KR-20260062832-A - VARIABLE ILLUMINATION OPTICAL SYSTEM FOR MICRODEFECT DETECTION OPTICAL SYSTEM AND APPARATUS FOR INSPECTING HAVING THE SAME

KR20260062832AKR 20260062832 AKR20260062832 AKR 20260062832AKR-20260062832-A

Abstract

A variable illumination system for a micro-defect detection optical system may include a dark field illumination system configured to illuminate an object by irradiating light toward the object at a predetermined angle with respect to the central axis of the object. The dark field illumination system may include a light source unit configured to be composed of at least two light sources having different wavelengths, wherein each of the light sources is irradiated vertically upward; a reflector unit configured to reflect each of the light incident vertically upward toward the object at the predetermined angle so that each of the light is irradiated toward the object at the predetermined angle to illuminate the object; and a variable unit configured to vary the position of the reflector unit so as to adjust the predetermined angle.

Inventors

김영주
이강배
김승현
박병현

Assignees

(주) 유남옵틱스

Dates

Publication Date: 20260507
Application Date: 20250929
Priority Date: 20241025

Claims (8)

A variable lighting system for a micro-defect detection optical system comprising a dark field illumination system configured to illuminate by irradiating light toward an object to be inspected at a predetermined angle with respect to the central axis of the object to be inspected, A variable illumination system for a micro-defect detection optical system, characterized in that the above dark field illumination system comprises a light source unit configured such that each of the lights from the light sources is irradiated vertically upward, each of the lights incident vertically upward is irradiated vertically upward so that each of the lights can be irradiated and illuminated at a predetermined angle toward the object to be inspected, and a variable unit configured such that the position of the reflector can be varied to adjust the predetermined angle.
In Article 1, A variable lighting system for a micro-defect detection optical system, characterized in that the above variable part is configured to adjust the predetermined angle by varying the position of the reflective part itself, or is configured to adjust the predetermined angle by varying the position of the reflective surface provided in the reflective part, or is configured to adjust the predetermined angle by simultaneously varying the positions of the reflective part itself and the reflective surface.
In Article 2, A variable lighting system for a micro-defect detection optical system, characterized in that the variable part comprises a driving part provided to supply a driving force for variation to the reflective part or the reflective surface, and a control part provided to control the driving part so as to adjust the variable range of the reflective part or the reflective surface by adjusting the magnitude of the driving force.
In Article 1, The light source unit is configured such that the at least two light sources are arranged along the perimeter of a plate configured to allow the object to be inspected to be positioned in a central region, wherein the at least two light sources are arranged along the inner perimeter of the plate and the outer perimeter of the plate, and A variable lighting system for a micro-defect detection optical system, characterized in that the above-mentioned reflectors are provided with at least two so as to correspond to each of the at least two light sources, and are positioned at each of the vertical upper portions facing the light sources arranged along the inner circumference of the plate and the light sources arranged along the outer circumference of the plate.
In Paragraph 4, The above plate is composed of an annular plate having a hole formed in the central region, and the at least two light sources are provided to be arranged along the inner circumference and the outer circumference of the annular plate, and A variable lighting system for a micro-defect detection optical system, characterized in that the reflector is composed of ring structures having sizes corresponding to the inner circumference and the outer circumference of the annular plate, respectively, and a reflective surface formed on each of the ring structures facing each of the at least two light sources is formed by a parabolic mirror having a different radius of curvature.
In an inspection device including a variable lighting system for a micro-defect detection optical system, A stage provided for placing an object to be inspected; An image acquisition unit configured to acquire an image of an object to be inspected placed on the above stage; A dark field illumination system configured to irradiate and illuminate the object to be inspected at a predetermined angle relative to the central axis of the object to be inspected placed on the stage; and It includes a bright field illumination system configured to illuminate the object to be inspected by irradiating light toward the object to be inspected at the same angle with respect to the central axis of the object to be inspected placed on the stage, The inspection device is characterized by comprising: a light source unit configured such that each of the lights from the light sources is irradiated vertically upward, and the dark field illumination system comprises at least two light sources having different wavelengths; a reflector unit configured to reflect each of the lights incident vertically upward toward the object to be inspected at a predetermined angle so that each of the lights can be irradiated and illuminated toward the object to be inspected at a predetermined angle; and a variable unit configured to vary the position of the reflector unit so as to adjust the predetermined angle.
In Article 6, The above variable part is configured to adjust the predetermined angle by varying the position of the reflective part itself, or to adjust the predetermined angle by varying the position of the reflective surface provided in the reflective part, or to adjust the predetermined angle by simultaneously varying the positions of the reflective part itself and the reflective surface, and An inspection device characterized by comprising: a driving unit configured to supply a driving force for variability to the reflective part or the reflective surface; and a control unit configured to control the driving unit so as to adjust the variable range of the reflective part or the reflective surface by adjusting the magnitude of the driving force.
In Article 6, The light source unit is configured such that at least two light sources are arranged along the perimeter of a plate configured to allow the object to be inspected to be positioned in a central area, wherein the at least two light sources are arranged along the inner perimeter of the plate and the outer perimeter of the plate, and the reflector unit is configured such that at least two reflectors are provided to correspond to each of the at least two light sources, wherein the reflectors are arranged at a vertical upper position facing each of the light sources arranged along the inner perimeter of the plate and the light sources arranged along the outer perimeter of the plate, respectively. An inspection device characterized in that the above plate is composed of an annular plate having a hole formed in the central region, the at least two light sources are provided to be arranged along the inner circumference of the annular plate and the outer circumference of the annular plate, and the reflector is composed of ring structures having sizes corresponding to the inner circumference of the annular plate and the outer circumference of the annular plate, respectively, and a reflective surface formed on each of the ring structures facing each of the at least two light sources is formed, the reflective surface being composed of a parabolic mirror having a different radius of curvature.

