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KR-102963980-B1 - Substrate support module and substrate processing apparatus having the same

KR102963980B1KR 102963980 B1KR102963980 B1KR 102963980B1KR-102963980-B1

Abstract

The present invention relates to a substrate support module and a substrate processing apparatus including the same, and more specifically, to a substrate support module that supports a substrate and a substrate processing apparatus including the same. The present invention discloses a substrate support module for supporting a substrate (1), comprising: a drive support pin portion (200) rotatably provided to support the substrate (1); and a rotation drive portion (300) that rotates the drive support pin portion (200) so that the drive support pin portion (200) changes between an upright state in which it can support the substrate (1) and a non-upright state in which it does not contact the substrate (1). The rotation drive portion (300) comprises a guide rotation shaft (310) installed to rotate integrally with the drive support pin portion (200), and a rotation drive source (320) coupled to the end of the guide rotation shaft (310) to rotate the guide rotation shaft (310).

Inventors

  • 이희운

Assignees

  • 주식회사 원익아이피에스

Dates

Publication Date
20260512
Application Date
20211208

Claims (18)

  1. As a substrate support module for supporting a substrate (1), A driving support pin portion (200) provided to be rotatable for supporting the above substrate (1); The device includes a rotary drive unit (300) that rotates the drive support pin unit (200) so that the drive support pin unit (200) changes between an upright state in which it can be supported on the substrate (1) and a non-upright state in which it is prevented from contacting the substrate (1). The above rotary drive unit (300) is, It includes a guide rotation shaft (310) installed to rotate integrally with the drive support pin part (200), and a rotation drive source (320) coupled to the end of the guide rotation shaft (310) to drive the guide rotation shaft (310) to rotate. A substrate support module further comprising a substrate support assembly (60) including a base plate (50), a support plate portion (100) installed on the base plate (50), and a drive support pin portion (200) rotatably installed on the support plate portion (100).
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  3. In claim 1, The above substrate support assembly (60) is, A substrate support module characterized by being capable of linear movement along the above guide rotation axis (310).
  4. In claim 3, The above substrate support assembly (60) is provided in multiple numbers, A plurality of the above substrate support assemblies (60) are, It includes a first substrate support assembly (61) installed on one side of the base plate (50) in a first direction, and a second substrate support assembly (62) installed on the other side of the base plate (50) spaced apart from the first substrate support assembly (61) and facing each other. The first substrate support assembly (61) and the second substrate support assembly (62) are, A substrate support module characterized by sharing the above-mentioned rotary drive unit (300).
  5. In claim 4, A plurality of the above substrate support assemblies (60) are, It further includes a third substrate support assembly (63) installed on one side of the base plate (50) in a second direction intersecting the first direction, and a fourth substrate support assembly (64) installed on the other side of the base plate (50). The first substrate support assembly (61) and the second substrate support assembly (62) are, A first guide rotation shaft (318) that is installed extending in the first direction and a first rotation drive source (328) that rotates the first guide rotation shaft (318) at the end of the first guide rotation shaft (318) are shared, The above third substrate support assembly (63) and the above fourth substrate support assembly (64) are, A substrate support module characterized by sharing a second guide rotation shaft (319) that is installed extending in the second direction and a second rotation drive source (329) that rotates the second guide rotation shaft (319) at the end of the second guide rotation shaft (319).
  6. In claim 5, The above first direction and the above second direction are, A substrate support module characterized by being orthogonal.
  7. In claim 5, The first substrate support assembly (61) and the second substrate support assembly (62) are, A substrate support module characterized by linear movement along the first guide rotation axis (318) while maintaining or varying the spacing between them.
  8. In claim 5, The above third substrate support assembly (63) and the above fourth substrate support assembly (64) are, A substrate support module characterized by maintaining or varying the spacing between the two guide rotation axes to move linearly along the second guide rotation axis (319).
  9. In claim 1, The above support plate portion (100) is, A substrate support module characterized by including a support plate (110) on which the above-mentioned drive support pin portion (200) is installed, and a linear drive portion (120) installed on the above-mentioned base plate (50) to linearly move the support plate (110).
  10. In claim 9, The above linear drive unit (120) is, A substrate support module characterized by including a mover (121) that moves in conjunction with the support plate (110), and a stator (122) that forms a movement path in the direction in which the guide rotation axis (310) extends and drives the mover (121) through electromagnetic force with the mover (121).
  11. As a substrate support module for supporting a substrate (1), A driving support pin portion (200) provided to be rotatable for supporting the above substrate (1); The device includes a rotary drive unit (300) that rotates the drive support pin unit (200) so that the drive support pin unit (200) changes between an upright state in which it can be supported on the substrate (1) and a non-upright state in which it is prevented from contacting the substrate (1). The above rotary drive unit (300) is, It includes a guide rotation shaft (310) installed to rotate integrally with the drive support pin part (200), and a rotation drive source (320) coupled to the end of the guide rotation shaft (310) to drive the guide rotation shaft (310) to rotate. The above drive support pin part (200) is, A substrate support module characterized by comprising: a vertical support member (210) installed vertically to support the guide rotation shaft (310); a ball spline nut part (220) fixedly coupled to the guide rotation shaft (310) to rotate integrally and capable of linear movement along the guide rotation shaft (310); a drive support pin fastening part (230) fixedly coupled to the ball spline nut part (220) to rotate integrally and installed to rotate on the vertical support member (210); and a substrate support pin (240) fixedly coupled to the drive support pin fastening part (230) to rotate.
  12. In claim 11, The above vertical support (210) is, A through hole (211) is provided through which the guide rotation shaft (310) passes and is installed. The above drive support pin fastening part (230) is, A substrate support module characterized by being joined to at least a portion of the outer surface of the ball spline nut portion (220), and having a portion rotatably inserted and installed in the through hole (211).
  13. As a substrate support module for supporting a substrate (1), A driving support pin portion (200) provided to be rotatable for supporting the above substrate (1); The device includes a rotary drive unit (300) that rotates the drive support pin unit (200) so that the drive support pin unit (200) changes between an upright state in which it can be supported on the substrate (1) and a non-upright state in which it is prevented from contacting the substrate (1). The above rotary drive unit (300) is, It includes a guide rotation shaft (310) installed to rotate integrally with the drive support pin part (200), and a rotation drive source (320) coupled to the end of the guide rotation shaft (310) to drive the guide rotation shaft (310) to rotate. The above rotary drive unit (300) is, A substrate support module characterized by including a first support frame (330) provided on one side and having the rotary drive source (320) installed thereon, a second support frame (340) provided on the other side opposite to the first support frame (330), and a rotary shaft fixing part (350) installed on the second support frame (340) to fix the end of the guide rotary shaft (310).
  14. A chamber (10) forming an internal space in which a substrate (1) is accommodated; A substrate processing device characterized by including at least one substrate support module (20) according to any one of claims 1, 3 to 13, which is installed in the internal space and supports the substrate (1).
  15. In claim 14, The above substrate support module (20) is, Supporting the center side of the above substrate (1), A substrate processing device characterized by additionally including a substrate support member (30) installed in the internal space and supporting the edge side of the substrate (1).
  16. In claim 14, A substrate processing device characterized by additionally including a grip portion installed on the upper side of the substrate support module (20) in the internal space above, for chucking or de-chucking the substrate (1) supported through the substrate support module (20).
  17. In claim 16, The above grip portion is, The substrate (1) is chucked by contacting the upper surface of the substrate (1), The above substrate support module (20) is, A substrate processing device characterized by supporting the substrate (1) by contacting the lower surface (S1) of the substrate (1).
  18. In claim 17, The above substrate (1) is, It includes a plurality of element regions (2) formed on the lower surface (S1) and arranged in a grid shape, and a non-element region (S2) arranged between the plurality of element regions (2). The above substrate support module (20) is, A substrate processing device characterized by supporting the substrate (1) by contacting the above-mentioned non-element region (S2).

