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KR-20260062589-A - Jig apparatus and installation method of substrate processing apparatus using the same

KR20260062589AKR 20260062589 AKR20260062589 AKR 20260062589AKR-20260062589-A

Abstract

The present invention relates to a jig device and a method for installing a substrate processing device using the same, and more specifically, to a jig device for installing a substrate processing device capable of processing multiple substrates simultaneously and a method for installing a substrate processing device using the same. The present invention discloses a jig device comprising: a fixed jig part (100) fixedly positioned adjacent to the loading chamber (20); a movable jig part (200) that supports the processing unit (30) and moves horizontally on the fixed jig part (100); and a transfer rail part (300) provided from the movable jig part (200) toward the loading chamber (20) so that the processing unit (30) can move toward the loading chamber (20).

Inventors

  • 현다은
  • 김기준

Assignees

  • 주식회사 원익아이피에스

Dates

Publication Date
20260507
Application Date
20241029

Claims (18)

  1. A jig device for installing a substrate processing device comprising a loading chamber (20) for loading/unloading substrates on a boat (10) on which a plurality of substrates are loaded, and a processing unit (30) disposed above the loading chamber (20) to introduce the substrates as the boat rises and process the substrates. A fixed jig part (100) fixedly positioned adjacent to the above loading chamber (20); A movable jig part (200) that supports the processing unit (30) and moves horizontally on the fixed jig part (100); A jig device characterized by including a transfer rail section (300) provided from the moving jig section (200) toward the loading chamber (20) so that the processing unit (30) can move toward the loading chamber (20).
  2. In claim 1, The above fixed jig part (100) is, A jig device characterized by being fastened to the rear of the loading chamber (20) via a fastening bracket (90).
  3. In claim 1, The above fixed jig part (100) is, A jig device characterized by being positioned between a pair of utility parts (40) spaced apart from each other on the rear side of the loading chamber (20).
  4. In claim 3, A jig device characterized by additionally including a spacing adjustment part (400) provided between the side of the fixed jig part (100) and the inner surface of the utility part (40) to adjust the spacing between the fixed jig part (100) and the utility part (40).
  5. In claim 3, The above fixed jig part (100) is, A jig device characterized by including a front fixing jig part (110) positioned between a pair of utility parts (40), and a rear fixing jig part (120) which is connected to maintain alignment through a plurality of fastening means (80) at the rear of the front fixing jig part (110) and is positioned to extend toward the rear of the utility part (40).
  6. In claim 1, The above fixed jig part (100) is, A jig device characterized by including a frame portion (130) provided at a preset height, and a top plate portion (140) provided on the upper part of the frame portion (130) on which the moving jig portion (200) moves.
  7. In claim 6, The above fixed jig part (100) is, A jig device characterized by including a guide part (150) installed on the upper plate part (140) to guide the movement of the moving jig part (200).
  8. In claim 6, The above upper plate (140) is, A jig device characterized in that the upper surface is located at a lower position than the upper surface of the loading chamber (20).
  9. In claim 1, The above moving jig part (200) is, A jig device characterized by comprising: a jig plate (210) having a plurality of fastening holes formed therein so as to be movable on the fixed jig part (100) and connected to the processing unit (30); and a plurality of ball casters (220) provided on the jig plate (210) to support the processing unit (30) so as to be movable.
  10. In claim 1, The above moving jig part (200) is, A jig device characterized by additionally including a wheel part (230) provided on the bottom surface so as to be movable on the fixed jig part (100).
  11. In claim 1, The above moving jig part (200) is, A jig device characterized by including a detachment prevention part (240) that is detachably installed to prevent detachment of the supporting processing unit (30).
  12. In claim 1, The above transfer rail section (300) is, A jig device characterized in that one end is connected to the moving jig part (200) and the other end is located at the installation position of the processing unit (30) in the loading chamber (20).
  13. In claim 1, The above transfer rail section (300) is, A jig device characterized by being configured to be movable relative to the above-mentioned moving jig part (200) and extending to the installation position of the processing unit (30) in the above-mentioned loading chamber (20).
  14. In claim 1, A jig device characterized by additionally including a height adjustment unit (500) for adjusting the height of the processing unit (30) so as to move the processing unit (30) supported on the transfer rail section (300) upwardly away from the transfer rail section (300).
  15. In claim 14, The height adjustment unit (500) above is, A jig device characterized by including a plurality of level bolts installed through the processing unit (30) to adjust the gap between the processing unit (30) and the upper surface of the loading chamber (20).
  16. A method for installing a substrate processing device using a jig device according to claim 1, A first moving step (S100) for horizontally moving the moving jig part (200) seated on the fixed jig part (100) to the end of the loading chamber (20) of the fixed jig part (100); A second movement step (S200) for horizontally moving the processing unit (30) located in the moving jig section (200) to the upper side of the loading chamber (20) via the transfer rail section (300); A processing unit mounting step (S300) for removing the transfer rail part (300) and the moving jig part (200) and mounting the processing unit (30) on the loading chamber (20); A method for installing a substrate processing device, characterized by including a processing unit installation step (S400) of fixing the processing unit (30) to the loading chamber (20).
  17. In claim 16, A method for installing a substrate processing device, characterized by additionally including a lifting movement step (S500) in which, prior to the first movement step (S100), the processing unit (30) is fixed to the moving jig part (200), and the moving jig part (200) with the processing unit (30) fixed is raised and placed on the fixed jig part (100).
  18. In claim 16, The above processing unit mounting step (S300) is, A method for installing a substrate processing device, characterized by including: a processing unit raising step (S310) in which the processing unit (30) supported on the transfer rail section (300) is moved upward from the transfer rail section (300) through a height adjustment section (500) that adjusts the height of the processing unit (30); a retraction step (S320) in which the moving jig section (200) is retracted while the processing unit (30) is moved away from the transfer rail section (300) through the processing unit raising step (S310); and a placement step (S330) in which the processing unit (30) is lowered through the height adjustment section (500) and placed on the loading chamber (20).

