KR-20260063429-A - Table apparatus for target change

KR20260063429AKR 20260063429 AKR20260063429 AKR 20260063429AKR-20260063429-A

Abstract

The present invention relates to a target replacement table device that allows for easy replacement of a target used in a deposition process of a substrate without damage. To this end, the present invention provides a target replacement table device comprising: a workbench top plate on which equipment is placed; a cushion module provided on the workbench top plate and on which a target is placed; a magnet transfer base block provided on an extension line of the cushion module and accommodating a magnet bar; and a transfer rail for transferring the magnet transfer base block, wherein the cushion module comprises a used cushion module on which a used target is placed and a pre-use cushion module on which a pre-use target is placed. Accordingly, the present invention has the advantage of allowing internal parts to be easily replaced without damaging the target when replacing the target.

Inventors

허동근
진용훈
정태환

Assignees

(주)에스티아이

Dates

Publication Date: 20260507
Application Date: 20241030

Claims (4)

Workbench top where equipment is placed; A cushion module provided on the top plate of the above-mentioned workbench, on which a target is placed; A magnet transfer base block provided on an extension of the above cushion module to accommodate a magnet bar; and It is configured to include a transfer rail that transfers the above-mentioned magnet transfer base block, and The above cushion module is a target replacement table device comprising a used cushion module on which a target is placed after use and a pre-use cushion module on which a target is placed before use.
In paragraph 1, A target replacement table device characterized in that the above-mentioned used cushion module and pre-use cushion module are arranged side by side in parallel.
In paragraph 1, A target replacement table device characterized by having a fixing jig for fixing the target between the cushion module and the magnet transfer base block.
In paragraph 1, A target replacement table device characterized by the fact that the magnet transfer base block is equipped with a ball plunger for fixing and releasing the magnet transfer base block to the transfer rail.

Description

Table apparatus for target change The present invention relates to a table device for replacing a target, and specifically, to a table device for replacing a target that can easily replace a target used in a deposition process of a substrate without damage. Sputtering is a type of vacuum deposition or physical vapor deposition (PVD) widely used in electronic circuit production line processes. The deposition process proceeds by accelerating gases such as ionized argon into a plasma at a relatively low vacuum, causing them to collide with a target, and ejecting atoms to form a film on a substrate such as a wafer or glass. If the target in the deposition process unit becomes contaminated, it must be replaced with a new one, as this can lead to problems with deposition efficiency or product quality. Such targets must be replaced by disassembling the upper lead located at the top of the deposition process unit or by disassembling the lower lead located at the bottom. At this time, a magnet bar is inserted inside the target. Since the magnet bar can be used semi-permanently, it is desirable to remove the magnet bar and insert a new target for reuse to reduce costs. According to the prior art disclosed in Patent Publication No. 10-2017-0096407, the method comprises the steps of: heating a cylindrical sputtering target to thermally expand it; providing the thermally expanded cylindrical sputtering target to the outside of a backing tube formed by an outer wall surrounding a hollow internal space extending in the longitudinal direction; and cooling the cylindrical sputtering target provided to the outside of the backing tube, wherein in the step of cooling the cylindrical sputtering target, the cylindrical sputtering target is thermally contracted by cooling and adheres to the outer wall of the backing tube. However, the aforementioned conventional technology has the problem of requiring complex devices such as a main part, an auxiliary support part, and a rotary drive part, and resulting in a long replacement time. FIG. 1 is a perspective view showing the configuration of a target replacement table device according to the present invention; FIG. 2 is a configuration diagram showing the configuration of the fixing jig in FIG. 1; FIG. 3 is a configuration diagram showing the configuration of the magnet transfer base block and the transfer rail in FIG. 1; FIG. 4 is an explanatory diagram for explaining the configuration and operation of the ball plunger in FIG. 3; FIGS. 5 and 6 are explanatory diagrams for explaining a target replacement method according to the present invention. The configuration and operation of a specific embodiment according to the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, the target replacement table device according to the present embodiment comprises a support frame (200), a workbench top plate (300), a cushion module (400), a magnet transfer base block (500), a transfer rail (600), and a fixing jig (700). The support frame (200) forms a rectangular frame that supports the table and may be constructed of a steel frame. Additionally, it is preferable to provide wheels on the lower part of the support frame to improve mobility. A workbench top plate (300) is provided on the upper part of the support frame (200). The workbench top plate serves as a support for placing various equipment. The cushion module (400) provided on the workbench top plate (300) serves to support the target. The above target is a metal or compound used for deposition on a substrate inside a sputtering device, and while it may be provided in various shapes, in this embodiment, it is provided as a cylindrical target. The above target is a consumable item and must be replaced with a new one after a certain period of time. To replace the above target, the upper or lower lead provided in the chamber of the sputtering device must be opened, the device must be moved to a workbench, and then disassembly and replacement work must be performed. In particular, the workbench top plate according to the present embodiment is equipped with target replacement devices that allow the magnet bar provided inside the used target to be replaced to be removed and safely and easily installed inside a new target. The above cushion module includes a used cushion module (410) on which a used target to be replaced is placed, and a pre-use cushion module (430) on which a new target, a pre-use target, is placed. Additionally, the used cushion module (410) and the pre-use cushion module (430) are provided parallel to each other at a certain distance apart. The above cushion module is formed with an upper surface that corresponds to the outer circumference of a cylindrical target so as to support the target. A pair of fixing jigs (700) capable of fixing a target are provided at a position located at a certain distance in the longitudinal direction from both ends of the cushion module. That is, the d