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KR-102963425-B1 - Overhead hoist transport

KR102963425B1KR 102963425 B1KR102963425 B1KR 102963425B1KR-102963425-B1

Abstract

According to exemplary embodiments, an overhead hoist transfer device for transferring a transport object in a manufacturing process of a semiconductor device or a display device is provided. The overhead hoist transfer device comprises: a transport vehicle configured to transfer the transport object having a space for transferring the transport object; a travel rail configured to provide a travel path to the transport vehicle; a battery installed on the transport vehicle and configured to supply power to the transport vehicle; a wireless power transmitter installed in a low-speed area of the travel rail and configured to charge the battery via a wireless power transmission method; and a wireless power receiver installed on the transport vehicle and configured to charge the battery via a wireless power transmission method.

Inventors

  • 이성호

Assignees

  • 세메스 주식회사

Dates

Publication Date
20260508
Application Date
20220316

Claims (7)

  1. A transport vehicle comprising a lifting module configured to transport said containers having a space for loading said containers containing substrates and configured to transport said containers, and configured so that said containers can move up and down; A travel path for the above-mentioned transport vehicle, and a driving rail installed on the ceiling; A battery installed in the above-mentioned transport vehicle and configured to supply power to the above-mentioned transport vehicle; A wireless power transmitter installed only in the low-speed area of the above-mentioned driving rail and configured to charge the battery using a wireless power transmission method; and A wireless power receiver installed in the above-mentioned transport vehicle and configured to charge the battery using a wireless power transmission method; is included, The above battery is charged when the above transport vehicle operates at a low speed in the above low speed area, and The overhead hoist transfer device is characterized by comprising a wireless power transmitter, a power supply attached to the travel rail, and a pair of second coils positioned along each of the first branched travel line, the second branched travel line, and the curved area of the travel rail, facing each other.
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  4. In paragraph 1, The above wireless power receiver is, An overhead hoist transfer device characterized by including a pair of first coils installed on the above-mentioned transfer vehicle.
  5. In paragraph 4, The first coils are configured to generate an induced current from a changing magnetic field, and An overhead hoist transfer device characterized in that the second coils are configured to generate a changing magnetic field by receiving alternating current from a power supply.
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Description

Overhead hoist transport The present invention relates to an overhead hoist transport device (hereinafter referred to as the "OHT device"). More specifically, it relates to an OHT device for transporting a transported object in a manufacturing process of a semiconductor device or a display device. In the manufacturing process of semiconductor devices or display devices, transported materials such as wafers, glass substrates, printed circuit boards, semiconductor devices, and display devices can be transported via an unmanned transport system such as an OHT device. In particular, the OHT device may include a transport vehicle configured to move along a travel rail installed on the ceiling of a cleanroom for transporting the materials, and power supply to the transport vehicle may be provided via a wireless power transmission method from a power supply cable installed along the travel rail. FIG. 1 is a conceptual diagram schematically illustrating an OHT device according to one embodiment of the present invention. Figures 2 and 3 are conceptual diagrams showing the transport vehicle and the running rail in more detail in the OHT device of Figure 1. FIG. 4 is a diagram illustrating the branch regions of FIG. 1 and the wireless power transmitters installed in the branch regions. FIG. 5 is a diagram illustrating the curved regions of FIG. 1 and the wireless power transmitters installed in the curved regions. Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Identical components in the drawings are denoted by the same reference numerals, and redundant descriptions thereof are omitted. FIG. 1 is a conceptual diagram schematically illustrating an OHT device ( 10 ) according to an embodiment of the present invention, wherein the OHT device ( 10 ) can be used to transport various types of transport materials in a manufacturing process of a semiconductor device or a display device. Generally, a substrate that is finally processed can be completed by repeatedly performing a plurality of manufacturing processes on a substrate such as a wafer, and when a manufacturing process is completed at a specific semiconductor manufacturing facility, the substrate is transported to a facility for the next manufacturing process. Here, the substrate may be transported while stored in a container capable of accommodating a plurality of substrates, for example, a FOUP (front opening unified pod, hereinafter FOUP). The container accommodating the substrates may be transported by the OHT device ( 10 ). Referring to FIG. 1, the OHT device ( 10 ) may include manufacturing equipment (11), a running rail (200), and a transport vehicle (100). The manufacturing equipment (11) may be configured to perform a process in a semiconductor or display manufacturing line. The run rail (200) may be configured to provide a transport path for transporting goods between manufacturing facilities (11). The run rail (200) provides a path to the transport vehicle (100) and may vary in shape depending on the arrangement of the manufacturing facilities (11). According to an exemplary embodiment, a central passage is formed, and existing lines (251) and first branched run lines (252) may be included in the central passage. According to exemplary embodiments, the manufacturing facilities (11) may be arranged along the second branched run lines (253) in the central passage. According to exemplary embodiments, the manufacturing facilities (11) may be arranged facing each other along curved areas (260). The transport vehicle (100) can be configured to transport a container containing substrates along a running rail (200) to manufacturing facilities (11) for the next manufacturing process. FIGS. 2 and FIGS. 3 are conceptual diagrams showing the transport vehicle (100) and the driving rail (200) in more detail in the OHT device ( 10 ) of FIGS. 1. When the direction in which the driving rail (200) extends is defined as the X direction, the direction perpendicular to the X direction is defined as the Y direction, and the direction perpendicular to each of the X direction and the Y direction is defined as the Z direction, FIGS. 2 is a front view of the transport vehicle (100) and the driving rail (200) viewed from the Y direction, and FIGS. 3 is a side view of the transport vehicle (100) and the driving rail (200) viewed from the X direction. Referring to FIGS. 2 and 3, the transport vehicle (100) may be configured to include a driving module (150), a lifting module (160), a wireless power receiver (110), and a battery (130). The driving module (150) can enable the transport vehicle (100) to move on the driving rail (200). The lifting module (160) can be configured to be connected in a suspension manner below the driving module (150) via a rotating shaft. According to exemplary embodiments, the lifting module (160) can be configured so that containers holding substrates can move up and down. The batt