KR-20260062733-A - Panel Processing Equipment Capable of Monitoring Vibration of Panel Spindle Stage

KR20260062733AKR 20260062733 AKR20260062733 AKR 20260062733AKR-20260062733-A

Abstract

A panel processing device for monitoring vibrations occurring during the rotation of a spindle stage is disclosed. The panel processing device of the present invention monitors vibrations occurring when the spindle stage rotates by placing vibration sensors on one side of the rotation axis of the spindle stage and on one side of the servo motor. If vibrations exceeding a set magnitude occur due to the rotation of the rotation axis, the panel processing device generates an alarm to allow an administrator to check the vibration status.

Inventors

김선왕
박영수
허동근
김학두

Assignees

(주)에스티아이

Dates

Publication Date: 20260507
Application Date: 20241029

Claims (5)

In a panel processing device for processing PLP (Panel Level Package) panels, A main body (100) that accommodates the above panel in an internal space; A spindle unit (200) provided in the internal space, comprising a spindle stage (210) that supports and rotates the panel, a spindle rotation axis (220) that supports the spindle stage (210), and a spindle rotation unit (240) that rotates and drives the spindle rotation axis (220); A spindle support member (230) fixed to the main body (100) that accommodates the spindle rotation axis (220) internally and supports it rotatably via a bearing (230a); A first vibration sensor (810) attached to one side of the outer surface of the spindle support member (230); A vibration analysis unit (305) that provides error information to an alarm generation unit (303) when the vibration detected by the first vibration sensor (810) deviates from a preset normal range; and A panel processing device for determining misalignment of the spindle rotation axis (220) or wear of the bearing (230a), including the alarm generation unit (303) that generates an alarm regarding the vibration when the error information is provided from the vibration analysis unit.
In paragraph 1, The above vibration analysis unit (305) is characterized by determining whether the vibration is due to an error in the spindle rotation axis (220) or due to bearing wear by analyzing the intensity and shape of the vibration with previously accumulated data when the vibration detected by the first vibration sensor (810) deviates from a preset normal range.
In paragraph 1, It further includes a second vibration sensor (820) attached to one side of the outer surface of a servo motor (241) that rotates the spindle rotation axis (220), and The above vibration analysis unit (305) is characterized by detecting an error in the tension of the belt (243) connecting the servo motor (241) and the spindle rotation shaft (220) by providing the above error information to the above alarm generation unit (303) when the vibration detected by the above second vibration sensor (820) deviates from a preset normal range.
In paragraph 3, The above vibration analysis unit (305) is characterized by determining whether the vibration is damage to the servo motor component or an error in the belt tension by analyzing the intensity and shape of the vibration with accumulated data when the vibration detected by the second vibration sensor (820) deviates from a preset normal range.
In paragraph 1 or 3, A panel processing device characterized by further including a display unit that displays an alarm generated by the above-mentioned alarm generation unit so that it can be visually recognized.

Description

Panel Processing Equipment Capable of Monitoring Vibration of Panel Spindle Stage The present invention relates to a panel processing device, and more specifically, to a panel processing device capable of detecting and monitoring minute vibrations occurring in a spindle stage that mounts and rotates a panel. Panel Level Package (PLP) is a technology that mounts multiple integrated circuit (IC) chips onto a single panel and separates them into individual packages after processing. A process for manufacturing a semiconductor package includes a development process in which a chemical solution is applied to the surface of a panel loaded in a process chamber, dried, and then exposed to a required pattern, and a developer solution is sprayed onto the surface of the exposed panel to selectively remove the exposed and unexposed areas. In a panel processing device, the process begins when a panel is loaded onto a spindle stage located inside a process chamber, at which point the spindle axis rotates via motor drive. Both motor drive systems and rotational axes always present vibration issues. Even slight vibration of the spindle axis can cause the spindle stage to vibrate, leading to alignment problems with the panels loaded on the stage. Depending on the cause of the vibration, this can result in significant equipment damage, such as damage to the rotational axis. Conventionally, panel processing devices have failed to account for vibration due to issues such as rotational axis damage and panel alignment errors occurring in the spindle stage. Prior art related to a panel processing device is disclosed in Korean Registered Patent No. 10-2566766. (Patent Document 1) KR 10-2566766 B (Title of Invention: Substrate Processing Device and Substrate Processing Method) FIG. 1 is a plan view of the panel processing device of the present invention, FIG. 2 is a front external view of the process chamber of the panel processing device of the present invention. FIG. 3 is a rear external view of the process chamber of the panel processing device of the present invention. FIG. 4 is a plan view of the process chamber of the panel processing device of the present invention, FIG. 5 is a cross-sectional view of line AA of FIG. 4, FIG. 6 is a cross-sectional perspective view of line AA of FIG. 4, FIG. 7 is a cross-sectional view of the BB line of FIG. 4, FIG. 8 is a cross-sectional perspective view of line BB of FIG. 4, FIG. 9 is a plan view showing the internal structure of the process chamber of the panel processing device of the present invention. FIG. 10 is a perspective view of a shutter unit provided in a process chamber of a panel processing device of the present invention. FIG. 11 is a perspective view of a clamp rotating part of a spindle unit provided in a process chamber of a panel processing device of the present invention in a raised position. FIG. 12 is a front view and a partially enlarged cross-sectional view of FIG. 11, FIG. 13 is a plan view of FIG. 11, FIG. 14 is a perspective view of a clamp rotating part of a spindle unit provided in a process chamber of a panel processing device of the present invention in a downwardly moved state. FIG. 15 is a front view and a partially enlarged cross-sectional view of FIG. 14, FIG. 16 is a plan view of FIG. 14, FIG. 17 is a perspective view of a bowl unit provided in the process chamber of the panel processing device of the present invention. FIG. 18 is a plan view of FIG. 17, FIG. 19 is a cross-sectional perspective view of the CC line of FIG. 18, FIG. 20 is a cross-sectional view of the DD line of FIG. 18, FIG. 21 is a cross-sectional view showing a panel loaded in a process chamber of a panel processing device of the present invention, with the nozzle arm in a process standby position, the bowl cup lowered, and the clamp raised. FIG. 22 is a perspective view of a nozzle arm unit provided in a process chamber of a panel processing device of the present invention. FIG. 23 is a side view showing the rotation and lifting drive structure of a nozzle arm provided in the process chamber of the panel processing device of the present invention. FIG. 24 (a) and (b) are bottom views of a nozzle arm unit showing an example of a nozzle arrangement structure formed on the bottom surface of a nozzle arm provided in a process chamber of a panel processing device of the present invention. FIG. 25 is a side view showing (a) the appearance of a nozzle arm provided in a process chamber of a panel processing device of the present invention when it is in a process waiting position, and (b) the appearance of a nozzle arm when it is in a process progress position rotated at a predetermined angle after moving upward. FIG. 26 is a cross-sectional view showing the bowl cup moving upward and the clamp moving downward to support the panel. FIG. 27 is a cross-sectional view showing the nozzle arm rising and rotating from the state of FIG. 26 to move to the process progress position. FIG. 28 is a perspecti