Search

KR-20260062243-A - Scrubber for removing harmful gas

KR20260062243AKR 20260062243 AKR20260062243 AKR 20260062243AKR-20260062243-A

Abstract

The present invention relates to a harmful gas removal device, and more specifically, to a harmful gas removal device for receiving harmful gas, removing harmful components, and discharging it. The present invention discloses a harmful gas removal device comprising: a reactor part (100) in which a reaction space (S1) for removing harmful gas is formed; a gas inlet part (200) provided at the top of the reactor part (100) and in which a gas passage (S2) for delivering the harmful gas to the reaction space (S1) is formed; and a heater part (300) installed in the gas inlet part (200) to be inserted into the gas passage (S2) and heating the inside of the gas passage (S2).

Inventors

  • 최성수
  • 이종원
  • 조승현
  • 김현민
  • 배수민
  • 김지훈
  • 박상준
  • 신현욱
  • 진용호
  • 김도훈
  • 진현석
  • 서혜민
  • 이진솔
  • 오승진

Assignees

  • 주식회사 원익홀딩스

Dates

Publication Date
20260507
Application Date
20241028

Claims (15)

  1. A reactor part (100) in which a reaction space (S1) for removing harmful gases is formed; A gas inlet section (200) provided at the top of the reactor section (100) and having a gas flow path (S2) formed therein for delivering the harmful gas to the reaction space (S1); A harmful gas removal device characterized by including a heater part (300) installed in the gas inlet part (200) to be inserted into the gas passage (S2) and heating the gas passage (S2).
  2. In claim 1, The above reactor part (100) is, A harmful gas removal device characterized by including a reactor body with an open top and an upper part (190) installed on the top of the reactor body to form the reaction space (S1) together with the reactor body.
  3. In claim 2, The upper part (190) above is, A harmful gas removal device characterized by having an inlet port (191) connected to the above gas inlet part (200).
  4. In claim 1, The above gas inlet part (200) is, A harmful gas removal device characterized by including a heater pipe section (210) coupled to the upper part of the reactor section (100) to form a part of the gas passage (S2) and having the heater section (300) installed inside, and a gas inlet line (220) provided to communicate with the heater pipe section (210) and forming the remainder of the gas passage (S2) inside to deliver the harmful gas from the outside.
  5. In claim 4, The above heater piping section (210) is, A harmful gas removal device characterized by being installed vertically on the upper part of the reactor section (100).
  6. In claim 4, The above gas inlet line (220) is, A harmful gas removal device characterized by being provided to communicate with the side of the heater pipe section (210).
  7. In claim 4, The above gas inlet line (220) is, A harmful gas removal device characterized by extending from the heater pipe section (210) in a direction inclined with respect to the upper surface of the reactor section (100).
  8. In claim 7, The above gas inlet line (220) is, A harmful gas removal device characterized by the fact that the upper edge of the reactor part (100) is tilted upward.
  9. In claim 4, The heater unit (300) above is, A harmful gas removal device characterized by being a cartridge heater that is inserted and installed in the heater pipe section (210).
  10. In claim 4, The heater unit (300) above is, A harmful gas removal device characterized by being inserted and installed in the heater pipe section (210), with the end located within the reaction space (S1).
  11. In claim 4, The heater unit (300) above is, A harmful gas removal device characterized by including a heater (310) installed by being inserted into the heater pipe section (210), and a temperature sensor (320) for measuring the temperature inside the heater (310) or the heater pipe section (210).
  12. In claim 1, The above harmful gas is, A harmful gas removal device characterized by comprising at least one of DCS gas, MCS gas, HCDS gas, STC gas, TCS gas, TFS gas, HFDS gas, TS gas, DS gas, MS gas, NH3 and N2.
  13. In claim 1, The above reactor part (100) is, A harmful gas removal device characterized by removing the above harmful gas using plasma.
  14. In claim 1, The above reactor part (100) is, A harmful gas removal device characterized by additionally including a burner part (400) installed in the upper part (190) to remove the harmful gas through combustion and to generate a flame into the reaction space (S1).
  15. In claim 1, A harmful gas removal device characterized in that the gas inlet section (200) and the heater section (300) are each provided in multiple numbers for a single reactor section (100).

