KR-102964802-B1 - CLEANING SHEET AND TRANSFER MEMBER PROVIDED WITH CLEANING FUNCTION

Abstract

The present invention provides a cleaning sheet having a cleaning layer that can be suitably used in a conveying member that conveys into a substrate processing device, and which can effectively suppress adsorption errors when the cleaning layer is adsorbed to an adsorption stage, etc. Furthermore, the present invention provides a conveying member having such a cleaning sheet and a conveying member, and a cleaning function added conveying member having such a cleaning sheet and a conveying member. The present cleaning sheet is a cleaning sheet having a cleaning layer, wherein, when viewed from the normal direction to the surface of the cleaning layer, the direction from the end of the surface toward the center is defined as the center direction, and the area occupied by a width of 10 mm from the end toward the center direction on the surface is defined as the end region, and the maximum thickness L in the normal direction of the cleaning layer within the end region and the average thickness T in the normal direction of the cleaning layer in the area other than the end region of the cleaning layer have the relationship L-T ≤ 5μm.

Inventors

• 후카미치 유이치

Assignees

• 닛토덴코 가부시키가이샤

Dates

Publication Date

20260513

Application Date

20220421

Priority Date

20210428

Claims (7)

1. As a cleaning sheet having a cleaning layer, Viewed from the normal direction to the surface of the cleaning layer, the direction from the edge of the surface toward the center is defined as the center direction, and With respect to the surface, the area occupied by a width of 10 mm from the end toward the center is designated as the end region, The maximum thickness L of the cleaning layer in the normal direction within the corresponding end region and the average thickness T of the cleaning layer in the normal direction outside the corresponding end region of the cleaning layer have the relationship 0μm < LT ≤ 5μm, and A portion of the cleaning layer having a thickness greater than or equal to 1 μm greater than the average thickness T, wherein the width d in the center direction is 4,000 μm or less Cleaning sheet.
2. delete
3. In Article 1, A cleaning sheet comprising at least one selected from the group consisting of a cleaning layer, wherein the cleaning layer comprises a polyimide-based resin and a polybenzoxazole-based resin.
4. In Article 1, A cleaning sheet having a cleaning layer thickness of 1 μm to 100 μm.
5. In Article 1, A cleaning sheet further comprising an adhesive layer.
6. In Article 1, A cleaning sheet additionally comprising a support.
7. The cleaning sheet described in claim 1 and Returned part A return member having a cleaning function.

Description

Cleaning Sheet and Transfer Member Provided with Cleaning Function The present invention relates to a cleaning sheet and a conveying member with a cleaning function. In various substrate processing devices that require strict adherence to foreign matter, such as manufacturing and inspection equipment for semiconductors, flat panel displays, and printed circuit boards, substrates are transported by physically contacting the transport device (typically a chuck table). At that time, if foreign matter adheres to the transport device, it contaminates subsequent substrates one after another; therefore, it was necessary to periodically stop the device for cleaning. Consequently, there were issues such as reduced operating efficiency of the processing equipment and the significant effort required for cleaning the device. To overcome this problem, a method has been proposed to remove foreign matter attached to a conveying device by conveying a plate-shaped member into a substrate processing device (see Patent Document 1). According to this method, since there is no need to stop the substrate processing device to perform cleaning treatment, the problem of reduced operating efficiency of the processing device is resolved. However, this method cannot sufficiently remove foreign matter attached to the conveying device. Meanwhile, a method for removing foreign matter attached to a conveying device by conveying a substrate with an adhesive substance fixed thereon into a substrate processing device as a cleaning member has been proposed (see Patent Document 2). This method has superior foreign matter removal capabilities compared to the method described in Patent Document 1. However, in the method described in Patent Document 2, a problem may arise in which the contact portion between the adhesive material and the conveying device adheres too strongly and does not detach. As a result, problems may arise such as the inability to reliably convey the substrate to which the adhesive material is fixed, damage to the conveying device, or contamination of the conveying device. On the other hand, if the adhesion force between the adhesive material and the conveying device becomes too small, the ability to remove foreign matter from the cleaning member is reduced, and a problem may arise in which a sufficient cleaning effect is not obtained. As a means of solving the various problems mentioned above, the applicant has reported a cleaning sheet having a cleaning layer that can be suitably used in a conveying member conveyed into a substrate processing device, wherein a polymer component is adopted as the material of the cleaning layer as a cleaning member (Patent Documents 3, 4). When a polymer component is used as the material for the cleaning layer, typically, a varnish containing the polymer component that serves as the material for the cleaning layer is coated by spin coating on the surface of any suitable substrate (e.g., the mirror surface of a silicon wafer), and if necessary, heating or drying is performed to form a cleaning layer on the substrate. However, when cleaning a conveying device (typically a chuck table, etc.) using a cleaning sheet or a conveying member with a cleaning function added that has a cleaning layer obtained as described above, it is common practice to place the cleaning sheet or the conveying member with a cleaning function added on the adsorption stage of the conveying device so that the cleaning layer side faces the adsorption stage side and perform vacuum adsorption, but there may be cases where an adsorption error occurs during this vacuum adsorption. FIG. 1 is a schematic cross-sectional view showing a cleaning sheet according to at least one embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing a cleaning sheet according to at least one embodiment of the present invention. FIG. 3 is a schematic cross-sectional view showing a cleaning sheet according to at least one embodiment of the present invention. FIG. 4 is a schematic cross-sectional view showing a cleaning sheet according to at least one embodiment of the present invention. FIG. 5 is a schematic diagram illustrating the normal direction, center direction, and end region of a cleaning sheet according to at least one embodiment of the present invention. FIG. 6 is a schematic cross-sectional view illustrating the difference (LT) between the maximum thickness L in the normal direction of the cleaning layer in the end region and the average thickness T in the normal direction of the cleaning layer in the region other than the end region of the cleaning layer in a cleaning sheet according to at least one embodiment of the present invention. FIG. 7 is a schematic cross-sectional view illustrating the width in the center direction of a portion having a thickness greater than 1 μm than the average thickness T of the cleaning layer in a cleaning sheet according to at least one embodiment of the present invention. FIG