KR-102962828-B1 - Apparatus of MTL and Transfer system including the same

KR102962828B1KR 102962828 B1KR102962828 B1KR 102962828B1KR-102962828-B1

Abstract

One aspect of the MTL device of the present invention for achieving the above objective comprises: an auxiliary track that contacts a driving rail forming a movement path of a conveyor device and extends the movement path of the driving rail, and supports the conveyor device that is inserted into or introduced from the driving rail; a lift part that moves the auxiliary track by adjusting its length in the vertical direction so that the auxiliary track is positioned adjacent to a floor surface relative to the driving rail for the conveyor device to be introduced from the outside or removed from the outside, or positioned in a second location where the auxiliary track contacts the driving rail; and a body part that is provided with the lift part and has wheels to move on a floor surface, wherein the body part moves to multiple points on the driving rail, and the conveyor device moves between the driving rail and the auxiliary track at the position where the body part has moved.

Inventors

김도현

Assignees

세메스 주식회사

Dates

Publication Date: 20260508
Application Date: 20220809

Claims (15)

An auxiliary track that contacts a traveling rail forming a movement path of a conveying device and extends the movement path of said traveling rail; A lift unit that moves the auxiliary track by adjusting its length in the vertical direction or raising and lowering it so that the auxiliary track is positioned at a first position adjacent to the floor surface relative to the position of the driving rail, or the auxiliary track is positioned at a second position in contact with the driving rail; and The above-mentioned lift portion is provided, and the body portion includes wheels to move on the floor surface, The above auxiliary track is raised to the above second position, and the conveyor device is moved between the driving rail and the auxiliary track at the position where the body part has moved, and A guide block installed on the above-mentioned driving rail and having a through hole formed therein that penetrates in the vertical direction but decreases in diameter as it moves upward; and An MTL device further comprising a link portion that penetrates the guide block, including a pin that is installed on the auxiliary track and guided in the through hole.
In paragraph 1, The above lift unit is, A frame on which the above auxiliary track is installed; and An MTL device comprising a lifting/lowering member provided in the body portion and equipped with a cylinder module, a wire winding module, or a gear module for adjusting the height of the frame.
In paragraph 2, The above cylinder module is, The above frame includes a fork that supports it, An MTL device that raises and lowers the fork using hydraulic or pneumatic pressure so that its length can be adjusted in the vertical direction.
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In paragraph 1, It further includes a first stopper positioned on the upper part of the guide block and rotatably installed on the travel rail to interfere with or open the travel path across the travel rail, and The above link portion is an MTL device that pushes the lower part of the first stopper upward in conjunction with the lifting of the auxiliary track to rotate the first stopper.
An auxiliary track that contacts a traveling rail forming a movement path of a conveying device and extends the movement path of said traveling rail; A lift unit that moves the auxiliary track by adjusting its length in the vertical direction or raising and lowering it so that the auxiliary track is positioned at a first position adjacent to the floor surface relative to the position of the driving rail, or the auxiliary track is positioned at a second position in contact with the driving rail; and The above-mentioned lift portion is provided, and the body portion includes wheels to move on the floor surface, The above auxiliary track is raised to the second position, and the conveyor device is moved between the driving rail and the auxiliary track at the position where the body part has moved, and An anti-detachment member provided on the auxiliary track, which interferes with the path of the conveyor device or allows the movement of the conveyor device depending on rotation; and A second stopper provided on the side of the anti-detachment member on the auxiliary track, which limits the rotation angle of the anti-detachment member in a first direction, The above-mentioned anti-detachment unit is, It is laid down by rotating in a second direction opposite to the first direction, or It is set up to interfere with the path of the above-mentioned return device, An MTL device in which rotation in the first direction is restricted by the second stopper while in an upright state.
An auxiliary track that contacts a traveling rail forming a movement path of a conveying device and extends the movement path of said traveling rail; A lift unit that moves the auxiliary track by adjusting its length in the vertical direction or raising and lowering it so that the auxiliary track is positioned at a first position adjacent to the floor surface relative to the position of the driving rail, or the auxiliary track is positioned at a second position in contact with the driving rail; and The above-mentioned lift portion is provided, and the body portion includes wheels to move on the floor surface, and The above auxiliary track is raised to the above second position, and the conveyor device is moved between the driving rail and the auxiliary track at the position where the body part has moved, and An MTL device further comprising an anti-overturning member provided in the body portion, which rotates outward relative to the body portion to expand the support area of the body portion, and whose vertical length is adjusted to contact the bottom surface or be spaced apart from the bottom surface.
