KR-102963201-B1 - A method for manufacturing a crucible, an evaporation source, an evaporation method, an evaporation system, and a device

KR102963201B1KR 102963201 B1KR102963201 B1KR 102963201B1KR-102963201-B1

Abstract

A crucible for evaporating a material is described. The crucible comprises a first material compartment configured to contain the material to be evaporated, a first heater for heating the first material compartment, a second material compartment configured to contain the material to be evaporated, and a second heater for heating the second material compartment. A steam induction compartment is provided. The steam induction compartment has a first opening providing a first fluid communication path between the first material compartment and the steam induction compartment, and a second opening providing a second fluid communication path between the second material compartment and the steam induction compartment. Additionally, the steam induction compartment has a third opening connectable to a steam distributor. The crucible further comprises a third heater for heating the steam induction compartment.

Inventors

안지키, 타카시
프랑케, 세바스티안

Assignees

어플라이드 머티어리얼스, 인코포레이티드

Dates

Publication Date: 20260508
Application Date: 20210216

Claims (16)

As a crucible for evaporating materials, A first material compartment configured to contain a material to be evaporated; A first heater surrounding the first material section to heat the first material section; A second material compartment configured to contain a material to be evaporated; A second heater surrounding the second material section to heat the second material section; A vapor guiding compartment having a first opening providing a first fluid communication path between the first material compartment and the vapor guiding compartment, and a second opening providing a second fluid communication path between the second material compartment and the vapor guiding compartment — the vapor guiding compartment is arranged outside the first material compartment and the second material compartment, and the vapor guiding compartment further has a third opening connectable to a vapor distributor —; A third heater surrounding the steam induction compartment to heat the steam induction compartment; and At least one of a partition wall and an orifice for controlling and adjusting the ratio between the deposition rate and the purification rate. including, A crucible for evaporating materials.
In Article 1, At least one of the partition wall and the orifice comprises at least one of the first orifice of the first fluid communication path and the second orifice of the second fluid communication path. A crucible for evaporating materials.
In Article 1 or Article 2, At least one of the partition wall and the orifice comprises the partition wall provided to define fluid conductance between the first material compartment and the second material compartment within the steam induction compartment. A crucible for evaporating materials.
In Paragraph 3, The above partition wall has an opening, A crucible for evaporating materials.
In Paragraph 3, The above partition wall has a slit opening, A crucible for evaporating materials.
As an evaporation source, Crucible according to claim 1; and A steam distributor having fluid communication with the third opening, Evaporation source.
In Article 6, The steam distributor is provided with an inlet port connected to the third opening, and the inlet port is provided between the first end of the steam distributor and the second end of the steam distributor. Evaporation source.
In Article 6, The above steam distributor is provided with an inlet port connected to the third opening, and the inlet port is provided at the first end of the steam distributor, Evaporation source.
In any one of paragraphs 6 through 8, The above steam distributor is, A plurality of outlet nozzles for guiding material vapor to a substrate, Evaporation source.
As an evaporation method, A step of providing a source material to be evaporated in the first material compartment of a crucible; A step of heating the first material compartment while the second material compartment of the crucible is in an idle state to evaporate the source material and produce an evaporated source material; A step of guiding a first portion of the evaporated source material from the first material compartment to a steam distributor and guiding a second portion of the evaporated source material to a second material compartment through a steam induction compartment; A step of heating the second material compartment to evaporate the condensed source material of the second material compartment and producing an evaporated source material; A step of guiding a third portion of the above-described evaporated source material from the second material compartment to the steam distributor; and A step comprising switching the above-mentioned first material compartment to an idle state, Evaporation method.
In Article 10, The method further comprises the step of heating a steam induction section that is in fluid communication with the first material section and the second material section. Evaporation method.
In Article 10 or Article 11, After switching the first material compartment to an idle state, the step of heating the first material compartment to evaporate the condensed source material of the first material compartment to produce an evaporated source material; A step of guiding the above-mentioned evaporated source material from the first material compartment to the steam distributor; and A further step of switching the above-mentioned second material compartment to an idle state, Evaporation method.
As an evaporation source, Crucible; and Includes a controller, The above controller includes a processor and a memory storing instructions, wherein the instructions, when executed by the processor, cause the evaporation source to perform the method according to claim 10. Evaporation source.
In Article 13, The above crucible is a crucible according to claim 1, Evaporation source.
As a vacuum processing device, vacuum deposition chamber; and A evaporation source according to any one of claims 6 to 8 or 13 located within the vacuum deposition chamber, Vacuum processing device.
A method for manufacturing a device having a layer of organic material, A step of operating a crucible according to the evaporation method of claim 10 or 11; and A step comprising depositing a layer of organic material on a substrate, A method for manufacturing a device having a layer of organic material.

