KR-102964239-B1 - HAND AND TRANSFER APPARATUS

KR102964239B1KR 102964239 B1KR102964239 B1KR 102964239B1KR-102964239-B1

Abstract

The present invention provides a hand and a transfer device. A hand according to one embodiment of the present invention comprises: a hand body having a suction hole formed therein; and a pad assembly installed in the suction hole and vacuum-adsorbing a substrate thereon; wherein the pad assembly comprises: a support pad inserted into the suction hole; a nut screwed to the support pad within the suction hole; and an O-ring sealing the gap between the inner surface of the suction hole and the support pad; and wherein the upper surface of a nut head formed on the nut may be formed to be inclined downward as it extends in the radial direction of the nut head.

Inventors

엄기상
김학준
도완호
최은찬

Assignees

세메스 주식회사

Dates

Publication Date: 20260513
Application Date: 20250929

Claims (20)

A hand body with a suction hole formed therein; and A pad assembly installed in the suction hole and vacuum-adsorbing a substrate; comprising The above pad assembly is, A support pad inserted into the above suction hole; A nut screwed onto the support pad within the suction hole; and It includes an O-ring that seals the gap between the inner surface of the suction hole and the support pad; and The upper surface of the nut head formed on the nut is formed to slope downward in the radial direction of the nut head, forming a hand of a transfer device.
In paragraph 1, The upper surface of the above-mentioned nut head forms a curved shape that is convex toward the upper side, forming a hand of a transfer device.
In paragraph 1, A protruding catch is formed on the inner surface of the suction hole so that the upper surface of the nut head is caught thereon, and The lower surface of the above-mentioned stopper is formed to slope downward toward the radial direction of the above-mentioned suction hole, forming a hand of a transfer device.
In paragraph 3, The lower surface of the above-mentioned stopper forms a curved shape that is concave toward the upper side. A hand of a conveying device.
In paragraph 3, A hand of a transfer device having a rotational space formed on the lower side of the stopper in the suction hole in which the nut head can rotate.
In paragraph 1, The pad head formed on the above support pad is formed to become thicker towards the center, and The above O-ring is the hand of the transfer device positioned on the lower side of the pad head.
In paragraph 6, The above O-ring is a hand of a transfer device positioned such that the vertical distance from the upper surface of the nut head is shorter than the vertical distance from the upper surface of the pad head.
A hand body with a suction hole formed therein; and A pad assembly installed in the suction hole and vacuum-adsorbing a substrate; comprising The above pad assembly is, A support pad having a pad body inserted into the suction hole and having a pad hole, and a pad head horizontally extended on the upper part of the pad body; A nut having a nut body screw-fastened into the pad hole and a nut head horizontally extended from the lower part of the nut body; and It includes an O-ring that surrounds the pad body and seals the gap between the inner surface of the suction hole and the pad body; The upper surface of the nut head is formed to slope downward in the radial direction, forming a hand of a transfer device.
In paragraph 8, The upper surface of the above-mentioned nut head forms a curved shape that is convex toward the upper side, forming a hand of a transfer device.
In paragraph 8, A protruding catch is formed on the inner surface of the suction hole so that the upper surface of the nut head is caught thereon, and The lower surface of the above-mentioned stopper is formed to slope downward toward the radial direction of the above-mentioned suction hole, forming a hand of a transfer device.
In Paragraph 10, The lower surface of the above-mentioned stopper forms a curved shape that is concave toward the upper side. A hand of a conveying device.
In Paragraph 10, A hand of a transfer device having a rotational space formed on the lower side of the stopper in the suction hole in which the nut head can rotate.
In paragraph 8, The above pad head is formed to become thicker towards the center, and The above O-ring is the hand of the transfer device positioned on the lower side of the pad head.
In Paragraph 13, The above O-ring is a hand of a transfer device positioned such that the vertical distance from the upper surface of the nut head is shorter than the vertical distance from the upper surface of the pad head.
Robotic arm; and It includes a hand connected to the above-mentioned robot arm and on which a substrate is placed; The above hand is, A hand body with a suction hole formed therein; and A pad assembly installed in the suction hole and vacuum-adsorbing the substrate; comprising A support pad having a pad body inserted into the suction hole and having a pad hole, and a pad head horizontally extended on the upper part of the pad body; A nut having a nut body screw-fastened into the pad hole and a nut head horizontally extended from the lower part of the nut body; and It includes an O-ring that surrounds the pad body and seals the gap between the inner surface of the suction hole and the pad body; The upper surface of the above nut head is formed to slope downward as it extends in the radial direction, and A transfer device having a protruding catch formed on the inner surface of the suction hole to catch the upper surface of the nut head, and the lower surface of the catch formed to slope downward toward the radial direction of the suction hole.
In paragraph 15, A transfer device in which the upper surface of the nut head has a curved shape that is convex toward the upper side.
In paragraph 15, A transfer device having a lower surface of the above-mentioned stopper forming a curved shape that is concave toward the upper side.
In paragraph 15, A transfer device having a rotational space formed on the lower side of the stopper in the suction hole where the nut head can rotate.
In paragraph 15, The above pad head is formed to become thicker towards the center, and The above O-ring is a transfer device positioned on the lower side of the pad head.
In Paragraph 19, The above O-ring is a transfer device arranged such that the vertical distance from the upper surface of the nut head is shorter than the vertical distance from the upper surface of the pad head.

