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KR-102963036-B1 - A APPARATUS FOR CONTROLLING STOCKER FOR STORING FOUP WITHOUT RACK-MASTER AND A TRANSPOTING SYSTEM USING THE APPARATUS

KR102963036B1KR 102963036 B1KR102963036 B1KR 102963036B1KR-102963036-B1

Abstract

A wafer transfer system using a rack master-free stocker control device for storing FOUPs according to the present invention comprises: a transfer unit including a transfer unit-side communication unit that communicates with a stocker for storing FOUPs, a QR code reader that reads a QR code and extracts information contained in the QR code, and a transfer unit control unit that controls the transfer unit; a stocker-side communication unit that communicates with the transfer unit and manages a plurality of station IDs in a group unit that include information corresponding to a plurality of ports included in the stocker for storing FOUPs, and a stocker control unit that controls the stocker for storing FOUPs and processes the transfer and loading of FOUPs using the plurality of station IDs managed in the group unit.

Inventors

  • 조세환

Assignees

  • 크린팩토메이션 주식회사

Dates

Publication Date
20260511
Application Date
20241106

Claims (19)

  1. A stocker for storing pods, comprising: a shelf unit having a frame and a loading plate mounted so as to be movable in a horizontal direction on the frame; and a switching unit optionally coupled to the shelf unit, formed to tow the loading plate to an unfolded position where a descending pod rests on the loading plate, and to hold the loading plate on the opposite side of the loading plate supported by the frame from the time the loading plate is towed to the unfolded position until it is moved to a storage position located in the internal space of the frame. A transfer unit comprising a transfer unit-side communication unit communicating with the above-mentioned stocker for storing pods, a QR code reader that reads a QR code and extracts information contained in the QR code, and a transfer unit control unit that controls the transfer unit; and A wafer transfer system using a rack master-less FOUP storage stocker control device, comprising: a stocker-side communication unit that communicates with a transfer unit and manages a plurality of station IDs in a group unit, each containing information corresponding to a plurality of ports included in the FOUP storage stocker; and a stocker control unit that controls the FOUP storage stocker and processes the transfer and loading of FOUPs using the plurality of station IDs managed in the group unit.
  2. In Article 1, The above transfer unit is A wafer transfer system using a stocker control device for POO storage without a rack master, which moves to a destination bay corresponding to a commanded destination port, reads the QR code corresponding to the destination bay where the move was completed using the QR code reader, and determines whether the destination bay information included in the commanded destination bay and the read QR code matches to determine whether the wafer has arrived at the destination correctly.
  3. In Article 2, The above transfer unit is, After activating the connection between the communication unit on the transfer unit side and the communication unit on the stoker side, the station ID information corresponding to the destination port is sent to the stoker for storing the pod, and The above-mentioned stocker for storing pods is A wafer transfer system using a stocker control device for storing pods without a rack master, which determines whether transfer loading is possible to a port corresponding to a receiving station ID through the above-mentioned stocker-side communication unit, and if possible, sends a message to the above-mentioned transfer unit indicating that transfer loading is possible to a destination port.
  4. In Paragraph 3, The above-mentioned stocker for storing pods is The loading plate corresponding to the above destination port is moved using a switching unit, and The above transfer unit is A wafer transfer system using a stocker control device for storing FOUPs without a rack master, which transfers FOUPs to a destination port provided on a loading plate moved by the switching unit.
  5. In Article 1, The above QR code is, It includes information on unit names, which are information distinguishing multiple units; bank names, which are information distinguishing banks included in a single unit; and bay names, which are information distinguishing ports included in a single bank based on columns. The above station ID is, A wafer transfer system using a stocker control device for POO storage without a rack master, comprising: a unit name, which is information distinguishing multiple units; a bank name, which is information distinguishing banks included in one unit; a bay name, which is information distinguishing ports included in one bank based on columns; and a level name, which is information distinguishing the layer where ports are located in one bay.
