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KR-20260062622-A - gaseous material decomposition module using light energy

KR20260062622AKR 20260062622 AKR20260062622 AKR 20260062622AKR-20260062622-A

Abstract

The present invention relates to a gaseous substance decomposition module utilizing light energy, comprising: a chamber having a reaction space in which the inlet and the outlet are connected, wherein at least one inlet pipe is formed with a light-transmitting window at one end and an inlet port is formed on the outer surface for the fluid to be treated to be introduced, and the other end has an outlet pipe formed therein; a first catalyst plate installed inside the chamber that allows fluid permeability and contains a thermal catalyst; a second catalyst plate installed inside the chamber between the first catalyst plate and the outlet port that allows fluid permeability and contains a photocatalyst; and a light irradiation unit installed opposite the light-transmitting window to irradiate light toward the first catalyst plate inside the chamber.

Inventors

  • 이광철
  • 안정환

Assignees

  • 한국광기술원

Dates

Publication Date
20260507
Application Date
20241029

Claims (11)

  1. A chamber having a reaction space in which the inlet and the outlet are in communication, wherein at least one inlet pipe is formed having a light-transmitting window at one end and an inlet port is formed on the outer surface for the fluid to be processed to flow in, and the other end has an outlet pipe formed having an outlet port; A catalytic decomposition unit comprising: a first catalyst plate installed within the chamber that allows fluid permeability and contains a thermal catalyst; a second catalyst plate installed within the chamber between the first catalyst plate and the outlet that allows fluid permeability and contains a photocatalyst; and A gaseous substance decomposition module utilizing light energy, characterized by having a light irradiation unit installed opposite to the light-transmitting window and irradiating light toward the first catalyst plate inside the chamber.
  2. A gaseous substance decomposition module utilizing light energy, characterized in that, in claim 1, it further comprises a light-diffusing reflector disposed between the second catalyst plate and the outlet, which reflects light transmitted from the light irradiation unit and incident via the first and second catalyst plates so as to be re-incident on the second catalyst plate.
  3. A gaseous substance decomposition module utilizing light energy, characterized in that, in paragraph 2, the light-diffusing reflector is formed such that a photocatalyst and a thermal catalyst are included in a reflector plate formed of a light-reflecting material.
  4. A gaseous substance decomposition module utilizing light energy, characterized in that, in paragraph 3, the first catalyst plate is formed by including at least one thermocatalytic material among Pt, Pd, Au, Ag, Ru, Rh, Cu, Ni, Ti, and W.
  5. The method of claim 3, wherein the second catalyst plate is TiO 2 , Zr-TiO 2 , Rh, Pt, Pd, Ag, Ru/TiO 2 , Pd/Sr 2 Ta 2 O 7 , Y, Ge-Si 3 N 4 , YOF, WO 3 , Si 3 N 4 , Ga 2 O 3 , ZnO, SnO 2 , SrTiO 3 , Rh/SrTiO 3 , Nb 2 O 5 , NiO, Cu/ZnO, Cu/Al 2 O 3 -ZnO, Ge doped Si 3 N 4 , Rh/TaON, TiN, BiVO 4 , BiFeO 3 , CoTiO 3 , In 2 O 3 -x/In 2 O 3 , CuO, Cu 2 O, CuWO 4 , FeTiO 3 , Fe 2 O 3 , gC A gaseous substance decomposition module utilizing light energy , characterized by being formed by including at least one photocatalytic material selected from 3N4 , Ta3N5 , MOF , ZIF, zeolite, ZnS, CuS, MoS2 , and InGaN.
  6. In paragraph 3, further comprising a carrier gas inlet spaced apart from the inlet of the chamber to introduce a carrier gas into the reaction space inside the chamber; A gaseous substance decomposition module utilizing light energy, further comprising a carrier gas supply unit that injects either air or nitrogen as a carrier gas into the carrier gas inlet.
  7. A gaseous substance decomposition module utilizing light energy, characterized in that, in claim 6, the carrier gas injection port is provided between the light-transmitting window and the inlet.
  8. In paragraph 1, the chamber The structure comprises a first portion formed downward from one end equipped with the light-transmitting window, having a first outer diameter, and having the carrier gas inlet and the inlet formed on the outer surface; a first tapered portion extending downward from the first portion such that the outer diameter gradually decreases; a second portion extending downward from the bottom of the first tapered portion such that the outer diameter gradually increases as it proceeds downward from the second portion; a third portion extending downward from the end of the second tapered portion such that the outer diameter gradually decreases as it extends downward, and having the outlet pipe connected at the end of the third tapered portion. A gaseous substance decomposition module utilizing light energy, characterized in that the first and second catalyst plates are mounted on the third part.
  9. In paragraph 1, the chamber The structure is formed to have a first part formed downwardly from one end equipped with the light-transmitting window, having a first outer diameter, and having the carrier gas injection port and the inlet port formed on the outer surface; a first tapered part that extends downwardly from the first part such that the outer diameter gradually decreases; and a second part that extends downwardly from the bottom of the first tapered part having a second outer diameter, with the end being the outlet pipe. A gaseous substance decomposition module utilizing light energy, characterized in that the first and second catalyst plates are mounted on the second part.
  10. In paragraph 1, the chamber The structure comprises a first portion formed downward from one end equipped with the light-transmitting window, having a first outer diameter, and having the carrier gas inlet and the inlet formed on the outer surface; a first tapered portion extending downward from the first portion such that the outer diameter gradually decreases; a second portion extending downward from the bottom of the first tapered portion such that the outer diameter gradually increases as it proceeds downward from the second portion; a second tapered portion extending downward from the second portion such that the outer diameter gradually increases as it proceeds downward; and a third tapered portion extending downward from the end of the second tapered portion such that the outer diameter gradually decreases as it extends downward, with the outlet pipe connected at the end. A gaseous substance decomposition module utilizing light energy, characterized in that the first and second catalyst plates are mounted on the second part.
  11. A gaseous matter decomposition module utilizing light energy according to claim 1, characterized in that the inner wall of the chamber is formed of any one of alpha alumina (α- Al₂O₃ ), YOF , AlF₃ , CaF₂, YF₃ , YwErxOyFz, Al, Mo, W , LaB₆, CaB₆ , Ni-Cr, Ni-Cu, Ni-Mo, Cu, Cu-15Zn, Cr-Ni-Mo steel, carbon steel, and Haynes 242 alloy.