Description

Jig apparatus and installation method of substrate processing apparatus using the same The present invention relates to a jig device and a method for installing a substrate processing device using the same, and more specifically, to a jig device for installing a substrate processing device capable of processing multiple substrates simultaneously and a method for installing a substrate processing device using the same. A substrate processing device is configured to perform substrate processing such as deposition, etching, and heat treatment on a substrate, and can be classified into single-wafer type, batch type, etc. Generally, a batch-type substrate processing device is a device that performs substrate processing by stacking a plurality of substrates vertically, and includes a loading chamber for loading and unloading a plurality of substrates onto a boat, a processing unit provided above the loading chamber for performing substrate processing by introducing substrates as the boat rises, and a utility unit that provides various utilities to the processing unit and the loading chamber. At this time, the processing unit is configured to be installed by being seated on the upper surface of the loading chamber, and thus requires installation and replacement through high-altitude work. In particular, as the size and height of processing units have recently increased, the weight has been increasing significantly, so a jig device for setting up such heavy-weight processing units is essential. Meanwhile, conventional jig devices for transporting and installing processing units moved the processing unit by manually pushing it or simply transferring it to the upper side of the loading chamber using rollers while it was placed at a high position; however, as the weight of the processing unit increased, it became difficult to move it to the upper side of the loading chamber, and there was a problem in that the safety of workers could not be guaranteed during high-altitude work involving heavy objects. FIG. 1 is a schematic plan view showing a substrate processing device installed through a jig device according to the present invention. FIG. 2 is a perspective view showing a substrate processing device having a jig device according to FIG. 1 arranged thereon. FIG. 3 is a drawing showing a fastening bracket for connecting a fixed jig part and a loading chamber among the jig device according to FIG. 1. Figure 4 is an enlarged view showing the appearance of the gap adjustment part of the jig device according to Figure 1. FIG. 5 is a side view showing the appearance of a movable jig part in which a processing unit is fixed among the jig devices according to FIG. 1. FIG. 6 is a plan view showing the moving jig section and the transfer rail section of the jig device according to FIG. 1. Figure 7 is an enlarged view showing the appearance of the gap adjustment part of the jig device according to Figure 1. FIGS. 8a to 8e are plan views showing the installation process of a substrate processing device using a jig device according to FIG. 1. FIG. 9 is a flowchart showing a method of installing a substrate processing device using a jig device according to the present invention. The following describes the installation method of a jig device according to the present invention and a substrate processing device using the same, with reference to the attached drawings. The jig device according to the present invention is a jig device for installing a substrate processing device comprising a loading chamber (20) for loading/unloading substrates on a boat (10) on which a plurality of substrates are loaded as shown in FIG. 1, and a processing unit (30) disposed above the loading chamber (20) to introduce the substrates as the boat rises and process the substrates, and comprises: a fixed jig part (100) fixedly disposed adjacent to the loading chamber (20); a movable jig part (200) that supports the processing unit (30) and moves horizontally on the fixed jig part (100); and a transfer rail part (300) provided from the movable jig part (200) to the loading chamber (20) so that the processing unit (30) can move toward the loading chamber (20). In addition, the jig device according to the present invention may further include a spacing adjustment unit (400) provided between the side of the fixed jig part (100) and the inner surface of the utility part (40) to adjust the spacing between the fixed jig part (100) and the utility part (40). In addition, the jig device according to the present invention may further include a height adjustment unit (500) for adjusting the height of the processing unit (30) so as to move the processing unit (30) supported on the transfer rail section (300) upward from the transfer rail section (300). Here, the substrate subject to processing can be understood to include all substrates used in display devices such as LEDs, LCDs, and OLEDs, semiconductor substrates, solar cell substrates, glass substrates, etc. The a