Description

Substrate support module and substrate processing apparatus having the same The present invention relates to a substrate support module and a substrate processing apparatus including the same, and more specifically, to a substrate support module that supports a substrate and a substrate processing apparatus including the same. Generally, for substrate processing, the substrate is supported by a substrate support module, and the substrate is placed and fixed to a substrate support in the form of an electrostatic chuck or vacuum chuck by moving the substrate support module up and down to perform the processing. At this time, the substrate to be processed can be placed on the substrate support part by lowering the substrate support module while the substrate to be processed is supported through the substrate support module, and thus, substrate processing can be performed on the substrate in a face-up state. Meanwhile, in the case of a substrate in a face-up state where the processing surface of the substrate faces upward, there may be some problems where floating foreign substances are re-adsorbed onto the processing surface of the substrate and contaminate the substrate. Therefore, while the substrate is supported through the substrate support module, the substrate support module can be raised so that the substrate is fixed to the substrate support in a face-down state so that the processing surface of the substrate faces downward. In cases where a substrate is supported to be fixed to a substrate support in this manner, it is necessary to support a specific location of the substrate. This specific location may vary depending on the type of substrate being fed in, and in the case of a substrate processed in the aforementioned face-down state, the processing surface must be supported, which presents a problem in that the support location is very limited. In other words, the support positions for the substrate are very limited and may vary depending on the substrate being inserted; however, there is a problem in that the processing surface is contaminated or the substrate is damaged because the substrate is not supported by precisely identifying these support positions. In particular, in situations where the support positions for the substrate are very limited, the support position varies depending on the input substrate. Since the support status at a specific location depends on the input substrate, there is a problem in that the cell where substrate processing is performed is supported, thereby damaging the substrate. In addition, as the substrate becomes larger, the center side sags downward relative to the edges, and by supporting the substrate in a state where horizontality is not maintained, the center side cannot contact the substrate support, resulting in a problem where the substrate cannot be chucked. FIG. 1 is a schematic diagram showing a substrate processing apparatus including a substrate support module according to the present invention. FIG. 2 is a perspective view showing the appearance of a substrate support module according to the present invention. FIGS. 3a and FIGS. 3b are drawings showing the upright and non-upright states of the substrate support module according to FIG. 2, respectively. FIG. 4 is a cross-sectional view showing the connection between the driving part and the driving support pin part of the substrate support module according to FIG. 2. FIG. 5 is a bottom view showing the support position of a substrate supported through a substrate support module according to FIG. 2. The following describes a substrate support module and a substrate processing apparatus including the same according to the present invention with reference to the attached drawings. A substrate processing device according to the present invention comprises, as shown in FIG. 1, a chamber (10) forming an internal space; and at least one substrate support module (20) installed in the internal space to support the substrate (1). Here, at least one substrate support module (20) can support the center side of the substrate (1). In addition, the substrate processing device according to the present invention may further include a substrate support member (30) installed in the internal space to support the edge side of the substrate (1). Here, the substrate support member (30) can be installed to surround the outer side of the substrate support module (20). In addition, the substrate processing device according to the present invention may further include a grip portion (40) installed above the substrate support module (20) in the internal space, which chucks or de-chucks the substrate (1) supported through the substrate support module (20). For example, the grip portion (40) may include an electrostatic chuck that chucks through electrostatic force, and as another example, may include a vacuum chuck. Here, the substrate (1) to be processed according to the present invention can be any substrate that is to be processe