KR-102964591-B1 - Light-emitting device and method of manufacturing the same

Abstract

[assignment] The present invention provides a light-emitting device capable of shaping light from multiple light-emitting elements into multiple shapes of light, and a method for manufacturing the same. [Solution] The light-emitting device of the present disclosure comprises a substrate, a plurality of light-emitting elements provided on a first surface side of the substrate, and a plurality of first lenses provided on a second surface side of the substrate, to which light emitted from the plurality of light-emitting elements is incident, and the plurality of first lenses include at least two types of lenses among concave lenses, convex lenses, and flat lenses.

Inventors

• 마에다 켄사쿠
• 야마모토 아츠시

Assignees

• 소니 세미컨덕터 솔루션즈 가부시키가이샤

Dates

Publication Date

20260513

Application Date

20201207

Priority Date

20200120

Claims (20)

1. The substrate and, A plurality of light-emitting elements provided on the first surface side of the above substrate, and A plurality of first lenses are provided on the second surface side of the substrate and are into which light emitted from the plurality of light-emitting elements is incident. The plurality of first lenses above include at least two types of lenses among concave lenses, convex lenses, and flat lenses, and A light-emitting device characterized by having a first coating film provided on the surface of the convex lens and having a flat surface on the opposite side of the convex lens.
2. In paragraph 1, In addition, a light-emitting device characterized by having a second lens into which light passing through the plurality of first lenses is incident.
3. In paragraph 1, A light-emitting device characterized in that the plurality of first lenses are provided on the second surface of the substrate as part of the substrate.
4. In paragraph 1, A light-emitting device characterized in that the plurality of light-emitting elements and the plurality of first lenses correspond in a one-to-one ratio, and light emitted from each light-emitting element is incident on a corresponding first lens.
5. In paragraph 1, In addition, a light-emitting device characterized by having a second coating film having a flat surface or a protruding film having a convex surface provided on the surface of the concave lens and on the opposite side of the concave lens.
6. delete
7. In paragraph 1, In addition, a light-emitting device characterized by having an anti-reflection film provided on the surface of the plurality of first lenses.
8. In paragraph 3, In addition, a light-emitting device characterized by having an inorganic film provided on the second surface of the substrate between the plurality of first lenses.
9. In paragraph 1, A light-emitting device characterized in that the above substrate is a semiconductor substrate containing gallium (Ga) and arsenic (As).
10. In paragraph 1, A light-emitting device characterized in that light emitted from the plurality of light-emitting elements is transmitted through the substrate from the first surface to the second surface and incident on the plurality of first lenses.
11. In paragraph 1, A light-emitting device characterized in that the first surface of the substrate is the surface of the substrate, and the second surface of the substrate is the back surface of the substrate.
12. In paragraph 1, In addition, a light-emitting device characterized by having a plurality of light-emitting elements provided on the first surface side of the substrate and a driving device for driving the plurality of light-emitting elements.
13. In Paragraph 12, A light-emitting device characterized by the above driving device driving each of the plurality of light-emitting elements individually.
14. delete
15. A plurality of light-emitting elements are formed on the first surface side of the substrate, and It includes forming a plurality of first lenses on the second surface side of the substrate, to which light emitted from the plurality of light-emitting elements is incident. The plurality of first lenses above include at least two types of lenses among concave lenses, convex lenses, and flat lenses, and A method for manufacturing a light-emitting device characterized in that the above-described concave lens is formed by forming a convex portion on the second surface of the substrate and processing the convex portion into a concave portion.
16. In paragraph 15, A method for manufacturing a light-emitting device, characterized by including, in addition, arranging a second lens into which light passing through the plurality of first lenses is incident.
17. In paragraph 15, A method for manufacturing a light-emitting device characterized in that the plurality of first lenses are formed as part of the substrate by processing the second surface of the substrate.
18. delete
19. In paragraph 15, A method for manufacturing a light-emitting device characterized by forming the above-mentioned convex portion by forming a resist film on the second surface of the substrate, patterning the resist film, baking the patterned resist film, and transferring the pattern of the baked resist film to the substrate.
20. In paragraph 15, A method for manufacturing a light-emitting device characterized by forming the above-mentioned concave portion by forming a mask layer on the above-mentioned convex portion, etching the mask layer to expose the above-mentioned convex portion from the mask layer, and etching the mask layer together with the above-mentioned convex portion.