Description

A method for manufacturing a crucible, an evaporation source, an evaporation method, an evaporation system, and a device [0001] The present disclosure relates to apparatuses, sources, and methods for the evaporation of materials, for example, organic materials. Embodiments of the present disclosure relate particularly to methods, sources, and apparatuses for evaporating materials, particularly organic materials, for producing organic light-emitting diodes (OLEDs) in a vacuum deposition system. In particular, embodiments of the present disclosure relate to a crucible, an evaporation source, an evaporation method, a vacuum processing system, and a method for manufacturing a device. [0002] Techniques for depositing layers on a substrate involve the evaporation of materials from an evaporation source. For example, evaporation sources are tools for the production of other electronic or optical devices, including organic light-emitting diodes (OLEDs) and stacks of deposited materials. OLEDs are a special type of light-emitting diode in which the emissive layer comprises a thin film of a specific organic compound. Organic light-emitting diodes (OLEDs) are used in the manufacture of television screens, computer monitors, mobile phones, other handheld devices, etc., for displaying information. OLEDs can also be used for general space lighting. The range of colors, brightness, and viewing angles possible with OLED displays is greater than that of traditional LCD displays because OLED pixels emit light directly and do not require a backlight. Therefore, the energy consumption of OLED displays is much lower than that of traditional LCD displays. Furthermore, the fact that OLEDs can be manufactured on flexible substrates leads to additional applications. Evaporation sources may also be used for the deposition of other material layers, such as metal layers, on substrates, such as on glass substrates or on semiconductor wafers. [0003] Evaporation sources typically include an evaporation device configured to evaporate a source material by heating the source material to a temperature above the evaporation temperature of the source material. The evaporated source material can be propagated through a vapor distribution pipe configured to direct the evaporated source material onto a substrate. [0004] During processing, the substrate may be supported on a carrier configured to hold the substrate. For example, the substrate may be held in alignment with a mask. Vapor from an evaporation source is directed toward the substrate, for example, through the mask, to form a film such as a patterned film on the substrate. One or more materials may be deposited on the substrate to create small pixels that can be individually addressed to create functional devices such as full-color displays. [0005] The internal volume of the evaporation device can be heated to evaporate the source material. The source material may be arranged in a solid form inside the evaporation device, for example, as a powder or granule. However, it is difficult to ensure a predetermined evaporation rate of the source material over a long period of time. Furthermore, source materials can be temperature-sensitive, and consequently, if the source material is exposed to high temperatures inside the evaporation device, especially over a long period of time, there is a risk of chemical reactions involving the source material within the evaporation device. If any impurities caused by any chemical reaction, for example, decomposed OLED material, reach the substrate, it can lead to a decrease in the luminous efficiency and lifespan of the OLED device. If any chemical reaction, for example, polymerization and oxidation, occurs that produces impurities with a lower vapor pressure than the original material, at least some of the impurities may remain in the crucible and cover the surface area of the original material. This results in higher temperatures to maintain the predetermined evaporation rate, and thus, the risk of degradation of the OLED device performance may increase. [0006] In light of the above, it would be beneficial to provide an improved deposition method and an improved deposition apparatus that ensure high-quality deposition of evaporated materials, particularly for the manufacture of OLED devices. Specifically, the risk of containing impurities in the substrate should be reduced while ensuring a predetermined evaporation rate over a long period of time. [0007] With the foregoing in mind, a crucible, an evaporation method, an evaporation apparatus, an evaporation system, and an evaporation source according to the independent claims are provided. Additional advantages, features, embodiments and details are apparent from the dependent claims, description and drawings. [0008] According to one embodiment, a crucible for evaporating a material is provided. The crucible includes a first material compartment configured to contain the material to be evaporated, a first