KR-102963428-B1 - Overhead hoist transport

KR102963428B1KR 102963428 B1KR102963428 B1KR 102963428B1KR-102963428-B1

Abstract

The technical concept of the present invention provides an overhead hoist transfer device comprising: a conveyor transfer vehicle configured to transport said conveyor having a space for transferring said conveyor; a travel rail provided along the ceiling of a semiconductor manufacturing line and providing a movement path for said conveyor transfer vehicle; a two-dimensional code repeatedly arranged at a first interval on said travel rail and containing stop tag information and travel tag information; and a reader located outside said conveyor transfer vehicle and coupled to the outside of said conveyor transfer vehicle, configured to move together with said conveyor transfer vehicle as the conveyor transfer vehicle moves along said travel rail and to read said two-dimensional code.

Inventors

이준호
박노재
강옥경
이성현
이성호

Assignees

세메스 주식회사

Dates

Publication Date: 20260508
Application Date: 20220701

Claims (10)

A transport vehicle configured to transport said transport vehicle having a space for loading said transport vehicle; A travel rail provided along the ceiling of a semiconductor manufacturing line, which provides a movement path for the above-mentioned transport vehicle; A two-dimensional code repeatedly arranged at first intervals on the above-mentioned driving rail, containing stop tag information and driving tag information; and A reader coupled to the exterior of the above-mentioned conveyor transport vehicle and configured to read the two-dimensional code while moving together as the above-mentioned conveyor transport vehicle moves along the driving rail; An overhead hoist transfer device characterized in that the first interval is an interval in which the reader simultaneously reads at least two two-dimensional codes.
In Article 1, The above stop tag information includes location information of the manufacturing facility that loads and transfers the above-mentioned return material, and The above driving tag information includes location information of the moving conveyor transport vehicle. Overhead hoist transfer device featuring
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In Article 1, The above first interval is 50mm to 150mm. Overhead hoist transfer device featuring
In Article 1, The above-mentioned driving rail includes a first rail and a second rail to support both sides of the above-mentioned conveyor transport vehicle, and The two-dimensional code is repeatedly arranged at a first interval on one of the first rail and the second rail. Overhead hoist transfer device featuring
In Article 1, The above-mentioned driving rail includes a first rail and a second rail to support both sides of the above-mentioned conveyor transport vehicle, and The two-dimensional code is repeatedly placed on the first rail and the second rail, and The two-dimensional code placed on the first rail and the two-dimensional code placed on the second rail are arranged to face each other. An overhead hoist transfer device characterized by the following.
In Article 1, The above-mentioned driving rail includes a first rail and a second rail to support both sides of the above-mentioned conveyor transport vehicle, and The two-dimensional code is repeatedly placed on the first rail and the second rail, and The two-dimensional code placed on the first rail and the two-dimensional code placed on the second rail are arranged to be offset from each other. An overhead hoist transfer device characterized by the following.
In Article 1, A mapmaker controller configured to collect the number and sequence of the above 2D code, store the position of the above-mentioned driving rail, and adjust the driving speed of the above-mentioned transport vehicle An overhead hoist transfer device including additional components.
In Article 1, A plurality of cameras installed on the ceiling of the semiconductor manufacturing line and configured to photograph the manufacturing equipment; and An auto-teaching controller configured to control the driving of the conveyor transport vehicle by modifying and storing the position information of the manufacturing equipment measured by the camera in the above 2D code An overhead hoist transfer device including additional components.
A transport vehicle configured to transport said transport vehicle having a space for loading said transport vehicle; A driving rail comprising a first rail and a second rail to provide a movement path for the above-mentioned conveyor transport vehicle, is provided along the ceiling of a semiconductor manufacturing line, and supports both sides of the above-mentioned conveyor transport vehicle; A plurality of cameras installed on the ceiling of the semiconductor manufacturing line and configured to photograph the manufacturing equipment; A two-dimensional code repeatedly arranged at a first interval on the above-mentioned driving rail, containing stop tag information and driving tag information; A reader coupled to the exterior of the above-mentioned conveyor transport vehicle, configured to move together with the above-mentioned conveyor transport vehicle as it moves along the driving rail and to read the above-mentioned two-dimensional code; A mapmaker controller configured to collect the number and sequence of the above 2D code, store the driving rail position, and adjust the driving speed of the above-mentioned transport vehicle; and An auto-teaching controller to control the driving of the conveyor transport vehicle by modifying and storing the position information of the manufacturing facility measured by the camera in the above 2D code; Includes, The above stop tag information includes location information of a manufacturing facility that loads and transfers the above-mentioned return, and the above-mentioned driving tag information includes location information of a vehicle that transports the above-mentioned return while in motion. The first interval mentioned above is 50mm to 150mm, and The two-dimensional code placed on the first rail and the two-dimensional code placed on the second rail are arranged to be offset from each other. Overhead hoist transfer device featuring

