KR-102964732-B1 - Pulse and Bias Synchronization Method and System

KR102964732B1KR 102964732 B1KR102964732 B1KR 102964732B1KR-102964732-B1

Abstract

The present invention relates to a radio frequency (RF) generator comprising an RF power source configured to output an RF power signal and a controller coupled to the RF power source. The controller is configured to generate a pulse comprising one or more state transitions to modulate the RF power signal of the RF power source. The controller is also configured to receive a synchronization signal representing one or more operating characteristics or parameters of another RF generator and to adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received synchronization signal. Additionally, other exemplary RF generators, an RF power delivery system comprising one or more RF generators, and a control method for adjusting the state transitions of a pulse to synchronize the state transition with a defined phase of the synchronization signal are disclosed.

Inventors

올지에이, 마리우시
라돔스키, 애런
버리, 애런
커크, 마이클

Assignees

엠케이에스 인코포레이티드

Dates

Publication Date: 20260513
Application Date: 20221222
Priority Date: 20221220

Claims (20)

As a radio frequency (RF) generator, RF power source configured to output an RF power signal; and A controller coupled to the above RF power source; is included, The above controller is: Generating a pulse including one or more state transitions to modulate the RF power signal of the above RF power source; Receiving a synchronization signal representing one or more operating characteristics or parameters of another RF generator; and An RF generator configured to adjust at least one of the state transitions of the pulse so as to synchronize the state transition with the defined phase of the received synchronization signal.
In paragraph 1, The above synchronization signal is a square wave generated by another RF generator, an RF generator.
In paragraph 2, The above synchronization signal is an RF generator that changes its state when the RF power signal of another RF generator crosses the zero point.
In paragraph 1, An RF generator comprising a synchronization monitor module configured to receive a synchronization signal and generate a synchronization active signal based on a defined phase of the synchronization signal.
In paragraph 4, An RF generator in which the phase defined above includes 0 degrees, 90 degrees, 120 degrees, or 180 degrees.
In paragraph 4, The above controller includes a pulse state latch module communicating with the synchronization monitor module, wherein the pulse state latch module receives a pulse state signal indicating a desired state transition of a pulse and, in response to the reception of the synchronization activation signal, outputs a synchronized pulse state signal based on the pulse state signal to adjust at least one of the state transitions of the pulse, thereby forming an RF generator.
In paragraph 6, The above controller includes a pulse state generator module that communicates with a pulse state latch module, and the pulse state generator module is configured to generate a pulse state signal, an RF generator.
In paragraph 6, The above controller includes an RF power control module that communicates with a pulse state latch module, and the RF power control module is configured to receive a synchronized pulse state signal and generate a control signal for controlling the pulse, an RF generator.
In paragraph 6, The RF generator is a first RF generator, and the pulse state latch module is configured to output a synchronized pulse state signal to a second RF generator to activate a pulse shaping mode in the second RF generator.
In paragraph 6, An RF generator, wherein the above RF power supply is configured to output an RF power signal to a matching network, and the above pulse state latch module is configured to output a synchronized pulse state signal to a matching network to align the tuning of the matching network with the synchronized pulse state signal.
In paragraph 4, The above controller is an RF generator comprising an Intermodulation Distortion (IMD) control module configured to receive a synchronization active signal and generate an IMD control signal based on the synchronization active signal to control the frequency of an RF power signal.
In paragraph 4, An RF generator, wherein the above RF power supply is configured to output an RF power signal to a matching network, and the above controller is configured to output a synchronization active signal to a matching network to control the matching network.
In paragraph 1, An RF generator, wherein at least one of the above state transitions is a first state transition, and the controller is configured to adjust a second state transition of the pulse based on the adjustment of the first state transition.
As a non-transient computer-readable medium for storing instructions executable to a processor for controlling a radio frequency (RF) generator of a power system that outputs an RF power signal, said RF generator includes an RF power supply, and said instructions are: Generating a pulse containing one or more state transitions to modulate an RF power signal of an RF power source; Receiving a synchronization signal representing one or more operating characteristics or parameters of another RF generator; A non-transient computer-readable medium storing instructions executable by a processor, comprising: adjusting at least one of the state transitions of the pulse so as to synchronize the state transition with a defined phase of a received synchronization signal.
In Paragraph 14, The above synchronization signal is a non-transient computer-readable medium storing instructions executable by a processor, which is a square wave generated by another RF generator.
In paragraph 15, The above synchronization signal is a non-transient computer-readable medium that stores processor-executable instructions that change state when the RF power signal of another RF generator zeros.
In Paragraph 14, A non-transient computer-readable medium storing instructions executable to a processor, further comprising receiving the synchronization signal and generating a synchronization active signal based on a defined phase of the synchronization signal.
In Paragraph 17, A non-transient computer-readable medium storing instructions executable to a processor, further comprising receiving a pulse state signal indicating a desired state transition of a pulse, and outputting a synchronized pulse state signal based on the pulse state signal in response to receiving a synchronization active signal to adjust at least one of the state transitions of the pulse.
In Paragraph 18, A non-transient computer-readable medium storing instructions executable to a processor, further comprising receiving a synchronized pulse state signal and generating a control signal for controlling a pulse according to the synchronized pulse state signal.
In Paragraph 19, A non-transient computer-readable medium storing instructions executable to a processor, further comprising outputting a synchronized pulse state signal to a second RF generator to enable a pulse shaping mode in the second RF generator.

