KR-20260062973-A - Position correction device and semiconductor process device

KR20260062973AKR 20260062973 AKR20260062973 AKR 20260062973AKR-20260062973-A

Abstract

The present application provides a position correction device and a semiconductor process device. The position correction device includes a first optical curtain assembly and a controller installed within a process chamber of a semiconductor process device. The first optical curtain assembly includes a first optical curtain transmitter, a first optical curtain receiver, a second optical curtain transmitter, and a second optical curtain receiver located in a first plane. The first optical curtain transmitter is used to transmit a first correction light toward a workpiece in the process chamber, and the first optical curtain receiver is used to receive the first correction light and to obtain a first projection of the workpiece at the first optical curtain receiver. The second optical curtain transmitter is used to transmit a second correction light toward the workpiece, and the second optical curtain receiver is used to receive the second correction light and to obtain a second projection of the workpiece at the second optical curtain receiver. The first correction light and the second correction light have a narrow angle of projection in the first plane that is greater than 0°. The controller is used to determine position information of the workpiece according to the first projection and the second projection.

Inventors

류, 환
류, 허
리, 샤오후이

Assignees

베이징 나우라 마이크로일렉트로닉스 이큅먼트 씨오., 엘티디.

Dates

Publication Date: 20260507
Application Date: 20240914
Priority Date: 20231009

Claims (14)

In a position correction device applied to a semiconductor process device, It includes a first light curtain assembly and a controller, and The first light curtain assembly is installed in the process chamber of the semiconductor process device, and The first light curtain assembly includes a first light curtain transmitter, a first light curtain receiver, a second light curtain transmitter, and a second light curtain receiver located on a first plane, and The first light curtain transmitting unit is used to transmit a first correction light toward a workpiece in the process chamber, and the first light curtain receiving unit is used to receive the first correction light and to obtain a first projection of the workpiece at the first light curtain receiving unit. The second light curtain transmitting end is used to transmit a second correction light toward the workpiece, and the second light curtain receiving end is used to receive the second correction light and to obtain a second projection of the workpiece at the second light curtain receiving end, wherein the first correction light and the second correction light have a narrow angle of projection in the first plane greater than 0°, and A position correction device characterized in that the above controller is used to determine position information of the workpiece according to the first projection and the second projection.
In paragraph 1, The step of determining the position information of the workpiece according to the first projection and the second projection is, A step of determining the measurement position of the workpiece on the first coordinate axis of the calibration coordinate system based on the first projection; A step of determining the measurement position of the workpiece on the second coordinate axis of the calibration coordinate system based on the second projection; and A position correction device characterized by including a step of determining position information of the workpiece according to the measurement position on the first coordinate axis and the measurement position on the second coordinate axis of the correction coordinate system.
In paragraph 1, The above position correction device further includes a second light curtain assembly, wherein the second light curtain assembly includes a third light curtain transmitter, a third light curtain receiver, a fourth light curtain transmitter, and a fourth light curtain receiver located on a second plane, and the second plane is located above the first plane. The third light curtain transmitter is used to transmit a third calibration light toward a robot hand extended into the process chamber, and the third light curtain receiver is used to receive the third calibration light and to obtain a third projection of the robot hand at the third light curtain receiver. The fourth light curtain transmitter is used to transmit a fourth calibration light toward a robot hand extended into the process chamber, and the fourth light curtain receiver is used to receive the fourth calibration light and to acquire a fourth projection of the robot hand at the fourth light curtain receiver, wherein the third calibration light and the fourth calibration light have a narrow angle of projection in the second plane greater than 0°, and A position correction device characterized in that the above controller is further used to determine position information of the robot hand according to the above third projection and the above fourth projection.
In paragraph 3, The position information of the robot hand includes the horizontal offset and horizontal level of the robot hand, and The step of determining the position information of the robot hand according to the third projection and the fourth projection is, A step of determining the horizontal offset of the robot hand according to the third projection above; and A position correction device characterized by including a step of determining the horizontal level of the robot hand according to the fourth projection above.
In paragraph 4, The step of determining the horizontal offset of the robot hand according to the third projection above is, A step of determining the measurement position of the first designated point of the robot hand according to the third projection above; and A position correction device characterized by including the step of determining a horizontal offset of the robot hand based on the measurement position of the first designated point and a standard position corresponding to the first designated point.
In paragraph 4, The step of determining the horizontal level of the robot hand according to the fourth projection above is, A step of determining the measurement positions of the second designated point and the third designated point of the robot hand according to the fourth projection above; A step of determining position information of the second designated point based on the measurement position of the second designated point of the robot hand and a standard position corresponding to the second designated point, and determining position information of the third designated point based on the third designated point of the robot hand and a standard position corresponding to the third designated point; and A position correction device characterized by including a step of determining the horizontal level of the robot hand according to the position information of the second designated point and the position information of the third designated point.
In paragraph 6, The second designated point includes the first endpoint of the lower surface of the robot hand, and the third designated point includes the second endpoint of the lower surface of the robot hand, or A position correction device characterized in that the second designated point includes a second endpoint on the lower surface of the robot hand, and the third designated point includes a first endpoint on the lower surface of the robot hand.
In paragraph 3, The angle of the projection in the first plane of the first calibration light and the extension direction of the robot hand is 30° to 60°, and The angle of projection in the first plane of the second correction light and the extension direction of the robot hand is 120° to 150°, and The angle of the projection in the second plane of the third calibration light and the extension direction of the robot hand is 30° to 60°, and A position correction device characterized in that the angle of projection in the second plane of the extension direction of the fourth correction light and the robot hand is 120° to 150°.
In paragraph 3, The process chamber further includes a transfer opening, and a robot hand enters and exits the process chamber through the transfer opening, and The above position correction device further includes a robot hand detection assembly used to detect the amount of extension of the robot hand, and A position correction device characterized in that the robot hand detection assembly includes a first sensor and a second sensor, wherein the first sensor and the second sensor are installed facing each other inside the transfer opening, and the first sensor and the second sensor are installed on the second plane.
In Paragraph 9, A position correction device characterized in that the first sensor includes a pressure sensor or a distance sensor, and the second sensor includes a pressure sensor or a distance sensor.
In Paragraph 7, The above controller is, In the process of the robot hand extending into the process chamber, the first measurement value of the first sensor and the first measurement value of the second sensor are obtained, and The amount of extension of the robot hand is determined based on the first measurement value of the first sensor, the first measurement value of the second sensor, and the horizontal offset of the robot hand, and In the process of the robot hand rotating toward one side of the first sensor, a second measurement value of the first sensor and a first amount of rotation of the robot hand are obtained, Determining the amount of adjustment in the first direction of the robot hand based on the first amount of rotation of the robot hand and the second measurement value of the first sensor, and In the process of the robot hand rotating toward one side of the second sensor, a second measurement value of the second sensor and a second amount of rotation of the robot hand are obtained, and A position correction device characterized by being further used to determine an adjustment amount in a second direction of the robot hand based on a second rotation amount of the robot hand and a second measurement value of the second sensor.
In paragraph 3, The light irradiation height of the first calibration light and the second calibration light is 3 mm or more, and A position correction device characterized in that the light irradiation height of the third correction light and the fourth correction light is 8 mm or more.
In paragraph 1, The above controller is, When the ejector pin used to lift the workpiece and place it on the placement surface of a placement device is in a raised state, based on the first projection and the second projection, it is determined whether the height difference of the different ejector pins is within a predetermined height threshold range, and If the height difference of the ejector pin is within the height threshold range and the height of the workpiece matches the height of the ejector pin, the workpiece is determined to be normal. If the height difference of the ejector pin is within the height threshold range and the height of the workpiece does not match the height of the ejector pin, it is determined that jumping has occurred in the workpiece. A position correction device characterized by being further used to determine that adhesion has occurred on the workpiece when the height difference of the ejector pin is not within the height threshold range.
A semiconductor process device characterized by including a position correction device according to any one of claims 1 to 13.