Description

Variable illumination system for microdefect detection optical system and inspection apparatus including the same The present invention relates to a variable illumination system for a micro-defect detection optical system and an inspection device including the same. More specifically, the present invention relates to a variable illumination system for a micro-defect detection optical system configured to illuminate an object by irradiating light toward the object at a predetermined angle with respect to the central axis of the object, and an inspection device including the same. An inspection device for inspecting micro-defects, such as a microscope, may include an objective lens and a lighting system that illuminates an object to be inspected by irradiating light toward it. The lighting system may include a bright field illuminating system that illuminates the object to be inspected by directly irradiating light toward it, and a dark field illuminating system that illuminates the object to be inspected by indirectly irradiating light toward it. The bright field illuminating system may be configured to adjust the magnitude of the light by controlling the degree to which the objective lens is opened using an aperture, etc. The dark field illuminating system may be configured to adjust the angle of the light incident on the object to be inspected by adjusting the distance from the objective lens. However, situations may frequently arise where different objective lenses must be applied to the above inspection device depending on the intended use, and there may be the inconvenience of having to change the configuration of the illumination system, particularly the dark field illumination system, whenever the objective lens is changed. FIG. 1 is a schematic diagram showing an inspection device including a variable illumination optical system for a micro-defect detection optical system according to exemplary embodiments of the present invention. Figure 2 is a schematic diagram illustrating a dark field illumination system in the illumination optical system of the inspection device of Figure 1. Figure 3 is a schematic diagram illustrating the light source section in the dark field illumination system of Figure 2. Figures 4 and 5 are schematic drawings for explaining the reflective part in the dark field illumination system of Figure 2. FIGS. 6 to 8 are enlarged drawings of area A in FIG. 4. The present invention is susceptible to various modifications and may take various forms, and embodiments are to be described in detail in the text. However, this is not intended to limit the invention to the specific disclosed forms, and it should be understood that the invention includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention. Similar reference numerals have been used for similar components in the description of each figure. Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. Such terms are used solely for the purpose of distinguishing one component from another. The terms used in this application are used only to describe specific embodiments and are not intended to limit the invention. A singular expression includes a plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "consisting of" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application. Furthermore, exemplary embodiments will be described in more detail with reference to the attached drawings. Identical components in the drawings are given the same reference numerals, and redundant descriptions of identical components are omitted. FIG. 1 is a schematic diagram showing an inspection device including a variable illumination optical system for a micro-defect detection optical system according to exemplary embodiments of the present invention. Referring to FIG. 1, an inspection device (1000) according to exemplary embodiments of the present invention can be applied to inspect for fine defects in an object to be inspected. For example, the inspection device (1000) can be applied to inspect for fine defects in an object