Description

Gaseous material decomposition module using light energy The present invention relates to a gaseous substance decomposition module utilizing light energy, and more specifically, to a gaseous substance decomposition module utilizing light energy that decomposes toxic harmful gases through light energy. Toxic hazardous gases emitted from semiconductor processes or various industrial phenomena are composed of a wide variety of substances, mainly fine dust, total volatile organic compounds (TVOC), nitrogen compounds ( NH₃ , NOx), sulfur oxides (SOx), fluorine compounds (PFC, CFC, HFC, etc.), acids (HCl, HF, etc.), and bases (NaOH, KOH, etc.). In addition, among fluorinated compounds (FCs) containing fluorine (F), substances that require treatment as toxic hazardous gases include chlorofluorocarbons (CFCs; fluorinated compounds containing chlorine (Cl), such as CCl₃F ), hydrofluorocarbons (HFCs; HFC-143a ( CH₃CF₃ ), HFC - 152a ( CH₃CHHF₂ ), etc.), and perfluorinated compounds (hereinafter 'PFCs') (including saturated and unsaturated aliphatic perfluorocarbons such as CF₄ , CHF₃ , CH₃F₂ , C₂F₄ , C₂F₆ , C₃F₆ , C₃F₅ , C₄F₅ , C₄F₅ , C₄F₁₀ , etc. , as well as cyclic aliphatic and aromatic perfluorocarbons) . Examples include nitrogen-containing PFCs ( NF3 ) and sulfur-containing PFCs ( SF4 , SF6 , etc.). Among these toxic and hazardous gaseous substances, perfluorinated compounds (PFCs) are classified as greenhouse gases with a global warming potential (GWP) and atmospheric decomposition lifetime thousands of times higher than that of CO2 , yet separation, recovery, or decomposition removal is very difficult. Among fluoride compounds, PFCs have a much greater adverse environmental impact than CFCs used as refrigerants, as they are more stable, have a higher global warming potential, and take much longer to decompose. However, as semiconductor processes become more complex and precise, the demand for PFCs is increasing every year. On the other hand, countries around the world are gradually strengthening regulations on PFCs due to their environmental impact. Given that PFCs, particularly carbon-containing PFCs, are the most widely used, many technologies are being developed to remove them. Representative treatment technologies can be divided into separation and recovery using Pressure Swing Adsorption (PSA) and membranes, and decomposition and removal using direct/indirect/plasma combustion or catalysts. In particular, industrial facilities utilize various types of Point of Use (POU) gas scrubbers for treatment, and recently, the plasma-wet type has been the most preferred. The combustion method used as a technology for decomposing and removing fluorinated compounds involves decomposing gaseous substances by burning them using combustible gases such as LNG or LPG, but it has the disadvantage of generating nitrogen oxides (NOx) due to high temperatures and having a low decomposition rate of perfluorinated compounds. In other words, while combustion and thermal decomposition are the most preferred industrial methods for the decomposition and removal of fluoride compounds, they have the disadvantage of requiring high operating costs due to the high temperatures exceeding 1,000°C and the large amount of energy required to decompose perfluorocarbons, as well as the need for post-treatment processes because the decomposition products contain hazardous substances such as HF, HCl, NOx, and SOx. Since these hazardous substances are generally dissolved by spraying water in a wet manner and undergo a separate water purification process, additional process costs are incurred. In addition, the plasma type has an excellent decomposition rate of perfluorinated compounds due to the high temperature implementation, but operating costs are a problem due to excessive power consumption and low energy consumption efficiency resulting from the plasma implementation. In other words, plasma decomposition is a technology that decomposes waste gas containing PFCs by passing it through a plasma region. While effective for PFC decomposition, it has the problem of generating various types of byproducts through secondary reactions of radicals produced by the indiscriminate decomposition of PFCs due to the use of high-energy plasma. Furthermore, there are many issues regarding the durability and economic feasibility of plasma generators required to stably generate plasma for extended periods. Meanwhile, the recovery method is a method of separating and recovering PFC components contained in waste gas using PSA or a separation membrane, and while it is desirable in that it allows for the recycling of PFCs, it is a method with low economic feasibility when dealing with PFCs that are emitted irregularly in small quantities, such as in semiconductor processes. As another decomposition method, catalytic decomposition has the advantage of reducing operating costs due to energy savings and ensuring long-term system durability by increasing reaction activit