Description

Hand and Transfer Apparatus The present invention relates to a hand and a transfer device in which a substrate is vacuum-adsorbed. To manufacture semiconductor devices and flat panel displays, various processes such as photolithography and cleaning are performed on the substrate. These processes are carried out within process chambers that have independent spaces, and the substrates are transported to each process chamber in the correct order by a transport device, such as a transport robot. The transfer device transports the substrate while the vacuum pads adsorb it to the vacuum. Meanwhile, since the processes for the substrate include numerous steps involving high-temperature treatment, the substrate undergoing the high-temperature process is partially deformed by heat, resulting in gentle curvature on parts of the surface, such as wrinkling or bending. In other words, the substrate may experience warpage due to causes such as differences in thermal stress. However, since the pad assembly that contacts the lower surface of the substrate in the hand of the transfer device is firmly fixed to the hand body, there are limitations in smoothly and stably holding the substrate in a bent or twisted state. FIG. 1 is a drawing showing a hand of a transfer device according to one embodiment of the present invention. Figure 2 is a cross-sectional view showing a pad assembly installed on the hand body of the hand of Figure 1. Figure 3 is a perspective view showing a nut in the pad assembly of the hand of Figure 2. Figure 4 is an enlarged view showing A of Figure 3. FIG. 5 is a perspective view showing the hand body in the pad assembly of the hand of FIG. 2. Figure 6 is an enlarged view showing B of Figure 5. Hereinafter, preferred embodiments are described in detail with reference to the attached drawings so that those skilled in the art can easily practice the present invention. However, in describing the preferred embodiments of the present invention in detail, if it is determined that a detailed description of related known functions or configurations may unnecessarily obscure the essence of the present invention, such detailed description is omitted. Additionally, the same reference numerals are used throughout the drawings for parts having similar functions and operations. Furthermore, in this specification, terms such as 'top', 'upper part', 'upper surface', 'lower', 'lower part', 'lower surface', 'side surface', etc., are based on the drawings and may actually vary depending on the direction in which the components are arranged. Additionally, throughout the specification, when a part is described as being 'connected' to another part, this includes not only cases where they are 'directly connected,' but also cases where they are 'indirectly connected' with other components in between. Furthermore, 'including' a component means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. FIG. 1 is a drawing showing a hand of a transfer device according to one embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a pad assembly installed on a hand body in the hand of FIG. 1. Referring to the drawing, the transfer device may include a robot arm (A) and a hand (1000). The transfer device of the present invention performs the role of transferring a substrate (S) in a substrate processing facility, and as an example, a transfer robot may be utilized. A transfer device having a robot structure like this may include a robot arm (A). The above-mentioned robot arm (A) only needs to have a driving structure that smoothly and easily moves the substrate (S) to the position to be moved, and it goes without saying that the specific structure is not limited by the present invention. And the hand (1000) is connected to the robot arm (A) and has a structure on which the substrate (S) is placed, thereby supporting the substrate (S) stably and firmly. Such a hand (1000) may include a hand body (100) and a pad assembly (P). As shown in FIGS. 1, 2, and 5, the hand body (100) may have a structure that extends in a curved shape on both sides to support the edge of the circular substrate (S) so that the substrate (S) can be stably seated. In addition, the pad assembly (P) is installed on the hand body (100) and firmly fixes the substrate (S) that is seated on the hand body (100) by vacuum suction force. Specifically, the hand body (100) is installed on the robot arm (A) and can take the shape of a plate to support the substrate (S). This hand body (100) is formed with a certain thickness, and a suction channel (100a) is formed inside, and a suction hole (100b) connected to the suction channel (100a) can be formed on the upper side. The above suction channel (100a) is connected to a vacuum pump (not shown) and is a passage through which air is sucked in by the operation of the vacuum pump. These suction channels (100a) can be extended laterally within