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  7. In Article 1, The above shelf unit is, Formed as a pair located on the same line, The above switching unit is, A wafer transfer system using a stocker control device for POO storage without a rack master, positioned between a pair of the above-mentioned shelf units.
  8. In Article 7, The above switching unit is, A wafer transfer system using a stocker control device for storing pods without a rack master, formed to move in the Y-axis direction (height direction) and then move in the Z-axis direction (horizontal direction) to be coupled with the loading plate of one of the pair of shelf units located on both sides and then towed in the horizontal direction.
  9. In Article 1, The above switching unit is, A chucking part coupled to the above shelf unit; and A wafer transfer system using a stocker control device for storing pods without a rack master, comprising: a moving part that moves the chucking part to change the position of the loading plate coupled to the chucking part to the unfolded position or the storage position.
  10. In Article 9, The above loading plate is, It includes a traction part protruding in the height direction, and The above chucking part is, It is formed with a clamp structure, The above moving part is, A wafer transfer system using a stocker control device for storing pods without a rack master, which moves the chucking part horizontally when the chucking part is moved to the traction part and the traction part is inserted into the clamp structure.
  11. In Article 1, The above shelf unit is, A wafer transfer system using a stocker control device for storing pods without a rack master, further comprising a locking part formed to restrict the movement of the loading plate at the storage position.
  12. In Article 11, The above locking part is, A ball catch installed on the above frame; and A wafer transfer system using a stocker control device for storing pods without a rack master, comprising: an insertion opening formed to be coupled to the ball catch when the loading plate is moved to a storage position.
  13. In Article 1, The above shelf unit is, A wafer transfer system using a stocker control device for storing pods without a rack master, further comprising a guide portion formed to guide a movement path when the above-mentioned loading plate moves in the horizontal direction.
  14. In Article 13, The above guide part is, A first guide portion formed to support the loading plate so as to be horizontally movable relative to the frame; and A wafer transfer system using a stocker control device for storing pods without a rack master, comprising at least one of: a second guide part formed to reduce the eccentricity of the loading plate caused by the traction of the switching unit.
  15. In Article 14, The above-mentioned first guide part is, A rail installed along the horizontal direction on the above frame; and A wafer transfer system using a stocker control device for Poop storage without a rack master, comprising: a slider installed on the loading plate and formed to move along the rail.
  16. In Article 14, The above second guide part is, A rack installed on the above loading plate; and A wafer transfer system using a stocker control device for storing pods without a rack master, comprising: a pinion installed in the frame to correspond to the rack and formed to engage with the rack when the loading plate moves horizontally.
  17. A stocker for storing pods, comprising: a shelf unit having a frame and a loading plate mounted so as to be movable in a horizontal direction on the frame; and a switching unit optionally coupled to the shelf unit, formed to tow the loading plate to an unfolded position where a descending pod rests on the loading plate, and to hold the loading plate on the opposite side of the loading plate supported by the frame from the time the loading plate is towed to the unfolded position until it is moved to a storage position located in the internal space of the frame. A stoker-side communication unit that communicates with a transfer unit and manages, in groups, a plurality of station IDs corresponding to a plurality of ports included in the stoker for storing the pod; and A rack master-less FOUP storage stocker control device comprising a stocker control unit that controls a FOUP storage stocker and processes the transfer and loading of FOUPs using a plurality of station IDs managed in the group unit.
  18. In Article 17, The above-mentioned stocker for storing pods is A stocker control device for storing pods without a rack master, which determines whether transfer loading is possible to a port corresponding to a receiving station ID through the above-mentioned stocker-side communication unit, and if possible, sends a message to the above-mentioned transfer unit indicating that transfer loading is possible to a destination port.
  19. In Article 18, The above-mentioned stocker for storing pods is A rack master-less stocker for storing FOUPs, wherein the transfer unit moves a loading plate corresponding to the destination port using a switching unit so as to transfer the FOUP to a destination port provided on a loading plate moved by the switching unit.

