KR-102963286-B1 - APPARATUS FOR SUPPLYING CHEMICAL AND APPARATUS FOR PROCESSING SUBSTRATE HAVING THE SAME

KR102963286B1KR 102963286 B1KR102963286 B1KR 102963286B1KR-102963286-B1

Abstract

A liquid medicine supply device capable of supplying liquid medicine to a substrate may include a liquid medicine storage unit, a pumping unit, and a supply line. The liquid medicine storage unit may be configured to have a single tank structure to receive and store the liquid medicine. The pumping unit may be configured to perform a pumping operation to supply the liquid medicine from the liquid medicine storage unit to the substrate. The supply line may be configured to provide a path for supplying the liquid medicine from the liquid medicine storage unit to the substrate via the pumping unit, wherein the liquid medicine storage unit and the pumping unit within the supply line may be connected by a straight supply line having a straight structure.

Inventors

유재혁
최문순
하도경
임채영

Assignees

세메스 주식회사

Dates

Publication Date: 20260511
Application Date: 20201229

Claims (20)

In a drug solution supply device that supplies a drug solution to a substrate, A liquid storage unit configured to have a single tank structure to receive and store the above liquid; A pumping unit configured to perform a pumping operation to supply the drug solution from the drug solution storage unit to the substrate; and A supply line configured to provide a path for supplying the drug solution from the drug solution storage unit to the substrate via the pumping unit, wherein The supply line above is configured such that the liquid storage unit and the pumping unit are connected by a straight supply line having a straight structure, The above liquid storage unit is provided with only one, and the single liquid storage unit is connected to the storage tank so that the liquid can be supplied from an external storage tank, and A liquid supply device characterized in that the straight supply line is provided to have a straight path through which the liquid from the liquid storage unit falls vertically at the bottom of the liquid storage unit, and the pumping unit is provided to be located on the straight supply line in the vertically falling straight path.
In Article 1, A liquid medicine supply device characterized in that the above-mentioned straight supply line is provided to have a relatively large diameter compared to other supply lines connected to the rear end of the pumping section.
In Article 1, A drug supply device characterized by further comprising, at the downstream end of the pumping section, a filter for filtering the drug solution and a bubble cutter for removing bubbles remaining in the drug solution.
In Paragraph 3, A liquid supply device characterized in that the bubble cutter is positioned immediately after the filter.
In Article 1, A drug supply device characterized by further having a temperature control unit for adjusting the temperature of the drug solution at the downstream end of the pumping unit.
In Article 1, A drug supply device characterized by further comprising a negative pressure maintaining unit that maintains the interior of the drug storage unit at a negative pressure.
In Article 1, A drug supply device characterized in that the above drug solution is isopropyl alcohol.
In a substrate processing apparatus that performs a processing process on a substrate, A process chamber configured to provide a space for positioning the substrate and performing a processing process on the substrate; and A drug solution supply device configured to supply a drug solution to the substrate located in the process chamber, wherein The above liquid supply device comprises a liquid storage unit configured to have a single tank structure to receive and store the liquid, a pumping unit configured to perform a pumping operation to supply the liquid from the liquid storage unit to the substrate, and a supply line configured to provide a path for supplying the liquid from the liquid storage unit to the substrate via the pumping unit, wherein the liquid storage unit and the pumping unit are connected by a straight supply line having a straight structure. A substrate processing apparatus characterized in that the above-mentioned liquid storage unit is provided with only one liquid storage unit, and the above-mentioned liquid storage unit is provided to be connected to the storage tank so that the liquid can be supplied from an external storage tank, and the above-mentioned straight supply line is provided to have a straight path through which the liquid from the liquid storage unit falls vertically at the bottom of the liquid storage unit, and the above-mentioned pumping unit is provided to be located on the straight supply line in the vertically falling straight path.
In Article 8, A substrate processing apparatus characterized by the above process chamber being equipped with a rotating chuck that supports and rotates the substrate when the substrate is positioned.
In Article 8, A substrate processing device characterized in that the above-mentioned straight supply line is provided to have a relatively large diameter compared to other supply lines connected to the rear end of the pumping section.
In Article 8, A substrate processing device characterized by further comprising, at the downstream end of the pumping unit, a filter for filtering the chemical solution and a bubble cutter for removing bubbles remaining in the chemical solution.
In Article 11, A substrate processing device characterized in that the bubble cutter is positioned immediately after the filter.
In Article 8, A substrate processing device characterized by further having a temperature control unit for adjusting the temperature of the chemical solution at the downstream end of the pumping unit.
In Article 8, A substrate processing device characterized by further comprising a negative pressure maintaining unit that maintains the interior of the above-mentioned liquid storage unit at a negative pressure.
In Article 8, A substrate processing apparatus characterized in that the above-mentioned chemical solution is isopropyl alcohol.
In a substrate processing apparatus that performs a cleaning process using isopropyl alcohol to clean a substrate, A process chamber provided with a rotating chuck for supporting and rotating a substrate, and a space for performing a cleaning process for cleaning the substrate on the rotating chuck; and A drug solution supply device configured to supply isopropyl alcohol to the substrate located in the process chamber, wherein The above liquid supply device comprises a liquid storage unit configured to have a single tank structure to receive and store the isopropyl alcohol, a pumping unit configured to perform a pumping operation to supply the isopropyl alcohol from the liquid storage unit to the substrate, and a supply line configured to provide a path for supplying the isopropyl alcohol from the liquid storage unit to the substrate via the pumping unit, wherein the liquid storage unit and the pumping unit among the supply lines are configured to be connected by a straight supply line having a straight structure. A substrate processing apparatus characterized in that the above-mentioned liquid storage unit is provided with only one liquid storage unit, and the above-mentioned liquid storage unit is connected to the storage tank so that the isopropyl alcohol can be supplied from an external storage tank having a relatively larger capacity than the above-mentioned liquid storage unit, and the above-mentioned straight supply line is provided to have a straight path through which the liquid from the above-mentioned liquid storage unit falls vertically at the bottom of the above-mentioned liquid storage unit, and the above-mentioned pumping unit is provided to be located on the straight supply line in the vertically falling straight path.
In Article 16, A substrate processing device characterized in that the above-mentioned straight supply line is provided to have a relatively large diameter compared to other supply lines connected to the rear end of the pumping section.
In Article 16, A substrate processing apparatus characterized by further comprising, at the rear end of the pumping section, a filter for filtering the isopropyl alcohol and a bubble cutter for removing bubbles remaining in the isopropyl alcohol, wherein the bubble cutter is positioned immediately after the filter.
In Article 16, A substrate processing apparatus characterized by further having a temperature control unit for adjusting the temperature of the isopropyl alcohol at the downstream end of the pumping unit.
In Article 16, A substrate processing device characterized by further comprising a negative pressure maintaining unit that maintains the interior of the above-mentioned liquid storage unit at a negative pressure.