Description

Overhead hoist transport The present invention relates to an overhead hoist transfer device. More specifically, it relates to an overhead hoist transfer device for transferring a transported object in a manufacturing process of a semiconductor device or a display device. In the manufacturing process of semiconductor devices or display devices, transported materials such as wafers, glass substrates, printed circuit boards, semiconductor devices, and display devices can be transported via an unmanned transport system such as an overhead hoist transport device. In particular, the overhead hoist transport device may include a transport vehicle and a travel rail configured to move along a travel rail installed on the ceiling of a cleanroom for transporting the transported materials. FIG. 1 is a conceptual diagram schematically illustrating an overhead hoist transfer device according to one embodiment of the present invention. Figures 2 and 3 are configuration diagrams showing the overhead hoist transfer device of Figure 1 in more detail. FIGS. 4 to 6 are configuration diagrams showing in detail the travel rail and two-dimensional code of an overhead hoist transfer device according to one embodiment of the present invention. FIG. 7 is a conceptual diagram schematically illustrating an overhead hoist transfer device according to one embodiment of the present invention. Figure 8 is a configuration diagram showing the overhead hoist transfer device of Figure 7 in more detail. FIG. 9 is a conceptual diagram schematically illustrating an overhead hoist transfer device according to one embodiment of the present invention. FIG. 10 is a configuration diagram showing the overhead hoist transfer device of FIG. 9 in more detail. FIG. 11 is a conceptual diagram schematically illustrating an overhead hoist transfer device according to one embodiment of the present invention. FIG. 12 is a configuration diagram showing the overhead hoist transfer device of FIG. 11 in more detail. The terms used in these embodiments have been selected to be as widely used and general as possible, taking into account the functions within these embodiments; however, these terms may vary depending on the intent of those skilled in the art, case law, the emergence of new technologies, etc. Additionally, in specific cases, the applicant has arbitrarily selected terms, and in such cases, their meanings will be described in detail in the relevant sections. Therefore, the terms used in these embodiments should be defined not merely by their names, but based on their meanings and the content throughout these embodiments. The embodiments are subject to various modifications and may take various forms; therefore, some embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the embodiments to the specific disclosed forms, and it should be understood that the embodiments include all modifications, equivalents, and substitutions that fall within the spirit and scope of the embodiments. The terms used herein are for the description of the embodiments only and are not intended to limit the embodiments. FIG. 1 is a conceptual diagram schematically illustrating an overhead hoist transfer device according to an embodiment of the present invention. FIG. 2 and FIG. 3 are configuration diagrams showing the overhead hoist transfer device of FIG. 1 in more detail. Referring to FIG. 1, the overhead hoist transfer device (10) may include a conveyor transfer vehicle (100), a travel rail (200), a two-dimensional code (230), and a reader (300). The transport vehicle (100) may have a space for transferring the transport. The transport vehicle may be configured to transport the transport. The transport includes wafers, glass substrates, printed circuit boards, semiconductor devices, display devices, etc., used in the manufacturing process of semiconductor devices or display devices. The travel rail (200) may be configured to provide a travel path for transporting materials to the manufacturing facility (11). The travel rail (200) may provide a travel path to the material transport vehicle (100). Additionally, the travel rail may be provided along the ceiling of the semiconductor manufacturing line and may vary in shape depending on the layout of the manufacturing facility (11). The overhead hoist transfer device (10) may include a plurality of two-dimensional codes (230). The two-dimensional codes (230) may be repeatedly arranged on the travel rail (200) at first intervals. The two-dimensional codes (230) may include stop tag information and travel tag information. In some embodiments, the two-dimensional codes (230) may be Quick Response Codes (QR codes). The above stop tag information may include location information of the manufacturing facility (11) that transfers the above-mentioned material. The above-mentioned driving tag information may include location information of the moving material transport vehicle (100). The