KR-20260062438-A - Viewport module for vacuum chamber and vacuum system including the same

Abstract

The present invention relates to a viewport module for a vacuum chamber and a vacuum system including the same. More specifically, the vacuum chamber viewport module coupled to a vacuum chamber comprises at least one optical film provided on the inner wall of the vacuum chamber, an optical plate provided on the outer wall of the vacuum chamber at a position corresponding to the position of the optical film, and a holder portion for fixing at least one of the optical film and the optical plate to the vacuum chamber. The optical film comprises a polarizing film that polarizes light entering the interior of the vacuum chamber, and the optical plate comprises a polarizing plate that is rotatably provided on the outer wall of the vacuum chamber and can adjust light transmittance.

Inventors

• 김정빈
• 임하은
• 안성민
• 김시준
• 천민준
• 김수현
• 이상엽

Assignees

• 국립한밭대학교 산학협력단

Dates

Publication Date

20260507

Application Date

20241029

Claims (8)

1. In a viewport module for a vacuum chamber coupled to a vacuum chamber, At least one optical film provided on the inner wall of the vacuum chamber; An optical plate provided on the outer wall of the vacuum chamber, positioned at a location corresponding to the position of the optical film; and A holder portion for fixing at least one of the optical film and the optical plate to the vacuum chamber; wherein The above optical film includes a polarizing film that polarizes light introduced into the interior of the vacuum chamber; and A viewport module for a vacuum chamber, comprising: an optical plate rotatably provided on the outer wall of the vacuum chamber to control light transmittance; and a polarizing plate.
2. In paragraph 1, The above holder part is, A first holder that secures the optical film by being coupled to the inner wall of the vacuum chamber; and A viewport module for a vacuum chamber comprising: a second holder coupled to the first holder to tightly fix the optical film between them.
3. In paragraph 2, The above holder part is, A viewport module for a vacuum chamber comprising: a third holder that is coupled to the outer wall of the vacuum chamber and fixes the optical plate so as to be rotatable.
4. In paragraph 3, The above third holder is, It includes a hole of a predetermined length, A viewport module for a vacuum chamber comprising: a rotation means that passes through the hole and is coupled to the polarizing plate to rotate the polarizing plate.
5. In paragraph 1, The above holder part is, A viewport module for a vacuum chamber comprising: a fixing ring that is fitted and coupled into a groove formed in the vacuum chamber and fixes the optical film.
6. In paragraph 5, The above holder part is, A viewport module for a vacuum chamber comprising: a fourth holder that is coupled to the outer wall of the vacuum chamber and fixes the optical plate.
7. In paragraph 6, The above holder part is, A viewport module for a vacuum chamber comprising: a handle coupled to the polarizing plate and rotating the polarizing plate.
8. vacuum chamber; and A vacuum system comprising a viewport module coupled to the vacuum chamber, the feature of claim 1.

Description

Viewport module for vacuum chamber and vacuum system including the same The present invention relates to a viewport module and a vacuum system including the same, and more specifically, to a viewport module for a vacuum chamber and a vacuum system including the same. A vacuum chamber (1) refers to a sealed space or container that creates a vacuum by removing internal air and gas. This vacuum chamber (1) is used in various scientific experiments, manufacturing processes, and technical applications, and is used to obtain characteristics different from reactions or processes that occur under atmospheric pressure. In particular, the vacuum chamber (1) is essential for maintaining the accuracy and consistency of the manufacturing process, and the conditions for the vacuum chamber (1) to achieve a high degree of vacuum are very demanding. FIG. 1 is a schematic diagram showing the exterior of a conventional vacuum chamber, and FIG. 2 is a schematic diagram illustrating the interior of a conventional vacuum chamber, and FIG. 3 is a schematic diagram illustrating a conventional viewport module for a vacuum chamber, and FIG. 4 is a schematic diagram illustrating a conventional vacuum chamber viewed from the side, and Figure 5 is a schematic diagram showing an enlarged view of Figure 2. As illustrated in FIGS. 1 to 3, a viewport (10) for checking the interior of a vacuum chamber (1) isolated from the outside is essential for an accurate and stable process, as it allows observation of the interior while maintaining a vacuum state and monitors the progress of the process. In particular, in the case of a vacuum chamber (1) for depositing a thin film, a shutter is unavoidable to prevent the thin film from forming on the viewport (10), but due to a device for operating the internal shutter from the outside, vacuum leakage may occur as illustrated in FIG. 4. Additionally, as shown in FIG. 5, when using a conventional shutter, an OHP film (14) can be attached inside to protect the viewport (10) from the deposited thin film. In this case, since the thin film deposited on the OHP film (14) obscures the viewport (10), the OHP film (14) must be replaced periodically to check the inside of the vacuum chamber (1). At this time, there is a problem in that the thin film deposited on the wall surface is lifted during the replacement process of the film (14), causing a large amount of particles to be generated. FIG. 1 is a schematic diagram showing the exterior of a conventional vacuum chamber. FIG. 2 is a schematic diagram showing the interior of a conventional vacuum chamber. FIG. 3 is a schematic diagram illustrating a conventional viewport module for a vacuum chamber. FIG. 4 is a schematic diagram showing a conventional vacuum chamber viewed from the side. FIG. 5 is a schematic diagram showing an enlarged view of FIG. 2. FIG. 6 is a schematic diagram illustrating a vacuum chamber according to the present invention. FIG. 7 is a schematic diagram illustrating a viewport module for a vacuum chamber according to the present invention. FIG. 8 is a schematic diagram illustrating a vacuum chamber according to another embodiment of the present invention. FIG. 9 is a schematic diagram illustrating a viewport module for a vacuum chamber according to another embodiment of the present invention. In order to explain the present invention, the operational advantages of the present invention, and the objectives achieved by the implementation of the present invention, preferred embodiments of the present invention are illustrated below and examined with reference thereto. First, the terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention; singular expressions may include plural expressions unless the context clearly indicates otherwise. Furthermore, in this application, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. In describing the present invention, if it is determined that a detailed description of related known components or functions may obscure the essence of the invention, such detailed description is omitted. FIG. 6 is a schematic diagram illustrating a vacuum chamber according to the present invention, and FIG. 7 is a schematic diagram illustrating a viewport module for a vacuum chamber according to the present invention. As illustrated in FIGS. 6 and 7, a vacuum chamber viewport module (1000) coupled to a vacuum chamber (1) according to the present invention may include an optical film (100), an optical plate (200), and a holder part (300). The optical film (100) may be provided on the inner wall of the vacuum chamber (1) and may include at least one film. Wh