KR-102965123-B1 - MAGNETIC COUPLING DEVICE

KR102965123B1KR 102965123 B1KR102965123 B1KR 102965123B1KR-102965123-B1

Abstract

A magnetic coupling device having a driving-side magnet row (10) in which a plurality of annular, fan-shaped first permanent magnets (14) are arranged along the circumferential direction, and a driven-side magnet row (20) in which a plurality of fan-shaped second permanent magnets (24) are arranged along the circumferential direction such that the pole surfaces of the first permanent magnets (14) and the pole surfaces of the second permanent magnets (24) face each other, wherein the driving-side magnet row (20) is driven by rotating the driving-side magnet row (10), wherein a first center line (X1) in the diameter direction of a specific first permanent magnet (140) among a plurality of first permanent magnets (14) and a second center line (X2) in the diameter direction of a specific second permanent magnet (240) among a plurality of second permanent magnets (24) are overlapped so that opposite poles face each other, and the specific first permanent magnet (140) and the specific The first permanent magnet (141) and the second permanent magnet (241) adjacent to the second permanent magnet (240) are also included, so that the area of the repulsion region where the repulsion force acts is set to be 5 to 15% of the area of the suction region where the suction force acts.

Inventors

키모토 아키히로
타구치 준노스케
요시모토 사토시
키시모토 노리히코
하야시 케이타

Assignees

가부시키가이샤 프로테리아루
도쿄엘렉트론가부시키가이샤

Dates

Publication Date: 20260513
Application Date: 20210729
Priority Date: 20200730

Claims (5)

A driving-side magnet row arranged in multiple numbers along the circumferential direction such that the first permanent magnets in the shape of an annular sector alternately become polarities, and It has a driven magnet row arranged such that a number of annular or fan-shaped second permanent magnets are alternately arranged along the circumferential direction to become two poles, and the pole surfaces of the first permanent magnets and the pole surfaces of the second permanent magnets face each other. A magnetic coupling device that drives a driven magnet train by driving a driven magnet train, A first center line in the diameter direction of a specific first permanent magnet among a plurality of first permanent magnets and a second center line in the diameter direction of a specific second permanent magnet among a plurality of second permanent magnets are overlapped so that opposite poles face each other, and a first permanent magnet and a second permanent magnet adjacent to the specific first permanent magnet and the specific second permanent magnet whose center lines are overlapped are also included, so that the area of the repulsion region where a repulsion force acts is set to be 5 to 15% of the area of the attraction region where an attraction force acts. A magnetic coupling device characterized in that, in the above-mentioned overlapping state, a repulsion region and an attraction region are formed in the specific first permanent magnet and the first permanent magnet adjacent thereto, respectively.
A driving-side magnet row arranged in multiple numbers along the circumferential direction such that the first permanent magnets in the shape of an annular sector alternately become polarities, and It has a driven magnet row arranged such that a number of annular or fan-shaped second permanent magnets are alternately arranged along the circumferential direction to become two poles, and the pole surfaces of the first permanent magnets and the pole surfaces of the second permanent magnets face each other. A magnetic coupling device that drives a driven magnet train by driving a driven magnet train, A first center line in the diameter direction of a specific first permanent magnet among a plurality of first permanent magnets and a second center line in the diameter direction of a specific second permanent magnet among a plurality of second permanent magnets are overlapped so that opposite poles face each other, and a first permanent magnet and a second permanent magnet adjacent to the specific first permanent magnet and the specific second permanent magnet whose center lines are overlapped are also included, so that the area of the repulsion region where a repulsion force acts is set to be 5 to 15% of the area of the attraction region where an attraction force acts. A magnetic coupling device characterized in that the above-mentioned driven magnet rows are arranged in a plurality along the circumferential direction in an area within a disc equipped with the above-mentioned driving magnet rows around the rotation axis of the driving magnet rows.
In claim 1 or 2, A magnetic coupling device characterized in that the first permanent magnet and the second permanent magnet are arranged along the circumferential direction without a gap.
In claim 1, A magnetic coupling device characterized by having a mechanism for moving the above-mentioned driven magnet row along the diameter direction of the first permanent magnet.
In claim 1, A magnetic coupling device characterized by having a pole piece made of a ferromagnetic material provided on the pole surface of the first permanent magnet and the second permanent magnet.

