KR-20260062209-A - Ground transport apparatus and logistics processing system including the same

KR20260062209AKR 20260062209 AKR20260062209 AKR 20260062209AKR-20260062209-A

Abstract

The present invention provides a ground conveying device for transporting containers on the ground and a logistics processing system including the same. The ground conveying device is a device for transporting containers containing substrates within a semiconductor manufacturing plant, comprising: a driving module that moves along the ground within the semiconductor manufacturing plant; a housing disposed on the driving module; a shelf module disposed within the housing and including a plurality of shelves; and a manipulator module disposed within the housing, spaced apart from the shelf module, and capable of taking out containers stored on the shelves or bringing containers onto the shelves, and transports containers between a plurality of facilities including a substrate processing device and a ground storage device that stores containers on the ground.

Inventors

백경담
최지민
윤지원
손왕현
이승준
류건진
백승혁
이승준
정연부
차재혁

Assignees

삼성전자주식회사
세메스 주식회사

Dates

Publication Date: 20260507
Application Date: 20241028

Claims (20)

In a device for transporting a container containing a substrate within a semiconductor manufacturing plant, A driving module that moves on the ground within the above-mentioned semiconductor manufacturing plant; A housing disposed on the above driving module; A shelf module disposed within the above housing and comprising a plurality of shelves; and It includes a manipulator module positioned within the housing, spaced apart from the shelf module, and capable of taking out the container stored on the shelf or bringing the container into the shelf. A ground transport device for transporting the container between a plurality of facilities including a substrate processing device and a ground storage device for storing the container on the ground.
In Article 1, The above driving module includes a code reader that recognizes an identification code attached to the equipment, and The above identification code is a ground transport device used for docking between the ground transport device and the facility.
In Article 2, The above identification code is a ground conveying device consisting of a plurality of vertical codes attached to the upper surface of a plate installed on the front of the facility.
In Paragraph 3, The above ground transport device corrects the attitude for docking based on the first angle formed by the first line segment and the second line segment, and The first line segment is a line segment connecting two vertical codes selected from the plurality of vertical codes, and The above second line segment is a ground transport device that is a line segment parallel to the front of the driving module.
In Article 1, The above driving module is, A first distance measuring sensor for measuring the distance between the above ground conveying device and the above facility; and It includes a second distance measuring sensor adjacent to the first distance measuring sensor, and The first distance measuring sensor and the second distance measuring sensor are ground transport devices used for docking between the ground transport device and the facility.
In Article 5, A ground conveying device in which the identification code attached to the above equipment is a single horizontal code attached to the side of a plate installed on the front of the above equipment.
In Article 6, The above ground transport device is a ground transport device that corrects the attitude for docking based on a value calculated by calculating the measurement value of the first distance measuring sensor and the measurement value of the second distance measuring sensor.
In Article 6, The above ground transport device corrects the attitude for the docking based on the second angle formed by the third and fourth line segments, and The third line segment is a line segment connecting the first distance measuring sensor and the second distance measuring sensor, and The above-mentioned fourth line segment is a ground conveying device that is a line segment parallel to the front surface of the plate.
In Article 1, The above driving module includes a charging pad that charges a battery within the ground transport device, and The above charging pad is a ground conveyor that charges the battery while the ground conveyor is bringing in or taking out the container.
In Article 1, The above housing is a ground conveying device with at least one side open.
In Article 1, The above shelf is, A pin assembly for securing the above container; and It includes a sensor that detects whether the container is loaded or whether the container is in the correct position, The above pin assembly is a ground transport device surrounding the sensor.
In Article 11, The above pin assembly is, kinematic pins; and A ground conveyor device comprising a vibration-absorbing structure positioned below the above kinematic fin.
In Article 1, A ground conveying device further comprising an elastic structure installed between the driving module and the housing, which absorbs shocks applied from the outside.
In Article 1, The above manipulator module is, Second main body; A first arm rotatably coupled to the second main body; A second arm rotatably coupled to the first arm; and A ground conveying device including a hand installed at the end of the second arm.
In Article 14, The above second arm is a ground conveying device provided at a different level from the above first arm.
In Article 14, The above second main body is a ground conveying device that moves the above first arm in a direction perpendicular to the rotational direction.
In Article 14, The above manipulator module is a ground conveying device that brings in or takes out the container through the backward movement of the second arm, the rotational movement of the second arm, and the forward movement of the first arm.
A substrate processing device for processing substrates; A ceiling storage device installed on the ceiling of a semiconductor manufacturing plant that stores a container containing the above-mentioned substrate; A ground storage device that stores the above container and is installed on the ground within the semiconductor manufacturing plant; A ceiling conveyor device that moves along a rail installed on the ceiling and transports the container; and It includes a ground conveyor device that moves on the ground and transports the container, The above ground conveyor device is, Driving module; A housing disposed on the above driving module; A shelf module disposed within the above housing and comprising a plurality of shelves; and It includes a manipulator module positioned within the housing, spaced apart from the shelf module, and capable of taking out the container stored on the shelf or bringing the container into the shelf. The above ground conveying device is a logistics processing system that conveys the container between a plurality of facilities including the substrate processing device and the ground storage device.
In Article 18, A logistics processing system further comprising an inter-floor conveying device that connects the ceiling and the ground and transports the container.
In a device for transporting a container containing a substrate within a semiconductor manufacturing plant, A driving module that moves on the ground within the above-mentioned semiconductor manufacturing plant; A housing disposed on the above driving module; A shelf module disposed within the above housing and comprising a plurality of shelves; and It includes a manipulator module positioned within the housing, spaced apart from the shelf module, and capable of taking out the container stored on the shelf or bringing the container into the shelf. Transporting the container between a plurality of facilities including a substrate processing device and a ground storage device that stores the container on the ground, and The above driving module is, A code reader that recognizes an identification code attached to the above equipment; A first distance measuring sensor for measuring the distance between the above ground conveying device and the above facility; and It includes a second distance measuring sensor adjacent to the first distance measuring sensor, and The above identification code, the first distance measuring sensor, and the second distance measuring sensor are used for docking between the ground transport device and the facility, and The above identification code is a plurality of vertical codes attached to the upper surface of a plate installed on the front of the equipment, or a single horizontal code attached to the side of a plate installed on the front of the equipment. If the above identification code is the above vertical code, the ground transport device corrects the attitude for the docking based on the first angle formed by the first line segment and the second line segment, and If the above identification code is the above horizontal code, the ground transport device corrects the attitude for the docking based on the second angle formed by the third line segment and the fourth line segment, and The first line segment is a line segment connecting two vertical codes selected from the plurality of vertical codes, and The second line segment is a line segment parallel to the front of the driving module, and The third line segment is a line segment connecting the first distance measuring sensor and the second distance measuring sensor, and The above-mentioned fourth line segment is a ground conveying device that is a line segment parallel to the front surface of the plate.

