KR-102965195-B1 - NOZZEL STANDBY PORT

KR102965195B1KR 102965195 B1KR102965195 B1KR 102965195B1KR-102965195-B1

Abstract

A nozzle standby port is provided that includes an insertion part into which a nozzle for discharging a liquid medicine is inserted, a housing having a receiving space for discharging the liquid medicine, an upper housing located at the top of the housing including the insertion part, and a discharge port located at the bottom of the housing, wherein the receiving space is configured to narrow symmetrically toward the bottom and is configured to be rotatable about a virtual axis penetrating two sides opposite to the housing so as to be tilted, thereby reducing fumes generated in the nozzle standby port and effectively cleaning the inside of the nozzle standby port.

Inventors

손영준

Assignees

세메스 주식회사

Dates

Publication Date: 20260513
Application Date: 20220816

Claims (10)

An insertion part into which a nozzle for dispensing liquid medicine is inserted; A housing having a receiving space for discharging the above-mentioned liquid medicine; An upper housing located at the top of the above housing and including the insertion portion; and A discharge port located at the bottom of the above housing; comprising, The above-mentioned receiving space is configured with a shape that narrows symmetrically toward the bottom, and It is configured to be rotatable about a virtual axis penetrating the housing and to be tilted, and A first surface, which is one side of the housing, where the liquid medicine discharged from the nozzle falls and impacts. The housing is configured with a second surface, which is another side facing the first surface of the housing, wherein A nozzle standby port configured such that when rotated and tilted around the above virtual axis, the liquid medicine discharged from the nozzle falls and strikes the second surface.
In paragraph 1, The above discharge port is a nozzle waiting port located at the bottom of the above receiving space.
In paragraph 1, A nozzle standby port further comprising: a cleaning liquid inlet that penetrates one side of the upper housing and into which a cleaning liquid for cleaning the housing and the nozzle is introduced.
An insertion part into which a nozzle for dispensing liquid medicine is inserted; Housing having a receiving space for discharging a liquid medicine; An upper housing located at the top of the above housing and including the insertion portion; and A discharge port located at the bottom of the above housing; comprising, It is configured to be rotatable about a virtual axis penetrating the housing and to be tilted, and A first surface, which is one side of the housing, where the liquid medicine discharged from the nozzle falls and impacts. The housing is configured with a second surface, which is another side facing the first surface of the housing, wherein A nozzle standby port configured such that when rotated and tilted around the above virtual axis, the liquid medicine discharged from the nozzle falls and strikes the second surface.
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In paragraph 4, A nozzle standby port configured such that the housing is tilted with respect to the virtual axis through the extension of a linear motor on one side of the outside of the nozzle standby port.
In paragraph 4, A nozzle standby port configured such that a cam contacting one side of the outside of the nozzle standby port rotates, causing the housing to tilt with respect to the virtual axis.
In paragraph 4, A cleaning liquid inlet that penetrates one side of the upper housing and into which a cleaning liquid for cleaning the housing and the nozzle is introduced; A first surface, which is one side of the housing into which the cleaning liquid flows and falls to impact; and A second surface, which is another side of the housing facing the first surface of the housing; Including more, A nozzle standby port configured such that when rotated and tilted around the above-mentioned virtual axis, the cleaning liquid falls and strikes the second surface.
An insertion part into which a nozzle for dispensing liquid medicine is inserted; Housing having a receiving space for discharging a liquid medicine; An upper housing located at the top of the above housing and including the insertion portion; and A discharge port located at the bottom of the above housing; comprising, The above-mentioned receiving space is configured with a shape that narrows toward the bottom, and It is configured to be rotatable about a virtual axis penetrating the two sides facing the housing and configured to be tiltable, and It further includes a cleaning liquid inlet that penetrates one side of the upper housing and into which a cleaning liquid for cleaning the housing and the nozzle is introduced; A first surface, which is one side of the housing, where the liquid medicine discharged from the nozzle falls and impacts. The housing is configured with a second surface, which is another side facing the first surface of the housing, and A nozzle standby port configured such that when rotated and tilted around the above virtual axis, the liquid medicine discharged from the nozzle falls and strikes the second surface.
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Description

Nozzle Standby Port The technical field of the present invention relates to a nozzle standby port. Various processes, such as cleaning, deposition, photolithography, etching, and ion implantation, are performed to manufacture semiconductor devices. During the cleaning, photolithography, and etching processes, chemical solutions are supplied to the substrate. This chemical supply is carried out through nozzles. When chemical ejection is not taking place, the nozzles standby and are cleaned in the nozzle standby port. Figure 1 is a perspective view schematically showing a substrate processing apparatus. FIG. 2 is a cross-sectional view of a substrate processing apparatus showing the coating block or development block of FIG. 1. Figure 3 is a plan view of the substrate processing apparatus of Figure 1. Figure 4 is a front view showing the liquid treatment unit of Figure 3. FIG. 5a is a side cross-sectional view showing a nozzle standby port according to one embodiment of the present invention. FIG. 5b is a side cross-sectional view showing a nozzle standby port according to one embodiment of the present invention. FIG. 6a is a side cross-sectional view showing a nozzle standby port according to one embodiment of the present invention. FIG. 6b is a side cross-sectional view showing a nozzle standby port according to one embodiment of the present invention. FIG. 7a is a perspective view showing a nozzle standby port according to one embodiment of the present invention. FIG. 7b is a side view showing a nozzle standby port according to one embodiment of the present invention. FIG. 7c is a side view showing a nozzle standby port according to one embodiment of the present invention. Exemplary embodiments of the present invention are provided to more fully explain the invention to those skilled in the art to which the concept of the invention belongs, and the following embodiments may be modified in various different forms, and the scope of the invention is not limited to the following embodiments. Rather, these embodiments are provided to make the invention more faithful and complete and to fully convey the spirit of the invention to those skilled in the art. Throughout the specification, when a part is described as being "connected" to another part, this includes not only cases where they are "directly connected," but also cases where they are "indirectly connected" with other members in between. Furthermore, when a part is described as "including" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application. FIG. 1 is a perspective view schematically showing a substrate processing apparatus according to one embodiment of the present invention, FIG. 2 is a cross-sectional view of the substrate processing apparatus showing a coating block or a developing block of FIG. 1, and FIG. 3 is a plan view of the substrate processing apparatus of FIG. 1. Referring to FIGS. 1 to 3, the substrate processing device (1) includes an index module (20), a treating module (30), and an interface module (40). According to one embodiment, the index module (20), the treating module (30), and the interface module (40) are arranged sequentially in a row. The index module (20) returns the substrate (W) from the container (10) containing the substrate (W) to the processing module (30) and stores the processed substrate (W) back into the container (10). The index module (20) has a load port (22) and an index frame (24). The load port (22) is located on the opposite side of the processing module (30) relative to the index frame (24). The container (10) containing the substrates (W) is placed in the load port (22). Multiple load ports (22) may be provided. As the container (10), a sealed container (10), such as a Front Open Unified Pod (FOUP), may be used. The container (10) may be placed in a load port (22) by a transport means (not shown), such as an overhead transfer, an overhead conveyor, or an automatic guided vehicle, or by a worker. An index robot (2200) is provided inside the index frame (24). A guide rail (2300) is provided inside the index frame (24), and the index robot (2200) may be provided to be movable on the guide rail (2300). The index robot (2200) includes a hand (2220) on which a substrate (W) is placed, and the hand (2220) is configured to be capable of translational movement, rotation, etc. The processing module (30) performs a coating process and a devel