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KR-102963984-B1 - Dustproof structure of laser light-emitting window sheet and laser

KR102963984B1KR 102963984 B1KR102963984 B1KR 102963984B1KR-102963984-B1

Abstract

The present invention provides a dustproof structure for a laser light-emitting window sheet and a laser, wherein the dustproof structure for the laser light-emitting window sheet comprises a discharge cavity body, a gas purifier, a dustproof pipe, and a fan; an intermediate cavity is installed between the light-emitting window sheet and a slit; the gas inlet end of the dustproof pipe is connected to the gas purifier via the intermediate cavity, and the gas outlet end of the dustproof pipe is connected to a fan; at least a portion of the working gas purified by the gas purifier flows through the intermediate cavity via the dustproof pipe, and the working gas is guided by the fan to increase the gas flow rate passing through the intermediate cavity and strengthen the purging of the clean gas onto the light-emitting window sheet, and effectively prevents particles of the working gas that have entered the intermediate cavity from within the body through a window on the slit from approaching the light-emitting window sheet and contaminating it.

Inventors

  • 우 진숭
  • 류 빈
  • 쉬 시앙위
  • 류 광이
  • 지앙 루이
  • 천 원빈

Assignees

  • 베이징 알에스레이저 옵토-일렉트로닉스 테크놀로지 컴퍼니 리미티드

Dates

Publication Date
20260512
Application Date
20220321
Priority Date
20210914

Claims (10)

  1. As a dustproof structure for a laser light-emitting window sheet, It includes a discharge cavity body (10), a gas purifier (20), a dustproof pipe (11), and a fan; The above gas purifier (20) performs purification treatment on the working gas (1) in the discharge cavity body (10); A light-emitting window sheet (50) and a slit (60) are installed in the above discharge cavity body (10); An intermediate cavity (12) is installed between the light-emitting window sheet (50) and the slit (60); The gas inlet end of the dustproof pipe (11) is connected to the gas purifier (20) via the intermediate cavity (12), and the gas outlet end (11a) of the dustproof pipe (11) is connected to a fan, and at least a portion of the working gas (1) purified by the gas purifier (20) flows through the dustproof pipe (11) and the intermediate cavity (12) to form a dustproof air curtain inside the light-emitting window sheet (50), thereby preventing the working gas (1) that has entered the intermediate cavity (12) from inside the body (10) through the window on the slit (60) from approaching the light-emitting window sheet (50) and contaminating it. The above slit (60) includes a main body (63) and a plurality of spoilers (61); in a projection plane perpendicular to the laser light emission direction, the spoilers (61) are installed symmetrically on the main body (63) left and right or up and down to surround a laser light channel (62) through which the laser light passes; and in the laser light emission direction, the spoilers (61) on both the left and right or up and down sides are arranged staggered. Dustproof structure of a laser light-emitting window sheet featuring.
  2. In paragraph 1, A dustproof structure of a laser light-emitting window sheet characterized in that the air pressure in the intermediate cavity (12) is less than or equal to the pressure in the discharge cavity body (10).
  3. In paragraph 1, A dustproof structure of a laser light emitting window sheet characterized in that the working gas (1) in the above dustproof pipe (11) flows back into the body (10) directly or through the pipe after passing through the fan.
  4. In paragraph 1, The above fan is a cross-flow fan (30), and shaft discs (33) are installed at both ends of the cross-flow fan (30); the gas discharge end (11a) of the above dust-proof pipe (11) is installed facing the shaft disc (33), and a through hole (36) is installed in the shaft disc (33) to communicate the inside and outside of the intermediate cavity of the cross-flow fan (30), and the working gas (1) discharged from the dust-proof pipe (11) enters the intermediate cavity of the cross-flow fan (30) through the through hole (36), characterized by a dust-proof structure of a laser light-emitting window sheet.
  5. In paragraph 4, A dustproof structure for a laser light emitting window sheet, characterized in that the above-mentioned through hole (36) is installed in a spirally inclined manner, so that when the motor (40) drives the shaft disk (33) to rotate, gas outside the shaft disk (33) tends to flow through the through hole (36) into the cavity of the cross-current fan (30).
  6. delete
  7. In paragraph 4, The shafts (32) at both ends of the above-mentioned cross-flow fan (30) are rotatably installed in the body (10) through a bearing (13); the shafts (32) have a threaded structure (34), a toothed structure, or a blade structure installed on an outer circle close to the outer end of the bearing (13); and when the motor (40) rotates the shafts (32) and the cross-flow fan (30), the threaded structure (34), the toothed structure, or the blade structure causes gas outside the bearing (13) to move away from the bearing (13), thereby preventing dust inside the body (10) from coming close to the bearing (13), thus forming a dustproof structure for a laser light-emitting window sheet.
  8. In Paragraph 7, A dustproof structure of a laser light emitting window sheet, characterized in that a mounting hole (14) is installed on the side wall of the body (10), and a threaded structure (34), a toothed structure, or a blade structure of a shaft (32) is inserted and mounted within the mounting hole (14); and when the cross-current fan (30) rotates, a dynamic sealing structure is formed between the threaded structure (34), the toothed structure, or the blade structure and the mounting hole (14).
  9. In Paragraph 7, A dustproof structure for a laser light emitting window sheet, characterized in that a plurality of blades are installed on the outer cross-section of the shaft disk (33) and the circumferential direction of the shaft (32) of the above-mentioned cross-flow fan (30), and when the motor (40) rotates the bearing (13), the shaft disk (33), and the blades, the blades tend to cause the gas near the bearing (13) and the shaft (32) to flow away from the bearing (13) and the shaft (32).
  10. A laser characterized by including a light-emitting window sheet dustproof structure according to any one of claims 1 to 5 and claims 7 to 9.

