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KR-102963999-B1 - Bracket automatic processing equipment installed in semiconductor manufacturing facilities

KR102963999B1KR 102963999 B1KR102963999 B1KR 102963999B1KR-102963999-B1

Abstract

The present invention relates to an automatic bracket processing device, comprising: a supply unit (10) that is transferred upward to sequentially supply a processing product (100) to be processed according to the processing order while the processing product (100) to be processed is stacked vertically; an input unit (30) that transfers the processing products (100) supplied sequentially by the supply unit (10) one by one so that they are placed in a processing waiting state and processed; a processing robot (50) that grasps the processing product (100) located in the input unit (30) and transfers it according to the processing process order; a processing unit (60) that allows the processing product (100) transferred by the processing robot (50) to be transferred and fixed, and rotates the processing product (100) to perform hole processing of the processing product (100); and, after the hole processing of the processing product (100) is completed by the processing unit (60), the processing robot (50) feeds the processing product (100) to be processed, and discharges the completed product to be transferred to the next process. As the bracket used in semiconductor process equipment is manufactured by an automatic manufacturing process by a robot and configured with a discharge platform (80), the production volume is increased and the product defect rate is reduced.

Inventors

  • 김동규

Assignees

  • 제이드인더스 주식회사

Dates

Publication Date
20260512
Application Date
20251223

Claims (5)

  1. In an automatic bracket processing device, The apparatus comprises a supply unit (10) that is transferred upward to sequentially supply the processing product (100) to be processed according to the processing order while the processing product (100) to be processed is stacked vertically, an input unit (30) that transfers the processing product (100) supplied sequentially by the supply unit (10) one by one so that it can be placed in a processing waiting state and processed, a processing robot (50) that grasps the processing product (100) located in the input unit (30) and transfers it according to the processing process order, a processing unit (60) that rotates the processing product (100) while the processing product (100) transferred by the processing robot (50) is fixed and allows hole processing of the processing product (100) to be performed, and a discharge unit (80) that, after the hole processing of the processing product (100) is completed by the processing unit (60), transfers the processing product (100) to be processed by the processing robot (50) and discharges the completed product so that it can be transferred to the next process. The above input section (30) is, The input waiting section (32) is composed of: a transfer section (31) for individually grasping and transporting the processed product (100) supplied sequentially through the supply section (10); a seating section (37) on which the processed product (100) transported by the transfer section (31) is placed; a rotating section (40) rotatably installed on the seating section (37) so that the processed product (100) is positioned on the upper part; a support (38) installed vertically on the seating section (37); and a detection plate (39) installed to protrude from the support (38) toward the processed product (100), which detects when the processed product (100) rotates due to the rotation of the rotating section (40) and the one wing (103) of the processed product (100) comes into contact, thereby preventing the rotating section (40) from rotating further so that the processed product (100) can be fed into the processing section (60) in a certain direction. The processing part (60) is, An automatic bracket processing device installed in a semiconductor manufacturing facility, characterized by comprising: a rotating body (61) that rotates while holding a processed product (100) to enable hole processing in the processed product (100); fingers (62) installed in multiple numbers in front of the rotating body (61) to adhere to each side of the square plate (102) of the processed product (100) transported by a processing robot (50) to fix the processed product (100); a first processing member (63) that allows a tap hole (104) to be processed in a cylindrical body (101) as the rotating body (61) rotates; and a second processing member (64) that allows a first hole (105) and a second hole (106) of different sizes to be processed in a wing (103) as the rotating body (61) rotates after the tap hole (104) is processed.
  2. In paragraph 1, The supply unit (10) is, An automatic bracket processing device installed in a semiconductor manufacturing facility, characterized by comprising: a support portion (11) on which a processed product (100) is placed; a rotating plate (12) installed on the upper part of the support portion (11) so as to be rotatable while the processed product (100) is placed on the upper part; a stacking plate (13) installed in multiple places on the rotating plate (12) to store multiple processed products (100) stacked thereon, which rotates together with the rotation of the rotating plate (12) to move to a position where the processed product (100) is fed; and a lifting portion (15) which, after the stacking plate (13) is moved to the position where the processed product (100) is fed by the rotation of the rotating plate (12), pushes the stacking plate (13) upward so that the processed products (100) stacked vertically on the stacking plate (13) can be fed sequentially from the top.
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  4. In paragraph 2, The above-mentioned loading plate (13) includes a fitting rod (19) that prevents the vertically stacked processed product (100) from shaking by fitting it in, a pair of guide rods (20) that allow one wing (103) of the processed product (100) to be fitted between the fitting rods (19) so that the direction of the processed product (100) fitted in the fitting rods (19) can be maintained constant, a lifting plate (16) that pushes the loading plate (13) upward while the loading plate (13) is positioned in the lifting section (15) by the rotation of the rotating plate (12) so that the processed product (100) stacked vertically on the loading plate (13) can be supplied sequentially, a ball screw (17) installed on the lifting plate (16) that rotates by a rotary motor (14) to cause the lifting plate (16) to be lifted, and when the lifting plate (16) is lifted by the ball screw (17), the lifting plate (16) An automatic bracket processing device installed in a semiconductor manufacturing facility, characterized by being composed of a lifting guide rod (18) that allows movement in an up-and-down straight line without shaking, and a sensing sensor (21) that detects whether a processed product (100) is loaded on a loading plate (13) located in the lifting section (15) so that the supply of the processed product (100) can be continuously carried out.
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Description