Description

Apparatus for supplying chemical solution and apparatus for processing substrate having the same The present invention relates to a chemical solution supply device and a substrate processing device including the same. More specifically, the present invention relates to a chemical solution supply device for supplying a chemical solution such as isopropyl alcohol and a substrate processing device for performing a substrate processing process using isopropyl alcohol. In the manufacture of integrated circuit devices such as semiconductor devices, a cleaning process is performed to remove particles remaining on the substrate, and in wet cleaning, chemicals such as isopropyl alcohol (IPA) are mainly used. The supply of the aforementioned liquid can be achieved by using a liquid supply device comprising a liquid storage unit having a dual tank structure, a pumping unit that performs a pumping operation to supply the liquid from the liquid storage unit to a substrate, and a supply line that provides a path for supplying the liquid from the liquid storage unit to the substrate via the pumping unit. However, since the liquid storage unit has a dual-tank structure, there may be a problem where excessive bubbles are generated when switching the liquid supply from one liquid storage unit to the other. In addition, the supply line between the liquid storage section and the pumping section may be configured to have a structure that bends at several places. Compared to the liquid passing through the straight section, the probability of bubbles occurring in the liquid passing through the bending section may be relatively higher, and this may lead to a problem where excessive bubbles occur. In addition, a filter unit for filtering the liquid may be provided when supplying the liquid, but there may be a problem in that excessive bubbles may be generated in the liquid passing through the filter unit due to the differential pressure generated during filtering in the filter unit. In addition, N2 gas and the like are constantly supplied to the chemical storage unit to purge it; however, due to the supply of N2 gas and the like, the concentration of dissolved gas in the chemical storage unit may increase, which may cause a problem in that it leads to the easy formation of bubbles. FIG. 1 is a schematic diagram illustrating a liquid medicine supply device according to exemplary embodiments of the present invention. FIG. 2 is a schematic diagram illustrating a substrate processing apparatus according to exemplary embodiments of the present invention. The present invention is susceptible to various modifications and may take various forms, and embodiments are to be described in detail in the text. However, this is not intended to limit the invention to the specific disclosed forms, and it should be understood that the invention includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention. Similar reference numerals have been used for similar components in the description of each figure. Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. Such terms are used solely for the purpose of distinguishing one component from another. The terms used in this application are used only to describe specific embodiments and are not intended to limit the invention. A singular expression includes a plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "consisting of" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application. Furthermore, exemplary embodiments will be described in more detail with reference to the attached drawings. Identical components in the drawings are given the same reference numerals, and redundant descriptions of identical components are omitted. FIG. 1 is a schematic diagram illustrating a liquid medicine supply device according to exemplary embodiments of the present invention. Referring to FIG. 1, a chemical solution supply device (100) according to exemplary embodiments of the present invention is intended to supply a chemical solution to a substrate during the manufacture of an inte