A traveling rail forming the movement path of the return device; and It includes an MTL device that contacts or is spaced apart from the above-mentioned driving rail, The above MTL device is, An auxiliary track that extends the movement path of the above-mentioned driving rail; A lift unit that moves the auxiliary track by adjusting its length in the vertical direction or raising and lowering it so that the auxiliary track is positioned at a first position adjacent to the floor surface relative to the position of the driving rail, or the auxiliary track is positioned at a second position in contact with the driving rail; and The above-mentioned lift portion is provided, and the body portion includes wheels to move on the floor surface, The above auxiliary track is raised to the second position, and the conveyor device is moved between the driving rail and the auxiliary track at the position where the body part has moved, and A guide block installed on the above-mentioned driving rail and having a through hole formed therein that penetrates in the vertical direction but decreases in diameter as it moves upward; and A conveying system further comprising a link portion that penetrates the guide block, including a pin that is installed on the auxiliary track and guided in the through hole.
In paragraph 8, The above lift unit is, A frame on which the above auxiliary track is installed; and It includes a cylinder module provided in the body portion and adjusting the height of the frame, and The above cylinder module is, The above frame includes a fork that supports it, A conveying system that raises and lowers the fork using hydraulic or pneumatic pressure so that its length can be adjusted in the vertical direction.
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In paragraph 8, The above-mentioned travel rail includes an open track forming an open section so that the above-mentioned conveyor device can move to the outside, and It further includes a first stopper positioned on the upper part of the guide block and rotatably installed on the travel rail to interfere with or open the travel path across the travel rail, and The above link portion is a conveying system that pushes the lower part of the first stopper upward in conjunction with the lifting of the auxiliary track to rotate the first stopper.
In Paragraph 11, The above-mentioned travel rail includes a plurality of bay sections in which the conveying device performs a task, and a passage section connecting the bay sections. The above-mentioned open track is a conveying system provided in one or more of the above-mentioned bays.
In paragraph 8, A conveying system further comprising a rotating plate that is provided at a position where the auxiliary track faces the driving rail, rotates axially in contact with the auxiliary track according to the raising and lowering of the auxiliary track, and connects the upper surface of the driving rail and the auxiliary track.
A traveling rail forming the movement path of the return device; and It includes an MTL device that contacts or is spaced apart from the above-mentioned driving rail, The above MTL device is, An auxiliary track that extends the movement path of the above-mentioned driving rail; A lift unit that moves the auxiliary track by adjusting its length in the vertical direction or raising and lowering it so that the auxiliary track is positioned at a first position adjacent to the floor surface relative to the position of the driving rail, or the auxiliary track is positioned at a second position in contact with the driving rail; and The above-mentioned lift portion is provided, and the body portion includes wheels to move on the floor surface, The above auxiliary track is raised to the above second position, and the conveyor device is moved between the driving rail and the auxiliary track at the position where the body part has moved, and An anti-detachment member provided on the auxiliary track, which interferes with the path of the conveyor device or allows the movement of the conveyor device depending on rotation; and A second stopper provided on the side of the anti-detachment member on the auxiliary track, which limits the rotation angle of the anti-detachment member in a first direction, The above-mentioned anti-detachment unit is, It is laid down by rotating in a second direction opposite to the first direction, or It is set up to interfere with the path of the above-mentioned return device, A conveying system in which rotation in the first direction is restricted by the second stopper while in an upright state.
A traveling rail forming the movement path of the return device; and It includes an MTL device that contacts or is spaced apart from the above-mentioned driving rail, The above MTL device is, An auxiliary track that extends the movement path of the above-mentioned driving rail; A lift unit that moves the auxiliary track by adjusting its length in the vertical direction or raising and lowering it so that the auxiliary track is positioned at a first position adjacent to the floor surface relative to the position of the driving rail, or the auxiliary track is positioned at a second position in contact with the driving rail; and The above-mentioned lift portion is provided, and the body portion includes wheels to move on the floor surface, and The above auxiliary track is raised to the second position, and the conveyor device is moved between the driving rail and the auxiliary track at the position where the body part has moved, and A conveying system further comprising an anti-overturning member provided in the body portion, which rotates outward relative to the body portion to expand the support area of the body portion, and whose vertical length is adjusted to contact or be spaced apart from the bottom surface.