Description

A apparatus for controlling a stocker for storing FOUP without a rack master and a wafer transfer system using the same The present invention relates to a stocker control device without a rack master and a wafer transfer system using the same. Since the process times for each semiconductor manufacturing step, such as wafer deposition and etching, are not uniform, the wafer waits for a certain period due to the time difference between processes before being fed into the next step after one process is completed. Due to time differences in semiconductor processes, it is necessary to store multiple wafers during the waiting period, and the waiting wafers are stored in a FOUP (Front Opening Unified Pod), and a Stocker is a device that receives and stores the FOUP. In conventional stokers, a transfer unit installed along the ceiling would lower the pod to a port, move it to a conveyor, and then transfer the moved pod to a rack master to a storage position on a shelf. In other words, the pod had a movement path connecting the transfer unit - port - conveyor - rack master - shelf. However, in the case of existing stokers, there was a problem in that the efficiency of the overall process system was reduced due to increased travel time and complexity of configuration as they were equipped with multiple travel paths. In addition, the need for multiple drive means, such as conveyors and rack masters, also presented the problem of increased costs due to the increased number of parts. Therefore, measures to resolve these problems are required. FIG. 1 is a drawing illustrating a wafer transfer system using a stocker control device for storing pods without a rack master according to the present invention. FIGS. 2, FIGS. 3 and FIGS. 4 are drawings for illustrating a stocker control device for storing pods without a rack master according to the present invention. FIGS. 5, 6, and 7 are drawings illustrating the process of transferring a FOUP using a wafer transfer system with a stocker control device for FOUP storage without a rack master according to the present invention. FIG. 8 is a conceptual diagram for briefly explaining the operation method of a stoker (1000) according to the present invention. FIGS. 9 and FIGS. 10 are perspective views illustrating the movement state of the stoker (1000) to the deployed position (D) and storage position (A). FIGS. 11 and FIGS. 12 are drawings for explaining the structure of a guide part (150) and a locking part (170) mounted on a shelf unit (100). FIG. 13 is a drawing for explaining the combined structure of the switching unit (300) and the loading plate (130). FIG. 14 is a drawing for explaining a stoker (1000') having a plurality of shelf units (100, 100') according to another embodiment of the present invention. FIG. 15 is a drawing for explaining a traction part (133') installed in the center area of a loading plate (130) according to another embodiment of the present invention and a chucking part (450) extending to the traction part (133'). FIG. 16 is a drawing for explaining a towing part (133) installed on the lower part of a loading plate (130) according to another embodiment of the present invention. FIG. 17 is a drawing for explaining a chucking part (550) configured to rotate and tow a towing part (133) according to another embodiment of the present invention. Hereinafter, a stocker for storing pods according to a preferred embodiment of the present invention will be described in detail with reference to the drawings. In this specification, identical or similar reference numbers are assigned to identical or similar components even in different embodiments, and the description thereof is replaced by the first description. FIG. 1 is a drawing illustrating a wafer transfer system using a stocker control device for storing pods without a rack master according to the present invention. Referring to FIG. 1, a wafer transfer system using a stocker control device for storing pods without a rack master includes a transfer unit (1) and a stocker for storing pods (5). In addition, various other equipment may be included in the wafer transfer system. The transfer unit (1) may include a transfer unit-side communication unit (2), a QR code reader (3), and a transfer unit control unit (4). The communication unit (2) on the transfer unit side can be implemented with various communication devices capable of communicating with the stocker (5) for storing the pod. A QR code reader (3) can read a QR code (91) and extract the information contained therein. The transfer unit control unit (4) can control the components included in the transfer unit overall. The stocker (5) for storing the pod includes a stocker-side communication unit (6) and a stocker control unit (7). The stoker-side communication unit (6) communicates with the transfer unit (1) and can manage in groups by including a station ID containing information corresponding to a plurality of ports included in the stoker for storing pods