Description

Magnetic coupling device The present invention relates to a magnetic coupling device having a driving-side magnet row arranged in multiple numbers along a circumferential direction such that a first permanent magnet alternately becomes a polarity, and a driven-side magnet row arranged in multiple numbers along a circumferential direction such that a second permanent magnet alternately becomes a polarity and the pole surface of the first permanent magnet and the pole surface of the second permanent magnet face each other, wherein the driven-side magnet row is driven by rotating the driving-side magnet row. Such magnetic coupling is known as a method of transmitting power non-contactually. For example, in semiconductor manufacturing processes, there are vacuum film deposition devices such as ALD (Atomic Layer Deposition) that perform film deposition while rotating a film target object, such as a semiconductor wafer. In such vacuum film deposition devices, a magnetic coupling device is used in which a plurality of driven magnet rows are arranged around the rotation axis of a driving magnet row. By transmitting rotation to the driven side in a vacuum atmosphere that is physically isolated from the driving side, various films can be deposited by rotating the film target object while blocking particles generated from the driving side's power system. For example, in the substrate processing device of Patent Document 1, rectangular permanent magnets are arranged along the circumferential direction on the surface of a toroidal driving gear (driving-side magnet row), and rectangular permanent magnets are also arranged along the circumferential direction on the surface of a driven gear (driven-side magnet row). A partition member is provided between the driven gear and the driving gear to distinguish between an atmospheric atmosphere and a vacuum atmosphere. A wafer is placed on a support that rotates integrally with the driven gear. Patent Document 2 discloses a magnetic gear that transmits torque through magnetic attraction and repulsion of magnetic teeth by alternately arranging radial permanent magnets as N and S poles on the outer periphery of each rotating disc on the driving side and the driven side, which are opposed while maintaining a predetermined gap. The permanent magnets used in this magnetic gear have a shape that is a radial curve (e.g., an involute curve). In order to uniformly deposit a film on a film target in a vacuum film deposition apparatus as described above, it is necessary to stably rotate the driven magnet train at a constant speed of about 1 rpm. However, in the magnetic coupling apparatus disclosed in Patent Documents 1 and 2, there was a problem in that the following ability of the driven side was poor, constant speed rotation was not possible, or movement became unstable when starting or stopping rotation. FIG. 1a is a schematic plan view of a magnetic coupling device (100) according to the present invention. FIG. 1b is a side view (cross-sectional view) of the magnetic coupling device shown in FIG. 1A. FIG. 2a is a plan view showing the magnet arrangement of the driving magnet row and the magnet arrangement of the driven magnet row and their positional relationship. Figure 2b is a cross-sectional view showing the magnetic poles of a magnet. Figure 3 is a diagram explaining the principle of rotating the driven magnet train. FIG. 4 is a drawing illustrating the preferred shape of the first permanent magnet and the second permanent magnet. Figure 5 is a diagram illustrating the misalignment of the driven magnet rows. Figure 6 is a graph showing the experimental results of Examples 1 and 2. Figure 7 is a graph showing the experimental results of Comparative Example 1. Figure 8 is a graph showing the experimental results of Comparative Example 2. A preferred embodiment of the magnetic coupling device according to the present invention will be described first. FIG. 1a is a schematic plan view of the magnetic coupling device (100) according to the present invention, and FIG. 1b is a side view (cross-sectional view) of the magnetic coupling device shown in FIG. 1a. FIG. 2a is a plan view showing the arrangement of magnets of the driving side magnet row and the arrangement of magnets of the driven side magnet row and their positional relationship, and FIG. 2b is a cross-sectional view showing the magnetic poles of the magnets. <Configuration of a Magnetic Coupling Device> In the driving side magnet row (10), a plurality of first permanent magnets (14) are arranged along the circumferential direction on the surface (upper surface) of the disc (12). FIG. 2a shows a part of the disc (12), but the first permanent magnets (14) are arranged so that their magnetic poles alternately become two poles, that is, the S pole and the N pole alternate. The first permanent magnets (14) are fixed to the disc (12) by mechanical means such as screws. Alternatively, they may be fixed using adhesive. The drive-side