and a metal included in the second conductive layer are combined.
In Paragraph 17, The above second conductive layer includes copper, and A method for manufacturing a display device, wherein the above delay film comprises copper sulfide.
In paragraph 15, The above thin-film transistors each have a source electrode and a drain electrode, and A method for manufacturing a display device, wherein each of the source electrode and the drain electrode comprises a first layer having a material identical to the material included in the first conductive layer, a second layer having a material identical to the material included in the second conductive layer, and a third layer having a material identical to the material included in the third conductive layer.
In Paragraph 19, The above first conductive layer comprises titanium, and The above second conductive layer includes copper, and A method for manufacturing a display device, wherein the third conductive layer comprises indium tin oxide (ITO).

Description

Display apparatus and method of manufacturing the same Embodiments of the present invention relate to a display device and a method for manufacturing the same, and more specifically, to a display device having a pad portion with improved defects and a method for manufacturing the same. Among display devices, organic light-emitting diode (OLED) displays are attracting attention as next-generation display devices due to their advantages, including a wide viewing angle, excellent contrast, and fast response speed. Generally, organic light-emitting display devices form thin-film transistors and organic light-emitting diodes on a substrate, and operate by the organic light-emitting diodes emitting light themselves. Such organic light-emitting display devices are used as display units for small products, such as mobile phones, or for large products, such as televisions. FIG. 1 is a plan view schematically illustrating a part of a display device according to one embodiment of the present invention. FIG. 2 is a cross-sectional view schematically illustrating a part of a display device according to one embodiment of the present invention. FIG. 3 is an equivalent circuit diagram of a light-emitting diode and a pixel circuit connected to the light-emitting diode, provided in a display device according to one embodiment of the present invention. FIG. 4 is a plan view schematically illustrating a part of an enlarged view of the pad area of FIG. 1. FIG. 5 is a cross-sectional view schematically illustrating a part of a display device according to one embodiment of the present invention. FIG. 6 is a cross-sectional view schematically illustrating a portion of an enlarged view of section A of FIG. 5. FIG. 7a is a plan view schematically illustrating a damaged portion of a pad portion according to one embodiment of the present invention. FIG. 7b is a plan view schematically illustrating the expanded damaged portion of the pad portion of FIG. 7a. FIG. 8 is a plan view schematically illustrating a part of the pad portion according to one embodiment of the present invention. FIG. 9 is a cross-sectional view of the pad portion taken along the line I-I' of FIG. 8. FIG. 10 is a cross-sectional view schematically illustrating a part of the pad portion according to one embodiment of the present invention. FIGS. 11 to 17 are cross-sectional views sequentially illustrating the manufacturing process of a display device according to one embodiment of the present invention. The present invention is capable of various modifications and may have various embodiments; specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention, and the methods for achieving them, will become clear by referring to the embodiments described below in detail together with the drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various forms. Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same reference numerals, and redundant descriptions thereof will be omitted. In the following embodiments, terms such as first, second, etc. are used not in a limiting sense, but for the purpose of distinguishing one component from another component. In the following examples, singular expressions include plural expressions unless the context clearly indicates otherwise. In the following embodiments, terms such as "include" or "have" mean that the features or components described in the specification are present, and do not preclude the possibility that one or more other features or components may be added. In the following embodiments, when a part such as a film, region, or component is described as being on or above another part, it includes not only cases where it is directly on top of another part, but also cases where another film, region, or component is interposed in between. In the drawings, the size of components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are depicted arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is illustrated. Where an embodiment can be implemented differently, a specific process sequence may be performed differently from the order described. For example, two processes described consecutively may be performed substantially simultaneously or proceed in the reverse order of the description. In this specification, "A and/or B" indicates the case where it is A, B, or both A and B. And, "at least one of A and B" indicates the case where it is A, B, or both A and B. In the following embodiments, when a membrane, region, component, etc. is described as being connected, it includes