Description

Scrubber for removing harmful gas The present invention relates to a harmful gas removal device, and more specifically, to a harmful gas removal device for receiving harmful gas, removing harmful components, and discharging it. A scrubber is a device that removes various harmful gases emitted during various processes, and is generally classified into a dry type that uses a heat source to directly remove harmful gases and a wet type that uses water to dissolve and remove water-soluble harmful gases. Recently, as harmful gases generated in various processes involving chemicals including perfluorocompounds (PFCs) have become more diverse and environmental problems arising from the external exhaust of harmful gases have emerged, there is a growing demand for high-performance scrubbers. Meanwhile, conventional hazardous gas removal devices receive and remove hazardous gases discharged after use from gas-using equipment, such as semiconductor processing equipment, provided at the front end; however, there is a problem in that some components of the incoming hazardous gas are converted into particles and solidified because the temperature inside the inlet where the hazardous gas enters is relatively low. In particular, conventional harmful gas removal devices have a problem in that, depending on the gas used in the upstream section, crystalline powder can be generated during the process of supplying it through the inlet due to the relatively low temperature, and the powder generated in this way hardens and clogs the inlet. In addition, conventional harmful gas removal devices are installed under environmental conditions where it is difficult to install the inlet section in a straight vertical direction. Consequently, bends occur in the flow path through which the exhaust gas is delivered, and furthermore, bends form at the contact point connecting to the reactor section, leading to a problem where the accumulation of generated powder intensifies. FIG. 1 is a cross-sectional view showing the appearance of a harmful gas removal device according to the present invention. FIG. 2 is an enlarged cross-sectional view showing the gas inlet and heater sections of the harmful gas removal device according to FIG. 1. FIG. 3 is a perspective view showing the gas inlet and heater sections of the harmful gas removal device according to FIG. 1. The harmful gas removal device according to the present invention will be described in detail below with reference to the attached drawings. A harmful gas removal device according to the present invention comprises, as illustrated in FIG. 1, a reactor part (100) in which a reaction space (S1) for removing harmful gas is formed; a gas inlet part (200) provided at the top of the reactor part (100) and in which a gas passage (S2) for delivering the harmful gas to the reaction space (S1) is formed; and a heater part (300) installed in the gas inlet part (200) to be inserted into the gas passage (S2) and to heat the gas passage (S2). Here, the harmful gas removal device according to the present invention may be configured to be connected to the downstream end of a gas-using facility and to remove harmful gases within the waste gas discharged from the upstream facility. At this time, any configuration of gas-using equipment can be applied to the shearing facility, and for example, it may be a device where a semiconductor process for semiconductor production is performed. In particular, the above-mentioned shearing facility is configured to perform a process using various types of gases. For example, for a nitride process, DCS gas (dichlorosilane, SiH2Cl2) can be used as a raw material gas and NH3 (ammonia) as a reaction gas. In this case, if the temperature of the waste gas discharged as a byproduct of the reaction between the raw material gas and the reaction gas is relatively low, crystalline powder such as NH4Cl may be generated, and consequently, it may harden and accumulate during the process of the gas flowing into the hazardous gas removal device after the discharge of the waste gas. Meanwhile, the above harmful gas may include not only the aforementioned DCS gas, but also at least one of MCS gas, HCDS gas, STC gas, TCS gas, TFS gas, HFDS gas, TS gas, DS gas, MS gas, NH3 and N2. The above reactor part (100) is configured such that a reaction space (S1) for removing harmful gases is formed, and various configurations are possible. At this time, the reactor unit (100) may be configured to remove harmful gases as disclosed in the prior art, and any method may be applied. For example, the reactor unit (100) may include a plasma method that removes harmful gases using plasma generated by a high-voltage electrode, a burn-in type that removes harmful gases using a combustion method, etc. Additionally, the reactor part (100) may be configured to remove residual by-products through a water film formed by supplying water, as shown in FIG. 1. Hereinafter, an embodiment of the reactor part (100) is d