Description

Ground transport apparatus and logistics processing system including the same The present invention relates to a ground conveying device for transporting a container containing a substrate within a semiconductor manufacturing plant and a logistics processing system including the same. When processing a substrate to produce a semiconductor, it can be moved to a facility that performs each process, such as a photolithography process, etching process, cleaning process, deposition process, and ion implantation process, while stored in a container (e.g., FOUP). In semiconductor manufacturing plants, overhead conveyors (e.g., OHTs) and ground conveyors (e.g., AMRs) may be deployed to transport containers. However, since numerous facilities are placed within a limited space on the ground, workspace was restricted. Consequently, overhead conveyors have conventionally been widely used for transporting containers. FIG. 1 is a first illustrative diagram for explaining the concept of a logistics processing system according to some embodiments of the present invention. FIG. 2 is a second illustrative diagram for explaining the concept of a logistics processing system according to some embodiments of the present invention. FIG. 3 is a first exemplary diagram for explaining the structure of a ground conveying device constituting a logistics processing system according to some embodiments of the present invention. FIG. 4 is a first exemplary diagram for explaining a driving module constituting a ground transport device according to some embodiments of the present invention. FIG. 5 is a second exemplary diagram for explaining a driving module constituting a ground transport device according to some embodiments of the present invention. FIG. 6 is a first illustrative diagram for explaining a housing and shelf module constituting a ground conveying device according to some embodiments of the present invention. FIG. 7 is a second exemplary diagram for explaining the housing and shelf module constituting a ground conveying device according to some embodiments of the present invention. FIG. 8 is a second exemplary diagram for explaining the structure of a ground conveying device constituting a logistics processing system according to some embodiments of the present invention. FIG. 9 is a first exemplary diagram for explaining a manipulator module constituting a ground transport device according to some embodiments of the present invention. FIG. 10 is a second exemplary diagram for explaining a manipulator module constituting a ground transport device according to some embodiments of the present invention. FIG. 11 is a third exemplary diagram illustrating a manipulator module constituting a ground transport device according to some embodiments of the present invention. FIG. 12 is a first illustrative diagram for explaining the docking sequence of a ground transport device according to some embodiments of the present invention. FIG. 13 is a second exemplary diagram for explaining the docking sequence of a ground transport device according to some embodiments of the present invention. FIG. 14 is a third exemplary diagram illustrating the docking sequence of a ground transport device according to some embodiments of the present invention. FIG. 15 is a fourth exemplary diagram illustrating a docking sequence of a ground transport device according to some embodiments of the present invention. FIG. 16 is a fifth exemplary diagram illustrating a docking sequence of a ground transport device according to some embodiments of the present invention. FIG. 17 is a sixth exemplary diagram illustrating the docking sequence of a ground transport device according to some embodiments of the present invention. FIG. 18 is a first illustrative diagram for explaining the handling sequence of a ground transport device according to some embodiments of the present invention. FIG. 19 is a second exemplary diagram illustrating the handling sequence of a ground transport device according to some embodiments of the present invention. FIG. 20 is a third exemplary diagram illustrating the handling sequence of a ground transport device according to some embodiments of the present invention. FIG. 21 is a fourth exemplary diagram illustrating a handling sequence of a ground transport device according to some embodiments of the present invention. FIG. 22 is a fifth exemplary diagram illustrating a handling sequence of a ground transport device according to some embodiments of the present invention. Embodiments of the present invention will be described in detail below with reference to the attached drawings. Identical components in the drawings are denoted by the same reference numerals, and redundant descriptions thereof are omitted. FIG. 1 is a first illustrative diagram for explaining the concept of a logistics processing system according to some embodiments of the present invention. Referring to FIG. 1, the logistics processing system (100) may be configured t