Automatic bracket processing equipment installed in semiconductor manufacturing facilities The present invention relates to an automatic processing device for brackets used in semiconductor manufacturing facilities. With semiconductors recently gaining attention, the installation of process equipment for semiconductor manufacturing is on the rise. When installing large-scale semiconductor process equipment, many equipment materials are used, and among them, a large number of brackets are used and installed on the supports installed at the bottom to support the process equipment. Conventionally, fastening grooves or tapped holes for these brackets have been machined manually to fit the installation location; consequently, this has led to an increase in product defect rates depending on the operator's skill level, and production volume has also been unable to keep pace with the expansion of semiconductor process facilities. FIG. 1 is a drawing illustrating the overall configuration of an automatic bracket processing device installed in a semiconductor manufacturing facility according to an embodiment of the present invention. FIG. 2 is a drawing illustrating the configuration of a supply unit and an input unit according to an embodiment of the present invention. FIG. 3 is a drawing illustrating the detailed configuration of a supply unit according to an embodiment of the present invention. FIG. 4 is a drawing illustrating the detailed configuration of an input section according to an embodiment of the present invention. FIG. 5 is a drawing illustrating the detailed configuration of a gripper of an input unit according to an embodiment of the present invention. FIG. 6 is a diagram illustrating the configuration of a transfer robot according to an embodiment of the present invention. FIG. 7 is a drawing illustrating the detailed configuration of a processing unit according to an embodiment of the present invention. FIGS. 8a and 8b are drawings illustrating the operational configuration of a processing unit according to an embodiment of the present invention. FIG. 9 is a drawing illustrating the composition of a processed product according to an embodiment of the present invention. Preferred embodiments of the present invention will be described in detail below with reference to the attached drawings. FIG. 1 is a drawing illustrating the overall configuration of a bracket automatic processing device installed in a semiconductor manufacturing facility according to an embodiment of the present invention. The automatic bracket processing device installed in the semiconductor manufacturing facility of the present invention comprises: a supply unit (10) that is transferred upward to sequentially supply a processing product (100) to be processed according to the processing order while the processing product (100) to be processed is stacked vertically; an input unit (30) that transfers the processing products (100) supplied sequentially by the supply unit (10) one by one so that they are placed in a processing waiting state and processed; a processing robot (50) that grasps the processing product (100) located in the input unit (30) and transfers it according to the processing process order; a processing unit (60) that allows the processing product (100) transferred by the processing robot (50) to be transferred and fixed, and rotates the processing product (100) to perform hole processing of the processing product (100); and after the hole processing of the processing product (100) is completed by the processing unit (60), the processing robot (50) transfers the processing product (100) to be processed, discharges the processed product, and transfers it to the next process. It consists of a discharge platform (80). As shown in FIG. 9, the processed product (100) of the present invention automatically processes the tap hole (104) formed in the cylindrical body (101) and the first hole (105) and second hole (106) formed in the wing (103), and processes the multiple tap holes (104) and the first hole (105) and second hole (106) by rotating the processed product (100) while holding it. The above supply unit (10) supplies the processing product to be processed in a stacked state, and when the upper processing product (100) is transferred to the input unit (30) in a waiting state for input, the processing product (100) is supplied sequentially while rising. Referring to FIG. 2, the configuration of the supply unit (10) and the input unit (30) is explained. The supply unit (10) of the present invention comprises a support unit (11) on which a processed product (100) is placed, a rotating plate (12) installed on the upper part of the support unit (11) so as to be rotatable when the processed product (100) is placed on the upper part, a stacking plate (13) installed in multiple places on the rotating plate (12) in which multiple processed products (100) are stacked and stored and rotated together by the rotation of the rotatin