Description

Dustproof structure of laser light-emitting window sheet and laser The present invention relates to the field of laser technology, and in particular to a dustproof structure of a laser light-emitting window sheet and a laser. Excimer laser discharge cavities involve electrode loss during the discharge process and continuously generate dust. This dust circulates with the airflow and disperses to various locations within the body, causing the most significant damage, particularly to the light-emitting window sheet of the lens laser and the bearings of the cross-current fan. Therefore, the design of a special protective device is required to protect the lens light-emitting window sheet and bearings, and to ensure normal operation and extend service life. Specifically, as illustrated in FIG. 1, the working gas (1) in the laser discharge cavity (10) flows into the gas purifier (20) (i.e., metal fluoride trap (MFT)) through the gas outlet in the body of the laser, is filtered to remove dust, then passes through the gas inlet and gas inlet path provided in the upper cavity, passes through the light inlet of the slit (60), and returns to the discharge cavity (10) to continue operating and circulating, and the arrow in the drawing indicates the direction of flow of the working gas (1). The gas inlet path in the upper cavity of the laser described above is the exhaust path of the metal fluoride trap. The laser's light-emitting window sheet (50) is installed outside the slit (60), and the two are adjacent to each other with a gap between them, which can be seen as a cavity between them, and the slit (60) has an opening for light to enter. Gas purified by a metal fluoride trap flows into the cavity between the light-emitting window sheet (50) and the slit (60) with only a slight pressure difference and returns to the discharge cavity (10) through the slit, but the gas flow rate is low and it is prone to clogging. Since the slit (60) has an opening through which light enters, the light-emitting window sheet (50) cannot be completely isolated from the discharge cavity (10), and thus dust from the discharge cavity (10) can enter the space between the light-emitting window sheet (50) and the slit (60) through the light-emitting opening of the slit (60), making it easy to contaminate the inner surface of the light-emitting window sheet (50). In order to more clearly explain specific embodiments of the present invention or technical solutions of the prior art, drawings used to describe specific embodiments or prior art are briefly introduced below. In the following description, the drawings are merely some embodiments of the present invention, and a person skilled in the art will be able to obtain other drawings based on these drawings without creative effort. FIG. 1 is a schematic diagram (plan view) of the exhaust path of a metal fluoride trap of a conventional laser, a light emission window sheet of a laser, and a slit. FIG. 2 is a structural diagram of the dustproof structure of a laser light-emitting window sheet provided in Example 1 of the present invention. Figure 3 is a three-dimensional cross-sectional view of a dustproof pipe. Figure 4 is a structural diagram of the dustproof piping and intermediate cavity of Example 1. FIG. 5 is a partial structural diagram of the light-emitting window sheet, intermediate cavity, and slit of Example 1. Figure 6 is a diagram showing the principle of the working gas passing through a cross-flow fan and returning to the body. FIG. 7 is a perspective view of the slit of Example 1. FIG. 8 is a structural diagram showing the slit spoilers of Example 1 arranged in an alternating pattern. Figure 9 is a partial structural diagram of the bearing and shaft of Example 1. FIG. 10 is a partial perspective view of the axis and shaft disk of Example 1. FIG. 11 is a partial enlarged view of the mounting hole of Example 1. Figure 12 is a diagram of the principle in which an independent fan is installed externally in Example 2. Figure 13 is a diagram showing the operating principle of the working gas of Example 2 returning to the gas purifier. Figure 14 is a schematic diagram of the laser of Example 3. The technical solution of the present invention will be clearly and completely explained below with reference to the attached drawings, and it should be understood that the described embodiments are merely a part, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort fall within the scope of protection of the present invention. In describing the present invention, it should be noted that directional or positional relationships indicated by terms such as "center," "top," "bottom," "left," "right," "vertical," "horizontal," "inner," and "outer" are based on directional or positional relationships depicted in the drawings and are intended merely for convenience and simpli