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KR-20260062348-A - Process Gas Cylinder Lift Device

KR20260062348AKR 20260062348 AKR20260062348 AKR 20260062348AKR-20260062348-A

Abstract

The present invention relates to a device for safely and conveniently replacing a process gas container by using a lift device capable of gripping, lifting, and transporting the process gas container using a single drive unit.

Inventors

  • 채수웅
  • 이상호
  • 백동식
  • 배정인

Assignees

  • (주)리가스

Dates

Publication Date
20260507
Application Date
20241029

Claims (11)

  1. A frame part (100) in which a space (110) is formed on the inner side; A driving unit (200) provided on the upper part of the above frame part (100); A ball screw (300) connected to and rotated with the above driving unit (200); A pair of gripper parts (400) formed on the front side of the above-mentioned frame part (100) to grip the gas container (10); A grip guide link part (500) connected to the gripper part (400) and guiding the gripper part (400) to close or open; A linear plate (600) positioned on the rear side of the grip guide link portion (500) and including a hinge shaft (610) hinge-connected to the grip guide link portion (500); and A process gas container lift device (1) characterized by comprising: a main lift plate (700) which is connected to the ball screw (300) and coupled to the grip guide link part (500), moves up and down according to the rotational direction of the ball screw (300) to operate the grip guide link part (500) to cause the gripper part (400) to contract or expand, and guides the up and down movement of the linear plate (600).
  2. In paragraph 1, The above grip guide link part (500) is, A connecting link (510) coupled to the main lift plate (700) above, and A pair of connecting bars (520) hinge-connected to the above connecting link (510), and X-links (530) each hinge-connected to the above-mentioned connecting bar (520), and each having an insertion hole (531) in the center that is inserted into the hinge shaft (610) and a through hole (532) at each end, and A connecting shaft (540) that passes through the above-mentioned through hole (532) and, A process gas container lift device (1) characterized by being composed of a moving guide roller (550) coupled to the rear of the above connecting shaft (540).
  3. In paragraph 2, A process gas container lift device (1) characterized in that the moving guide roller (550) is inserted and moved into the linear plate (600), and a curved roller moving guide (620) is symmetrically formed to guide the spreading or closing movement of the X-link (530) according to the vertical movement direction of the connecting link (510).
  4. In paragraph 3, The above roller movement guide (620) is, An upper movement restriction section (621) formed at the top, and A lower movement restriction section (622) formed at the very bottom and, A process gas container lift device (1) characterized by being composed of a curved path (623) having a curved shape connecting the upper movement restriction section (611) and the lower movement restriction section (622).
  5. In paragraph 4, When the moving guide roller (550) is positioned in the upper movement limit section (621) due to the lowering of the main lift plate (700), the unfolding operation of the X-link (550) is completed, and at the same time, the unfolding operation of the gripper part (400) is also completed. A process gas container lift device (1) characterized in that when the moving guide roller (550) is positioned in the lower movement limiting section (622) due to the raising of the main lift plate (700), the closing operation of the X-link (550) is completed and the closing operation of the gripper part (400) is also completed.
  6. In paragraph 5, A process gas container lift device (1) characterized in that when the ball screw (300) continues to rotate clockwise while the above-mentioned moving guide roller (550) is positioned in the above-mentioned lower movement restriction section (622) and movement is restricted, the above-mentioned linear plate (600) rises.
  7. In paragraph 4, A middle lift plate (800) that is fastened to the ball screw (300) is formed on the rear side of the main lift plate (700), and The above middle lift plate (800) is, A crossbar member (810) comprising a first screw hole (811) in the center to which the ball screw (300) is fastened and insertion holes (812) on both sides, and A guide shaft (820) in which the upper and lower ends are connected to the upper and lower ends of the space (110) while inserted into each inlet hole (812), and A process gas container lift device (1) characterized by being composed of a guide block (830) that is coupled to the linear plate (600) while a pair of guide blocks are inserted vertically into each of the guide shafts (820).
  8. In Paragraph 7, On the lower surface of the above space (110), a movement limiting projection (120) is formed to support the guide block (830') on the lower side during the process of the linear plate (600) located on the upper side of the frame part (100) descending, thereby limiting the downward movement of the linear plate (600). A process gas container lift device (1) characterized in that, when the ball screw (300) continues to rotate counterclockwise while the downward movement of the linear plate (600) is restricted by the movement restriction projection (120), the movement guide roller (550) located in the lower movement restriction section (622) moves along the curved path (623) to the upper movement restriction section (621).
  9. In paragraph 2, The above gripper part (400) is, A handler (410) that is formed long in the longitudinal direction and has an inner side that is bent, and A ring housing (420) connected to the connecting shaft (510) while being rotatably connected to the outside of the handler (410), and A first pin (430) formed on the outer side of the handler (410), and A second pin (440) formed on the outer side of the above ring housing (420), and, A process gas container lift device (1) characterized by being composed of an elastic member (450) provided between the first and second pins (430, 440) to provide elastic force.
  10. In paragraph 1, A process gas container lift device (1) characterized by further including a gas cylinder (900) connecting the main lift plate (700) and the linear plate (600).
  11. In paragraph 1, A process gas container lift device (1) characterized by having a transfer cart (130) equipped with casters (not shown) further provided on the rear side of the above-mentioned frame part (100).