Description

Position correction device and semiconductor process device The present application relates to the field of semiconductor manufacturing technology, and more specifically to a position correction device and a semiconductor process device. When a semiconductor process device performs processing such as etching or deposition, the wafer must be placed on a placement device inside a vacuum process chamber. In addition, to improve the processing quality of the semiconductor process device, it must be determined before the process whether the wafer has been accurately placed at a designated location on the placement device. After the process is completed, the wafer must be transferred to a designated location for the next process. This imposes higher requirements on the transfer precision and position correction precision of the wafer. The present application provides a position correction device and a semiconductor process device to solve at least one of the technical problems existing in the prior art. To realize the purpose of the present application, a position correction device applied to a semiconductor process device is provided. This includes a first light curtain assembly and a controller installed within the process chamber of the semiconductor process device. The first light curtain assembly includes a first light curtain transmitter, a first light curtain receiver, a second light curtain transmitter, and a second light curtain receiver located in a first plane. The first light curtain transmitting unit is used to transmit a first correction light toward a workpiece within the process chamber. The first light curtain receiving unit is used to receive the first correction light and to obtain a first projection of the workpiece at the first light curtain receiving unit. The second light curtain transmitting end is used to transmit a second correction light toward the workpiece. The second light curtain receiving end is used to receive the second correction light and to obtain a second projection of the workpiece at the second light curtain receiving end. The first correction light and the second correction light have a projection angle in the first plane that is greater than 0°. The above controller is used to determine the position information of the workpiece according to the first projection and the second projection. The step of determining the position information of the workpiece according to the first projection and the second projection includes the following steps. Based on the first projection above, the measurement position of the workpiece is determined on the first coordinate axis of the calibration coordinate system. Based on the second projection above, the measurement position of the workpiece is determined on the second coordinate axis of the calibration coordinate system. Position information of the workpiece is determined according to the measurement position on the first coordinate axis and the measurement position on the second coordinate axis of the calibration coordinate system. Here, the position correction device further includes a second light curtain assembly. The second light curtain assembly includes a third light curtain transmitter, a third light curtain receiver, a fourth light curtain transmitter, and a fourth light curtain receiver located on a second plane. The second plane is located above the first plane. The third light curtain transmitter is used to transmit a third calibration light toward a robot hand extended into the process chamber. The third light curtain receiver is used to receive the third calibration light and to acquire a third projection of the robot hand at the third light curtain receiver. The fourth optical curtain transmitter is used to transmit a fourth calibration light toward the robot hand. The fourth optical curtain receiver receives the fourth calibration light and is used to acquire a fourth projection of the robot hand at the fourth optical curtain receiver. The third calibration light and the fourth calibration light have a projection angle in the second plane that is greater than 0°. The above controller is further used to determine position information of the robot hand according to the third projection and the fourth projection. Here, the position information of the robot hand includes the horizontal offset and horizontal level of the robot hand. The step of determining the position information of the robot hand according to the third projection and the fourth projection includes the following steps. The horizontal offset of the robot hand is determined according to the third projection above. The horizontal level of the robot hand is determined according to the above fourth projection. Here, the step of determining the horizontal offset of the robot hand according to the third projection includes the following steps. The measurement position of the first designated point of the robot hand is determined according to the third projection ab