Description

Pulse and Bias Synchronization Method and System Cross-reference of related applications This application claims priority to U.S. Patent Application No. 18/084,696, filed December 20, 2022, and U.S. Provisional Patent Application No. 63/298,825, filed January 12, 2022. The full disclosure of the applications referred to in this paragraph is incorporated herein by reference. Technology field The present disclosure relates to a pulse and bias synchronization system and method. Plasma processing is frequently used in semiconductor manufacturing. In plasma processing, ions are accelerated by an electric field to etch or deposit material on the surface of a substrate. In one basic implementation, an electric field is generated based on radio frequency (RF) or direct current (DC) power signals generated by one or more RF or DC generators of a power delivery system. A power delivery system generally includes at least two generators, such as a source generator and a bias generator. The bias generator can control plasma parameters such as ion energy. In some embodiments, the bias generator may operate at a lower frequency than the source generator. For example, the bias generator may operate at 400 kHz, and the source generator may operate at 60 MHz. The background description provided herein is intended to present the content of the invention in general. The work of the currently named inventor is not recognized as prior art to the extent described in this background section, nor are aspects of the description that may not otherwise qualify as prior art at the time of filing, expressly or impliedly. According to one aspect of the present disclosure, a radio frequency (RF) generator comprises an RF power source configured to output an RF power signal, and a controller connected to the RF power source. The controller is configured to generate pulses to modulate the RF power signal of the RF power source. The pulses include one or more state transitions. The controller is further configured to receive a synchronization signal representing one or more operating characteristics or parameters of another RF generator, and to adjust at least one of the state transitions of the pulses to synchronize the state transitions with a defined phase of the received synchronization signal. A system composed of one or more computers may be configured to perform specific operations or functions by installing software, firmware, hardware, or a combination thereof on the system so that the system performs functions when operated. One or more computer programs may be configured to perform specific operations or functions by including instructions that cause the device to perform functions when executed by a data processing device. One general aspect includes a radio frequency (RF) generator. The RF generator also includes an RF power source configured to output an RF power signal. The RF generator also includes a controller connected to the RF power source, the controller is configured to generate a pulse containing one or more state transitions to modulate the RF power signal of the RF power source; receive a synchronization signal indicating one or more operating characteristics or parameters of another RF generator; and adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received synchronization signal. Other embodiments of this aspect include corresponding computer systems, devices, and computer programs written on one or more computer storage devices, each of which is configured to perform the functions of the methods. An embodiment may include one or more of the following features: an RF generator in which the synchronization signal is a square wave generated by another RF generator. The synchronization signal changes state when the RF power signal of the other RF generator crosses the zero point. A controller includes a synchronization monitor module configured to receive the synchronization signal and generate a synchronization active signal based on a defined phase of the synchronization signal. The defined phase includes 0 degrees, 90 degrees, 120 degrees, or 180 degrees. The controller includes a pulse state latch module communicating with the synchronization monitor module, wherein the pulse state latch module is configured to receive a pulse state signal indicating a desired state transition of the pulse and to output a synchronized pulse state signal based on the pulse state signal to adjust at least one of the state transitions of the pulse in response to the reception of the synchronization active signal. The controller includes a pulse state generator module communicating with the pulse state latch module, wherein the pulse state generator module is configured to generate a pulse state signal. The controller includes an RF power control module communicating with the pulse state latch module, wherein the RF power control module is configured to receive