Description

Process Gas Cylinder Lift Device The present invention relates to a process gas container lift device comprising: a frame portion (100) having a space (110) formed on the inner side; a driving portion (200) provided on the upper part of the frame portion (100); a ball screw (300) connected to and rotated by the driving portion (200); a pair of gripper portions (400) formed on the front side of the frame portion (100) and gripping a gas container (10); a grip guide link portion (500) connected to the gripper portion (400) and guiding the gripper portion (400) to close or open; and a linear plate (600) positioned on the rear side of the grip guide link portion (500) and including a hinge shaft (610) hinge-connected to the grip guide link portion (500). The invention relates to a process gas container lift device characterized by comprising: a main lift plate (700) which is connected to the ball screw (300) and coupled to the grip guide link part (500), and moves up and down according to the rotational direction of the ball screw (300) to operate the grip guide link part (500) to cause the gripper part (400) to contract or expand, and guides the up and down movement of the linear plate (600). Generally, processes such as semiconductor manufacturing require special process gases to be used during execution, and specially manufactured gas cylinders are used to supply these process gases safely and accurately. These gas cylinders are installed in a gas cabinet filled with high-pressure gas and connected to piping; they are used by adjusting the valve during the necessary processes, and once use is complete, the gas is removed from the cabinet and replaced with a new cylinder filled with gas. Meanwhile, the existing method of replacing gas cylinders was performed manually by workers using transport means such as carts and wagons, which resulted in high worker fatigue due to the transport of heavy cylinders, prolonged work times caused by the long transport duration, and the risk of major accidents occurring if the cylinders tipped over due to worker error. FIGS. 1 and 2 are perspective views showing the overall appearance of a process gas container lift device according to a preferred embodiment of the present invention. FIG. 3 is an exploded perspective view showing the exploded view of a process gas container lift device according to a preferred embodiment of the present invention. FIG. 4 is a perspective view showing the frame part and the transfer cart among the components of a process gas container lift device according to a preferred embodiment of the present invention. FIG. 5 is an embodiment showing the X-link spread apart while the linear plate is positioned at the bottom in the configuration of a process gas container lift device according to a preferred embodiment of the present invention. FIG. 6 is an embodiment showing the position of the guide block in the state of FIG. 5. FIGS. 7 and 8 are embodiments showing the X-link operating and gradually closing while the linear plate of the process gas container lift device according to a preferred embodiment of the present invention is positioned at the bottom. FIG. 9 is an embodiment showing a linear plate moving from the bottom to the top in the configuration of a process gas container lift device according to a preferred embodiment of the present invention. FIG. 10 is an embodiment showing the position of the guide block in the state of FIG. 9. FIGS. 11 and 12 are plan views showing the middle gripper portion of a process gas container lift device according to a preferred embodiment of the present invention. Hereinafter, a process gas container lift device (1) according to an embodiment of the present invention will be described in detail with reference to the attached drawings. First, it should be noted that in the drawings, identical components or parts are indicated by the same reference numerals as much as possible. In describing the present invention, specific descriptions regarding related known functions or configurations are omitted to avoid obscuring the gist of the present invention. Referring to FIG. 2 or FIG. 3, a process gas container lift device (1) according to one embodiment of the present invention is largely composed of a frame part (100), a driving part (200), a ball screw (300), a gripper part (400), a grip guide link part (500), a linear plate (600), a main lift plate (700), and a middle lift plate (800). Before the explanation, the process gas container lift device (1) according to one embodiment of the present invention is equipped with interconnected components such as a drive motor, a sensor, a PCB, a control unit, and a power supply device so that the operation can be carried out smoothly. Since the principle of configuring and operating the drive elements corresponds to a level of technology widely known in the field to which the present invention belongs, a detailed description is omitted. In addition, it should be noted that a