Description

Light-emitting device and method of manufacturing the same The present disclosure relates to a light-emitting device and a method for manufacturing the same. As a type of semiconductor laser, surface-emitting lasers such as VCSELs (Vertical Cavity Surface Emitting Lasers) are known. Generally, in a light-emitting device using a surface-emitting laser, a plurality of light-emitting elements are arranged in a two-dimensional array shape on the surface or back surface of a substrate. FIG. 1 is a block diagram illustrating the configuration of a distance measuring device of a first embodiment. FIG. 2 is a cross-sectional view illustrating an example of the structure of a distance measuring device of a first embodiment. FIG. 3 is a cross-sectional view illustrating the structure of the distance measuring device shown in FIG. 2B. FIG. 4 is a cross-sectional view illustrating the structure of a light-emitting device of a first embodiment. FIG. 5 is a plan view illustrating an example of the structure of a light-emitting device of a first embodiment. FIG. 6 is a cross-sectional view illustrating an example of the use of a light-emitting device of the first embodiment. FIG. 7 is a cross-sectional view illustrating the structure of a light-emitting device of a modified example of the first embodiment. FIG. 8 is a cross-sectional view illustrating the structure of a light-emitting device of another variation of the first embodiment. FIG. 9 is a cross-sectional view illustrating the structure of a light-emitting device of another variation of the first embodiment. FIG. 10 is a plan view illustrating the structure of a light-emitting device of another variation of the first embodiment. FIG. 11 is a cross-sectional view illustrating the structure of a light-emitting device of another variation of the first embodiment. FIG. 12 is a plan view illustrating an example of the structure of a light-emitting device shown in FIG. 11 B. FIG. 13 is a cross-sectional view illustrating a method for manufacturing a light-emitting device of a first embodiment. FIG. 14 is a cross-sectional view illustrating a method for manufacturing a light-emitting device of a modified example of the first embodiment. FIG. 15 is a cross-sectional view (1/2) for explaining the details of the process shown in A of FIG. 14. FIG. 16 is a cross-sectional view (2/2) for explaining the details of the process shown in A of FIG. 14. FIG. 17 is a cross-sectional view illustrating a method 1 different from the method illustrated in FIG. 15 A through FIG. 16 D. FIG. 18 is a cross-sectional view illustrating method 2 different from the method illustrated in FIG. 15 A through FIG. 16 D. Hereinafter, embodiments of the present invention will be described with reference to the drawings. (First embodiment) FIG. 1 is a block diagram illustrating the configuration of a distance measuring device of a first embodiment. The distance measuring device of FIG. 1 is equipped with a light-emitting device (1), an imaging device (2), and a control device (3). The distance measuring device of FIG. 1 irradiates light emitted from the light-emitting device (1) onto a subject, captures light reflected from the subject by the imaging device (2) to capture the subject, and measures (calculates) the distance to the subject by the control device (3) using the image signal output from the imaging device (2). The light-emitting device (1) functions as a light source for the imaging device (2) to capture the subject. The light-emitting device (1) is equipped with a light-emitting unit (11), a driving circuit (12), a power circuit (13), and a light-emitting optical system (14). The imaging device (2) is equipped with an image sensor (21), an image processing unit (22), and an imaging optical system (23). The control device (3) is equipped with a distance measuring unit (31). The light-emitting unit (11) emits laser light to irradiate a subject. The light-emitting unit (11) of the present embodiment is provided with a plurality of light-emitting elements arranged in a two-dimensional array shape, as described below, and each light-emitting element has a VCSEL structure. Light emitted from these light-emitting elements is irradiated onto the subject. In addition, the light-emitting unit (11) of the present embodiment is provided within a chip called an LD (Laser Diode) chip (41). The driving circuit (12) is an electric circuit that drives the light-emitting part (11). The power circuit (13) is an electric circuit that generates the power voltage of the driving circuit (12). For example, the distance measuring device of the present embodiment generates a power voltage by the power circuit (13) from an input voltage supplied from a battery within the distance measuring device, and drives the light-emitting part (11) by the driving circuit (12) using this power voltage. In addition, the driving circuit (12) of the present embodiment is provided within a substrate called an LDD (Laser Diode Driver