Description

Apparatus of MTL and Transfer system including the same The present invention relates to an MTL device and a transport system including the same. A semiconductor manufacturing process is a process for manufacturing semiconductor devices on a substrate (wafer), and includes, for example, photolithography, deposition, etching, ion implantation, cleaning, and packaging. A manufacturing plant for manufacturing semiconductor devices may have one or more layers composed of cleanrooms, and a number of semiconductor manufacturing facilities for performing semiconductor manufacturing processes may be placed on each layer. In a manufacturing facility, a final processed substrate can be completed by repeatedly performing multiple manufacturing processes on a substrate (wafer). When a manufacturing process is completed in a specific semiconductor manufacturing facility, the substrate can be returned to the facility for the next manufacturing process. Here, the substrate may be returned while stored in a container (front opening unified pod, FOUP) capable of accommodating multiple substrates. The container containing the substrate may be returned by an overhead hoist transport (OHT). That is, dozens to hundreds of semiconductor manufacturing facilities are provided in one location, and multiple hoist transport devices (OHT) are provided to move between the semiconductor manufacturing facilities. FIG. 1 is a plan view illustrating a conveying system in which an MTL device according to some embodiment of the present invention is provided. FIG. 2 is a perspective view illustrating an MTL device according to some embodiments of the present invention. FIG. 3 is a side view illustrating an MTL device according to some embodiments of the present invention. FIG. 4 is a drawing illustrating the link portion of an MTL device according to some embodiments of the present invention moving in the downward direction of a driving rail. FIG. 5 is a drawing illustrating the link portion of an MTL device according to some embodiments of the present invention being inserted into a guide block. FIG. 6 is a drawing illustrating the link portion of an MTL device according to some embodiment of the present invention rotating a first stopper. FIG. 7 is a drawing showing the auxiliary track and the driving rail facing each other of a conveying system according to some embodiments of the present invention. FIG. 8 is a drawing illustrating the movement of an auxiliary track of a conveying system in a downward direction according to some embodiments of the present invention. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same components. Although terms such as "first," "second," etc. are used to describe various elements, components, and/or sections, it goes without saying that these elements, components, and/or sections are not limited by these terms. These terms are used merely to distinguish one element, component, or section from another. Accordingly, it goes without saying that the first element, first component, or first section mentioned below may be a second element, second component, or second section within the technical scope of the present invention. The terms used herein are for describing the embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. As used herein, "comprises" and/or "comprising" do not exclude the presence or addition of one or more other components, steps, actions, and/or elements to the mentioned components, steps, actions, and/or elements. FIG. 1 is a plan view illustrating a conveying system in which an MTL device according to some embodiment of the present invention is provided, and FIG. 2 and FIG. 3 are drawings for explaining an MTL device according to some embodiment of the present invention. FIG. 4 to 6 are drawings for explaining a link portion and a guide block of an MTL device according to some embodiment of the present invention. FIG. 7 is a drawing illustrating an auxiliary track and a driving rail facing each other in a conveying system according to some embodiment of the present invention, and FIG. 8 is a drawing illustrating an auxiliary track of a conveyin