KR-20260062701-A - Panel Processing Equipment Capable of Monitoring Panel Alignment by Vision

KR20260062701AKR 20260062701 AKR20260062701 AKR 20260062701AKR-20260062701-A

Abstract

A panel processing device capable of verifying panel alignment by image analysis is disclosed. The panel processing device of the present invention includes a plurality of cameras and an image processor capable of verifying the panel alignment state by analyzing images captured by the cameras. The image processor can determine the panel alignment state by verifying the alignment state of a pre-set sight and a region of interest of the panel in the image captured by the cameras.

Inventors

허동근
김선왕
김학두

Assignees

(주)에스티아이

Dates

Publication Date: 20260507
Application Date: 20241029

Claims (7)

In a panel processing device for processing PLP (Panel Level Package) panels, A main body (100) having an internal space for accommodating and processing the above panel; A spindle unit (200) having a spindle stage (210) that supports and rotates the above panel; A camera unit provided within the main body (100) to photograph the panel and generate an image; and A panel processing device characterized by including an image processor that performs image processing on an image generated by the camera unit to determine whether the panel is aligned to the correct position of the spindle stage (210) and generates an alarm if there is an alignment error.
In paragraph 1, The above image processor is, It includes an image processing unit that determines the alignment error by pre-setting the pixel coordinates of a plurality of gauges to be placed at a plurality of pre-set designated positions based on an image generated by the camera unit, and determining whether the panel corners are aligned in the image generated by the camera unit. A panel processing device characterized in that the above designated position is a position on an image where the panel corner, aligned in the posture of the camera unit, is captured.
In paragraph 2, The above camera unit (500) is, It includes a first camera (500-1) and a second camera (500-2) positioned to photograph the panel from the side at an inclined angle, and photographing centered on the nearest corner among the corners of the panel. A panel processing device characterized by determining alignment status at multiple designated positions by determining whether one of the panel corners is aligned with a gauge set for a first camera image captured by the first camera (500-1) and determining whether another of the panel corners is aligned with another gauge set for a second camera image captured by the second camera (500-2).
In paragraph 2, A panel processing device characterized by further including a display unit that displays the first camera image and the second camera image processed by the image processing unit so that they can be visually recognized, while also displaying the scale together.
In paragraph 1, The chamber control unit further includes sending an alignment verification request to the image processor when the panel is loaded onto the spindle stage and before it is unloaded. A panel processing device characterized in that the image processor receives an alignment verification request from the chamber control unit and performs image processing on an image provided by the camera unit.
In paragraph 5, The above chamber control unit A panel processing device characterized by determining the loading and unloading status of the panel by using the operation schedule of a robot (21) that loads and unloads the panel onto the spindle stage (210) or by using the operation of a panel support member (23) connected to a robot arm (22).
In paragraph 1, The above image processor is, A panel processing device characterized by including an alarm generation unit that generates the alarm according to the above alignment error and displays it on a display unit, and also displays the alignment status of the panel according to the above image processing on the display unit.

Description

Panel Processing Equipment Capable of Monitoring Panel Alignment by Vision The present invention relates to a panel processing device, and more specifically, to a panel processing device capable of determining whether a panel is aligned in place on the spindle stage of the panel processing device using vision technology. Panel Level Package (PLP) is a technology that mounts multiple integrated circuit (IC) chips onto a single panel and separates them into individual packages after processing. A process for manufacturing a semiconductor package includes a development process in which a chemical solution is applied to the surface of a panel to be processed, dried, and then exposed to a required pattern, and a developer solution is sprayed onto the surface of the exposed panel to selectively remove the exposed and unexposed areas. Conventional panel processing devices not only failed to verify whether a panel was introduced into the spindle stage installed inside the process chamber in the correct position, but also lacked a means to determine whether the panel had deviated from its correct position on the spindle stage after the process was completed. Consequently, if the process proceeded with the panel not properly positioned on the spindle stage, or if the panel was removed after the process was finished without being in the correct position on the spindle stage, process defects such as panel damage occurred. Prior art related to a panel processing device is disclosed in Korean Registered Patent No. 10-2566766. (Patent Document 1) KR 10-2566766 B (Title of Invention: Substrate Processing Device and Substrate Processing Method) FIG. 1 is a plan view of the panel processing device of the present invention, FIG. 2 is a front external view of the process chamber of the panel processing device of the present invention. FIG. 3 is a rear external view of the process chamber of the panel processing device of the present invention. FIG. 4 is a plan view of the process chamber of the panel processing device of the present invention, FIG. 5 is a cross-sectional view of line AA of FIG. 4, FIG. 6 is a cross-sectional perspective view of line AA of FIG. 4, FIG. 7 is a cross-sectional view of the BB line of FIG. 4, FIG. 8 is a cross-sectional perspective view of line BB of FIG. 4, FIG. 9 is a plan view showing the internal structure of the process chamber of the panel processing device of the present invention. FIG. 10 is a perspective view of a shutter unit provided in a process chamber of a panel processing device of the present invention. FIG. 11 is a perspective view of a clamp rotating part of a spindle unit provided in a process chamber of a panel processing device of the present invention in a raised position. FIG. 12 is a front view and a partially enlarged cross-sectional view of FIG. 11, FIG. 13 is a plan view of FIG. 11, FIG. 14 is a perspective view of a clamp rotating part of a spindle unit provided in a process chamber of a panel processing device of the present invention in a downwardly moved state. FIG. 15 is a front view and a partially enlarged cross-sectional view of FIG. 14, FIG. 16 is a plan view of FIG. 14, FIG. 17 is a perspective view of a bowl unit provided in the process chamber of the panel processing device of the present invention. FIG. 18 is a plan view of FIG. 17, FIG. 19 is a cross-sectional perspective view of the CC line of FIG. 18, FIG. 20 is a cross-sectional view of the DD line of FIG. 18, FIG. 21 is a cross-sectional view showing a panel loaded in a process chamber of a panel processing device of the present invention, with the nozzle arm in a process standby position, the bowl cup lowered, and the clamp raised. FIG. 22 is a perspective view of a nozzle arm unit provided in a process chamber of a panel processing device of the present invention. FIG. 23 is a side view showing the rotation and lifting drive structure of a nozzle arm provided in the process chamber of the panel processing device of the present invention. FIG. 24 (a) and (b) are bottom views of a nozzle arm unit showing an example of a nozzle arrangement structure formed on the bottom surface of a nozzle arm provided in a process chamber of a panel processing device of the present invention. FIG. 25 is a side view showing (a) the appearance of a nozzle arm provided in a process chamber of a panel processing device of the present invention when it is in a process waiting position, and (b) the appearance of a nozzle arm when it is in a process progress position rotated at a predetermined angle after moving upward. FIG. 26 is a cross-sectional view showing the bowl cup moving upward and the clamp moving downward to support the panel. FIG. 27 is a cross-sectional view showing the nozzle arm rising and rotating from the state of FIG. 26 to move to the process progress position. FIG. 28 is a perspective view showing a smart vision camera equipped in the process chamber of the panel processing device of the present invention c